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Posting history for user ASDG::CULLEY

95 notes across 1 conferences

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Posts		Conference Title
asdg::cmp95CMP

Conference asdg::cmp (CMP)

95 posts
TOPIC 62.0 Process Excursion (PEX) for CMP
62.1Sun Nov 12 1995 06:57 Pex XA0233Q for high tox at incoming 3127 THK_CMP 18 lines
62.2Sun Nov 12 1995 06:59 PEX-XD0263 for high tox and range at 3127 THK_CMP 18 lines
62.3Sun Nov 12 1995 07:01 PEX-XD0273 high tox at 2951 THK_CMP 2 19 lines
62.4Sun Nov 12 1995 07:02 PEX-XD0280-XD0284 high tox at oper #3079 21 lines
62.5Sun Nov 12 1995 07:05 PEX-XL0260 at 3120 THK_CMP 10 high uniformity 19 lines
62.6Sun Nov 12 1995 07:08 PEX-XL0297 high tox at incoming 3361 THK_L_CMP2 19 lines
62.7Sun Nov 12 1995 07:09 PEX-XL0305 high tox at 3361 THK_L_CMP2 19 lines
62.8Sun Nov 12 1995 07:10 XA0234Q for cmp visual at incoming 33 lines
62.11Mon Nov 20 1995 06:17 PEX for Xd0299 at incoming 17 lines
62.12Tue Nov 21 1995 07:02 pex for XL0314 at 3362, low step height but uniform 38 lines
62.22Thu Dec 14 1995 04:39 PEX FOR JD0036 AT 3064/FOR RANGE 19 lines
62.23Thu Dec 14 1995 05:29 PEX FOR XD0323 AT THK_ILD2_PRE/RANGE 19 lines
62.24Fri Dec 15 1995 06:08 PEX for JD0049 at 3023 THK_ILD1_PRE/low tox 18 lines
62.31Sat Dec 23 1995 01:36 Pex for jd0051 at incoming ild1_pre 18 lines
62.33Thu Jan 04 1996 05:46 pre_3 tox low but ok for xd0315 18 lines
62.37Sat Jan 13 1996 06:53 pex for xd0344 at idl1_pre, high range 18 lines
62.38Sat Jan 13 1996 07:11 pex for jd0061 at ild1_pre, tox low,range high 20 lines
62.41Thu Jan 18 1996 04:00 Pex for JD0061 at ild2_pst, wafers 1 & 10 low tox 19 lines
62.42Thu Jan 18 1996 06:52 Pex for Xd0344 at il2_pre thickness, LOW 18 lines
62.43Sat Jan 20 1996 09:18 Pex for XD0334 at THK_ILD1_PRE 22 lines
62.44Sat Jan 20 1996 09:19 Pex for JD0062 at THK_PMD_PRE 20 lines
62.45Sat Jan 20 1996 09:19 Pex for JD0067 at THK_ILD1_PRE 20 lines
62.55Wed Jan 24 1996 03:57 Pex for JD0073 at 3078 STEP_CMP 1 STEP_PMD 20 lines
62.56Wed Jan 24 1996 07:18 Pex for Xd0352 at THK_ILD1_PRE, low reads 18 lines
62.57Thu Jan 25 1996 05:26 Pex for XD0342 at 3054 cmp ild1 pst, low tox 25 lines
62.61Fri Jan 26 1996 05:21 Pex for JD0063B at cmp ild1 19 lines
62.66Fri Feb 02 1996 20:27 PEX FOR JD0072 AT ILD1_PRE 17 lines
62.67Fri Feb 02 1996 20:28 PEX FOR JD0070 AT ILD2_PRE, LOW THICKNESS 19 lines
62.70Fri Feb 09 1996 06:54 Pex for JD0082 at ILD1_pre, low thickness 18 lines
62.71Sat Feb 10 1996 07:09 pex for JD0075 for low thickness at ild1_pre 17 lines
62.79Thu Feb 15 1996 00:29 Pex for xd0368 at ild1_pre, 3023 high range 18 lines
62.80Thu Feb 15 1996 01:07 Pex for JD0065 at oper 3058, THK_ILD3_PRE, low thickness 18 lines
62.82Fri Feb 16 1996 01:10 Pex for JD0081 at ILD1_Pst, high range 21 lines
62.83Sat Feb 17 1996 04:16 Pex for XD0384 at 3078 STEP_CMP 1 STEP_PMD, low 18 lines
62.86Wed Feb 21 1996 04:36 pex for Xd0348, THK_ILD3_PRE, low 17 lines
62.87Wed Feb 21 1996 04:37 Pex for JD0103, STEP_PMD_PRE, low 20 lines
62.88Thu Feb 22 1996 04:10 Pex for XL0365 at cmp THK_ILD2_PST 2, high range 17 lines
62.89Thu Feb 22 1996 06:50 Pex for JD0087 at THK_ILD3_PRE, low thx 18 lines
62.90Fri Feb 23 1996 05:36 Pex for XD0403 at THK_ILD1_PST, scrapped wafer 17 lines
62.91Sat Feb 24 1996 08:21 Pex for Xd0402 at STP_PMD_PRE, height low 18 lines
62.99Sat Mar 02 1996 03:10 pex for xd0406 at STEP_PMD 18 lines
62.104Wed Mar 06 1996 07:34 pex for XL0365, wafer 15 scrapped 26 lines
62.107Fri Mar 08 1996 01:22 Pex @3078 step height, low 18 lines
62.108Fri Mar 08 1996 01:23 Pex for XD0381 @3053 Range high. 17 lines
62.110Sat Mar 09 1996 08:55 pex for XD0402 Thickness low at operation 3058 17 lines
62.113Thu Mar 14 1996 04:56 Pex for Xd0414 at 3078 STEP_CMP, low 18 lines
62.120Wed Mar 20 1996 05:00 PEX for JD0102 at 3058 THK_ILD3_PRE, low thk 17 lines
62.121Thu Mar 21 1996 04:25 PEX for XD0390 at 3058 THK_ILD3_PRE, low thickness 17 lines
62.122Fri Mar 22 1996 07:01 Thickness low at operation 3058 THK_ILD3_PRE 17 lines
62.123Fri Mar 22 1996 07:11 Thickness low at operation 3058 THK_ILD3_PRE 17 lines
62.127Thu Mar 28 1996 00:08 thickness low at operation 3023 THK_ILD1_PRE 17 lines
62.132Wed Apr 03 1996 07:17 Step-height low reading at oper #3078 18 lines
62.134Thu Apr 04 1996 07:39 Pex for JD0139, low thickness at THK_ILD3_PRE 17 lines
62.138Fri Apr 05 1996 06:13 THK_ILD1_PST, thickness low on whole lot @5100A' 17 lines
62.152Wed Apr 17 1996 01:59 Thickness low at 3120 17 lines
62.153Wed Apr 17 1996 07:07 thickness low at operation 3023 18 lines
62.154Wed Apr 17 1996 07:13 Thickness low at operation 3053 17 lines
62.156Thu Apr 18 1996 03:54 Thickness low at 3120 17 lines
62.157Thu Apr 18 1996 04:14 Thickness low at 3120 17 lines
62.158Thu Apr 18 1996 04:28 Thickness low at operation 3023 17 lines
62.159Thu Apr 18 1996 07:54 thickness low at operation 3023 17 lines
62.160Fri Apr 19 1996 02:01 Thickness low at operation 3058 17 lines
62.161Fri Apr 19 1996 07:33 Thickness low at operation 3053 17 lines
62.170Thu Apr 25 1996 08:14 Wafer breakage for JD0190 at cmp 12 lines
62.182Thu May 02 1996 07:52 thickness low at operation 3023 17 lines
62.185Sat May 04 1996 05:52 PEX for JD0211 and JD0192 at 3023 THK_ILD1_PRE 16 lines
62.194Thu May 09 1996 07:24 thickness low at operation 3023 THK_ILD1_PRE 17 lines
62.195Thu May 09 1996 07:24 thickness low at operation 3023 THK_ILD1_PRE 17 lines
62.199Fri May 10 1996 03:58 STP_PMD_PRE high at cmp incoming 20 lines
62.200Fri May 10 1996 04:15 PEX for JD0188 at 3066 THK_CMP 11 THK_ILD2_PST 2 15 lines
62.201Fri May 10 1996 05:06 thickness low at operation 3023 THK_ILD1_PRE 17 lines
62.202Fri May 10 1996 05:07 thickness low at operation 3023 THK_ILD1_PRE 17 lines
62.205Sat May 11 1996 08:06 JD0214 at cmp_pmd, 1 broken wafer 26 lines
62.206Sat May 11 1996 09:22 thickness low at operation 3023 THK_ILD1_PRE 17 lines
62.207Sat May 11 1996 09:31 PEX at 3054 ILD1_pst, low post reading 24 lines
62.208Sat May 11 1996 09:35 THK_ILD3_PRE, low 17 lines
62.209Sat May 11 1996 09:43 high thickness at incoming 16 lines
62.218Thu May 16 1996 08:19 Broken and scratched wafers at B2, crash. 14 lines
62.219Thu May 16 1996 09:36 Severe lifting on one alignment mark. @ 1 inch dia. 14 lines
62.237Thu May 23 1996 07:57 PEX for lots JD0194, JD0203 at 3058 THK_ILD3_PRE, low thickness. 17 lines
62.238Thu May 23 1996 08:04 PEX for JD0265 at 3023 THK_CMP 6 THK_ILD1_PRE 17 lines
62.240Fri May 24 1996 04:17 PEX for JD0204 at 3058 THK_ILD3_PRE, low thickness. 17 lines
62.241Fri May 24 1996 04:18 PEX for JD0223 at 3053 THK_CMP 10 THK_ILD2_PRE 17 lines
62.242Fri May 24 1996 04:19 PEX for JD0237 at 3023 THK_CMP 6 THK_ILD1_PRE 17 lines
62.243Fri May 24 1996 04:19 PEX for JD0238 at 3023 THK_CMP 6 THK_ILD1_PRE 17 lines
62.244Fri May 24 1996 04:20 PEX for JD0197 at 3064 THK_ILD3_PST, high range. 17 lines
62.246Sat May 25 1996 06:15 THK_ILD3_PRE, low thickness 17 lines
62.252Thu May 30 1996 07:30 PEX for JD0256 at 3023 THK_CMP 6 THK_ILD3_PRE 17 lines
62.259Sat Jun 01 1996 09:57 PEX for JD0226 at 3058 THK_ILD3_PRE, low 17 lines
62.260Sat Jun 01 1996 10:24 Wafers 4 and 6 scrapped 13 lines
62.266Thu Jun 06 1996 07:55 PEX for lot JD0290 at 1978 CMP_PMD, 5 broken wafers 13 lines
62.276Fri Jun 14 1996 07:01 PEX for JD0276 at 3023 THK_CMP 6 THK_ILD1_PRE 19 lines
62.277Fri Jun 14 1996 07:02 PEX for JD0286 at 3023 THK_CMP 6 THK_ILD1_PRE 19 lines
62.308Thu Jul 11 1996 07:15 CMP STP_ILD3_PRE FOR JD0295 31 lines
62.309Thu Jul 11 1996 07:16 CMP STEP_PMD_pre FOR XM0479 32 lines

Additional information

First Post:Sun Nov 12 1995
Last Post:Thu Jul 11 1996
# Topics:0
# Replies:95
# We have note bodies for:95
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