Conference | Total Posts | Conference Title |
---|---|---|
asdg::cmp | 6 | CMP |
TOPIC | 62.0 | Process Excursion (PEX) for CMP | ||
62.640 | Thu Apr 17 1997 12:18 | XD1104 4 WAFERS SCRAPPED DUE TO OVER-POLISH | 58 lines | |
62.641 | Thu Apr 17 1997 17:14 | JD1460 2 wafers scrapped @PMD - crash. | 27 lines | |
62.642 | Thu Apr 17 1997 22:15 | XD1205 HIGH OUTGOING SD @ILD1 | 50 lines | |
62.651 | Fri Apr 25 1997 17:23 | JD1460B high range/SD @ILD3 | 59 lines | |
62.652 | Sat Apr 26 1997 17:57 | XD1292 TWO WAFERS SCRAPPED @PMD | 30 lines | |
62.676 | Wed May 28 1997 20:11 | XD1483 five wafers over-polished @ILD2 | 36 lines |
First Post: | Thu Apr 17 1997 |
Last Post: | Wed May 28 1997 |
# Topics: | 0 |
# Replies: | 6 |
# We have note bodies for: | 6 |