Title: | CMP |
Notice: | Welcome to the CMP notesfile |
Moderator: | FABSIX::B_TOWER LLE |
Created: | Tue Oct 31 1995 |
Last Modified: | Fri Jun 06 1997 |
Last Successful Update: | Fri Jun 06 1997 |
Number of topics: | 94 |
Total number of notes: | 6381 |
This is the official CMP notesfile! Anything and everything pertaining to CMP shall be made to reside here. Typing the command SHOW MOD at the notes> prompt will show you the current moderators of this notesfile. Feel free to send us mail with any questions you may have! jim (moderator and creator of the CMP notesfile)
T.R | Title | User | Personal Name | Date | Lines |
---|---|---|---|---|---|
1.1 | CMP Notesfile Index | ACURA::NEUMANN | Sun Oct 27 1996 10:19 | 26 | |
ASDG::CMP NOTESFILE INDEX ============================================================================== TOOL/TOPIC NOTE # TOOL NOTE # ============================================================================== CMP.A PM TEMPLATES...........4 INCOMPLETE PM's..............30 CMP.A1.......................5 SPEEDFAM F.R.A.C.U.S.........31 CMP.A1 CHECKSHEETS...........6 SPEEDFAM BUG/WISH FORM.......32 CMP.A2.......................7 SPEEDFAM HARDWARE/ENG REQ....33 CMP.A2 CHECKSHEETS...........8 CMP.B WAFER CRASH FORM.......34 STRASBAUGH GENERAL ISSUES...15 CMP-SCRUB.A PM TEMPLATES.....35 CMP.B PM TEMPLATES..........16 CMP-SCRUB.A1.................36 CMP.B1......................17 CMP-SCRUB.A1 CHECKSHEETS.....37 CMP.B1 CHECKSHEETS..........18 CMP-SCRUB.A2.................38 CMP.B2......................19 CMP-SCRUB.A2 CHECKSHEETS.....39 CMP.B2 CHECKSHEETS..........20 CMP-SCRUB.A3.................40 CMP.B3......................21 CMP-SCRUB.A3 CHECKSHEETS.....41 CMP.B3 CHECKSHEETS..........22 CMP-SCRUB.C PM TEMPLATES.....44 GENERAL SPEEDFAM ISSUES.....23 CMP-SCRUB.C1-7...............45 WESTECH GENERAL ISSUES......24 CMP-SCRUB.C1-7 CHECKSHEETS...46 CMP.C PM TEMPLATES..........25 ONTRAK GENERAL ISSUES........54 CMP.C1-7....................26 GENERAL CMP ISSUES...........61 CMP.C2-7 CHECKSHEETS........27 FY97 PM SCHEDULE.............66 CMP.C2-7....................28 CMP-6 CALIBRATION LISTINGS...78 CMP.C2-7 CHECKSHEETS........29 ============================================================================== | |||||
1.2 | CMP.A2 CRASHED 1 WAFER BROKEN JL1330 | FABSIX::S_AGUILA | Mon Apr 14 1997 08:25 | 23 | |
CMP PEX LOT # JL1330 QUANTITY: 24 - 1 = 23 OPERATION # 1984 MODIFIED SINGLE PASS CMP - PMD /DESCR. POLISHER: CMP.A2 EVAL TOOL: N/A DATE: 04/14/96 B-SHIFT PROBLEM: CMP.A2 CRASHED, ONE WAFERS SCRAPPED. WAFER CAME OUT OF RIGH CARRIER. SEE CRASH REPORT INFO. DISPOSITION: LOTS STILL POLISHING CORRECTIVE ACTION CARRIERS AND PAD WERE CHANGED |