| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 67.1 | A shift CMP passdown 12/03/95 | SUBPAC::SADIN | Freedom isn't free. | Sun Dec 03 1995 18:43 | 72 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 1 scrubbers
BREAKIN WAFERS 75 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: running XD0316 pmd.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: running XL0306 m2.
CMP.B1 (Speedfam CMP-V) - RUNNING: running XL0297 m3.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
� box of 12K monitors. 2 more boxes on orders (see ASDG::FAB6_WAFERSTARTS)
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0316 - PMD - 24WFRS
XL0306 - M2 - 23WFRS
XL0321 - PMD - 23WFRS
XL0320 - PMD - 24WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 FULL CARRIERS FOR STRASBAUGH
6 FULL CARRIERS FOR CMP.B1
1 PLATE FILMED/HOLES PUNCHED FOR STRASBAUGH
|
| 67.2 | A shift CMP passdown 12/04/95 | SUBPAC::SADIN | Freedom isn't free. | Mon Dec 04 1995 18:41 | 76 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 6 cmp.b1/scrub mqc
BREAKIN WAFERS 75 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: running JD0034 M2.
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.B1 (Speedfam CMP-V) - IDLE.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0050 - PMD (pre-measuring now)
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
� box of 12K monitors
Number of product lots in room:
------------------------------
2
New specs/revs posted:
---------------------
Read strasbaugh spec to see new changes.
Lots/wafers processed:
---------------------
XD0275 - M2 - 23WFRS
XD0307 - M2 - 23WFRS
XD0274 - M2 - 17WFRS
YD0135 - M1 - 23WFRS
JD0034 - M2 - 10WFRS
JD0038B- M2 - 6WFRS
102 WAFERS TOTAL
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 full carriers built for strasbaugh.
3 plates filmed/shimmed for strasbaugh.
4 carriers built for speedfam (need more white rings...suprise, suprise!)
|
| 67.3 | A shift CMP passdown 12/05/95 | SUBPAC::SADIN | Freedom isn't free. | Tue Dec 05 1995 19:34 | 74 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 cmp.a1/.b1/scrub
BREAKIN WAFERS 75 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: breaking in a new pad now.
CMP.A2 (Strasbaugh 6DS-SP) - PM: down for a semi-annual.
CMP.B1 (Speedfam CMP-V) - MQC: running daily mqcs.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A2 - SEMI-ANNUAL PM
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1 box of 12K monitors (2 more boxes ordered)
Number of product lots in room:
------------------------------
2
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0035 - PMD - 12WFRS
XA0215A- PMD - 12WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
4 extra carriers for CMP.B1
6 full carriers for strasbaugh
3 extra plates (shimmed/filmed) for strasbaugh
* note * - fab dumped for a few hours this afternoon/evening due to solvent
exhaust problems.
|
| 67.4 | CMP 12/7/95 | FABSIX::G_ISAACS | | Thu Dec 07 1995 06:00 | 53 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.B1 (Speedfam CMP-V) - DOWN/
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE RAN MQC'S D SHIFT
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE RAN MQC'S D SHIFT
HOT/B lots in area:
-------------------
Hot lot #
B lot #
HOT lots coming to area:
------------------------
Hot lot #
STATIC lots in area:
--------------------
DOWN equipment:
---------------
SPEEDFAM
CARRIERS::
-----------
5 SPEEDFAM EXTRA 5 HAVE PLATES
4 STRAUSBAUGH COMPLETE
HOLD LOTS:
----------
*none*
MONITOR status:
---------------
NUMBER of product lots in room:
-------------------------------
1-XD0299
new spec/revs posted:
---------------------
*none*
|
| 67.5 | A shift CMP passdown 12/10/95 | SUBPAC::SADIN | Freedom isn't free. | Sun Dec 10 1995 18:19 | 71 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 30 cmp.a1/.a2./.b1/scrub
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: running mqcs.
CMP.A2 (Strasbaugh 6DS-SP) - MQC: running breakins.
CMP.B1 (Speedfam CMP-V) - RUNNING2: running JD0033 (m1) and JD0042 (m1).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE. (receiver door latch failure
errors today)
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - MQC
CMP.A2 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1 box of 12K monitors. 2 more boxes ordered.
Number of product lots in room:
------------------------------
5
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0041 - M1 - 12WFRS
JD0043 - M1 - 12WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
4 complete strasbaugh carriers
4 complete speedfam carriers
|
| 67.6 | A shift CMP passdown 12/11/95 | SUBPAC::SADIN | Freedom isn't free. | Mon Dec 11 1995 18:38 | 68 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 18 cmp.a1/.a2./.b1/scrb
BREAKIN WAFERS 75 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: running mqcs. (new pad/carriers)
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0309 (M1).
CMP.B1 (Speedfam CMP-V) - RUNNING: XD0307 (m3) and JD0035 (m1).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
JD0049 - PMD
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1 full box of 12k monitors
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
NEW SPEEDFAM SPEC ON-LINE. PLEASE REVIEW.
Lots/wafers processed:
---------------------
* none *
# of carriers for strasbaugh/speedfam:
--------------------------------------
2 carriers for strasbaugh (need to have some built)
3 spare carriers for speedfam
|
| 67.7 | A shift CMP passdown 12/12/95 | SUBPAC::SADIN | Freedom isn't free. | Tue Dec 12 1995 18:59 | 72 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 18 cmp.a1/.b1/scrub
BREAKIN WAFERS 75 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING2: XL0321 (m2) and XD0274 (m3).
CMP.A2 (Strasbaugh 6DS-SP) - DOWN: broke wafers on the pad.
CMP.B1 (Speedfam CMP-V) - MQC: running daily mqcs.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XL0321
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A2 - BROKE WAFERS
CMP.B1 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
� box of 12K monitors left.
Number of product lots in room:
------------------------------
7
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0315 M2 22WAFERS
XD0275 M3 21WAFERS
XA0215A M1 12WAFERS
XD0332 M1 24WAFERS
# of carriers for strasbaugh/speedfam:
--------------------------------------
2 COMPLETE CARRIERS FOR STRASBAUGH
5 COMPLETE CARRIERS FOR SPEEDFAM
|
| 67.8 | A shift CMP passdown 12/17/95 | SUBPAC::SADIN | Freedom isn't free. | Sun Dec 17 1995 18:57 | 73 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 6 cmp.a1/scrub
BREAKIN WAFERS 75 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: XD0317 (pmd).
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0033 (m2) and XL0327 (m1).
CMP.B1 (Speedfam CMP-V) - RUNNING: XL0321 (m3).
CMP-SCRUB.A1 (On-track scrubber) - IDLE. (doc fixed roller motor problem
today)
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0317 - PMD
XL0321 - M3
Hot lots coming to area:
-----------------------
JD0049 - DEP 2-1
XL0320 - DEP 2-1 (B-LOT)
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes ordered, none left in room.
Number of product lots in room:
------------------------------
5
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0322 - M1 - 22WFRS
JD0040 - M2 - 12WFRS
JD0033 - M2 - 12WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 complete strasbaugh carriers (plus two plates filmed/shimmed)
10 complete speedfam carriers
|
| 67.9 | A shift CMP passdown 12/18/95 | SUBPAC::SADIN | Freedom isn't free. | Mon Dec 18 1995 19:08 | 73 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 cmp.a1/scrub
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0052 (pmd).
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0309 (m2).
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0053 (pmd).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
4 full boxes of 12K monitors. Please make sure to keep at least 2 full
boxes on hand at all times! Don't be shy about ordering monitors. See the
ASDG::CMP notesfile for details.
Number of product lots in room:
------------------------------
3
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0049 - M2 - 12WFRS
XL0320 - M2 - 24WFRS
JD0051 - PMD - 10WFRS
JD0053 - PMD - 12WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 complete strasbaugh carriers (plus two plates filmed/shimmed)
10 complete speedfam carriers
|
| 67.10 | A shift CMP passdown 12/19/95 | SUBPAC::SADIN | Freedom isn't free. | Tue Dec 19 1995 19:05 | 73 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 cmp.b1/.b2./.a2 mqc
BREAKIN WAFERS 75 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.B1 (Speedfam CMP-V) - IDLE.
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0058 (pmd - hot) and XL0314 (m1 -
split)
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0058 - PMD - HOT
Hot lots coming to area:
-----------------------
XL0338 - ILD 1-1
XD0343 - DEP_PMD
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
3.5 boxes of 12K monitors
Number of product lots in room:
------------------------------
3
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0058 - PMD - 24WFRS
JD0056 - PMD - 10WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
10 CARRIERS FOR CMP.B1/.B2
6 CARRIERS FOR CMP.A1/.A2 (PLUS 2 PLATES SHIMMED AND FILMED)
|
| 67.11 | CMP 12/21/95 D SHIFT | FABSIX::D_CAUSE | | Thu Dec 21 1995 06:40 | 55 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE MQC COMPLETE RUN AT 14.8
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE RUNNING MQC'S SECOND TIME
CMP.B1 (Speedfam CMP-V) - UP/RUNNING LOT XD0332 FOR TOUCHUP
CMP.B2 (Speedfam CMP_V) - UP/ RUNNING SECOND MQC
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE RAN MQC'S
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE RAN MQC'S
HOT/B lots in area:
-------------------
Hot lot # JD0049 SUPER HOT LOT!
B lot #
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:
--------------------
DOWN equipment:
---------------
CARRIERS::
-----------
SPEEDFAM PLATES COMPLETE. 10 COMPLETE
STRAUSBAUGH COMPLETE 4 COMPLETE
HOLD LOTS:
----------
NONE
MONITOR status:
---------------
NUMBER of product lots in room: 1
-------------------------------
LOT # XD0332
new spec/revs posted:
---------------------
*none*
|
| 67.12 | D SHIFT PASSDOWN 12/22/95 | FABSIX::D_CAUSE | | Fri Dec 22 1995 07:12 | 56 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE NEEDS MQC
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.B1 (Speedfam CMP-V) - DOWN/ RAN MQC'S FAILED FOR SCRATCHES. CHANGED PAD
FAIED FOR SCRATCHES AGAIN.
CMP.B2 (Speedfam CMP_V) - UP/ RUNNING TWO LOTS JD0042, "B" LOT XD0317
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE RAN MQC'S
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE RAN MQC'S
HOT/B lots in area:
-------------------
Hot lot #
B lot # XD0317
HOT lots coming to area:
------------------------
Hot lot # JD0058
B LOT #
STATIC lots in area:
--------------------
DOWN equipment:CMP.B1
---------------
CARRIERS::
-----------
SPEEDFAM PLATES COMPLETE. 10 COMPLETE
STRAUSBAUGH COMPLETE 4 COMPLETE
HOLD LOTS:
----------
NONE
MONITOR status:
---------------
NUMBER of product lots in room: 4
-------------------------------
LOT # JD0055-XD0317-JD0042-JD0046
new spec/revs posted:
---------------------
*none*
|
| 67.13 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Sat Dec 23 1995 07:07 | 57 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING LOT JD0046
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING LOT YD00137
CMP.B1 (Speedfam CMP-V) - DOWN/ RAN MQC'S FAILED FOR SCRATCHES. CHANGED PAD
FAIED FOR SCRATCHES AGAIN.
CMP.B2 (Speedfam CMP_V) - UP/ RUNNING FOUR LOTS JD0041,JD0044,XD0343 HOT LOT
XD0325 B LOT
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
HOT/B lots in area:
-------------------
Hot lot # XD0343
B lot # XD0325
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:
--------------------
DOWN equipment:CMP.B1
---------------
CARRIERS::
-----------
SPEEDFAM PLATES COMPLETE. 10 COMPLETE
STRAUSBAUGH COMPLETE 4 COMPLETE
HOLD LOTS:
----------
NONE
MONITOR status:
---------------
NUMBER of product lots in room: 10
-------------------------------
new spec/revs posted:
---------------------
*none*
|
| 67.14 | CORRECTION OF STATUS FOR CMP.B1 | FABSIX::D_CAUSE | | Sat Dec 23 1995 07:14 | 56 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING LOT JD0046
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING LOT YD00137
CMP.B1 (Speedfam CMP-V) - DOWN
CMP.B2 (Speedfam CMP_V) - UP/ RUNNING FOUR LOTS JD0041,JD0044,XD0343 HOT LOT
XD0325 B LOT
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
HOT/B lots in area:
-------------------
Hot lot # XD0343
B lot # XD0325
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:
--------------------
DOWN equipment:CMP.B1
---------------
CARRIERS::
-----------
SPEEDFAM PLATES COMPLETE. 10 COMPLETE
STRAUSBAUGH COMPLETE 4 COMPLETE
HOLD LOTS:
----------
NONE
MONITOR status:
---------------
NUMBER of product lots in room: 10
-------------------------------
new spec/revs posted:
---------------------
*none*
|
| 67.15 | CMP C-SHIFT PD. 12/23/95 | FABSIX::E_DAWSON | | Sat Dec 23 1995 17:37 | 40 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - DOWN/GLOBAL
CMP.A2 (Strasbaugh 6DS-SP) - DOWN/GLOBAL
CMP.B1 (Speedfam CMP-V) - DOWN/GLOBAL
CMP.B2 (Speedfam CMP-V) - DOWN/GLOBAL
CMP-SCRUB.A1 (On-track scrubber) - DOWN/GLOBAL
CMP-SCRUB.A2 (On-track scrubber) - DOWN/GLOBAL
LOT STATUS
------------
* HOT LOT * XD0343 @OP# 1981 CMP_ILD1
- Lot was polished on CMP.B2 needs 100% on meassurement.
*2 Wafers broke during T/UP on .B2*
* B-LOT * XD0325 @OP# 3066 THICK AFTER CMP ILD2...This lot is at T/UP
Lot was run on CMP.B2 and needs 100% meassurement.
* B-LOT * XL0320 @OP# 3127 THICK BEFORE ILD3
* Lot JD0041 @OP# 1989 CMP AFTER ILD3. Lot was run on CMP.B2
Lot is at T/UP and needs 100% meassurement.
* Lot JD0044 @OP# 1989 CMP AFTER ILD3. Lot was run on CMP.B2
Lot is at T/UP and needs a 100% meassurement.
* HOLD * * JD0046 THICK AFTER CMP ILD2. This lot needs a 100%
meassurement and T/UP on CMP.A1.
Lots in CMP.....JD0051 DC1035 1981 CMP_ILD1
XL0311 TM55 1996 CMP_ILD3
XD0319 TM36 3058 THK_CMP 14
XD0323 TM36 3058 THK_CMP 14
|
| 67.16 | 1/16/96 CMP PASSDOWN | FABSIX::L_CEDRONE | | Tue Jan 16 1996 06:40 | 77 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 23 cmp.a1/.b1/scrub
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN, ROBOT UPGRADE
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING XD0356
CMP.B1 (Speedfam CMP-V) - DOWN -PARTS
CMP.B2 (SPEEDFAM CMP-V) - MQC, SCRATCHES
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S DONE
Hot/B lots in area:
__________________
XD0356 24W B LOT
Hot lots coming to area:
-----------------------
* NONE *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 DOWN, ROBOT UPGRADE
CMP.B1 DOWN, PARTS
Scrap lots:
----------
* none *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
1/2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
1
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0341 23W
XD0345 24W
XD0350 24W
# of carriers for strasbaugh/speedfam:
-------------------------------------
6 spare carriers for CMP.B1/B2
3 full carriers for CMP.A1/.A2
1 plates filmed for CMP.A1/.A2
|
| 67.17 | CMP.B2 OFFSET CHANGE 5/30/96 | FABSIX::G_ISAACS | | Thu May 30 1996 12:53 | 16 |
| SYSTEM:CMP.B2
DATE 5/30/96
OLD NEW
HEAD OFFSET OFFSET
---- ------ ------
1 +14
2 -14
3 +14
4 + 7
5 +14
REASON FOR CHANGE: HEAD TO HEAD VARIATION WAS GREATER THAN 300�/MIN.
ON MQCS FOLLOWING A PAD CHANGE AND NEW CARRIERS.
|
| 67.18 | OFFSET CHANGE CMP.B2 5/31/96 | FABSIX::G_ISAACS | | Fri May 31 1996 16:32 | 17 |
| SYSTEM:CMP.B2
DATE 5/31/96
OLD NEW
HEAD OFFSET OFFSET
---- ------ ------
1 +14 +14
2 -14 -15
3 +14 +16
4 + 7 - 3
5 +14 + 1
REASON FOR CHANGE: HEAD TO HEAD VARIATION WAS DIFFERENCE, AFTER MQC"S
|