| B Shift Photo Ops Passdown 3/08/97
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** IMPORTANT - Please begin using the new Prometrix FT750 (between Litho.B1 and
Litho.B2) for all thickness MQC's. The software is the same as the UV1050
we are using now. We need to run this because the FT650 will be going away
very soon. Auto MQC is also set up for this tool, so just use it normally.
Jennifer Baker will also be sending out a message about this.
Note 3/8/97: We were not able to use this to run any of our C Shift MQC's,
keep getting errors. Note sent to J.Baker
** DO NOT RUN ANY MORE METAL LAYERS UNTIL PSS CLEARS THEM
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EQUIPMENT ISSUES: (DOWN EQUIP, WARNINGS, REQUESTS, MQC'S)
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Litho.A7 - DOWN - Process acceptance
Litho.B3 - DOWN - several problems, see C shift Equipment Passdown, vendor in
tomorrow
WARNING: DUV.B3 - Uniformity out of spec, grey filter to be replaced.
CD-SEM.A1 - WARNING - Eng believes problem with contacts has been fixed,
Still has warning for vibration issue. M1C and M2C are better,
having problems with M3C now. Also has problem with high 3sigma
CD-SEM.A1-WARNING-Problem with high 3sigma
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HOT LOTS IN PHOTO: (See WIP Status Board for Hot Lots in other areas)
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XE1063 - At Mask M1, hold for evaluation, per Ian Fink. HOT LOT
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HOLD LOTS:
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JD1054 - At Mask M1, Hold for eng, alignment - 1 rwk wafer is out, lot is
not coated
JD1053 - At Mask M1 - LOT IS COATED.....WAS RUN ON LITHO.A3
Per engineering...rework the pilot and place the lot on hold lot for
Scott Wiberg. See S. Inga's passdown.
JD1053RWK1 - Pilot rework from above lot, has not been coated
XE1063 - At Mask M1, hold for evaluation, per Ian Fink. HOT LOT
YD0241 - At Mask M2C, working on pilot CD job
JD0930 - At Ovl M3, hold for Gil Cooper for non-std metrology
JD0992-S1 - At Mask M3, 1 wafer will not align, needs to be bought by eng.
JL1003-S1 - At Mask M3, 1 wafer will not align, needs to be bought by eng.
JL0980-S1 - At Mask M3, 2 wafers will not align, needs to be bought by eng.
XE0631-S1 - At Mask MT1, waiting to be bought by eng.
JD1054RWK1- Pilot rework from above lot, has not been coated
XD0913-Hold for engineering
JD0856-Hold for engineering
JL1084rwk1-Hold for engineering
JD1175-Hold for engineering
JL1182-Hold for engineering
JL1084-Hold for engineering
JD0929-Hold for engineering
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OPEN ANNOTATIONS:
none
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EDCO's/TDCO's/NEW SPECS:
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EDCO:
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TDCO:
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o Posted 2/24/97 - Expires 3/27/97
* DC1073 Poly: new ADI CD target .31-.34
* All Cmos5 devices, M1C and M2C: new exposure 18.5 mj / -.2 focus
* All Cmos5 devices, M1C and M2C: new ADI CD target .45-.55
o Posted 2/25/97 - Expires 3/27/97
* Two more wafers need to be added to daily MQC procedure for all overlay
tools...see TDCO for details.
SPECS: (Please keep new specs in passdown for 1 week)
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MISCELLANEOUS: (GENERAL INFORMATION, REQUESTS)
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REWORKS:
LOT # | OPERATION | # WAFERS | REASON FOR REWORKING
----------|---------------|-----------|-----------------------------------------
Jl1182 poly 1 low cd's
----------|---------------|-----------|-----------------------------------------
XD1070 poly 3 low cd's
----------|---------------|-----------|-----------------------------------------
SCRAPS:
LOT # | OPERATION | # WAFERS |REASON FOR SCRAPPING
----------|---------------|-----------|-----------------------------------------
----------|---------------|-----------|-----------------------------------------
|