TOPIC | 62.0 | Process Excursion (PEX) for CMP |
| 62.526 | Fri Jan 31 1997 19:20 | JL0901 high incoming step @PMD | 42 lines |
| 62.528 | Sat Feb 01 1997 13:57 | JL0829 SLIGHTLY LOW OUTGOING THICKNESS @PMD | 27 lines |
| 62.529 | Sat Feb 01 1997 14:06 | LATE POSTING XD0582 SLIGHTLY HIGH SD @PMD | 26 lines |
| 62.534 | Fri Feb 07 1997 16:07 | xd0585 5 wafers scrapped @ILD1 | 31 lines |
| 62.546 | Thu Feb 13 1997 15:38 | JL0901 HIGH INCOMING STEP @PMD | 29 lines |
| 62.547 | Thu Feb 13 1997 19:03 | JD0933 high SD @ILD1 | 45 lines |
| 62.548 | Fri Feb 14 1997 19:14 | YE0218 high outgoing range @ILD3 | 44 lines |
| 62.563 | Wed Feb 19 1997 11:19 | JL0968 HIGH INCOMING STEP @ILD1 | 32 lines |
| 62.574 | Thu Feb 27 1997 18:43 | XD0914 HIGH INCOMING STEP @ILD2 | 33 lines |
| 62.575 | Fri Feb 28 1997 19:36 | JL1014 over polished @ILD2 | 33 lines |
| 62.575 | Sat Mar 01 1997 18:13 | JL1014 OVER POLISHED @ILD2 | 33 lines |
| 62.584 | Fri Mar 07 1997 15:37 | XE0903 high outgoing range @ILD3 | 45 lines |
| 62.601 | Thu Mar 13 1997 10:59 | JL1159 high incoming step @PMD | 31 lines |
| 62.602 | Fri Mar 14 1997 09:44 | JD1052 4 WAFERS SCRAPPED @ILD2 - CRASH ON .B3 | 25 lines |
| 62.603 | Sat Mar 15 1997 18:17 | JL1144 some wafers overpolished @pmd | 32 lines |