TOPIC | 62.0 | Process Excursion (PEX) for CMP |
| 62.17 | Mon Dec 04 1995 04:33 | JDOO44 PRE CMP STEP HEIGHT AT PMD | 40 lines |
| 62.18 | Tue Dec 05 1995 06:46 | JD0035 pre CMP thickness at PMD | 32 lines |
| 62.20 | Sun Dec 10 1995 06:28 | XA0215 pre-CMP thickness at PMD | 37 lines |
| 62.21 | Tue Dec 12 1995 00:45 | XD0275 pre CMP planarity at ILD3 | 43 lines |
| 62.25 | Sun Dec 17 1995 22:28 | XL0338 pre CMP thickness at PMD | 34 lines |
| 62.26 | Sun Dec 17 1995 22:47 | Xd0316 high range pre CMP at ILD1 | 35 lines |
| 62.27 | Mon Dec 18 1995 03:38 | JD0055 pre CMP thickness at PMD | 35 lines |
| 62.28 | Tue Dec 19 1995 00:28 | JD0054 pre CMP planarity at PMD | 34 lines |
| 62.29 | Tue Dec 19 1995 23:08 | XL0338 thickness at ILD1 incoming | 34 lines |
| 62.32 | Wed Jan 03 1996 05:47 | XL0338 pre-CMP step height at ILD2 | 37 lines |
| 62.34 | Mon Jan 08 1996 02:06 | JD0043 pre CMP thickness low at ILD3 | 34 lines |
| 62.39 | Tue Jan 16 1996 03:52 | XL0327 pre-CMP thickness at ILD3 | 35 lines |
| 62.47 | Sun Jan 21 1996 02:31 | JD0065 high range at pre-CMP PMD | 32 lines |
| 62.49 | Sun Jan 21 1996 23:27 | XL0346 pre thickness low at ILD1 | 34 lines |
| 62.50 | Sun Jan 21 1996 23:38 | XD0341 pre thickness low at ILD1 | 35 lines |
| 62.51 | Mon Jan 22 1996 01:51 | XD0356 pre CMP range at ILD1 | 32 lines |
| 62.52 | Mon Jan 22 1996 05:07 | JD0070 overpolished at PMD | 64 lines |
| 62.53 | Mon Jan 22 1996 05:51 | JD0052 pre-thickness low at ILD3 | 33 lines |
| 62.62 | Sun Jan 28 1996 04:40 | JD0063 pre thickness low at ILD2 | 34 lines |
| 62.63 | Sun Jan 28 1996 22:38 | XD0356 post-CMP thickness low at ILD2 | 44 lines |
| 62.64 | Mon Jan 29 1996 05:23 | JD0068 pre-CMP thickness at ILD1 | 34 lines |
| 62.73 | Sun Feb 11 1996 23:45 | XD0362 post-CMP thin at ILD1 | 68 lines |
| 62.74 | Mon Feb 12 1996 05:35 | XD0348, JD0071 post CMP thickness low ILD2 | 35 lines |
| 62.77 | Wed Feb 14 1996 07:01 | JD0074 pre-thickness low at ILD2 | 33 lines |
| 62.84 | Tue Feb 20 1996 02:10 | JD0088 pre-thickness low at ILD1 | 33 lines |
| 62.94 | Mon Feb 26 1996 03:24 | XD0373 high range at ILD2 | 51 lines |
| 62.100 | Sun Mar 03 1996 00:02 | YD0140 pre-thickness low at ILD3 | 35 lines |
| 62.102 | Mon Mar 04 1996 04:37 | JD0102 range high at ILD1 | 57 lines |
| 62.103 | Tue Mar 05 1996 05:41 | JD0111 pre step height at pmd | 35 lines |
| 62.126 | Wed Mar 27 1996 04:36 | XD0395 low thickness at ILD2 | 33 lines |