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Posting history for user SUBPAC::KULP

79 notes across 1 conferences

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Posts		Conference Title
asdg::cmp79CMP

Conference asdg::cmp (CMP)

79 posts
TOPIC 62.0 Process Excursion (PEX) for CMP
62.287Sun Jun 23 1996 06:55 JL0321 High incoming range @PMD 26 lines
62.288Tue Jun 25 1996 04:51 Data entry error CMP.B2_ILD3_PST_THK_RG 25 lines
62.289Tue Jun 25 1996 05:20 High range CMP.B3 3064 THK_ILD3_PST 45 lines
62.297Sun Jun 30 1996 08:37 Popped chart 2957 RATE_TM36 (high) 56 lines
62.299Mon Jul 01 1996 02:11 High range post ILD3 thickness 41 lines
62.300Tue Jul 02 1996 03:24 High range post ILD1 thickness 39 lines
62.301Wed Jul 03 1996 08:35 3 wfrs broken cmp.b1 27 lines
62.316Sun Jul 21 1996 05:41 CMP.B1 JD0334, STEP_ILD3 over 20K 33 lines
62.317Sun Jul 21 1996 06:43 JD0333 THK_ILD3_PST STdev (high) and data entry 29 lines
62.318Mon Jul 22 1996 07:12 JD0369 THK_ILD1_PST STdev (high) 38 lines
62.343Sun Aug 18 1996 08:31 JD0377 - 3441 popped chart for low thickness and high range. 32 lines
62.344Mon Aug 19 1996 05:21 PEX JD0386 31 lines
62.345Mon Aug 19 1996 05:33 PEX jd0393 31 lines
62.347Tue Aug 20 1996 05:54 CMP.b1 JL0438 over polish 1st 5 wfrs 38 lines
62.348Tue Aug 20 1996 08:14 cmp.b1 broke 2 wfrs 26 lines
62.355Wed Aug 28 1996 08:37 JL0458 2 broken wfrs 26 lines
62.363Sun Sep 08 1996 07:23 JL0474 OVER POLISH ILD1 36 lines
62.364Sun Sep 08 1996 07:39 xd0520, high stdev 36 lines
62.365Tue Sep 10 1996 07:42 JL0493 1 broken wafer 24 lines
62.366Tue Sep 10 1996 08:05 JD0497 High INCOMING STEP ....ILD1 9680� 27 lines
62.367Wed Sep 11 1996 05:10 XD0516, 3066 THK_ILD2_PST Popped chart thickness STD 38 lines
62.368Wed Sep 11 1996 05:37 XM0515, 3066 THK_ILD2_PST Popped chart thickness STD 36 lines
62.369Wed Sep 11 1996 08:19 over polish 167 lines
62.371Sun Sep 15 1996 07:47 oper# 3053 THK_ILD2_PRE THK_RG high reading 29 lines
62.372Sun Sep 15 1996 07:48 oper# 3053 THK_ILD2_PRE THK_RG high reading 30 lines
62.373Sun Sep 15 1996 07:56 oper# 3120 THK_ILD2_PRE THK_RG high reading 26 lines
62.375Mon Sep 16 1996 02:17 oper# 3023 THK_ILD1_PRE high range 28 lines
62.384Sun Sep 22 1996 09:06 jd0501 4 wfrs scrap overpolish 115 lines
62.385Sun Sep 22 1996 09:19 JL0487 2 scrapped wfrs over polish 105 lines
62.387Wed Sep 25 1996 06:51 xd0528 thk_ILD3_PST, popped chart stdv 16.1 25 lines
62.388Wed Sep 25 1996 06:56 JL0514 - 3114 THK_ILD1_PST 3, popped chart stdv 13.78 UCL:10 26 lines
62.391Sat Sep 28 1996 07:27 XD0554 Popped chart CMP.B3 THK_ILD3_PST THK_SD_5 26 lines
62.395Sun Sep 29 1996 07:32 JD0506 2 broke wfrs slurry loss 36 lines
62.396Sun Sep 29 1996 07:36 xe0541 2 broke wfrs slurry loss 36 lines
62.405Sun Oct 06 1996 08:41 jd0557 2 wfrs broke cmp.a1 33 lines
62.406Mon Oct 07 1996 08:32 cmp.a2 2 broken wfrs 34 lines
62.407Tue Oct 08 1996 10:36 xe0557 broke 1 wfr CMP_SCRUB1.a1 32 lines
62.408Wed Oct 09 1996 09:25 4 wafer overpolish 3 scrap JD0533 28 lines
62.416Mon Oct 14 1996 07:45 JL0527 high STdev ILD1 on CMP.B1 39 lines
62.417Mon Oct 14 1996 07:45 JD0560 high stdev ILD1 CMP.B3 32 lines
62.430Sun Oct 27 1996 07:20 xd0559 high range and STdev 37 lines
62.431Sun Oct 27 1996 07:21 Jd0566 2 broken wfrs cmp.b3 58 lines
62.432Mon Oct 28 1996 07:45 JD0550 low pre-thickness mean ILD3 CMP.B3 25 lines
62.433Mon Oct 28 1996 07:45 CMP.B2 JD0549 ILD3 high range 36 lines
62.434Mon Oct 28 1996 07:33 JD0550 low pre-thickness mean ILD3 CMP.B3 25 lines
62.435Mon Oct 28 1996 07:34 CMP.B2 JD0549 ILD3 high range 36 lines
62.438Sun Nov 03 1996 07:33 jd0553 broke 2 wfrs cmp.b2 35 lines
62.440Mon Nov 04 1996 08:01 jd0455 i wfr over polish 48 lines
62.442Wed Nov 06 1996 03:55 JD0562 high pre step ht. ILD3 22 lines
62.446Sun Nov 10 1996 08:19 popped chart CMP.B1 THK_ILD2_PST THK_SD_5 = 16.6 UCL:16 34 lines
62.447Sun Nov 17 1996 08:48 JD0589 high stdev ILD3 CMP.B3 34 lines
62.449Tue Nov 19 1996 05:39 JL0656 Popped Stdev chart, THK_ILD1_PST THK_SD_5 34 lines
62.450Tue Nov 19 1996 05:47 JD0651 Popped Stdev chart, THK_ILD1_PST THK_SD_5 34 lines
62.456Tue Nov 26 1996 07:28 jd0664 slightly low thickness mean ILD1 35 lines
62.464Wed Dec 04 1996 07:39 2 wafers scrapped (crash) CMP.A2 49 lines
62.465Wed Dec 04 1996 07:42 4 wafers over polish, scrapped out < 3400K 68 lines
62.471Mon Dec 09 1996 04:53 XD0622 over dep CMP PMD rework 23 lines
62.472Mon Dec 09 1996 06:04 XD0618 - 1981 CMP AFTER ILD1 BROKE 2 WAFERS ON CMP.A2 52 lines
62.473Tue Dec 10 1996 07:38 XD0625 2 wafers lost on CMP.A1 84 lines
62.478Sun Dec 15 1996 07:32 xd0759 low incoming step height 93 lines
62.487Sun Dec 22 1996 08:29 jd0652 1 wfr overpolish 85 lines
62.491Tue Dec 31 1996 08:19 jd0688 4 wafers scrapped, CMP.B2 59 lines
62.495Mon Jan 06 1997 07:26 1 wfr broke CMP.B2 Jd0709 41 lines
62.501Wed Jan 15 1997 07:22 2 wafers over polish ILD3, lot# JD0710 26 lines
62.512Sun Jan 26 1997 03:52 CMP.B3 broke 1 wafer on wafer track JL0824 54 lines
62.513Sun Jan 26 1997 03:53 CMP.B2 broke 1 wafer on scrubber JD0789 54 lines
62.515Mon Jan 27 1997 08:14 xd0585 2 wafer broken cmp.a2 98 lines
62.516Mon Jan 27 1997 08:15 XE0902 incoming step height low ILD2 31 lines
62.519Wed Jan 29 1997 08:29 JL0884 5 wafer scrapped overpolish 27 lines
62.520Wed Jan 29 1997 08:30 JL0822 1 wafer scrapped overpolish 24 lines
62.549Sun Feb 16 1997 05:59 JL0901 15 wafers overpolish 124 lines
62.550Sun Feb 16 1997 06:47 JL1002 high stdev PMD, CMP.B1 38 lines
62.551Sun Feb 16 1997 06:48 JL0976, 20 wafers over polish ILD1, CMP.B1 124 lines
62.553Mon Feb 17 1997 05:31 JD0897 1 scrap wafer over polish CMP.B3,ILD2 43 lines
62.611Sun Mar 23 1997 04:58 JL1160 overpolish 39 lines
62.612Sun Mar 23 1997 04:58 jl1128 overpolish 37 lines
62.677Thu May 29 1997 09:12 jd1561 7 overpolish 1 scrap 22 lines
62.679Fri May 30 1997 08:23 JD1401 several wafers over polish. ILD3 41 lines
62.680Fri May 30 1997 08:24 xb1342 all wafers overpolish PMD 40 lines

Additional information

First Post:Sun Jun 23 1996
Last Post:Fri May 30 1997
# Topics:0
# Replies:79
# We have note bodies for:79
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