TOPIC | 1.0 | Official CMP notesfile welcome note! |
| 1.2 | Mon Apr 14 1997 08:25 | CMP.A2 CRASHED 1 WAFER BROKEN JL1330 | 23 lines |
TOPIC | 62.0 | Process Excursion (PEX) for CMP |
| 62.635 | Tue Apr 15 1997 07:41 | NIT.A2 PEX REPORT FOR HIGH/TOTAL PARTICLES CENTER | 28 lines |
| 62.643 | Sun Apr 20 1997 06:49 | CMP.B2 CRASHED 1 WAFER SCRAPPED | 23 lines |
| 62.647 | Mon Apr 21 1997 06:06 | CMP.B3 TWO WAFERS BROKEN | 26 lines |
| 62.655 | Mon May 05 1997 08:18 | 2 WAFERS OVERPOLISHED ON CMP.B2, XE1112 | 33 lines |
| 62.681 | Tue Jun 03 1997 07:49 | pex report for JL1585, 1 wafer scrapped due to overpolish | 30 lines |
| 62.684 | Wed Jun 04 1997 04:37 | JD1474, 3 WAFERS REMARKED FOR EXTRA DEP | 43 lines |
| 62.685 | Wed Jun 04 1997 05:04 | XE1199, 5 WAFERS REMARKED FOR EXTRA DEP | 44 lines |