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Posting history for user YIELD::PHESTER

205 notes across 1 conferences

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Posts		Conference Title
asdg::cmp205CMP

Conference asdg::cmp (CMP)

205 posts
TOPIC 62.0 Process Excursion (PEX) for CMP
62.46Sat Jan 20 1996 13:12 Pex for XD0335 at THK_ILD1_PRE 14 lines
62.58Thu Jan 25 1996 10:51 Lot JD0054 PEX @ILD3... 28 lines
62.59Thu Jan 25 1996 18:42 XD0334 PEX @ILD3 19 lines
62.60Thu Jan 25 1996 18:49 Xl0314 PEX at ILD2 19 lines
62.65Thu Feb 01 1996 16:07 YD0355 PEX AT ILD2 18 lines
62.72Sat Feb 10 1996 13:44 XL0346 PEX AT ILD3 18 lines
62.81Thu Feb 15 1996 18:58 JD0065 HIGH OUTGOING RANGE AT ILD3 20 lines
62.92Sat Feb 24 1996 09:28 JD0083 LOW INCOMING AT ILD3 20 lines
62.93Sat Feb 24 1996 18:10 XD0380 PEX AT ILD1 OUTGOING 22 lines
62.96Fri Mar 01 1996 10:24 JD0085 PEX @ ILD2 22 lines
62.97Fri Mar 01 1996 10:36 JD0078 PEX @ILD3 19 lines
62.98Fri Mar 01 1996 10:38 JD0075 PEX @ILD3 19 lines
62.105Wed Mar 06 1996 19:02 LOT XD0409 PEX @ STEP PMD 24 lines
62.106Thu Mar 07 1996 13:34 LOT JD0076 LOW INCOMING THICKNESS A ILD3 27 lines
62.109Fri Mar 08 1996 17:13 JD0106 LOW INCOMING @ILD3 25 lines
62.111Sat Mar 09 1996 17:31 XD0375 LOW INCOMING THICKNESS ILD3 23 lines
62.112Sat Mar 09 1996 17:37 XD0357 LOW INCOMING @ILD3 23 lines
62.114Thu Mar 14 1996 18:16 JD0091 LOW INCOMING @ILD3 25 lines
62.116Fri Mar 15 1996 19:13 LOT JD0089 LOW INCOMING @ILD3 27 lines
62.117Sat Mar 16 1996 18:15 XD0396 LOW INCOMING 26 lines
62.118Sat Mar 16 1996 18:59 24 lines
62.119Sat Mar 16 1996 19:03 YD0152 Low outgoing At ILD2 24 lines
62.124Sat Mar 23 1996 18:34 XD0410 LOW INCOMING AT ILD3 26 lines
62.128Fri Mar 29 1996 19:29 JD0114 High incoming @ILD3 29 lines
62.129Fri Mar 29 1996 19:37 JD0110 low incoming @ILD3 25 lines
62.130Sat Mar 30 1996 17:49 XD0440 LOW STEP INCOMING @PMD 24 lines
62.133Wed Apr 03 1996 20:34 JD0144A1 LOW INCOMING @ILD2 27 lines
62.135Thu Apr 04 1996 14:26 YDO154 LOW OUTGOING @ILD3 25 lines
62.136Thu Apr 04 1996 14:26 XD0406 LOW OUTGOING @ILD3 25 lines
62.137Thu Apr 04 1996 20:08 JD0158 low incoming @PMD 27 lines
62.139Fri Apr 05 1996 19:31 JL0162 High Incoming Step @PMD 27 lines
62.140Fri Apr 05 1996 19:42 XD0442 Low incoming step @PMD 27 lines
62.141Fri Apr 05 1996 19:45 JD0127 Low incoming @ILD3 27 lines
62.142Sat Apr 06 1996 15:36 LD0150 low incoming @ILD3 25 lines
62.144Sat Apr 13 1996 10:30 JD0142 high range outgoing @ILD2 23 lines
62.145Sat Apr 13 1996 10:45 XD0443 low incoming @ILD1 23 lines
62.146Sat Apr 13 1996 10:53 JD0144A1 Low incoming @ILD2 26 lines
62.147Sat Apr 13 1996 11:08 XD0443 low outgoing @ILD1 24 lines
62.148Sat Apr 13 1996 11:20 JD0166 low incoming @ILD2 25 lines
62.149Sun Apr 14 1996 16:17 XD0410 LOW INCOMING @ILD3 an old PEX I missed 24 lines
62.150Sun Apr 14 1996 16:50 JD0160 LOW INCOMING @ILD1 26 lines
62.155Wed Apr 17 1996 20:22 ZD0111 High incoming @ILD3 25 lines
62.162Fri Apr 19 1996 12:25 JD0207 LOW INCOMING @ILD1 23 lines
62.163Fri Apr 19 1996 12:26 JD0145 LOW INCOMING @ILD1 24 lines
62.164Fri Apr 19 1996 12:27 XL0433 LOW INCOMING ILD2 25 lines
62.165Fri Apr 19 1996 12:27 JL0162 LOW INCOMING @ILD1 26 lines
62.166Fri Apr 19 1996 12:28 JD0173 LOW INCOMING @ILD3 27 lines
62.167Fri Apr 19 1996 12:28 JD0142 LOW INCOMING @ILD3 25 lines
62.168Fri Apr 19 1996 12:29 XL0428 LOW INCOMING @ILD3 26 lines
62.171Thu Apr 25 1996 17:13 JD0155 Low incoming @ILD3..... 27 lines
62.172Thu Apr 25 1996 17:20 JD0191 Low outgoing @PMD...... 25 lines
62.173Thu Apr 25 1996 17:26 XD0449 Low incoming step @PMD.... 28 lines
62.174Thu Apr 25 1996 17:36 JL0162 Low incoming step @ILD2..... 28 lines
62.175Fri Apr 26 1996 20:24 XL0429 low outgoing @ILD3 27 lines
62.176Sat Apr 27 1996 13:42 JD0145 low incoming @ILD3 27 lines
62.177Sat Apr 27 1996 13:52 JD0145 High incoming step @ILD3 27 lines
62.179Wed May 01 1996 15:38 JD0191 Low incoming @ILD1..... 29 lines
62.180Wed May 01 1996 16:11 JD0211 low incoming step @PMD 25 lines
62.181Wed May 01 1996 20:42 JD0203 two wafers scrapped due to crash... 23 lines
62.183Fri May 03 1996 15:17 XD0443 high outgoing range @ILD3 25 lines
62.184Fri May 03 1996 15:27 YD0160 low outgoing @ILD3 25 lines
62.186Sat May 04 1996 14:15 JD0194 low incoming @ILD1 27 lines
62.187Sat May 04 1996 17:17 JD0174 high outgoing range @ILD2 28 lines
62.188Sat May 04 1996 17:32 JD0197 Low incoming @ILD1 29 lines
62.196Thu May 09 1996 16:23 JD0208 low incoming @ILD1 28 lines
62.197Thu May 09 1996 16:35 JD0202 low incoming @ILD1 27 lines
62.198Thu May 09 1996 16:38 JD0215 low incoming @ILD1 28 lines
62.203Fri May 10 1996 18:04 JD0233 high incoming step @PMD.... 27 lines
62.204Fri May 10 1996 19:56 JD0234 high incoming avg step @PMD 27 lines
62.210Sat May 11 1996 16:24 JD0183 low incoming @ILD3 30 lines
62.211Sat May 11 1996 19:32 JD0211 low incoming @ILD3 28 lines
62.216Wed May 15 1996 20:17 JD0181 low incoming @ILD3 31 lines
62.217Wed May 15 1996 20:21 JD0182 low incoming @ILD3 28 lines
62.220Thu May 16 1996 09:50 JD0212 low incoming @ILD2 25 lines
62.221Thu May 16 1996 09:55 XD0449 high incoming range @ILD2 26 lines
62.222Thu May 16 1996 16:05 JD0181 high outgoing range.... 34 lines
62.223Thu May 16 1996 16:12 JD0223 low incoming @ILD1 28 lines
62.224Thu May 16 1996 16:20 JD0230 low incoming @ILD1 27 lines
62.225Thu May 16 1996 16:28 JD0182 high outgoing range @ILD3 32 lines
62.226Thu May 16 1996 16:32 JD0225 low incoming @ILD1 25 lines
62.227Fri May 17 1996 17:02 JD0220 5 wafers scrapped 27 lines
62.228Fri May 17 1996 17:13 JD0186 low incoming @ILD3 28 lines
62.229Fri May 17 1996 17:18 JD0229 low incoming @ILD1 25 lines
62.230Fri May 17 1996 17:25 JD0246 one wafer over-polished @PMD 29 lines
62.231Fri May 17 1996 17:41 JD0220 low incoming @ILD3 30 lines
62.232Fri May 17 1996 20:30 JD0191 low incoming @ILD3 32 lines
62.233Sat May 18 1996 16:29 JD0190 low incoming @ILD3 29 lines
62.234Sat May 18 1996 16:32 XD0460 Low incoming step @PMD 28 lines
62.239Thu May 23 1996 20:34 JD0263 high incoming step @PMD 26 lines
62.245Fri May 24 1996 16:34 JD0240 low incoming @ILD1 28 lines
62.247Sat May 25 1996 14:04 JD0266 low incoming step @PMD 28 lines
62.248Sat May 25 1996 16:39 XD0469 one wafer scrapped due to over-polish.. 24 lines
62.251Wed May 29 1996 19:31 JD0252 Low incoming @ILD1 29 lines
62.253Thu May 30 1996 15:17 JD0215 low incoming @ILD3 29 lines
62.254Thu May 30 1996 15:30 JD0205 low incoming @ILD3 29 lines
62.255Fri May 31 1996 09:50 JD0259 low incoming @ILD1 29 lines
62.256Fri May 31 1996 19:16 JD0276 low incoming @ILD1 29 lines
62.257Fri May 31 1996 19:27 JD0276 low incoming @ILD1 30 lines
62.258Fri May 31 1996 19:55 JD0276 low outgoing @ILD1 31 lines
62.261Sat Jun 01 1996 16:59 JD0257 low incoming @ILD1 28 lines
62.262Sat Jun 01 1996 20:41 JD0233 high outgoing range @ILD3 30 lines
62.267Fri Jun 07 1996 12:09 JD0264 low incoming @ILD1 29 lines
62.268Fri Jun 07 1996 12:20 JD0228 low incoming @ILD3 29 lines
62.269Sat Jun 08 1996 12:00 JD0270 low incoming @ILD1 27 lines
62.270Sat Jun 08 1996 12:04 JD0239 low incoming @ILD3 28 lines
62.271Sat Jun 08 1996 16:07 JD0229 low incomiung @ILD3 29 lines
62.274Wed Jun 12 1996 15:29 JD0248 High outgoing range @ILD3 28 lines
62.275Thu Jun 13 1996 20:10 JD0289 low incoming @ILD1 27 lines
62.278Fri Jun 14 1996 17:59 JD0293 low incoming @ILD1 26 lines
62.279Fri Jun 14 1996 18:54 JD0266 LOW INCOMING/HIGH RANGE @ILD2 31 lines
62.280Sat Jun 15 1996 10:12 JD0251 low incoming @ILD3 28 lines
62.281Sat Jun 15 1996 19:52 XD0482 low incoming step @PMD 29 lines
62.282Sat Jun 15 1996 20:37 JD0240 low incoming @ILD3 29 lines
62.285Thu Jun 20 1996 16:26 JD0327 - two wafers scrapped @PMD due to crash. 27 lines
62.286Fri Jun 21 1996 15:54 JL0356 High incoming range @PMD 26 lines
62.290Wed Jun 26 1996 14:32 JD0281 high incoming step height @ILD3 30 lines
62.291Wed Jun 26 1996 17:24 XD0485 low incoming range @PMD 30 lines
62.292Thu Jun 27 1996 14:32 JD0324 high incoming thickness @ILD2 28 lines
62.293Fri Jun 28 1996 11:18 JD0298 HIGH SD @ILD2 POST 29 lines
62.294Fri Jun 28 1996 18:21 JD0343 high incoming range @PMD 28 lines
62.295Sat Jun 29 1996 16:15 JD0277 highg incoming step @ILD3 29 lines
62.296Sat Jun 29 1996 16:17 XD0481 CMP PEX - High incoming thickness @ILD2 28 lines
62.298Sun Jun 30 1996 14:58 JD0292 low outgoing thickness @ILD3 29 lines
62.304Wed Jul 10 1996 11:29 XD0492 high incoming range @ILD2 29 lines
62.305Wed Jul 10 1996 12:44 JD0357 high removal rate @PMD 29 lines
62.306Wed Jul 10 1996 12:51 XD0441B high incoming thickness & range @ILD1 33 lines
62.307Wed Jul 10 1996 18:27 JD0354 LOW INCOMING STEP HEIGHT @PMD 29 lines
62.310Fri Jul 12 1996 17:39 JD0363 high incoming range @PMD 28 lines
62.311Fri Jul 12 1996 17:45 JD0364 high incoming range @PMD 27 lines
62.312Fri Jul 12 1996 17:51 JDO364 LOW INCOMING STEP @PMD 28 lines
62.320Sat Jul 27 1996 17:41 JL0418C high SD on one wafer POST @ILD2 26 lines
62.323Thu Aug 01 1996 20:11 JD0354 High outgoing range @ILD3 28 lines
62.324Thu Aug 01 1996 20:16 JD0408 SLIGHTLY OVER-POLISHED @ILD2 27 lines
62.325Sat Aug 03 1996 15:57 JL0404 low outgoing thickness @ILD1 29 lines
62.328Fri Aug 09 1996 11:16 XD0502 OVER-POLISHED @ILD2 27 lines
62.329Fri Aug 09 1996 11:17 JD0371 HIGH OUTGOING RANGE @ILD2 28 lines
62.331Thu Aug 15 1996 14:55 XD0498 LOW INCOMING STEP @PMD 28 lines
62.332Thu Aug 15 1996 15:35 JL0410 HIGH OUTGOING RANGE @PMD 28 lines
62.333Thu Aug 15 1996 15:39 XD0499 HIGH INCOMING RANGE @ILD1 26 lines
62.334Thu Aug 15 1996 15:51 XD0354 LOW OUTGOING THICKNESS @ILD1 29 lines
62.335Thu Aug 15 1996 15:56 JD0358 LOW OUTGOING @ILD1 29 lines
62.336Thu Aug 15 1996 16:00 JD0368 LOW INCOMING STEP @ILD1 27 lines
62.341Fri Aug 16 1996 09:27 JL0477A low incoming step @PMD 25 lines
62.342Fri Aug 16 1996 17:51 JL0437 high incoming range @ILD1 28 lines
62.349Wed Aug 21 1996 15:12 JD0444 high incoming step @ILD1 27 lines
62.350Fri Aug 23 1996 18:55 JD0441 LOW INCOMING STEP @PMD 28 lines
62.357Thu Aug 29 1996 20:15 JL0435 OVER-POLISHED @ILD2 45 lines
62.358Fri Aug 30 1996 18:22 JL0457 LOW INCOMING STEP @ILD1 27 lines
62.360Thu Sep 05 1996 15:55 XD0536 LOW INCOMING STEP @PMD 27 lines
62.370Sat Sep 14 1996 13:06 XE0450 LOW INCOMING STEP @PMD 31 lines
62.378Wed Sep 18 1996 12:09 JL0514 LOW STEP - INCOMING PMD 29 lines
62.381Thu Sep 19 1996 16:06 JD0377 one wafer scrapped - over polish @ILD4 36 lines
62.382Fri Sep 20 1996 12:50 JD0501 OVER-POLISH @ILD1 31 lines
62.383Sat Sep 21 1996 14:36 JD0481 LOW INCOMING STEP @ILD3 30 lines
62.389Thu Sep 26 1996 20:45 XEO552 LOW INCOMING STEP @PMD 28 lines
62.390Fri Sep 27 1996 18:49 JD0468 HIGH OUTGOING SD @ILD3 45 lines
62.392Sat Sep 28 1996 09:17 JL0488 LOW INCOMING STEP @ILD1 29 lines
62.393Sat Sep 28 1996 17:06 JD0500 OPEN PEX - 1 WAFER SCRAPPED 35 lines
62.394Sat Sep 28 1996 17:12 XE0530 high outgoing range/SD @ILD3.... 64 lines
62.399Thu Oct 03 1996 11:16 JD0526 SLIGHT OVER-POLISH @PMD 47 lines
62.400Thu Oct 03 1996 18:38 JD0533 HIGH OUTGOING SD @ILD2 42 lines
62.401Sat Oct 05 1996 20:01 JD0557 LOW INCOMING STEP HEIGHT 30 lines
62.402Sat Oct 05 1996 20:06 JD0548 two wafers scrapped 27 lines
62.403Sat Oct 05 1996 20:11 XE0541 HIGH OUTGOING SD @ILD2 37 lines
62.404Sat Oct 05 1996 20:15 JL0517 high outgoing SD @ILD2 35 lines
62.410Sat Oct 12 1996 18:12 XD0534 LOW OUTGOING THICKNESS @PMD 28 lines
62.411Sat Oct 12 1996 18:15 JL0531 HIGH OUTGOING SD @ ILD2 38 lines
62.412Sat Oct 12 1996 18:17 JD0548 HIGH OUTGOING SD @ILD1 33 lines
62.413Sat Oct 12 1996 18:19 XD0558 HIGH OUTGOING SD @ILD2 39 lines
62.421Fri Oct 18 1996 19:19 JD0533 HIGH OUTGOING SD @ILD2 36 lines
62.422Fri Oct 18 1996 19:23 JD0526 HIGH INCOMING STEP @ILD2 29 lines
62.423Fri Oct 18 1996 19:27 XD0513 HIGH OUTGOING SD @ILD3 31 lines
62.424Fri Oct 18 1996 19:32 XD0441 three wafers scrapped 25 lines
62.427Fri Oct 25 1996 19:31 XD0561 2 WAFERS SCRAPPED DUE TO CRASH. 30 lines
62.428Fri Oct 25 1996 19:37 XD0589 low outgoing thickness @ILD1 31 lines
62.429Sat Oct 26 1996 20:12 JD0574 high SD @ILD1 30 lines
62.436Wed Oct 30 1996 19:36 JL0648 low outgoing thickness @ILD1 40 lines
62.437Wed Oct 30 1996 19:36 XD0590 low outgoing thickness @PMD 41 lines
62.443Thu Nov 07 1996 18:46 JD0566 high outgoing range @ILD3 28 lines
62.444Thu Nov 07 1996 18:46 JL0594 high outgoing range & SD @ILD2 28 lines
62.445Thu Nov 07 1996 18:46 XD0581 over polished @ILD3 29 lines
62.452Thu Nov 21 1996 11:04 JL0642 HIGH RANGE @ILD1 31 lines
62.453Fri Nov 22 1996 08:28 JD0591 High SD @ILD3 28 lines
62.454Sat Nov 23 1996 15:02 JL0671 HIGH INCOMING STEP @PMD 25 lines
62.455Sat Nov 23 1996 16:35 JL0518 High outgoing range @ILD2 31 lines
62.459Sat Nov 30 1996 08:10 JD0667 HIGH INCOMING STEP HEIGHT @ILD1 28 lines
62.460Sat Nov 30 1996 08:16 XE0608 LOW INCOMING STEP HEIGHT @PMD 30 lines
62.461Sat Nov 30 1996 19:10 JL0673 overpolished @ILD1 32 lines
62.462Sat Nov 30 1996 19:13 XD0560 OVERPOLISHED @ILD3 32 lines
62.469Thu Dec 05 1996 16:28 XM0587 low thickness and high range outgoing @ILD2 49 lines
62.470Fri Dec 06 1996 10:33 JD0633 SOME WAFERS OVER-POLISHED @ILD3 48 lines
62.477Sat Dec 14 1996 13:26 JL0706 high SD @ILD2 41 lines
62.485Thu Dec 19 1996 13:35 XD0632 2 WAFERS SCRAPPED @PMD DUE TO CRASH 110 lines
62.486Thu Dec 19 1996 13:36 JD0710 2 Wafers scrapped @PMD 92 lines
62.493Thu Jan 02 1997 08:43 XE0756 LOW INCOMING STEP HEIGHT @PMD 27 lines
62.494Thu Jan 02 1997 13:23 JD0687 HIGH INCOMING STEP @ILD3 29 lines
62.617Fri Mar 28 1997 11:16 JD1181 HIGH SD OUTGOING @PMD 41 lines
62.620Thu Apr 03 1997 14:40 JD1176 TWO WAFERS SCRAPPED DUE TO CRASH ON .B1 26 lines
62.649Fri Apr 25 1997 09:30 JD1298 slight over polish @ILD2 43 lines
62.650Fri Apr 25 1997 10:31 JD1326 high range/SD @ILD1 46 lines
62.653Sat May 03 1997 19:39 JD1399 slight overpolish @ILD2 37 lines
62.668Sat May 17 1997 20:02 JL1528 4 WAFERS SCRAPPED DUE TO OVER-POLISH 27 lines
62.674Sat May 24 1997 09:58 XE1025 slightly low outgoing thickness @ILD2 36 lines
62.675Sat May 24 1997 20:27 XD1383 low outgoing thickness @ ILD3 41 lines
62.678Thu May 29 1997 17:40 JD1561 revised PEX - 7 wafers overpolish @ILD1 31 lines

Additional information

First Post:Sat Jan 20 1996
Last Post:Thu May 29 1997
# Topics:0
# Replies:205
# We have note bodies for:205
Total memory used by this script: 850,136 (2,097,152)