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Posting history for user SUBPAC::SMARTIN

99 notes across 1 conferences

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Posts		Conference Title
asdg::cmp99CMP

Conference asdg::cmp (CMP)

99 posts
TOPIC 62.0 Process Excursion (PEX) for CMP
62.9Wed Nov 15 1995 04:41 PEX FOR INCOMING PMD ON PROFILER.A1 TOO LOW 19 lines
62.13Wed Nov 29 1995 03:27 PEX ILD2 INCOMING THK HIGH 18 lines
62.15Sat Dec 02 1995 01:41 PEX FOR LOT XA0162, WAFER BREAKAGE 35 lines
62.16Sat Dec 02 1995 01:51 PEX FOR XD0318 THK_RG 18 lines
62.19Sat Dec 09 1995 06:21 PEX FOR JD0047 HEIGHT_ME INCOMING TO CMP 17 lines
62.30Wed Dec 20 1995 16:57 PEX FOR XL0338 (SCRATCHES) 33 lines
62.40Wed Jan 17 1996 17:58 PEX JD0061 PRE STEP HIEGHT IS HIGH 27 lines
62.48Sun Jan 21 1996 14:30 PEX FOR JD0061 INCOMMINGTHICKNESS TOO LOW FROM FILMS AGAIN 28 lines
62.54Mon Jan 22 1996 18:53 XL0347 HIGH RANGE 28 lines
62.68Sun Feb 04 1996 18:27 PEX JD0062 PRE ILD 2 READING WAS LOW 30 lines
62.69Mon Feb 05 1996 11:57 JD0063B LOW INCOMING THICKNESS 37 lines
62.75Mon Feb 12 1996 10:55 JD0072 OVER POLISH ON ILD2,5 WAFERS SCRAPED 34 lines
62.76Mon Feb 12 1996 11:08 JD0080 31 lines
62.85Tue Feb 20 1996 17:13 JD0084 HIGH THK AND HIGH RG 30 lines
62.95Wed Feb 28 1996 18:49 PEX FOR XD0358,RANGE SLIGHTLY HIGH 29 lines
62.101Sun Mar 03 1996 12:37 JD0080 PRE CMP THICKNESS LOW ILD3 37 lines
62.125Mon Mar 25 1996 18:14 XD0423 OVER POLISHED AT ILD1 34 lines
62.131Mon Apr 01 1996 16:13 LOW INCOMING THICKNESS XD0395 19 lines
62.263Mon Jun 03 1996 18:43 3 WAFERS SCRAPPED FROM LOT JD0223 DUE TO CRASH 24 lines
62.265Wed Jun 05 1996 19:12 PEX FOR CMP.A1 CRASH ON LOT JD0267 20 lines
62.284Wed Jun 19 1996 15:55 LOT JD0325 SCRAPPED FOR SEVERLY OVER POLISH AT PMD 27 lines
62.302Tue Jul 09 1996 11:09 CMP PEX FOR WAFER CRASH ON LOT YD0184 28 lines
62.303Tue Jul 09 1996 17:06 CMP PEX FOR TWO MORE WAFERS BROKE FROM LOT YD0184 32 lines
62.346Mon Aug 19 1996 18:32 CMP PEX XD0521 2 WAFERS BROKEN 24 lines
62.351Sun Aug 25 1996 15:30 CMP PEX FOR TWO BROKEN WAFERS FROM LOT YD0172 28 lines
62.352Sun Aug 25 1996 15:51 CMP PEX FOR OVER POLISH ON LOT JL0525 47 lines
62.353Sun Aug 25 1996 18:49 CMP PEX FOR SEVERLY OVER POLISH-5 WAFERS SCRAPPED 30 lines
62.374Sun Sep 15 1996 17:35 CMP PEX, TWO WAFERS TOASTED FROM XE0530 31 lines
62.376Mon Sep 16 1996 12:52 CMP PEX, 15 WAFERS SCRAPPED DUE TO OVER POLISH FROM LOTXD0542 34 lines
62.377Tue Sep 17 1996 18:25 CMP PEX, 5 WAFERS SCRAPPED ON LOT JD0412 28 lines
62.397Mon Sep 30 1996 15:55 CMP PEX,2 WAFERS CRASHED FROM LOT JD0524 46 lines
62.398Tue Oct 01 1996 17:25 CMP PEX,4 WAFERS OVER POLISHED ON LOT JL0509 26 lines
62.409Wed Oct 09 1996 18:29 CMP PEX, TWO WAFERS OVER POLISHED ON LOT JD0523 28 lines
62.414Sun Oct 13 1996 17:43 CMP PEX, A1 CRASHED, TWO WAFERS BROKEN ON JD0576 56 lines
62.415Sun Oct 13 1996 19:48 CMP PEX,2 WAFERS SCRATCHED TO DEATH ON JD0580 56 lines
62.418Tue Oct 15 1996 18:03 CMP PEX, TWO WAFERS BROKE ON XE0541 26 lines
62.425Sun Oct 20 1996 15:49 CMP PEX, 4 WAFERS OVER POLISHED ON JD0580 "HOT LOT" . 30 lines
62.426Mon Oct 21 1996 17:27 CMP PEX, 3 WAFERS OVER POLISHED ON JD0548 32 lines
62.441Mon Nov 04 1996 09:49 CMP PEX, 8 WAFERS OVER POLISHED ON XD0591 39 lines
62.457Tue Nov 26 1996 11:41 CMP PEX 3 WAFERS SCRAPPED DUE TO OVER POLISH 30 lines
62.458Tue Nov 26 1996 18:38 CMP PEX, 1 WAFER SCRAPPED DUE TO OVER POLISH 29 lines
62.463Mon Dec 02 1996 17:01 CMP PEX, 5 WAFERS SCRAPPED DUE TO TOOL FAILURE. 29 lines
62.466Wed Dec 04 1996 18:40 CMP PEX,5 WAFERS OVER POLISHED ON JD0664 29 lines
62.467Wed Dec 04 1996 18:51 CMP PEX,2 WAFERS OVER POLISHED ON XE0553 30 lines
62.468Wed Dec 04 1996 19:23 CMP PEX 3 WAFERS SCRAPPED DUE TO OVER POLISH ON JD0524 34 lines
62.488Sun Dec 22 1996 11:55 CMP PEX, TWO WAFERS BROKE ON CMP.A1 FOR JD0732 27 lines
62.489Mon Dec 23 1996 19:12 CMP PEX,2 WAFERS OVER POLISHED ON JD0742 36 lines
62.492Tue Dec 31 1996 10:55 CMP PEX.10 WAFERS SCRAPPED DUE TO OVER DEP at 2165 DEP_ILD1 2 51 lines
62.506Mon Jan 20 1997 08:50 CMP PEX,SLIGHTLY HIGH POST THK FOR JD0734 44 lines
62.514Sun Jan 26 1997 18:13 CMP PEX, HIGH INCOMING STEP HEIGHT FOR JL0880 31 lines
62.521Wed Jan 29 1997 09:42 CMP PEX,JL0906,HIGH INCOMING STEP HEIGHT. 31 lines
62.522Wed Jan 29 1997 11:36 CMP PEX,1 WAFER OVERPOLISHED ON JL0887 "B" SHIFT 45 lines
62.523Wed Jan 29 1997 15:18 CMP PEX,JL0941 HIGH INCOMING STEP HEIGHT 31 lines
62.524Wed Jan 29 1997 15:35 CMP PEX, 7 WAFERS OVER POLISHED FROM XD0781 48 lines
62.552Sun Feb 16 1997 09:38 CMP PEX FOR LOW INCOMING STEP HEIGHT FOR XE0903 33 lines
62.554Mon Feb 17 1997 11:22 Cmp pex for high incoming step height for JL1004 32 lines
62.555Mon Feb 17 1997 17:40 CMP PEX FOR HIGH STDEV ON JL0997 48 lines
62.556Mon Feb 17 1997 18:41 CMP PEX, 2 WAFERS OVERPOLISHED ON JL0943 46 lines
62.557Tue Feb 18 1997 09:17 CMP PEX FROM YESTERDAY FOR HIGH STDEV FOR JD0935 47 lines
62.558Tue Feb 18 1997 13:04 CMP PEX,11 WAFERS OVER POLISHED ON JL0972 59 lines
62.559Tue Feb 18 1997 13:45 Revised pex for cmp on JL0972 over polish 78 lines
62.560Tue Feb 18 1997 13:47 CMP PEX,HIGH STDEV FOR JL0972 77 lines
62.561Tue Feb 18 1997 16:33 CMP PEX FOR OVER POLISH ON XD0864 60 lines
62.562Tue Feb 18 1997 19:32 CMP PEX,1 WAFER SCRAPPED AND 6 OVER POLISHED ON JD0870 72 lines
62.569Mon Feb 24 1997 18:24 CMP PEX, 8 WAFERS FOR EXTRA DEP FOR YD0238 44 lines
62.571Tue Feb 25 1997 19:20 CMP PEX, JD1017 5 WAFERS REMARKED FOR EXTRA DEP. 1 lines
62.572Tue Feb 25 1997 19:31 CMP PEX,XM0948 3 WAFERS REMARKED FOR EXTRA DEP. 49 lines
62.573Tue Feb 25 1997 19:37 CMP PEX ,JD1017 5 WAFERS REMARKED FOR EXTRA DEP 42 lines
62.604Sun Mar 16 1997 18:54 CMP PEX FOR 1 BROKEN WAFER IN LOT JD1108 35 lines
62.605Mon Mar 17 1997 09:07 CMP PEX FOR HIGH INCOMING STEP HEIGHT FOR JL1158 41 lines
62.606Mon Mar 17 1997 11:16 CMP PEX FOR HIGH INCOMING STEP HEIGHT FOR JL1162 41 lines
62.607Mon Mar 17 1997 13:31 CMP PEX,JL1129 REMARKED FOR EXTRA DEP. 48 lines
62.608Mon Mar 17 1997 15:03 CMP PEX,LOT JD1133 4 WAFERS REMARKED FOR EXTRA DEP 57 lines
62.609Tue Mar 18 1997 11:14 CMP PEX,1 WAFER REMARKED FOR EXTRA DEP FOR JD1106 47 lines
62.610Tue Mar 18 1997 17:36 CMP PEX, 8 WAFERS REMARKED FOR EXTRA DEP ON XM1027 62 lines
62.613Mon Mar 24 1997 13:29 CMP PEX,SLIGHTLY LOW THICKNESS FOR JD1105 @ILD1 47 lines
62.614Mon Mar 24 1997 13:44 CMP PEX,LOW INCOMING STEP HEIGHT FOR JL1210 42 lines
62.615Mon Mar 24 1997 16:48 CMP PEX, 10 WAFERS SCRAPPED DUE TO OVER POLISH ON JD1108 157 lines
62.616Mon Mar 24 1997 17:00 CMP PEX,JD1136 Leftover lot from B-shift 3 wafers overpolished. 51 lines
62.619Tue Apr 01 1997 19:59 CMP.B3 CRASH ON YD0241, 1 PRODUCT WAFER IS HISTORY. 54 lines
62.636Tue Apr 15 1997 14:33 CMP PEX, 2 WAFERS REMARKED FOR EXTRA DEP ON XD1168. 39 lines
62.637Tue Apr 15 1997 17:20 CMP PEX FOR HIGH S/D AND HIGH RANGE FOR JD1233 38 lines
62.638Tue Apr 15 1997 20:04 CMP PEX, 1 WAFER BROKE DURING LIFT OFF ON JL1271 33 lines
62.639Tue Apr 15 1997 20:42 CMP PEX, 1 WAFER OVER POLISHED ON JL1163 37 lines
62.644Sun Apr 20 1997 17:52 CMP PEX, 4 WAFERS REMARKED FOR EXTRA DEP FOR JD1307 40 lines
62.645Sun Apr 20 1997 18:00 CMP PEX, 3 WAFERS REMARKED FOR EXTRA DEP FOR JD1312 38 lines
62.646Sun Apr 20 1997 20:09 CMP PEX,1 WAFER SCRAPPED FROM LOT JL1008 33 lines
62.648Wed Apr 23 1997 16:15 CMP PEX, 2 WAFERS REMARKED FOR EXTRA DEP ON JD1249. 39 lines
62.654Sun May 04 1997 18:08 CMP PEX, 12 WAFERS REMARKED FOR EXTRA DEP FROM JD1469 81 lines
62.659Wed May 07 1997 20:15 CMP PEX FOR XD1241 1 scrap-10 overpolished left over from b shift. 53 lines
62.665Tue May 13 1997 14:15 CMP PEX,JD1459 4 WAFERS REMARKED FOR EXTRA DEP. 48 lines
62.666Tue May 13 1997 17:30 CMP PEX,JD1401 5 WAFERS REMARKED FOR EXTRA DEP 61 lines
62.669Sun May 18 1997 17:15 CMP PEX JL1547, 1 WAFER BROKE ON CMP.A1. 62 lines
62.670Sun May 18 1997 18:09 CMP PEX, JL1461-13 WAFERS OVER POLISHED. 74 lines
62.671Mon May 19 1997 14:20 CMP PEX,JD1455 had 4 wafers scrapped and the rest redep 57 lines
62.672Mon May 19 1997 20:02 CMP PEX 5 WAFERS SCRAPPED FROM OUR BONUS ON LOTJD1554 41 lines
62.673Tue May 20 1997 17:19 CMP PEX,JD1540 4 WAFERS SCRAPPED FOR SCRATCHES. 37 lines
62.682Tue Jun 03 1997 14:27 Updated cmp pex,1 more scrap due to wafer missing pattern 36 lines
62.683Tue Jun 03 1997 16:02 CMP PEX, 15 WAFERS REMARKED FOR EXTRA DEP ON XB1369 55 lines

Additional information

First Post:Wed Nov 15 1995
Last Post:Tue Jun 03 1997
# Topics:0
# Replies:99
# We have note bodies for:99
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