TOPIC | 62.0 | Process Excursion (PEX) for CMP |
| 62.169 | Sun Apr 21 1996 11:24 | 5 wafers over polished at IDLE2 | 17 lines |
| 62.319 | Mon Jul 22 1996 15:31 | JD0342 - two wafers scrapped @IDLE2 over polish | 24 lines |
| 62.322 | Wed Jul 31 1996 20:01 | 2 WAFERS SCRAPPED AT PMD SYSTEM CRASHED... | 25 lines |
| 62.439 | Sun Nov 03 1996 12:19 | JD0581 THK_ILD3 - 16 wafers overpolished | 25 lines |
| 62.448 | Sun Nov 17 1996 19:09 | JD0617 - 2 wfrs scrapped due to crash | 49 lines |
| 62.451 | Tue Nov 19 1996 10:59 | XD0595 HAD 3 WAFERS OVER POLISHED | 30 lines |
| 62.474 | Tue Dec 10 1996 17:16 | Jd0615 - 2 wafer overpolished 1 wafer scrapped | 21 lines |
| 62.475 | Tue Dec 10 1996 17:17 | XD0624 - 4 wafer overpolished | 21 lines |
| 62.479 | Mon Dec 16 1996 11:13 | JD0688 1 wafer scrapped | 25 lines |
| 62.480 | Mon Dec 16 1996 18:42 | JD0708 Had high incoming stp height | 29 lines |
| 62.482 | Tue Dec 17 1996 14:43 | JD0733 2 wafers overpolished | 23 lines |
| 62.497 | Sun Jan 12 1997 19:42 | JL0841 HIGH INCOMING STEP HEIGHT @PMD | 32 lines |
| 62.498 | Mon Jan 13 1997 12:18 | JL0845 2 WAFERS SCRAPPED/2 OVERPOLISHED @PMD | 69 lines |
| 62.499 | Tue Jan 14 1997 14:33 | JL0848 HIGH INCOMMING STEP HEIGHT @PMD | 28 lines |
| 62.500 | Tue Jan 14 1997 15:32 | JD0765 3 wafers scrapped (overpolished) | 27 lines |
| 62.503 | Wed Jan 15 1997 11:20 | JL0820 high incoming step height @PMD | 32 lines |
| 62.504 | Wed Jan 15 1997 11:39 | JL0849 high incoming step height @PMD | 32 lines |
| 62.507 | Tue Jan 21 1997 11:38 | JL0884 HIGH INCOMING STEP HEIGHT @PMD | 31 lines |
| 62.517 | Mon Jan 27 1997 15:15 | XE0609 - 5 wafers over polished | 28 lines |
| 62.530 | Mon Feb 03 1997 15:56 | JL0938 High incoming step height @pmd | 33 lines |
| 62.535 | Sun Feb 09 1997 12:57 | JL0672 1 wafer scrapped overpolished | 25 lines |
| 62.536 | Sun Feb 09 1997 19:29 | High SD @PMD - JL09696 | 32 lines |
| 62.537 | Mon Feb 10 1997 15:53 | JL0978 High incoming step height @PMD | 33 lines |
| 62.538 | Mon Feb 10 1997 16:43 | JL0938- 3 wafers overpolished- update from b-shift | 37 lines |
| 62.539 | Mon Feb 10 1997 17:46 | JL0944 - 5 WAFERS OVERPOLISHED @ILD1 | 36 lines |
| 62.540 | Mon Feb 10 1997 18:19 | JL0907 - All wafers overpolished @ILD2 | 59 lines |
| 62.541 | Mon Feb 10 1997 18:57 | JD0960 - 2 wafers scrapped due to crash on A2 | 25 lines |
| 62.542 | Tue Feb 11 1997 12:59 | JL0979 - High step height at PMD | 33 lines |
| 62.543 | Tue Feb 11 1997 14:23 | XE0597 - 13 wafers overpolished @ILD1 | 69 lines |
| 62.544 | Wed Feb 12 1997 16:14 | JL0972 - Slightly high incoming step height @pmd | 33 lines |
| 62.564 | Sun Feb 23 1997 17:20 | XE0949 - 2 wafers scrapped due to chips | 23 lines |
| 62.565 | Sun Feb 23 1997 17:35 | JD0935 - 1 wafer over polished @ILD2 | 39 lines |
| 62.566 | Sun Feb 23 1997 18:05 | XE0614 - 4 wafers over polished | 36 lines |
| 62.567 | Sun Feb 23 1997 18:19 | JL1001 - 2 wafers overpolished @ILD1 | 36 lines |
| 62.568 | Sun Feb 23 1997 19:34 | JL1003 - 1 wafer with high sd | 36 lines |
| 62.570 | Tue Feb 25 1997 12:35 | JD0992 - 3 wafers with high stddev | 35 lines |
| 62.578 | Sun Mar 02 1997 09:05 | JL1090 - Slightly high incoming step heights @PMD | 29 lines |
| 62.579 | Sun Mar 02 1997 11:16 | JL1062 - High incoming Step height @PMD | 29 lines |
| 62.580 | Sun Mar 02 1997 15:26 | JD1118 - HAD HIGH OUTGOING RANGE @ILD3 | 40 lines |
| 62.581 | Sun Mar 02 1997 18:58 | JD0930 - 2 wafers overpolished @ILD2 | 32 lines |
| 62.582 | Mon Mar 03 1997 13:55 | JL1081 - High Step Heights @PMD | 29 lines |
| 62.587 | Sun Mar 09 1997 14:52 | JL1088 - 8 wafers overpolished @PMD | 51 lines |
| 62.588 | Sun Mar 09 1997 15:05 | JL1087 - 9 wafers overpolished @PMD | 56 lines |
| 62.589 | Sun Mar 09 1997 15:20 | JL1089 - High incoming step heights @PMD | 28 lines |
| 62.590 | Sun Mar 09 1997 16:39 | XD0805 - LOW INCOMING STEP HEIGHTS @ILD3 | 28 lines |
| 62.591 | Sun Mar 09 1997 18:59 | JL1123 - High incoming step heights @PMD | 28 lines |
| 62.593 | Mon Mar 10 1997 11:21 | JL1095 - Slightly high incoming step heights @PMD | 29 lines |
| 62.594 | Mon Mar 10 1997 11:34 | JL1099 - Slightly high incoming step heights @PMD | 29 lines |
| 62.595 | Mon Mar 10 1997 18:32 | JL1100 had high incoming step heights @PMD | 28 lines |
| 62.598 | Wed Mar 12 1997 09:34 | JL1122 - 2 wafers had high SD after PMD | 33 lines |
| 62.599 | Wed Mar 12 1997 17:13 | XD1024 - 5 wafers scrapped @ILD1 | 35 lines |
| 62.600 | Wed Mar 12 1997 17:25 | XM1027 - SLIGHTLY LOW INCOMING STEP HEIGHTS @PMD | 28 lines |
| 62.618 | Sun Mar 30 1997 16:01 | JL1221 - 2 wafers slightly overpolished @ILD1 | 45 lines |
| 62.623 | Sun Apr 06 1997 12:36 | CMP.B2 - Scrapped 2 wafers due to a crash | 63 lines |
| 62.624 | Mon Apr 07 1997 15:56 | JD1178 - 3 wafers overpolished | 25 lines |
| 62.625 | Mon Apr 07 1997 18:13 | CMP.A2 - 3 wafers scrapped due to crash. | 26 lines |
| 62.626 | Mon Apr 07 1997 18:22 | JD1237 - 5 wafers overpolished @ILD1 | 29 lines |
| 62.627 | Tue Apr 08 1997 20:33 | XD1109 - 3 wafers Broken on CMP.B3 | 25 lines |
| 62.628 | Wed Apr 09 1997 20:15 | JD1108 - High STD & Range | 34 lines |
| 62.633 | Sun Apr 13 1997 12:56 | JL1270 - HIGH RANGE FOR THE STD DEV @ILD1 | 38 lines |
| 62.656 | Mon May 05 1997 14:04 | JD1384 - 9 WAFERS OVERPOLISHED & HIGH THK_SD_5 | 57 lines |
| 62.658 | Tue May 06 1997 18:33 | XD1116 - 6 wafers scrapped due to overpolish | 32 lines |
| 62.661 | Sun May 11 1997 13:49 | XD1482 - 2 wafers overpolished @PMD | 24 lines |
| 62.662 | Sun May 11 1997 17:51 | CMP.B3 - 3 WAFERS SCRAPPED DUE TO A CRASH | 63 lines |