| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 65.1 | A shift CMP passdown - 11/05/95 | SUBPAC::SADIN | Freedom isn't free. | Sun Nov 05 1995 18:20 | 66 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 cmp.b1/.a1/scrub
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.B1 (Speedfam CMP-V) - RUNNING: running hot lot JD0030.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XL0290 - M3
JD0030 - M1
Hot lots coming to area:
-----------------------
XL0305 - PMD DEP
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1 box of 12K wafers left - 2 more boxes ordered. We can only order 2 boxes
of wafers at any one time (new rules from the wet lab).
Number of product lots in room:
------------------------------
2
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
xd0293 - pmd - 24wfrs
xl0290 - m3 - 21wfrs (hot lot)
|
| 65.2 | CMP A SHIFT PASSDOWN | FABSIX::J_ROA | | Mon Nov 06 1995 19:40 | 77 |
|
-< A shift CMP passdown - Monday 11/06/95 >-
--------------------------------------------------------------------------------
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 8 cmp.b1 mqcs
BREAKIN WAFERS 30 cmp.b1 breakin
CMP.A1 (Strasbaugh 6DS-SP) - IDLE/UP Getting ready to break in pad to try
to run insitu conditioning test.
CMP.A2 (Strasbaugh 6DS-SP) - DOWN: Monthly PM in progress.
CMP.B1 (Speedfam CMP-V) - IDLE/UP:
CMP-SCRUB.A1 (On-track scrubber) - IDLE/UP: Mqc's done
CMP-SCRUB.A2 (On-track scrubber) - IDLE/UP: Mqc's done
****** ( One lot containing 24 wafers was moved out of CMP )******
Hot/B lots in area:
__________________
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
Down Equipment:
--------------
Scrap lots:
----------
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12K's
Number of product lots in room:
------------------------------
New specs/revs posted:
---------------------
|
| 65.3 | A shift CMP passdown 11/07/95 | SUBPAC::SADIN | Freedom isn't free. | Tue Nov 07 1995 18:27 | 63 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 cmp.b1/.a2/scrub
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: running mqcs.
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.B1 (Speedfam CMP-V) - RUNNING1: running JD0029 (hot m3 lot).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0029 - M3
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1 box of 12k monitors
Number of product lots in room:
------------------------------
1
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
* none *
|
| 65.4 | A shift CMP passdown 11/12/95 | SUBPAC::SADIN | Freedom isn't free. | Sun Nov 12 1995 18:20 | 75 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 23 cmp.a1/b1/scrub mqc
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: running mqcs after pad change.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING2: running XA0234Q for touchup and
JD0030 (hot - see note below).
CMP.B1 (Speedfam CMP-V) - MQC: running mqcs after pad change.
CMP-SCRUB.A1 (On-track scrubber) - IDLE. mqcs done.
CMP-SCRUB.A2 (On-track scrubber) - IDLE. mqcs done.
** note ** JD0030 is a split lot. Some wafers have partial die on the edge
and others do not. Please 100% final measure this lot after verifying the
wafer #'s on the sorter. When measuring the lot on the UV-1050, make sure
to put the wafer #'s in when selecting the slots to measure (i.e. - don't
just hit the select key to select a slot...type in the wafer #). Send Larry
Camilletti (ASDG::CAMILLETTI) a mail message telling him which tool you
measured this lot on. Also tell Larry which wafer #'s had partial die and
which did not. Thanks.
Hot/B lots in area:
__________________
JD0030 - M3
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - MQC
CMP.B1 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
XL0289 - HOLD FOR LARRY CAMILLETTI FOR EXTENSIVE P2 MEASUREMENTS.
XD0300 - HOLD FOR DRG INSPECTION (NO COVERAGE TODAY).
Monitor status:
--------------
1 box of 12K monitors on hand.
Number of product lots in room:
------------------------------
4 (two on hold - two running)
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
* none *
|
| 65.5 | A shift CMP passdown 11/13/95 | SUBPAC::SADIN | Freedom isn't free. | Mon Nov 13 1995 19:07 | 66 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 cmp.a1/.a2 mqc
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: running XD0293.
CMP.B1 (Speedfam CMP-V) - VERIFY-U: need to reset the exposure on one
carrier and then machine will be up for mqcs.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0287 - BLOT - M3
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
XD0300 - 1.7DAYS
XL0289 - 0.9DAYS
Down Equipment:
--------------
CMP.B1 - BROKE WAFERS ON PAD
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12K wafers
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0302 - PMD - 24WFRS
XD0293 - M1 - 22WFRS
|
| 65.6 | A shift CMP passdown 11/14/95 | SUBPAC::SADIN | Freedom isn't free. | Tue Nov 14 1995 18:21 | 63 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 cmp.b1/.a2/.a1
BREAKIN WAFERS 100 mqc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: running XD0284.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: running XL0305.
CMP.B1 (Speedfam CMP-V) - DOWN: high unif/particles.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XL0305 - PMD
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B1 - BAD UNIF/RANGE.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12K monitors
Number of product lots in room:
------------------------------
5
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0286 - M3 - 21WFRS
|
| 65.7 | CMP A SHIFT PASSDOWN | FABSIX::J_ROA | | Wed Nov 15 1995 19:40 | 83 |
|
-< A shift CMP passdown - Wednesday 11/15/95 >-
--------------------------------------------------------------------------------
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 6 cmp.b1 mqcs
BREAKIN WAFERS 50 cmp.b1 breakin
CMP.A1 (Strasbaugh 6DS-SP) - IDLE/UP: Uniformity and removal rate are still
good. Unfortunately, the wafer count is at 520 wafers and the carriers is at
437 wafers.
CMP.A2 (Strasbaugh 6DS-SP) - MQC: Need to combined the data in order to
determine wether or not the tool is available for production. So far particles
are in spec.
CMP.B1 (Speedfam CMP-V) - IDLE/UP:
CMP-SCRUB.A1 (On-track scrubber) - IDLE/UP: Mqc's done
CMP-SCRUB.A2 (On-track scrubber) - RUNNING: Lot XA0275 running through
second scrub.
****** ( Two lots containing 41 wafers were moved out of CMP )******
Hot/B lots in area:
__________________
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
Down Equipment:
--------------
Scrap lots:
----------
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12K's
Number of product lots in room:
------------------------------
One lot
New specs/revs posted:
---------------------
|
| 65.8 | A shift CMP passdown 11/19/95 | SUBPAC::SADIN | Freedom isn't free. | Sun Nov 19 1995 18:35 | 69 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 7 cmp.a1/scrub mqc
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING1: running XD0280 M3.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING1: running XL0297 M1.
CMP.B1 (Speedfam CMP-V) - DOWN: broke wafers on pad. Wafer loss detectors
didn't function properly and we took out all five heads. There are no more
carrier plates in stock and we don't have any carriers to scavenge from
cmp.b2. We are down until tomorrow morning when the new plates come in.
CMP-SCRUB.A1 (On-track scrubber) - IDLE. mqcs done.
CMP-SCRUB.A2 (On-track scrubber) - IDLE. mqcs done.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
JD0039 - PMD
Static Lots in area:
-------------------
YD0128 - 0.7 days (was running on CMP.B1 when 5 wafers broke)
Down Equipment:
--------------
CMP.B1 - BROKE WAFERS. WAITING FOR CARRIER PLATES TO COME IN THE MORNING.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1 box of 12K monitors
Number of product lots in room:
------------------------------
5
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
yd0134 - m1 - 19wfrs
xd0308 - m1 - 24wfrs
jd0038 - m1 - 6wfrs
xa0281 - m3 - 19wfrs
|
| 65.9 | A shift CMP passdown 11/20/95 | SUBPAC::SADIN | Freedom isn't free. | Mon Nov 20 1995 18:28 | 71 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 13 cmp.a1/.a2/scrub
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING1: running YL0133 M2.
CMP.A2 (Strasbaugh 6DS-SP) - VERIFY: running breakin wafers after pad
change.
CMP.B1 (Speedfam CMP-V) - DOWN: spindle to cup alignment is off.
CMP-SCRUB.A1 (On-track scrubber) - IDLE. mqcs done.
CMP-SCRUB.A2 (On-track scrubber) - IDLE. mqcs done.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
JD0039 - PMD (should be here by 7:30-8pm)
JD0038B- PMD
XD0294 - B-LOT - DEP ILD2-1
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B1 - SPINDLE/CUP ALIGNMENT
CMP.A2 - VERIFY - RUNNING BREAKIN WAFERS
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1 box of 12K monitors in room
Number of product lots in room:
------------------------------
2
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
YD0128 - M3 - 13WFRS
XD0279 - M2 - 18WFRS
XD0299 - M1 - 18WFRS
XD0300 - M1 - 22WFRS
|
| 65.10 | A shift CMP passdown 11/21/95 | SUBPAC::SADIN | Freedom isn't free. | Tue Nov 21 1995 18:44 | 69 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 cmp.a1/scrub mqc
BREAKIN WAFERS 75 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.B1 (Speedfam CMP-V) - RUNNING1: running XL0312. Will be running XD0301
soon.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0294 - B-LOT (WILL BE FINISHING UP ON CMP.A1 SHORTLY)
XD0301 - B-LOT
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
XD0294 - 0.7DAYS
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
XL0314 - HOLD FOR LARRY CAMILLETTI FOR P2 MEASUREMENTS. ON HOLD IN STORES.
Monitor status:
--------------
2 BOXES OF 12K MONITORS
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0038B - PMD - 6WFRS
JD0038 - M2 - 6WFRS
XA0162 - M2 - 23WFRS
XL0314 - PMD - 24WFRS
XL0312 - M1 - 23WFRS
|
| 65.11 | CMP 11/22/95 | FABSIX::G_ISAACS | | Wed Nov 22 1995 06:04 | 60 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE NEED'S MQC'S
CMP.B1 (Speedfam CMP-V) -UP/ Running lot # XD0288
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE mqc's completed D shift
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE mqc's completed D shift
HOT/B lots in area:
-------------------
Hot lot
B lot #
HOT lots coming to area:
------------------------
Hot lot #
STATIC lots in area:
--------------------
DOWN equipment:
---------------
CARRIERS::
-----------
5 SPEEDFAM COMPLETE
3 STRAUSBAUGH COMPLETE
2 " " FILMED AND SHIMMED
HOLD LOTS:
----------
*none*
MONITOR status:
---------------
WAFERS USED 12K-
NUMBER of product lots in room:
-------------------------------
1-LOT # XD0288
new spec/revs posted:
---------------------
*none*
|
| 65.12 | CMP 11/24/95 | FABSIX::G_ISAACS | | Sat Nov 25 1995 06:02 | 61 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/Running lot # XL0306
CMP.A2 (Strasbaugh 6DS-SP) - DOWN/ RUNNING MQC'S
CMP.B1 (Speedfam CMP-V) - DOWN/ RAN THREE MQC'S CAN'T GET TOOL TO
PASS UNIF.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - DOWN/ FAILED MQC'S
HOT/B lots in area:
-------------------
Hot lot
B lot #
HOT lots coming to area:
------------------------
Hot lot #
STATIC lots in area:
--------------------
DOWN equipment:
---------------
B.1
CARRIERS::
-----------
10 SPEEDFAM COMPLETE
4 STRAUSBAUGH COMPLETE
HOLD LOTS:
----------
*none*
MONITOR status:
---------------
WAFERS USED 12K-
NUMBER of product lots in room:
-------------------------------
2 -LOT
new spec/revs posted:
---------------------
*none*
|
| 65.13 | A shift CMP passdown 11/26/95 | SUBPAC::SADIN | Freedom isn't free. | Sun Nov 26 1995 18:33 | 74 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 cmp.a1/.b1/scrub
BREAKIN WAFERS 75 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: pad changed. running mqcs.
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.B1 (Speedfam CMP-V) - RUNNING: running XD0318 (pmd).
CMP-SCRUB.A1 (On-track scrubber) - DOWN: doc putting in new spindle shaft
assembly.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0318 - PMD
Hot lots coming to area:
-----------------------
JD0038B - UPP_ILD1 1 - HOT
XD0298 - UPP_ILD3 1 - B-LOT
XD0301 - DEP_ILD3 1 - B-LOT
XD0294 - DEP_ILD3 2 - BLOT
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - DOWN FOR PAD CHANGE.
Scrap lots:
----------
* none *
Hold Lots:
---------
ZB0019 - STI LOT. ON HOLD FOR LARRY CAMILLETTI.
Monitor status:
--------------
� box of 12K monitors. 2 more boxes on order.
Number of product lots in room:
------------------------------
2
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XL0297 - M2 - 22WFRS
# of carriers for strasbaugh/speedfam:
-------------------------------------
5 spare carriers for CMP.B1
5 carriers built for CMP.B2 (more plates due in on monday)
2 full carriers for CMP.A1/.A2
2 plates filmed and shimmed for CMP.A1/.A2
|
| 65.14 | A shift CMP passdown 11/27/95 | SUBPAC::SADIN | Freedom isn't free. | Mon Nov 27 1995 18:55 | 73 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 19 cmp.a1/.a2./.b1/scrub
BREAKIN WAFERS 175 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: running XD0294 M3.
CMP.A2 (Strasbaugh 6DS-SP) - MQC: broke a wafer. needs full mqcs.
CMP.B1 (Speedfam CMP-V) - RUNNING: running XD0298 and XD0301 M3.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0301 - BLOT - M3
XD0298 - BLOT - M3
XD0294 - BLOT - M3
Hot lots coming to area:
-----------------------
XD0323 UPP_PMD1
XD0308 DEP_ILD3 1
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A2 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
ZB0019 - STI LOT. HOLD FOR LARRY CAMILLETTI.
Monitor status:
--------------
� BOX OF 12K MONITORS. MORE ON ORDER.
Number of product lots in room:
------------------------------
9
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
* none * (slurry system down from 9am - 2:30pm)
# of carriers for strasbaugh/speedfam:
--------------------------------------
0 for strasbaugh (wafer breakage ate up our last two)
5 for CMP.B1 (spare)
5 for CMP.B2
FYI: extra plates for speedfam carriers came in today.
|
| 65.15 | A shift CMP passdown 11/28/95 | SUBPAC::SADIN | Freedom isn't free. | Tue Nov 28 1995 18:50 | 80 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 mqcs
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: running ZB0019 PMD (eng lot).
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: running XD0315 M1.
CMP.B1 (Speedfam CMP-V) - IDLE.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
Two more boxes on order. Check ASDG::FAB6_WAFERSTARTS for lot#'s.
Number of product lots in room:
------------------------------
2
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0308 - M3 - 24WFRS
JD0038B - M1 - 6WFRS
JD0039 - M3 - 6WFRS
XD0279 - M3 - 18WFRS
XD0323 - PMD - 24WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
4 extras built for CMP.B1 (5 carriers on the tool)
5 carries on CMP.B2 (10 plates came in, but we have no white rings!)
4 complete carries for strasbaugh
5 plates filmed/shimmed for strasbaugh
**** note****
carriers for the speedfam are to be set at 7.0-8.0mils from now
on!! If you have time, please reset the exposure on the 4 extra carriers
for CMP.B1 (they are on the transformer case behind CMP.B1). thanks.
|
| 65.16 | CMP A SHIFT PASSDOWN | FABSIX::J_ROA | | Wed Nov 29 1995 19:43 | 90 |
|
-< A shift CMP passdown - Wednesday 11/29/95 >-
--------------------------------------------------------------------------------
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1 mqcs
BREAKIN WAFERS 50 cmp.b1 breakin
Built carriers and plates available.
-----------------------------------
4 FULL CARRIERS BUILT ( STRASBAUGH )
3 PLATES WITH FILM AND ADJUSTED EXPOSURE
1 PLATE WITH FILM AND OPEN HOLES
------------------------------------------
SPEEDFAM B1 AND B2 10 CARRIERS BUILT
CMP.A1 (Strasbaugh 6DS-SP) - IDLE/UP: Mqc's completed.
CMP.A2 (Strasbaugh 6DS-SP) - MQC: Swapped carriers from left to right and
right to left to see if the high uniformity follows the carrier. If, it does
the tool might need to be calibrated.
CMP.B1 (Speedfam CMP-V) - RUNNING: Lot XA0162 running through first polish.
CMP-SCRUB.A1 (On-track scrubber) - IDLE/UP: Mqc's done
CMP-SCRUB.A2 (On-track scrubber) - IDLE/UP: Mqc's done
second scrub.
****** ( No lots move out of CMP today. )******
Hot/B lots in area:
__________________
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
Down Equipment:
--------------
Scrap lots:
----------
Hold Lots:
---------
* none *
Monitor status:
--------------
3 boxes of 12K's
Number of product lots in room:
------------------------------
One lot
New specs/revs posted:
---------------------
|
| 65.17 | CMP 11/30/95 D SHIFT | FABSIX::G_ISAACS | | Thu Nov 30 1995 05:45 | 57 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE RAN MQC'S
CMP.B1 (Speedfam CMP-V) - UP/ RUNNING TOUCH-UPS ON LOT # XA0162
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE RAN MQC'S D SHIFT
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE RAN MQC'S D SHIFT
D SHIFT FOUND OVER 75 EXCIL WAFERS IN
CMP TONIGHT.
HOT/B lots in area:
-------------------
Hot lot
B lot #
HOT lots coming to area:
------------------------
Hot lot #
STATIC lots in area:
--------------------
DOWN equipment:
---------------
CARRIERS::
-----------
5 SPEEDFAM COMPLETE
2 STRAUSBAUGH COMPLETE
HOLD LOTS:
----------
*none*
MONITOR status:
---------------
NUMBER of product lots in room:
-------------------------------
new spec/revs posted:
---------------------
*none*
|
| 65.18 | CMP D SHIFT 12/1/95 | FABSIX::G_ISAACS | | Fri Dec 01 1995 06:53 | 60 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/ Broke wafers twice tonight. No alarms.
Didn't know wafers broke until they were
unloading. First break was noticed when
tool alarmed because unload flipper could
not pick up wafer, chunk was missing.
Second break happened after running 50
break in wafers and the tool was about to
unload the last MQC wafer, it to was
missing a chunk in the unload cup.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE RAN MQC'S D SHIFT
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE RAN MQC'S D SHIFT
HOT/B lots in area:
-------------------
Hot lot
B lot #
HOT lots coming to area:
------------------------
Hot lot #
STATIC lots in area:
--------------------
DOWN equipment:
---------------
CARRIERS::
-----------
5 SPEEDFAM COMPLETE
4 STRAUSBAUGH COMPLETE
HOLD LOTS:
----------
*none*
MONITOR status:
---------------
NUMBER of product lots in room:
-------------------------------
new spec/revs posted:
---------------------
*none*
|
| 65.19 | cmp 12/06/95 D SHIFT | FABSIX::G_ISAACS | | Wed Dec 06 1995 07:22 | 67 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - DOWN/PM
CMP.B1 (Speedfam CMP-V) - UP/ RUNNING LOT # XL0311 FOR FIRST 200 SEC.
RAN SEND A HEAD WAFERS. TM..55 ILD-1 REMOVAL RATE PER CARRIER.
# 1...3639
2...3984
3...3785
4...3670
5...3635
WE RAN TM..36 ILD-1. REMOVAL RATES PER CARRIER
#1...3925
2...4101
3...4200
4...3949
5...4065
??????????????????????????????? STDV % ON SPEEDFAM FOR MQC'S
IS 8% NOW IN THE SPC CHART UCL IS 10% ????????????????????
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE RAN MQC'S D SHIFT
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE RAN MQC'S D SHIFT
HOT/B lots in area:
-------------------
Hot lot #
B lot # XD0232
HOT lots coming to area:
------------------------
Hot lot #
STATIC lots in area:
--------------------
DOWN equipment:
---------------
CMP.A2
CARRIERS::
-----------
4 SPEEDFAM EXTRA
6 STRAUSBAUGH COMPLETE
3 " " FILMED WITH SHIMS
HOLD LOTS:
----------
*none*
MONITOR status:
---------------
NUMBER of product lots in room:
-------------------------------
2
new spec/revs posted:
---------------------
*none*
|
| 65.20 | CMP 12/08/95 D SHIFT | FABSIX::G_ISAACS | | Fri Dec 08 1995 06:29 | 59 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE RAN LOT # JD0037
REMOVAL RATE LEFT CARRIER=1713
RIGHT " "=2124
DC 1035 ILD_1
CMP.A2 (Strasbaugh 6DS-SP) - UP/ RUNNING TOUCH UP'S ON LOT # XD0299
CMP.B1 (Speedfam CMP-V) - UP/ RUNNING TOUCH-UP'S ON LOT #XD0293 &
LOT # XL0312
REMOVAL RATES PR CARRIER'S TM36 ILD_3
# 1=2107
2=1926
3=2062
4=1766
5=1884
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE RAN MQC'S D SHIFT
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE RAN MQC'S D SHIFT
HOT/B lots in area:
-------------------
Hot lot #
B lot #
HOT lots coming to area:
------------------------
Hot lot #
B LOT # XL0320
STATIC lots in area:
--------------------
DOWN equipment:
---------------
CARRIERS::
-----------
10 SPEEDFAM PLATES COMPLETE NO RINGS.
4 STRAUSBAUGH COMPLETE
HOLD LOTS:
----------
*none*
MONITOR status:
---------------
NUMBER of product lots in room:
-------------------------------
3 LOTS
new spec/revs posted:
---------------------
*none*
|
| 65.21 | cmp 12/9/95 d shift | FABSIX::G_ISAACS | | Sat Dec 09 1995 07:24 | 54 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/IDLE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE RAN MQC'S D SHIFT
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE RAN MQC'S D SHIFT
HOT/B lots in area:
-------------------
Hot lot #
B lot #
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:
--------------------
DOWN equipment:
---------------
CARRIERS::
-----------
10 SPEEDFAM PLATES COMPLETE NO RINGS.
4 STRAUSBAUGH COMPLETE
HOLD LOTS:
----------
*none*
MONITOR status:
---------------
NUMBER of product lots in room:
-------------------------------
1 LOTS # XD0324
new spec/revs posted:
---------------------
*none*
|
| 65.22 | CMP A SHIFT PASSDOWN | FABSIX::J_ROA | | Wed Dec 13 1995 19:20 | 84 |
|
-< A shift CMP passdown - Wednesday 12/13/95 >-
--------------------------------------------------------------------------------
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1 mqcs
BREAKIN WAFERS 100 cmp.b1 breakin
Built carriers and plates available.
-----------------------------------
6 FULL CARRIERS BUILT ( STRASBAUGH )
------------------------------------------
SPEEDFAM B1 AND B2 10 CARRIERS BUILT
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: Running lot ZA0097
CMP.A2 (Strasbaugh 6DS-SP) - DOWN: Dummy wafer broke. Needs pad and carriers.
CMP.B1 (Speedfam CMP-V) - RUNNING: Finishing lot JD0036 and YD0135
CMP-SCRUB.A1 (On-track scrubber) - IDLE/UP: Mqc's done
CMP-SCRUB.A2 (On-track scrubber) - IDLE/UP: Mqc's done
****** ( 1 lot move out of CMP today. )******
Hot/B lots in area:
__________________
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
Down Equipment:
--------------
Scrap lots:
----------
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12K's
Number of product lots in room:
------------------------------
Three lots
New specs/revs posted:
---------------------
|
| 65.23 | CMP C-SHIFT PD 12/15/95 | FABSIX::E_DAWSON | | Fri Dec 15 1995 19:29 | 66 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 8 CMP.A1/MQC
BREAKIN WAFERS ????
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING 1 / LOT XD0302 TM36 ILD1 24 WAFERS
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING 1 / LOT YD0138 TM36 ILD1 24 WAFERS
CMP.B1 (Speedfam CMP-V) - RUNNING 1 / LOT XD0319 TM36 ILD2 22 WAFERS
CMP.B2 (Speedfam CMP-V) - VERIFY-U
CMP-SCRUB.A1 (On-track scrubber) - RUNING LOT XD0318 TM36 ILD3 23 WAFERS
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
* MQC PREFORMED ON BOTH SCRUBBERS
Hot/B lots in area:
__________________
NONE
Hot lots coming:
---------------
Static Lots:
-------------
XL0311 STEP_CMP 1.5 DAYS
ZA0097 CMP_ILD1 2.1 DAYS
Down Equipment:
--------------
NONE
Scrap lots:
----------
NONE
Hold Lots:
---------
NONE
MQC Monitors:
--------------
1 BOX
Lots in CMP:
-----------
12 LOTS
New SPECS/TDCO posted:
---------------------
NONE
Strasbaugh / Speedfam:
---------------------
0 - STRASBAUGH CARRIERS
10 - SPEEDFAM CARRIERS
|
| 65.24 | CMP 12/16/95 D SHIFT | FABSIX::G_ISAACS | | Sat Dec 16 1995 07:25 | 57 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE RUNNING MQC'S
CMP.A2 (Strasbaugh 6DS-SP) - UP/ RUNNING LOT # XA0215 FOR
TOUCH-UPS
CMP.B1 (Speedfam CMP-V) - UP/ RUNNING LOT # JD0042 & JD0044
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE RAN MQC'S D SHIFT
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE RAN MQC'S D SHIFT
HOT/B lots in area:
-------------------
Hot lot #
B lot #
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:
--------------------
LOT # ZA0097 2.6 WAFER BROKE ON .A1 DURING TOUCH-UP
DOWN equipment:
---------------
CARRIERS::
-----------
10 SPEEDFAM PLATES COMPLETE.
2 STRAUSBAUGH COMPLETE
HOLD LOTS:
----------
*none*
MONITOR status:
---------------
NUMBER of product lots in room: 6
-------------------------------
LOT #'S JD0046 .8
JD0042 .1
JD0044 .0
XA0215 .2
ZA0097 2.6
XD0326 .5
new spec/revs posted:
---------------------
*none*
|
| 65.25 | CMP C-SHIFT/PD 12/16/95 | FABSIX::E_DAWSON | | Sat Dec 16 1995 19:37 | 39 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING / XD0324 ILD1 TM36 23 Wafers
Mqc's completed (D Shift 7:30am)
CMP.A2 (Strasbaugh 6DS-SP) - Up/Idle Needs full mqc's
CMP.B1 (Speedfam CMP-V) - RUNNING / JD0043 Ild2 DC1026 12 Wafers
Mqc's completed
CMP.B2 (Speedfam CMP-V) - Verify-U
CMP-SCRUB.A1 (On-track scrubber) - Up/Idle/Warning = "Check ammonia
pressure before every run" Mqc's completed
CMP-SCRUB.A2 (On-track scrubber) - Up/Idle/Warning = "Check ammonia
pressure before every run" Mqc's completed
Hot/B lots in area: Hot Lots coming:
------------------ ---------------
Static Lots: Scrap Lots:
----------- ----------
Hold Lots: 2 Lots in CMP: 4
--------- -----------
XL0328 "STORES" JD0043 ILD2 DC1026 12 Wafers
ZA0097 "STORES" XD0316 ILD1 TM36 24 Wafers
JD0035 ILD2 DC1026 11 Wafers
XD0324 ILD1 TM36 23 Wafers
Down Equipment: New SPEC/TDCO:
-------------- -------------
MQC Monitors: Carriers:
------------- --------
21 Wafers 4 - Strasbaugh
MQC Mon. Used: 2 - Strasbaugh Plates
------------- 10 - Speedfam
5
|
| 65.26 | CMP 12/20/95 | FABSIX::G_ISAACS | | Wed Dec 20 1995 05:41 | 57 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE NEEDS MQC'S
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/IDLE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
HOT/B lots in area:
-------------------
Hot lot #
B lot #
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:
--------------------
DOWN equipment:
---------------
CARRIERS::
-----------
SPEEDFAM PLATES COMPLETE.
STRAUSBAUGH COMPLETE
HOLD LOTS:
----------
*none*
MONITOR status:
---------------
NUMBER of product lots in room: 2
-------------------------------
LOT #'S XL0314
XD0331
new spec/revs posted:
---------------------
*none*
|
| 65.27 | CMP C-SHIFT PD 12/20/95 | FABSIX::E_DAWSON | | Wed Dec 20 1995 19:27 | 38 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - Up/Idle - Needs full mqc's
CMP.A2 (Strasbaugh 6DS-SP) - Up/Idle Needs full mqc's
CMP.B1 (Speedfam CMP-V) - RUNNING-2 Lot XL0314 & XD0331
Mqc's completed
CMP.B2 (Speedfam CMP-V) - Up/Idle Needs full mqc's
CMP-SCRUB.A1 (On-track scrubber) - Up/Idle/Warning Mqc's completed
* Please check ammonia flow before running. *
CMP-SCRUB.A2 (On-track scrubber) - Up/Idle/Warning Mqc's completed
* Please check ammonia flow before running. *
Hot/B lots in area: Hot Lots coming:
------------------ ---------------
JDOO49 DC0126 ILD3 10 Wafers
Static Lots: Scrap Lots:
----------- ----------
Hold Lots: Lots in CMP: 3
--------- -----------
XD0331 TM36 ILD1 23 Wafers
XL0314 TM55 ILD1 23 Wafers
XD0332 TM36 ILD2 23 Wafers
Down Equipment: New SPEC/TDCO:
-------------- -------------
MQC Monitors: Carriers:
------------- --------
4 Boxes 4 - Strasbaugh
MQC Mon. Used: 2 - Strasbaugh Plates
------------- 10 - Speedfam
15
|
| 65.28 | 1/17/96 cmp passdown | FABSIX::L_CEDRONE | | Wed Jan 17 1996 07:06 | 76 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 cmp.a1/.b1/scrub
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN, ROBOT UPGRADE
CMP.A2 (Strasbaugh 6DS-SP) - DOWN, PAD CHANGE AND NEW CARRIERS
CMP.B1 (Speedfam CMP-V) - DOWN -PARTS, UPGRADE
CMP.B2 (SPEEDFAM CMP-V) - RUNNING XD0324
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S DONE
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
----------------------_
JD0067
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 DOWN, ROBOT UPGRADE
CMP.B1 DOWN, PARTS
CMP.A2 DOWN, PAD CHANGE
Scrap lots:
----------
* none *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
1 1/4 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0326 24W M3
# of carriers for strasbaugh/speedfam:
-------------------------------------
1 spare carriers for CMP.B1/B2
3 full carriers for CMP.A1/.A2
2 plates filmed for CMP.A1/.A2
|
| 65.29 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Thu Jul 11 1996 08:30 | 56 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.B1 (Speedfam CMP-V) - DOWN/UPGRADE
CMP.B2 (Speedfam CMP-V) - UP/RUNNING 2 LOT MQC DONE
***HOT LOT JL0384*** FIRST PASS
JD0295 NEEDS 100% AND TOUCHUP
CMP.B3 (Speedfam CMP-V) - UP/ IN MQC WAITING FOR FRANK KRUPPA TO EVAL.
JD0307-100% ON A4 FOR TOUCHUP
***BOTTOM SCRUBBER PAD REMOVED PLACED IN REC
ELEVATOR #2***
CMP-SCRUB.A1 (On-track scrubber) - IDLE MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE MQC DONE
HOT/B lots in area:1
-------------------
JL0384 HOT LOT***
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:2
--------------------
HOLD LOTS IN AREA:2
__________________
DOWN equipment:B1 UPGRADE
---------------
---------------
NUMBER of product lots in room:5
-------------------------------
LOTS COMPLETED : 3
----------------
BREAK IN WAFERS USED: 40
MQC WAFERS USED:21
----------
|
| 65.30 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Fri Jul 12 1996 07:53 | 46 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE MQC DONE
CMP.B1 (Speedfam CMP-V) - DOWN/UPGRADE
CMP.B2 (Speedfam CMP-V) - DOWN/MONTHLY PM
CMP.B3 (Speedfam CMP-V) - UP/LOT JD0304 RAN 400 SEC. NOW IN SCRUB.A2
CMP-SCRUB.A1 (On-track scrubber) - IDLE MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE MQC DONE
HOT/B lots in area:
-------------------
STATIC lots in area:1
--------------------
HOLD LOTS IN AREA:2
__________________
DOWN equipment:B1 UPGRADE
B2 MONTHLY PM
---------------
---------------
NUMBER of product lots in room:2
-------------------------------
LOTS COMPLETED : 9
----------------
BREAK IN WAFERS USED: 30
MQC WAFERS USED:3
----------
|
| 65.31 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Sat Jul 13 1996 08:38 | 47 |
|
CMP.A1 (Strasbaugh 6DS-SP) - IN VERIFY AFTER 3 FAILED MQC AND PAD CHANGE
NEEDS FULL MQC
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE MQC DONE
CMP.B1 (Speedfam CMP-V) - UP/IDLE MQC DONE
CMP.B2 (Speedfam CMP-V) - UP/IDLE
CMP.B3 (Speedfam CMP-V) - UP/IDLE
CMP-SCRUB.A1 (On-track scrubber) - IDLE MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE MQC DONE
HOT/B lots in area:
-------------------
STATIC lots in area:0
--------------------
HOLD LOTS IN AREA:1
__________________
DOWN equipment:
---------------
---------------
NUMBER of product lots in room:1
-------------------------------
LOTS COMPLETED : 5
----------------
BREAK IN WAFERS USED: 40
MQC WAFERS USED:19
----------
|
| 65.32 | PASSDOWN | FABSIX::D_CAUSE | | Fri Aug 02 1996 08:27 | 49 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IN MQC NEEDS FULL MQC
CMP.A2 (Strasbaugh 6DS-SP) -UP/IN MQC
CMP.B1 (Speedfam CMP-V) - UP/RUNNING HOT LOT JL0436 PMD 100% ON A.4 NEEDS T/U
CMP.B2 (Speedfam CMP-V) - UP/RUNNING LOT JD0424 FIRST PASS
CMP.B3 (Speedfam CMP-V) - DOWN/FAILED MQC WILL NEED PAD CHANGE AND MQC
CMP-SCRUB.A1 (On-track scrubber) - IDLE MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE MQC DONE
HOT/B lots in area:3
-------------------
XL0514 M1
JL0410 M2
STATIC loDts in area:
--------------------
HOLD LOTS IN AREA:2
__________________
XL0514 ***HOT LOT *** PROGRAM NOT COMPLETE ON THK.A4 OR .A5
JL0410 ***HOT LOT *** UNABLE TO READ ALL WAFERS ON THK.A4 OR .A5
DOWN equipment:
---------------
---------------
B3 HIGH PARTICLES
NUMBER of product lots in room:4
-------------------------------
LOTS COMPLETED : 7
----------------
BREAK IN WAFERS USED: 40
MQC WAFERS USED:20
MQC WAFERS AVAILABLE:4 BOXES
----------
|
| 65.33 | PASSDOWN | FABSIX::D_CAUSE | | Sat Aug 03 1996 08:44 | 50 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/MQC 3RD SET OF MQC HAVE BEEN RUN IN SCRUB.A1
NEED EVAL.
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JD0368A FIRST 400 SEC/ XD0462 NEEDS 100%
AND TOUCHUP
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JL0403A READY TO RUN/JL0404 5 SEND AHEADS
RAN AT 170 SEC
CMP-SCRUB.A1 (On-track scrubber) - IDLE MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE MQC DONE
HOT/B lots in area:
-------------------
STATIC lots in area:
--------------------
HOLD LOTS IN AREA:
__________________
DOWN equipment:
---------------
---------------
THICKNESS.A4 WILL NOT FOCUS
NUMBER of product lots in room:4
-------------------------------
LOTS COMPLETED : 4
----------------
BREAK IN WAFERS USED: 25
MQC WAFERS USED:25
MQC WAFERS AVAILABLE:2.5 BOXES
----------
|
| 65.34 | PASSDOWN | FABSIX::D_CAUSE | | Wed Aug 07 1996 08:33 | 49 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING MQC
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING MQC
CMP.B1 (Speedfam CMP-V) - UP/RUNNING LOT JD0305 100% ON .A4
CMP.B2 (Speedfam CMP-V) - UP/RUNNING LOT JD0415 100% ON .A5
CMP.B3 (Speedfam CMP-V) - UP/RUNNING MQC
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
HOT/B lots in area:
-------------------
XL0514
STATIC lots in area:4
--------------------
JD0383
JD0419
JD0409
JD0386
HOLD LOTS IN AREA:1
__________________
**HOT LOT** XL0514 BAD READINGS ON THICKNESS.A4 & .A5
DOWN equipment:
---------------
---------------
NUMBER of product lots in room:7
-------------------------------
LOTS COMPLETED : 8
----------------
BREAK IN WAFERS USED: 30
MQC WAFERS USED:14
MQC WAFERS AVAILABLE:1 BOX
----------
|