TOPIC | 62.0 | Process Excursion (PEX) for CMP |
| 62.178 | Sun Apr 28 1996 04:17 | JD0182 THK_ILD1_PST "Mean" low | 40 lines |
| 62.189 | Mon May 06 1996 06:21 | JD0170 LOW INCOMING ILD3 THICKNESS | 27 lines |
| 62.190 | Mon May 06 1996 06:37 | JD0226 2 WAFERS CRASHED AT PMD on CMP.A2 | 23 lines |
| 62.191 | Tue May 07 1996 07:39 | JD0198 THK_ILD1_PRE below LCL | 23 lines |
| 62.192 | Tue May 07 1996 07:43 | JD0171 THK_ILD3_PRE below LCL | 23 lines |
| 62.193 | Wed May 08 1996 05:40 | JD0169 3 wafers broken | 26 lines |
| 62.212 | Mon May 13 1996 02:57 | JD0218 low incoming tox at ILD1 | 22 lines |
| 62.213 | Mon May 13 1996 03:04 | JD0220 high THK_RG incoming ILD2 | 22 lines |
| 62.214 | Tue May 14 1996 01:51 | JD0180 JD0184 - Low incoming thickness ILD3 | 22 lines |
| 62.215 | Tue May 14 1996 04:02 | JD0179 POST ILD3 RANGE HIGH | 27 lines |
| 62.235 | Sun May 19 1996 07:18 | JD0227 ILD1 - 1 wafer crash on CMP.A2 | 23 lines |
| 62.264 | Mon Jun 03 1996 23:01 | JD0240 PEX ILD2 4 wafers low thickness. | 29 lines |
| 62.272 | Mon Jun 10 1996 23:35 | JD0292 incoming thickness low for ILD1 | 22 lines |
| 62.273 | Tue Jun 11 1996 04:49 | JD0298 1 wfr crash from CMP.A1 - scrapped (Wfr 08) | 23 lines |
| 62.283 | Mon Jun 17 1996 07:12 | JD0301 LOW ILD1 PRE / JD0247 LOW ILD3 PRE | 24 lines |
| 62.326 | Sun Aug 04 1996 07:17 | JD0394 THK_ILD1_PST - slight overpolish | 25 lines |
| 62.354 | Mon Aug 26 1996 07:41 | DATA MIS-ENTRY JD0467 @ THK_PMD_PST | 33 lines |
| 62.483 | Wed Dec 18 1996 05:18 | JL0713 ILD1 - Two wafers overpolished | 30 lines |
| 62.484 | Wed Dec 18 1996 05:31 | JD0687 ILD2 - 5 wafers scrapped for over-polish | 25 lines |
| 62.531 | Tue Feb 04 1997 04:09 | CMP.A2 CRASH @ PMD, XD0947 lost 2 wafers {02, 24} | 25 lines |
| 62.577 | Sun Mar 02 1997 06:55 | XD0915 ILD3 3 wafers broken while mapping input cassette | 25 lines |
| 62.586 | Sun Mar 09 1997 03:59 | XM0948 CMP_ILD2 4 wafers scrapped for overpolish | 33 lines |
| 62.592 | Mon Mar 10 1997 05:24 | JD0985 ILD3 4 wafers overpolished | 50 lines |
| 62.622 | Sun Apr 06 1997 07:24 | JD1311 one wafer broken on CMP-SCRUB.A1 | 23 lines |
| 62.632 | Sun Apr 13 1997 07:14 | XB0782 2 wafers broken in automobile crash | 25 lines |
| 62.634 | Mon Apr 14 1997 08:33 | JD1230 12 wafers overpolished after ILD2 | 34 lines |
| 62.664 | Tue May 13 1997 07:56 | JD1459 ILD1 - 4 scrap, 8 overpolished @ ILD1 HDP | 74 lines |