| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 92.1 | | FABSIX::M_CADIEUX | KADOU | Thu May 01 1997 08:27 | 46 |
|
CMP D SHIFT PASSDOWN
CMP.A1(Strasbaugh 6DS-SP)-UP/MQC -BREAKIN IN PAD, MEASURED ON.A1
**THIS MACHINE WILL BE NEEDED BY
ENG. THIS MORNING**
CMP.A2(Strasbaugh 6DS-SP)-UP/MQC -BREAKIN IN PAD, MEASURED ON.A1
CMP.B2(Speedfam CMP-V)-UP/RUNNING-1 -JD1249(ILD3) MEASURED ON.A5
NEEDS MINOR TOUCH-UPS
CMP.B3 (Speedfam CMP-V)-UP/IDLE -
CMP.B4 (Speedfam CMP-V)UP/ILDE -**PLEASE RUN MQC'S BEFORE RUNNING
PRODUCT, IT IS VERY CENTER FAST.
REQUESTED BY PSS.**
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (On-track scrubber) - UP/IDLE
HOT LOTS IN AREA:
-------------------
NONE
-------------------
MQC WAFERS USED:17
-------------------
MQC WAFERS AVAIL:4
-------------------
LOTS ON HOLD:NONE
___________________
|
| 92.2 | | FABSIX::M_CADIEUX | KADOU | Fri May 02 1997 08:18 | 43 |
|
CMP D SHIFT PASSDOWN
CMP.A1(Strasbaugh 6DS-SP)-UP/ENG -
CMP.A2(Strasbaugh 6DS-SP)-UP/RUNNING-2 -JD1379(PMD) SA'S MEASURED ON.A5
RUN TIME=100
-JL1423(PMD) 100%ED ON.A4
RUN TIME=100 REM.RATE=1900
NEEDS TOUCH-UP
CMP.B2(Speedfam CMP-V)-UP/RUNNING-1 -JD1310(ILD1) READY TO RUN
CMP.B3 (Speedfam CMP-V)-UP/RUNNING-1 -JL1323(ILD2) SA'S MEASURING ON.A1
RUN TIME=200
CMP.B4 (Speedfam CMP-V)UP/IDLE -
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (On-track scrubber) - UP/IDLE
HOT LOTS IN AREA:
-------------------
NONE
-------------------
MQC WAFERS USED:5
-------------------
MQC WAFERS AVAIL:3.5
-------------------
LOTS ON HOLD:NONE
___________________
|
| 92.3 | D SHIFT | FABSIX::R_THOMPSON | | Sat May 03 1997 08:44 | 41 |
|
D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -RUNNING,JL1489,SA'S IN SLOTS 1,2 WERE READ ON A4,
BUT HAVE NOT BEEN RUN YET
CMP.A2 (Strasbaugh 6DS-SP) -RUNNING,JL1476,SA'S RAN ON .A4, TIME 100 SEC.
CMP.B1 (Speedfam CMP-V) GONE
CMP.B2 (Speedfam CMP-V) - RUNNING 2 LOTS,JD1380A READ ON.A ,NEED'S T/U
XD1291 READ ON .A1 NEEDS T/U
CMP.B3 (Speedfam CMP-V) -RUNNING 4 LOTS,JD1114 100% ON A1 NEED'S T/U (HAS AL-
READY RUN 1100 SEC).JD1075 100% ON A1 NEEDS TU(
HAS ALREADY RUN 800 SEC,).XE1064,XD1024,SA'S
RAN AND RUN ON .A5
CMP.B4 (Speedfam CMP-V) -ENGINEERING
CMP-SCRUB.A1 (On-track scrubber) -UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:15
MQC WAFERS USED:10
MQC WAFERS AVAIL:~3 boxes
----------
|
| 92.4 | PASSDOWN CMP.B-SHIFT 05/04/97 | FABSIX::M_PROVENCHER | | Sun May 04 1997 07:36 | 139 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 14 mqcs
BREAKIN WAFERS 51 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24h MQCS COMPLETED : 05/03/97 @ 9:30 pm
CMP.A1 24hr MQCS NEXT DUE : 05/04/97 @ 9:30 pm
CMP.A2 (Strasbaugh 6DS-SP) - up/idle
CMP.A2 24hr MQCS COMPLETED: 05/04/97 @ 12:30 am
CMP.A2 24hr MQCS NEXT DUE : 05/05/97 @ 12:30 am
CMP.B1 (Speedfam CMP-V) - dn/external
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - up/running jl1439 m1 t:175 rr:3941
CMP.B2 24hr MQCS COMPLETED: 05/04/97 @ 1:00 am
CMP.B2 24hr MQCS NEXT DUE : 05/05/97 @ 1:00 am
CMP.B2 12hr MQCS COMPLETED: 05/03/97 @ 10:00 pm
CMP.B2 12hr MQCS NEXT DUE : 05/04/97 @ 10:00 am
CMP.B3 (Speedfam CMP-V) - up/running jd1325 m2/jl1387 m2
CMP.B3 24hr MQCS COMPLETED: 05/03/97 @ 10:00 pm
CMP.B3 24hr MQCS NEXT DUE : 05/04/97 @ 10:00 pm
CMP.B3 12hr MQCS COMPLETED: 05/04/97 @ 6:00 am
CMP.B3 12hr MQCS NEXT DUE : 05/04/97 @ 6:00 pm
CMP.B4 (Speedfam CMP-V) -up/eng - do not run, per M_VANHANEHEM tool not to be
run until monday afternoon, tool is hooked up to
a barrell of ss25 at 18%
please keep to up/eng, per b.tower
CMP.B4 24hr MQCS COMPLETED: over due @ 11:30 pm
CMP.B4 24hr MQCS NEXT DUE : @ 11:30 am
CMP.B4 12hr MQCS COMPLETED: over due @ 11:00 pm
CMP.B4 12hr MQCS NEXT DUE : @ 11:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 05/04/97 @ 7:00 am
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 05/04/97 @ 7:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 05/04/97 @ 7:00 am
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 05/04/97 @ 7:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 05/04/97 @ 7:00 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 05/04/97 @ 7:00 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
*12 lots *
Down Equipment:
---------------
* cmp b1 (external) *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
--------------
* xd1116 hold for m_Broomfield *
jl1231 m3 hold for e_bodensieck
Monitor status:
--------------
3 boxes of 12K mqc wafers
3 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*28 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see t.d.c.o. regarding modified single pass lot processing *
Lots/wafers processed
--------------------
* jl1372 m2 21 wafers *
jl1437 m1 24 wafers
jl1390 m2 24 wafers
jl1393 m2 24 wafers
jl1438 m1 24 wafers
jl1391 m2 24 wafers
jd1231 m3 24 wafers
Jl1488 pmd 24 wafers
JL1425 pmd 19 wafers
JD1473 pmd 22 wafers
JD1470 pmd 24 wafers
XD1336 pmd 24 wafers
JL1372 M2 21 wafers
JL1419 M2 24 wafers
JL1415 M2 24 wafers
JL1371 M2 24 wafers
JD1469 M2 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
18 SPEEDFAM
10 STRASBAUGH
1 PLATES F/S
|
| 92.5 | Cmp Passdown A Shift | FABSIX::J_BLAIS | You have read | Sun May 04 1997 20:24 | 63 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 5 boxes
BREAKIN WAFERS 3 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up running jd1454 05/04/97 9:45pm na
--------------------------------------------------------------------------------
CMP.A2 up running jd1459 05/05/97 12:18am na
--------------------------------------------------------------------------------
CMP.B1 Schld Down na na
--------------------------------------------------------------------------------
CMP.B2 up running jd1380,xe1112 05/05/97 3:00am 05/04/97 11:00pm
--------------------------------------------------------------------------------
CMP.B3 up running jd1377 05/04/97 9:30pm 05/05/97 7:30am
--------------------------------------------------------------------------------
CMP.B4 ENG IDLE na na
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 05/04/97 @ 5:40am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 05/04/97 @ 5:40am
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
XD1116,JD1231,JD1288
lots in room: New specs/revs posted:
------------- ---------------------
25 lots
Lots Processed
JD1471/24
JL1387/24
JD1468/24
JL1495/23
JD1469/23
JL1393/24
JL1439/24
JL1485/24
JL1512/23
JL1391/24
JL1371/24
JL1390/24
JD1470/24
JD1295/24
YD0257/23
|
| 92.6 | passdown cmp b-shift 05/05/97 | FABSIX::M_PROVENCHER | | Mon May 05 1997 05:52 | 145 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 17 mqcs
BREAKIN WAFERS 53 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running JD1450 T:110 R/R:2315
tool down for pad change @10:30pm due to failed
24H MQC's. back up at 2:00am
CMP.A1 24h MQCS COMPLETED : 05/05/97 @ 2:00 am
CMP.A1 24hr MQCS NEXT DUE : 05/06/97 @ 2:00 am
CMP.A2 (Strasbaugh 6DS-SP) - up/verify
tool down for pad change at @ 3:30am due to
failed 24H Mqc's. breakins running
CMP.A2 24hr MQCS COMPLETED: in process
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - dn/external
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - up/running jd1307 m3/t:400 rr:
jl1256 m2 mps
CMP.B2 24hr MQCS COMPLETED: 05/05/97 @ 4:00 am
CMP.B2 24hr MQCS NEXT DUE : 05/06/97 @ 4:00 am
CMP.B2 12hr MQCS COMPLETED: 05/04/97 @ 11:00 pm
CMP.B2 12hr MQCS NEXT DUE : 05/05/97 @ 11:00 am
CMP.B3 (Speedfam CMP-V) - up/running jd1384 rr:3389 t:225
jl 1427dc 1034 m1 (start)
CMP.B3 24hr MQCS COMPLETED: 05/04/97 @ 11:30 pm
CMP.B3 24hr MQCS NEXT DUE : 05/05/97 @ 11:30 pm
CMP.B3 12hr MQCS COMPLETED: 05/04/97 @ 10:30 pm
CMP.B3 12hr MQCS NEXT DUE : 05/05/97 @ 10:30 am
CMP.B4 (Speedfam CMP-V) -up/eng - do not run, per M_VANHANEHEM tool not to be
run until monday afternoon, tool is hooked up to
a barrel of ss25 at 18%
please keep to up/eng, per b.tower
CMP.B4 24hr MQCS COMPLETED: over due @ 11:30 pm
CMP.B4 24hr MQCS NEXT DUE : @ 11:30 pm
CMP.B4 12hr MQCS COMPLETED: over due @ 11:00 pm
CMP.B4 12hr MQCS NEXT DUE : @ 11:00 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 05/04/97 @ 9:30 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 05/05/97 @ 9:30 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 05/04/97 @ 9:30 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 05/05/97 @ 9:30 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 05/04/97 @ 9:30 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 05/05/97 @ 9:30 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* 12 lots *
Down Equipment:
---------------
* cmp b1 (external) *
cmp.a2 pad & carriers changed/breakin/mqc's in process
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
--------------
* xd1116 m1 hold for m_Broomfield *
jl1231 m3 hold for e_bodensieck
jd1288 m3 hold for M_VANHANEHEM
yd0257 m2 hold for e_bodensieck
jd1114 m4 hold for e_bodensieck
Monitor status:
--------------
3� boxes of 12K mqc wafers
2� boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*28 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see t.d.c.o. regarding modified single pass lot processing *
Lots/wafers processed
--------------------
* xe1112 m3 21 wafers
jd1386 m1 23 wafers
jd1380 m1 24 wafers
jl1300 m2 24 wafers
jl1222 m2 24 wafers
jl1304 m2 24 wafers
jl1300 m2 24 wafers
jl1214 m2 24 wafers
jl1218 m2 24 wafers
jd1377 m2 24 wafers
jd1406 m1 24 wafers
JD1454 pmd 24 wafers
JD1459 pmd 24 wafers
JD1449 pmd 24 wafers
JD1448 pmd 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
18 SPEEDFAM
8 STRASBAUGH
1 PLATES F/S
|
| 92.7 | Cmp Passdown A Shift | FABSIX::J_BLAIS | You have read | Mon May 05 1997 20:48 | 65 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 5 boxes
BREAKIN WAFERS 3 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up running jd1463 05/06/97 2:00am na
--------------------------------------------------------------------------------
CMP.A2 up running 05/06/97 7:15am na
--------------------------------------------------------------------------------
CMP.B1 Schld Down na na
--------------------------------------------------------------------------------
CMP.B2 up running jd1287 05/06/97 3:40am 05/05/97 11:15pm
--------------------------------------------------------------------------------
CMP.B3 up running jl1373 05/05/97 11:30pm 05/06/97 7:30am
--------------------------------------------------------------------------------
CMP.B4 ENG Switching back to production now, will need full MQC's.......
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 05/05/97 @ 5:40am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 05/06/97 @ 5:40am
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
jd1288
lots in room: New specs/revs posted:
------------- ---------------------
25 lots
Lots Processed
jl1300/23
jd1448/24
jl1256/23
jd1455/24
jl1427/24
jd1456/24
jd1494/19
jd1384/24
jd1450/24
jl1428/24
jd1325/24
jd1472/23
jb1169/24
jd1231/24
jd1307/22
jl1516/24
jl1411/24
|
| 92.8 | passdown cmp b-shift 05/06/97 | FABSIX::M_PROVENCHER | | Tue May 06 1997 06:39 | 146 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 23 mqcs
BREAKIN WAFERS 43 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/mqc (24 hr mqc's failed for uniformity, pad and
carriers were changed tool down at 4am.
breakins/mqc's in process).
CMP.A1 24h MQCS COMPLETED : in process
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - up/eng (eng shed to take tool at @ 5am. pad
changed and special requests being put into
place).
CMP.A2 24hr MQCS COMPLETED: when tool come back to production
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - dn/external
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - up/mqc
tool down at 11pm robot problems/carrier
rotation problems tool up for mqc at 1AM
minus head 2 (tool is running on 4 heads
failed first set of mqc's head 1 high
unif. high range, changed carrier 1
running 2nd set of mqc's
CMP.B2 24hr MQCS COMPLETED: n/a
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: 05/05/97 @ 11:00 pm
CMP.B2 12hr MQCS NEXT DUE : 05/05/97 @ 11:00 am
CMP.B3 (Speedfam CMP-V) - up/running jl1424 m1 start
jl1412 m1 start
CMP.B3 24hr MQCS COMPLETED: 05/05/97 @ 11:30 pm
CMP.B3 24hr MQCS NEXT DUE : 05/06/97 @ 11:30 pm
CMP.B3 12hr MQCS COMPLETED: 05/06/97 @ 3:00 pm
CMP.B3 12hr MQCS NEXT DUE : 05/06/97 @ 3:00 am
CMP.B4 (Speedfam CMP-V) -up/eng - running jl1465 m1 t:170 rr:4311
jd1287 m3 transfered from cmp.b2
please keep to up/eng, per b.tower
CMP.B4 24hr MQCS COMPLETED: 05/06/97 @ 1:30 am
CMP.B4 24hr MQCS NEXT DUE : 05/07/97 @ 1:30 am
CMP.B4 12hr MQCS COMPLETED: 05/06/97 @ 1:30 am
CMP.B4 12hr MQCS NEXT DUE : 05/06/97 @ 1:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 05/04/97 @ 11:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 05/05/97 @ 9:30 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 05/04/97 @ 9:30 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 05/05/97 @ 9:30 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 05/04/97 @ 9:30 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 05/05/97 @ 9:30 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* lots *
Down Equipment:
---------------
* cmp b1 (external) *
cmp.a2 turned over to eng.
cmp.a1 pad/carrier change, breakins inprocess
cmp.b2 2nd set of mqc's in process (running on 4 heads)
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
--------------
* yd0257 m2 hold for e_bodensieck
jd1114 m4 hold for e_bodensieck
Monitor status:
--------------
4 boxes of 12K mqc wafers
1 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*20 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see t.d.c.o. regarding modified single pass lot processing *
Lots/wafers processed
--------------------
* JD1463 pmd 24 wafers
xd1434 pmd 24 wafers
JD1401 pmd 24 wafers
JD1451 pmd 22 wafers
JD1463 pmd 24 wafers
xd1434 pmd 24 wafers
jl1373 m2 23 wafers
jl1294 m2 24 wafers
jl1430 m1 12 wafers
jl1414 m1 24 wafers
jl1456 m1 24 wafers
jl1417 m1 21 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
17 SPEEDFAM
6 STRASBAUGH
1 PLATES F/S
|
| 92.9 | Cmp Passdown A Shift | FABSIX::J_BLAIS | You have read | Tue May 06 1997 20:39 | 60 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 5 boxes
BREAKIN WAFERS 3 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up running jd1541,jl1500 05/07/97 8:40am na
--------------------------------------------------------------------------------
CMP.A2 up/Eng running eng expierments 05/06/97 7:15am na
--------------------------------------------------------------------------------
CMP.B1 Schld Down na na
--------------------------------------------------------------------------------
CMP.B2 up running xe1367 05/07/97 1:00pm 05/07/97 7:30am
--------------------------------------------------------------------------------
CMP.B3 up running xd1116 05/06/97 11:30pm 05/07/97 6:00am
--------------------------------------------------------------------------------
CMP.B4 up running jd1404 05/07/97 1:15am 05/07/97 7:30am
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 05/06/97 @ 5:40am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 05/07/97 @ 5:40am
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
1 hot lot jd1288 for eng. measurments
lots in room: New specs/revs posted:
------------- ---------------------
25 lots
Lots Processed
jl1426/24
jl1510/24
jd1462/24
xe1367/24
jl1424/24
jl1412/24
yd0257/23
jd1288/22
jl1079/24
jd1287/23
jl1365/24
jl1466/24
|
| 92.10 | passdown cmp b-shift 05/07/97 | FABSIX::M_PROVENCHER | | Wed May 07 1997 06:41 | 141 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 16 mqcs
BREAKIN WAFERS 43 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24h MQCS COMPLETED : 05/06/97 @ 8:30 am
CMP.A1 24hr MQCS NEXT DUE : 05/07/97 @ 8:30 am
CMP.A2 (Strasbaugh 6DS-SP) - up/eng running eng process
CMP.A2 24hr MQCS COMPLETED: when tool come back to production
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - dn/external
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - up/running JD1469 M3 1st 400s hot lot
JD1446 M1 t:160 rr:
CMP.B2 24hr MQCS COMPLETED: 05/06/97 @ 1:00 pm
CMP.B2 24hr MQCS NEXT DUE : 05/07/97 @ 1:00 pm
CMP.B2 12hr MQCS COMPLETED: 05/07/97 @ 5:00 am
CMP.B2 12hr MQCS NEXT DUE : 05/07/97 @ 5:00 pm
CMP.B3 (Speedfam CMP-V) - up/running jl1407 m2 t:220 rr:2786
jl1408 m2 start
CMP.B3 24hr MQCS COMPLETED: 05/07/97 @ 1:00 am
CMP.B3 24hr MQCS NEXT DUE : 05/08/97 @ 1:00 am
CMP.B3 12hr MQCS COMPLETED: 05/07/97 @ 6:00 am
CMP.B3 12hr MQCS NEXT DUE : 05/07/97 @ 6:00 pm
CMP.B4 (Speedfam CMP-V) -up/eng - running jd1446 m1 t:190 rr:
jl1394 m2 t:190 rr:
please keep to up/eng, per b.tower
CMP.B4 24hr MQCS COMPLETED: 05/07/97 @ 5:30 am
CMP.B4 24hr MQCS NEXT DUE : 05/08/97 @ 5:30 am
CMP.B4 12hr MQCS COMPLETED: 05/07/97 @ 7:30 am
CMP.B4 12hr MQCS NEXT DUE : 05/07/97 @ 7:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 05/07/97 @ 10:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 05/08/97 @ 10:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 05/07/97 @ 10:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 05/08/97 @ 10:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 05/07/97 @ 10:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 05/08/97 @ 10:00 pm
Hot/B lots in area:
__________________
* jd1469 m3 cmp.b2 *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* 4 lots *
Down Equipment:
---------------
* cmp b1 (external) *
cmp.a2 turned over to eng.
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
--------------
* xd1116 m1 *
jd1288 m3
Monitor status:
--------------
4� boxes of 12K mqc wafers
1� boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*16 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see t.d.c.o. regarding modified single pass lot processing *
Lots/wafers processed
--------------------
* xe1367 m1 24 wafers hotlot
jd1404 m1 22 wafers
jl1079 m1 24 wafers
jd1473 m1 22 wafers hotlot
jl1465 m1 24 wafers
jl1442 m1 24 wafers
jl1416 m1 24 wafers
JL1409 m1 24 wafers
JD1541 pmd 24 wafers
JL1500 pmd 24 wafers
JL1513 pmd 24 wafers
JL1511 pmd 24 wafers
JL1499 pmd 24 wafers
JL1507 pmd 24 wafers
JL1491 m1 24 wafers
Jl1375 m2 24 wafers
XD1241 m3 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
6 STRASBAUGH
1 PLATES F/S
|
| 92.11 | 5-7 a shift | FABSIX::B_SAVAGEAU | | Wed May 07 1997 21:00 | 15 |
| CMP PASSDOWN 5-7 A-SHIFT
CMP.A1 STATUS IDLE
CMP.A2 STATUS Down TO ENG Exercise wafers running now. See PE
Bryan's passdown for more info.
CMP.B1 Visiting Phoenix
CMP.B2 STATUS IDLE
CMP.B3 STATUS 2 Lots in Process
JD1385 ILD1 Done Touching up, ready for sort & Final 5.
JD1494 ILD1 HOT. Only SA's run.
CMP.B4 STATUS IDLE
The remaining tools in room are up. BUT Scrub.A3 has been periodically throwing
the first wafer in a cassette.
|
| 92.12 | P/D, "C" SHIFT, 5/8/97 | SUBPAC::HOEKSTRA | | Thu May 08 1997 20:06 | 236 |
| ================================================================================
"C" SHIFT DAILY PASSDOWN FOR EQUIPMENT SUPPORT IN IMPLANT/DIFFUSION/CMP
================================================================================
SAFETY/PERSONNEL STATUS
o SAFETY ISSUES: None
-------------------------------------------
o HSEKPG: Areas OK
-------------------------------------------
o ABSENT: John Raymond out to Austin TX for Implant training
Ian Goldie out on STD
John Swenson out sick
Mike Standing out sick
Pete Wilcox out sick
-------------------------------------------
o FACILITIES: STATUS QUO, Low exhaust pressure in Wetlab/Sinks areas
-------------------------------------------
o ERT ISSUES: 1 ERT call
-------------------------------------------
o PERSONNEL IN FOR OT: None
-------------------------------------------
o SCRAPPED WAFERS: None
================================================================================
FAB 6 DOWN EQUIPMENT STATUS
-------------------------------------------
o DIFFUSION "NO EQUIPMENT DOWN"
o WETLAB "NO EQUIPMENT DOWN"
o SINKS "NO EQUIPMENT DOWN"
-------------------------------------------
o ION IMPLANT "NO EQUIPMENT DOWN"
-------------------------------------------
o C.M.P.
CMP.A1 UNSCHED_DOWN STRASBAUGH CMP DOWN 5/08/97 17:48:19
Needs pad change
CMP.B3 PM SPEEDFAM CMP-V CMP BGN_PM 5/08/97 13:48:11
Need approximately 4 more hours for the semi-annual PM, onto "D"
CMP.B1 EXTERN SPEEDFAM CMP-V CMP BGN_EXT 4/18/97 09:42:10
Shipped out to Speedfam for upgrade
SCRUB.A3 PART ONTRAK DSS-200 SCRUB CHANGE 5/08/97 06:49:48
Needs more verifications
================================================================================
FAB 4 DECON STATUS
DIFUSSION - No Updates
IMPLANT - No Updates
================================================================================
OTHER ISSUES
From: SUBPAC::TOOKER Subj: Update on cmp-scrub.a3
Today OnTrak field service was here to work on the wafer dropping problem on
cmp-scrub.a3. He has done some major realignments of the robot and spin sta-
tion positions. Currently, the tool appears to be running OK. After the tool
comes back to UP, we will need to implement the following plan for a few days
until we are highly confident that OnTrak has fixed the problem:
1. If there are any more occurrences of wafers dropping in the spin station
or receive station, the tool must immediately go back DOWN and OnTrak
field service notified. We can not afford to risk any more product
wafers.
2. If the tool does go DOWN for dropping wafers, please do not attempt to
make any adjustments to the robot, spin station, or lifter blade teach
positions. Also, do not attempt to change any mechanical alignments on
these areas as well. We will wait for OnTrak field service to come in
so they can observe the tool running with the current teach positions.
3. If the tool goes DOWN for reasons other than the wafer dropping problem,
go ahead and make the necessary repairs unless it means changing the
teach positions.
Please feel free to call me at home at 508-874-0839 if there are any questions
or concerns, Thanks, Jim
From: SCOMAN::BOUCHARD Subject: Imp-Dose.A1 Upgrade Update
The Twave FSE and one of the Apps engineers came in last
night and were able to get the robot working. Thats a big
plus. The system was left in a reference mapping routine
overnight to exercise the hardware and check stability.
The system completed the mapping routine with out an error
and the system stability looked pretty good.
The last hardware issue (fingers crossed) we are up against
is that the system is not recognizing the cassette platforms.
The twave rep. has been troubleshooting the mechanical
interface pcb with no luck. The pcb has been ordered from
Texas and is scheduled to be curriered to his hotel late this
evening. Depending on what time it arrives, he may be back
later this evening. The system is presently performing
another stability test on the reference.
From: SCOMAN::POLLARD Subj: CMP.A2 plans for tonight - splitlot is running!
Finished up the Conditioning tests and all looked good (up to 500waf).
We've taken all day to get the 18% in spec for uniformity. It was
very Center fast - it finally came in after we changed the Right Carrier
(which didn't improve all day as the Left one did).
Rich and I started the split lot - JL1509. The send aheads are running on
CMP.A2 for the 18% split. Rich will target the rest of the 18% split and
finish it up. The std portion can be run on CMP.A1 (or CMP.A2 when everything
gets changed back to normal).
For EE to get CMP.A2 back to normal the following will be done:
1. Remove 18% slurry and reconnect STD slurry.
2. Change Pad (Please SAVE this PAD also as it acted weird!)
3. Change 4" Disk back to STD 6" Disk.
4. Change the following variables -
Var 126 "Prog Cond Offset" back to 96,500.
Var 71 back to 1.55
7. Do std startup procedures for New Pad. - Bk-ins and MQC.
================================================================================
List of current DEP times for POLY and NITRIDE furnaces asof 1900 08 MAY 97
Notes: (1.) Nit.A1 Dummy Change on 07 May 1997
(2.) Nit.A2 Dummy Change on 08 May 1997
(3.) Poly.A1 Boat/Dummies on 29 Apr 1997
(4.) Poly.A2 Dummies on 05 May 1997
Furnace: Next Event DEP HRS:MINS REMAINING HRS:MINS
Poly.A1 Dummy Change at 34:35 31:30 03:05
Poly.A2 Tube pull at 44:00 35:41 08:19
Nitride.A1 Boat/Dummy Change at 21:16 19:16** 02:00
Nitride.A2 *Dummy change at 16:57 13:57 03:00
** Tool time is off by +4 hrs due to a cold start to the 4000 today
* With this system having the SIC boat, the current game plan is to see
how much life expectancy we can achieve prior to high particle excursion.
So if the the boat time expires please continue to track.
Nitride Systems Normal Dummy/Boat Exchange Event Schedule
Event (HRS:MINS)
New/Clean Quartz,Residents,Extra Dummies,Product Dummies 0:00
Residents 4:00
Boat,Residents,Extra Dummies 8:00
Residents 12:00
Boat,Residents,Extra Dummies,Product Dummies 16:00
Residents 20:00
Boat,Residents,Extra Dummies 24:00
Residents 28:00
Tube Pull 32:00
Poly Systems Normal Dummy/Boat Exchange Event Schedule
Event (HRS:MINS)
Dummy Exchange 10:00
Boat/Dummy 20:00
Dummy Exchange 30:00
Tube Pull 40:00
================================================================================
WW45, FY97, FAB 6 IMPLANT/DIFFUSION/CMP Preventive Maintenance Status
================================================================================
EQUIP PM DUE STATUS NOTE Diffusion/Wetlab Note ASDG::Diff6
------------ "A" SHIFT -------------------------------------COMMENTS-----------
CLN-OX.A4 W1 DONE 36.113
NIT-TUBE.A2 M1 DONE 104.133
ALLOY.A1 W1 DONE 84.112
------------ "B" SHIFT -------------------
CLN-OX.A3 W1 DONE 32.106
NIT-TUBE.A1 W1 DONE 100.124
ANNEAL.A1 W1 DONE 88.103
------------ "C" SHIFT -------------------
CLN-OX.A2 M1 DONE 28.111
GATE-OX.A2 W1 140.
POLY-TUBE.A2 M1 124.
CLN-OX.A5 W1 DONE 40.16
------------ "D" SHIFT -------------------
CLN-OX.A1 W1 DONE 24.117
GATE-OX.A1 M1 DONE 136.112
POLY-TUBE.A1 Y2 120. ONGOING, WKLY PERFORMED
CLN-OX.A6 W1 DONE 44.01
----------- CLEANS/WET LAB ---------------
A-SINK.D1 MO DONE 185.61
A-SINK.D2 WE DONE 189.63
A-SINK.F1 WE 197.
WL-STRIP.A1 MO 169.
WL-STRIP.A2 WE 173.
DNS-SCRUB.A2 WE DONE 193.25
===============================================================================
EQUIP PM DUE STATUS NOTE IMPLANT NOTE ASDG::EST_IMPLANT
-------------------------------------------------------COMMENTS----------------
MED-I.A1 WK 52.
TC WAIVED 52.618 PER ENG.
SBM DONE 52.617 PERFORMED WW44
------------------------------------------
MED-I.A2 WK DONE 55.422
RP WAIVED 55.424 SEE EXPLANATION IN NOTES
RH DONE 55.423 MISSED FROM WW44
------------------------------------------
HI-I.A1 WK DONE 72.659
SH DONE 72.661 MISSED FROM WW44
SC DONE 72.660
CL DONE 72.663
STV DONE 72.662
------------------------------------------
HI-I.A2 SH DONE 75.628 PERFORMED WW44
WK DONE 75.632
M DONE 75.633
PFF DONE 75.634
------------------------------------------
IMP-DOSE.A1 WK 92.
------------------------------------------
IMP-DOSE.A2 WK 95.
===============================================================================
EQUIP PM DUE STATUS NOTE C.M.P. NOTE ASDG::CMP
-------------------------------------------------------COMMENTS----------------
CMP.A1 W 6.
CMP.A2 M 8.
CMP.B1 W WAIVED 18.92 TOOL SHIPPED OUT FOR UPGRADE
CMP.B2 W 20.
CMP.B3 S 22.
CMP.B4 W DONE 24.3
SCRUB.A1 S 46.
SCRUB.A2 W DONE 48.89
SCRUB.A3 W DONE 50.47
SCRUB.C1-7 W DONE 55.41
===============================================================================
|
| 92.13 | PASSDOWN | FABSIX::D_CAUSE | | Sat May 10 1997 08:37 | 46 |
|
D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) -DOWN/WAITING FOR PARTS
CMP.B1 (Speedfam CMP-V) -GONE TO AZ.
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JD1447 100%ING ON.A5, NEEDS TOUCH-UPS
REM.RATE=3487 RUN TIME210
JD1398 READY TO RUN
CMP.B3 (Speedfam CMP-V) - DOWN/ FAILED 24HR MQC FOR REMOVAL RATE
NEEDS PAD CHANGE
JD1238 RAN FOR 400 SECS 100% ON THK.A4
CMP.B4 (Speedfam CMP-V)- UP/RUNNING JD1379 FIRST PASS TIME=195 RR=3830
XD1383 FIRST PASS TIME=195 RR=3950
BOTH WILL NEED 100% AND T/U
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - DOWN/REPAIR REP WORKING ON IT NOW
HOT lots in area:
----------------
BREAK IN WAFERS USED:15
MQC WAFERS USED:20 WAFERS USED
----------
|
| 92.14 | cmp passdown a shift | FABSIX::J_BLAIS | You have read | Sun May 11 1997 20:51 | 64 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 2 boxes
BREAKIN WAFERS 3 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up MQC na na
--------------------------------------------------------------------------------
CMP.A2 up MQC na na
--------------------------------------------------------------------------------
CMP.B1 Schld Down na na
--------------------------------------------------------------------------------
CMP.B2 up running jd1380 05/12/97 3:30pm 05/12/97 3:30am
--------------------------------------------------------------------------------
CMP.B3 up running jl1485,jd1449 05/12/97 1:30pm 05/12/97 7:30am
--------------------------------------------------------------------------------
CMP.B4 up running xe1243 05/12/97 3:40am 05/12/97 7:30am
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 05/10/97 @ 11:40am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 05/01/97 @ 11:40am
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
jd1399,jd1453,jd1457
lots in room: New specs/revs posted:
------------- ---------------------
33 lots
Lots Processed
jl1526/24
jl1492/16
xe1367/24
jl1486/21
jl1529/24
jl1324/12
xd1505/24
jd1540/24
xd1482/24
jl1528/23
jl1523/24
jl1487/24
jl1439/24
jd1386/23
jl1427/24
jd1474/24
jl1477/24
|
| 92.15 | passdown cmp b-shift 05/12/97 | FABSIX::M_PROVENCHER | | Mon May 12 1997 06:08 | 150 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 16 mqcs
BREAKIN WAFERS 61 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running JD1475 t:110 r/r:2414
tool was in mqc at shift change failed 1st set
after carrier change/pad was changed @ 11p
running breakins, tool crashed at 11:30pm while
running breakins, pad/carriers changed, started
breakins/mqc's again. tool up at
CMP.A1 24h MQCS COMPLETED : 05/12/97 @ 4:00 am
CMP.A1 24hr MQCS NEXT DUE : 05/13/97 @ 4:00 am
CMP.A2 (Strasbaugh 6DS-SP) - up/running JD1479 t:110 r/r:2445
tool was running breakins,mqc's at shift change.
this was 2nd set - passed. tool up at 9:30 pm
CMP.A2 24hr MQCS COMPLETED: 05/11/97 @ 9:30 pm
CMP.A2 24hr MQCS NEXT DUE : 05/12/97 @ 9:30 pm
CMP.B1 (Speedfam CMP-V) - dn/external
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - dn/pm
tool went down/shed for a pad change due to
2000 wafers primary pad. eeg to perform monthly
pm on tool as well. time down 1:30 am.
CMP.B2 24hr MQCS COMPLETED: when tool is returned from pm
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: 05/12/97 @ 1:30 am
CMP.B2 12hr MQCS NEXT DUE : 05/12/97 @ 1:30 pm
CMP.B3 (Speedfam CMP-V) - up/running jl1488 m1 t:180 rr:3960
jd1384 m2 start
CMP.B3 24hr MQCS COMPLETED: 05/11/97 @ 1:30 pm
CMP.B3 24hr MQCS NEXT DUE : 05/12/97 @ 1:30 pm
CMP.B3 12hr MQCS COMPLETED: 05/12/97 @ 7:30 am
CMP.B3 12hr MQCS NEXT DUE : 05/12/97 @ 7:30 pm
CMP.B4 (Speedfam CMP-V) -up/eng - running xe1064 m3 t:350 rr:
jd1471 m1 t:190 rr:
please keep to up/eng, per b.tower
CMP.B4 24hr MQCS COMPLETED: 05/12/97 @ 3:30 am
CMP.B4 24hr MQCS NEXT DUE : 05/13/97 @ 3:30 am
CMP.B4 12hr MQCS COMPLETED: 05/11/97 @ 11:30 pm
CMP.B4 12hr MQCS NEXT DUE : 05/12/97 @ 11:30 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 05/11/97 @ 3:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 05/12/97 @ 3:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 05/11/97 @ 3:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 05/12/97 @ 3:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 05/12/97 @ 7:30 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 05/13/97 @ 7:30 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* lots *
Down Equipment:
---------------
* cmp b1 (external) *
cmp.b2 pad change/monthly pm
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
--------------
* jd1457 pmd *
jd1453 pmd
jd1399 m3
Monitor status:
--------------
1 boxes of 12K mqc wafers
3 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 23 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see t.d.c.o. regarding modified single pass lot processing *
Lots/wafers processed
--------------------
* jl1466 m2 24 wafers *
jl1417 m2 21 wafers
jd1380 m2 24 wafers
jl1477 m1 24 wafers
jl1512 m1 23 wafers
jl1513 m1 24 wafers
jl1464 m1 24 wafers
jl1414 m2 19 wafers
xe1243 m2 19 wafers
jd1449 m1 23 wafers
jl1428 m2 24 wafers
jl1485 m1 24 wafers
jl1430 m2 12 wafers
jd1474 pmd 24 wafers
xe1480 pmd 24 wafers
xe1431 pmd 24 wafers
xe1479 pmd 24 wafers
jd1475 pmd 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
2 SPEEDFAM
5 STRASBAUGH
1 PLATES F/S
|
| 92.16 | Cmp Passdown A Shift | FABSIX::J_BLAIS | You have read | Mon May 12 1997 20:32 | 61 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 2 boxes
BREAKIN WAFERS 3 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up idle 05/13/97 4:15am na
--------------------------------------------------------------------------------
CMP.A2 up idle 05/12/97 9:40pm na
--------------------------------------------------------------------------------
CMP.B1 up idle na na
--------------------------------------------------------------------------------
CMP.B2 up idle 05/13/97 10:00am 05/13/97 7:15am
--------------------------------------------------------------------------------
CMP.B3 up running JD1448 05/13/97 5:20pm 05/13/97 7:30am
--------------------------------------------------------------------------------
CMP.B4 up running JD1454 05/13/97 3:40am 05/13/97 7:30am
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
JD1399
lots in room: New specs/revs posted:
------------- ---------------------
18 lots
Lots Processed: (16)
JD1471/24
XE1064/18
JL1525/24
XE1243/19
JL1524/24
JL1428/24
JL1497/24
JL1515/24
JL1430/12
JD1470/24
JL1426/24
JL1424/24
JL1498/24
JD1468/24
JL1460/9
jl1500/24
|
| 92.17 | passdown cmp b-shift 05/13/97 | FABSIX::M_PROVENCHER | | Tue May 13 1997 06:02 | 132 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 9 mqcs
BREAKIN WAFERS 47 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24h MQCS COMPLETED : 05/13/97 @ 6:00 am
CMP.A1 24hr MQCS NEXT DUE : 05/14/97 @ 6:00 am
CMP.A2 (Strasbaugh 6DS-SP) - up/idle
CMP.A2 24hr MQCS COMPLETED: 05/12/97 @ 10:00 pm
CMP.A2 24hr MQCS NEXT DUE : 05/13/97 @ 10:00 pm
CMP.B1 (Speedfam CMP-V) - dn/external
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - up/running JD1473 m3 t:400s rr:
CMP.B2 24hr MQCS COMPLETED: 05/13/97 @ 10:00 am
CMP.B2 24hr MQCS NEXT DUE : 05/14/97 @ 10:00 am
CMP.B2 12hr MQCS COMPLETED: 05/13/97 @ 7:30 am
CMP.B2 12hr MQCS NEXT DUE : 05/13/97 @ 7:30 pm
CMP.B3 (Speedfam CMP-V) - up/running jd1401 m1 t:200 rr:
CMP.B3 24hr MQCS COMPLETED: 05/12/97 @ 5:30 pm
CMP.B3 24hr MQCS NEXT DUE : 05/13/97 @ 5:30 pm
CMP.B3 12hr MQCS COMPLETED: 05/12/97 @ 9:00 pm
CMP.B3 12hr MQCS NEXT DUE : 05/13/97 @ 9:00 am
CMP.B4 (Speedfam CMP-V) -up/eng - running jd1376 m3 t:400 rr:
jl1412 m2 t:195 rr:
please keep to up/eng, per b.tower
CMP.B4 24hr MQCS COMPLETED: 05/13/97 @ 6:30 am
CMP.B4 24hr MQCS NEXT DUE : 05/14/97 @ 6:30 am
CMP.B4 12hr MQCS COMPLETED: 05/13/97 @ 6:30 am
CMP.B4 12hr MQCS NEXT DUE : 05/13/97 @ 6:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 05/12/97 @ 5:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 05/13/97 @ 5:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 05/12/97 @ 5:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 05/13/97 @ 5:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 05/12/97 @ 5:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 05/13/97 @ 5:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* 3 lots *
Down Equipment:
---------------
* cmp b1 (external) *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
--------------
* jd1399 m3 *
Monitor status:
--------------
3 boxes of 12K mqc wafers
3 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*14 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see t.d.c.o. regarding modified single pass lot processing *
Lots/wafers processed
--------------------
* jd1454 m1 23 wafers *
jd1384 m2 24 wafers
jd1381 m2 23 wafers
jd1456 m1 24 wafers
jd1455 m1 24 wafers
xe1199 m1 19 wafers
jd1459 m1 24 wafers
jl1425 m1 19 wafers
jd1448 m1 24 wafers
jd1422 m2 24 wafers
jd1491 m2 23 wafers
jl1530 pmd 24 wafers
jd1402 pmd 24 wafers
jd1493 pmd 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
2 SPEEDFAM
5 STRASBAUGH
1 PLATES F/S
|
| 92.18 | Cmp Passdown A Shift | FABSIX::J_BLAIS | You have read | Tue May 13 1997 20:45 | 60 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 2 boxes
BREAKIN WAFERS 3 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up idle 05/14/97 5:15am na
--------------------------------------------------------------------------------
CMP.A2 up/eng running eng exp. breaking in new pad now.....
--------------------------------------------------------------------------------
CMP.B1 Out on Vacation na na
--------------------------------------------------------------------------------
CMP.B2 up running jl1516,jl1420 05/14/97 10:00am 05/14/97 6:20am
--------------------------------------------------------------------------------
CMP.B3 DWN Failed for High Particles
--------------------------------------------------------------------------------
CMP.B4 up/eng running jd1399 ENG lot 05/14/97 6:00am 05/14/97 7:30am
at 18% slurry, tool is on the barrel.
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
lots in room: New specs/revs posted:
------------- ---------------------
12 lots
Lots Processed: (13)
jd1473/22
jd1542/24
jd1458/24
jl1465/24
jl1510/24
xd1336/24
jd1376/22
jd1534/24
jl1412/24
jd1401/24
jd1459/20
xe1478/22
jd1493/24
|
| 92.19 | PASSDOWN | FABSIX::D_CAUSE | | Wed May 14 1997 08:35 | 49 |
|
D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -DOWN/MONTHLY PM
CMP.A2 (Strasbaugh 6DS-SP) -UP/ENG RUNNING MQC'S WITH 18% SLURRY PRE READ
ON THK.A5
CMP.B1 (Speedfam CMP-V) -GONE TO AZ.
CMP.B2 (Speedfam CMP-V) - UP/IDLE
CMP.B3 (Speedfam CMP-V) - UP/RUNNING **HOT LOT** XE1368 SA READING ON THK.A5
RAN FOR 170 SECS
JD1494 RAN FOR 800 SECS NEEDS TU READ
ON THK.A1
CMP.B4 (Speedfam CMP-V)- UP/RUNNING **HOT LOT** JD1543 FIRST PASS RR=14800
RUN TIME=15 SEC
JD1399 SPLIT LOT 18% SLURRY SPLIT COMPL.
WAFERS ARE BY THE TOOL REMAINING 12W
READ ON THK.A4 NEED TOUCH UP SEE MATT'S
REMARK BEFORE YOU MOVE IT ON
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:***2*** ONE MORE DUE IN AROUND SHIFT CHANGE
----------------
BREAK IN WAFERS USED:15
MQC WAFERS USED:35 WAFERS USED
----------
|
| 92.20 | | FABSIX::M_CADIEUX | KADOU | Thu May 15 1997 08:39 | 46 |
|
CMP D SHIFT PASSDOWN
CMP.A1(Strasbaugh 6DS-SP)-UP/RUNNING-2 -JD1551(PMD) RUNNING100% ON.A1
NEEDS TOUCH-UPS, R.R=2700 TIME=100
-JD1562(PMD) NEEDS 100%
R.R.=2400 TIME=100
CMP.A2(Strasbaugh 6DS-SP)-UP/RUNNING-1 -XD1506(PMD) NEEDS 100%
AND TOUCH-UPS R.R.=3200 TIME=80
CMP.B2(Speedfam CMP-V)-UP/RUNNING-2 -XE1290(ILD2) RUNNING FIRST PASS
R.R.=2645 TIME=250
-JD1446(ILD2) READY TO RUN
CMP.B3 (Speedfam CMP-V)-DOWN/REPAIR -XE1335(ILD1)
NEEDS FINAL MEASUREMENT
CMP.B4 (Speedfam CMP-V)UP/IDLE -JD1405(ILD2) R.R=3491 TIME=215
NEEDS DRG AND FINAL
-JL1066,JL1508(ILD1) SA'S RUNNING
TIME=180
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (On-track scrubber) - UP/IDLE
HOT LOTS IN AREA:
-------------------
NONE
-------------------
MQC WAFERS USED:13
-------------------
MQC WAFERS AVAIL:4
-------------------
LOTS ON HOLD:NONE
___________________
|
| 92.21 | | FABSIX::M_CADIEUX | KADOU | Fri May 16 1997 08:48 | 45 |
|
CMP D SHIFT PASSDOWN
CMP.A1(Strasbaugh 6DS-SP)-UP/RUNNING-1 -JD1532(PMD) NEEDS TOUCH-UPS
MEASURED ON.A1
CMP.A2(Strasbaugh 6DS-SP)-DOWN-VERIFY-U -MQC'S POST READING ON.A5
CMP.B2(Speedfam CMP-V)-UP/RUNNING-2 -JL1518(ILD1) READING SA'S ON.A1
TIME=180
-JL1517(ILD1) READY TO START
CMP.B3 (Speedfam CMP-V)-UP/RUNNING-2 -JD1444(ILD2)SA'S RUN FOR 180 SEC
MEASURING ON.A4
-JL1519(ILD1)SA'S RUN FOR 180 SEC
MEASURING ON.A4
CMP.B4 (Speedfam CMP-V)UP/RUNNING-2 -JD1239(ILD3) RUN FIRST 400 SEC
NOT ABLE TO READ ON ANY UV1050
-JD1379(ILD2) RUNNING FIRST PASS
R.R=3900 TIME=190
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (On-track scrubber) - UP/IDLE
HOT LOTS IN AREA:
-------------------
NONE
-------------------
MQC WAFERS USED:11
-------------------
MQC WAFERS AVAIL:4
-------------------
LOTS ON HOLD:NONE
___________________
|
| 92.22 | | FABSIX::M_CADIEUX | KADOU | Sat May 17 1997 08:23 | 41 |
|
CMP D SHIFT PASSDOWN
CMP.A1(Strasbaugh 6DS-SP)-DOWN/VERIFY-U -BREAKING IN NEW PAD
CMP.A2(Strasbaugh 6DS-SP)-UP/RUNNING-1 -JD1566(PMD) NEEDS 100% ON .A4
LRR=2656 RRR=2679 TIME=100
**ROCKET LOT**
CMP.B2(Speedfam CMP-V)-UP/RUNNING-2 -JD1447(ILD2) R.R=3336 TIME=220
100%ING 0N.A5
-JL1464(ILD2) READY TO START
CMP.B3 (Speedfam CMP-V)-UP/RUNNING-1 -JL1513(ILD2) SA'S READ ON.A5
TIME=200, READY FOR FIRST PASS
CMP.B4 (Speedfam CMP-V)UP/RUNNING-1 -JL1514(ILD1) IN SCRUB.A3
NEEDS 100%, R.R=4074 TIME=190
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (On-track scrubber) - UP/IDLE
HOT LOTS IN AREA: ROCKET LOT
-------------------
**JD1566(PMD) RUN ON.A2**
-------------------
MQC WAFERS USED:6
-------------------
MQC WAFERS AVAIL:4
-------------------
LOTS ON HOLD:YD0257
___________________
|
| 92.23 | notespassdown cmp b-shift 05/18/97 | FABSIX::M_PROVENCHER | | Sun May 18 1997 07:01 | 128 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 0 mqcs
BREAKIN WAFERS 41 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24h MQCS COMPLETED : 05/17/97 @ 11:30 am
CMP.A1 24hr MQCS NEXT DUE : 05/18/97 @ 11:30 am
CMP.A2 (Strasbaugh 6DS-SP) - up/running JL1548 24w t:110 r/r:2160
CMP.A2 24hr MQCS COMPLETED: 05/17/97 @ 9:30 am
CMP.A2 24hr MQCS NEXT DUE : 05/18/97 @ 9:30 am
CMP.B1 (Speedfam CMP-V) - dn/external
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - up/running XD1382 m1 start
CMP.B2 24hr MQCS COMPLETED: 05/17/97 @ 11:00 am
CMP.B2 24hr MQCS NEXT DUE : 05/18/97 @ 11:00 am
CMP.B2 12hr MQCS COMPLETED: 05/17/97 @ 11:00 pm
CMP.B2 12hr MQCS NEXT DUE : 05/18/97 @ 11:00 am
CMP.B3 (Speedfam CMP-V) - up/running xe1431 m1 t:170 rr:3190
xd1382 m1 t:185 rr:4061
CMP.B3 24hr MQCS COMPLETED: 05/17/97 @ 2:00 pm
CMP.B3 24hr MQCS NEXT DUE : 05/18/97 @ 2:00 pm
CMP.B3 12hr MQCS COMPLETED: 05/17/97 @ 8:30 pm
CMP.B3 12hr MQCS NEXT DUE : 05/18/97 @ 8:30 am
CMP.B4 (Speedfam CMP-V) -up/running jd1380 m3 t:400 rr:2788
jd1474 m1 t:190 rr:
CMP.B4 24hr MQCS COMPLETED: 05/17/97 @ 2:00 pm
CMP.B4 24hr MQCS NEXT DUE : 05/18/97 @ 2:00 pm
CMP.B4 12hr MQCS COMPLETED: 05/18/97 @ 3:30 am
CMP.B4 12hr MQCS NEXT DUE : 05/18/97 @ 3:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 05/17/97 @ 3:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 05/18/97 @ 3:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 05/17/97 @ 3:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 05/18/97 @ 3:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 05/17/97 @ 3:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 05/18/97 @ 3:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* 3 lots *
Down Equipment:
---------------
* cmp b1 (external) *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* jl1528 m1 2 wafers cmp.b4 see pex *
Hold Lots:
--------------
* yd0257 ILD23 *
Monitor status:
--------------
4 boxes of 12K mqc wafers
� box of 50K breakin wafers
Number of product lots in room:
------------------------------
* 12 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* none *
Lots/wafers processed
--------------------
* jl1528 m1 17 wafers *
jl1520 m1 24 wafers
jd1461 m1 24 wafers
jl1488 m2 24 wafers
jl1486 m2 21 wafers
JD1462 m2 24 wafers hotlot
XE1368 m2 21 wafers hotlot
XE1026 m3 21 wafers
JL1527 m1 24 wafers
JL1568 pmd 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
24 SPEEDFAM
6 STRASBAUGH
7 PLATES F/S
|
| 92.24 | Cmp Passdown | FABSIX::J_BLAIS | You have read | Sun May 18 1997 20:50 | 58 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 2 boxes
BREAKIN WAFERS 3 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 dwn crash, running breakin/mqc na
--------------------------------------------------------------------------------
CMP.A2 up/mqc won't pass mqc's.%dev to high pad replaced again, breaking in
--------------------------------------------------------------------------------
CMP.B1 Out on Vacation na na
--------------------------------------------------------------------------------
CMP.B2 up running xd1242,jl1492 05/19/97 12:20pm 05/19/97 7:20am
--------------------------------------------------------------------------------
CMP.B3 up running xm1435 05/19/97 3:30pm 05/19/97 7:30am
--------------------------------------------------------------------------------
CMP.B4 dwn failed MQC's for particles, ee tried paging ashland but no go..
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
2 lots for eng.
lots in room: New specs/revs posted:
------------- ---------------------
13 lots
Lots Processed: (11)
xe1431/24
jd1461/24
jd1474/24
xd1382/23
jl1571a/12
jl1568/24
jl1548/24
xe1368/21
xe1243/19
jd1380/24
xd1383/24
|
| 92.25 | passdown cmp b-shift 05/19/97 | FABSIX::M_PROVENCHER | | Mon May 19 1997 06:48 | 136 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 0 mqcs
BREAKIN WAFERS 41 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24h MQCS COMPLETED : 05/18/97 @ 7:00 pm
CMP.A1 24hr MQCS NEXT DUE : 05/19/97 @ 7:00 pm
CMP.A2 (Strasbaugh 6DS-SP) - up/running
CMP.A2 24hr MQCS COMPLETED: 05/19/97 @ 12:30 am
CMP.A2 24hr MQCS NEXT DUE : 05/20/97 @ 12:30 am
CMP.B1 (Speedfam CMP-V) - dn/external
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - up/idle
CMP.B2 24hr MQCS COMPLETED: 05/18/97 @ 12:30 pm
CMP.B2 24hr MQCS NEXT DUE : 05/19/97 @ 12:30 pm
CMP.B2 12hr MQCS COMPLETED: 05/19/97 @ 7:30 am
CMP.B2 12hr MQCS NEXT DUE : 05/19/97 @ 7:30 pm
CMP.B3 (Speedfam CMP-V) - up/JD1554 M1 start
CMP.B3 24hr MQCS COMPLETED: 05/18/97 @ 3:30 pm
CMP.B3 24hr MQCS NEXT DUE : 05/19/97 @ 3:30 pm
CMP.B3 12hr MQCS COMPLETED: 05/19/97 @ 2:30 am
CMP.B3 12hr MQCS NEXT DUE : 05/19/97 @ 2:30 pm
CMP.B4 (Speedfam CMP-V) -dn/unsched
tool down at shift change,no ashland reps to
change filter.ran mqc's after scrubbing tool, and
having slurry flushed. Only carrier 4 failed for
particles. cleaning carrier, and running another
set of mqc's.
CMP.B4 24hr MQCS COMPLETED: 05/18/97 @ 3:00 pm
CMP.B4 24hr MQCS NEXT DUE : 05/19/97 @ 3:00 pm
CMP.B4 12hr MQCS COMPLETED: 05/18/97 @ 6:30 am
CMP.B4 12hr MQCS NEXT DUE : 05/18/97 @ 6:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 05/18/97 @ 4:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 05/19/97 @ 4:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 05/18/97 @ 4:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 05/19/97 @ 4:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 05/18/97 @ 4:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 05/19/97 @ 4:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* see hold lots *
Down Equipment:
---------------
* cmp b1 (external) *
cmp b4 particles
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
--------------
* yd0257 ILD23 *
xe0863 ILD1
Monitor status:
--------------
4 boxes of 12K mqc wafers
� box of 50K breakin wafers
Number of product lots in room:
------------------------------
* 5 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* none *
Lots/wafers processed
--------------------
* JL1492 M2 16 wafers
JL1536 M1 24 wafers
Jl1510 M2 24 wafers
jd1566 m1 24 wafers rocketlot
JL1547 pmd 23 wafers
JL1544 pmd 24 wafers
JL1571 pmd 12 wafers
Jl1577 pmd 24 wafers
JL1575 pmd 24 wafers
JL1570 pmd 24 wafers
XM1435 M1 24 Wafers
JL1529 M1 24 Wafers
JD1455 M2 24 Wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
24 SPEEDFAM
6 STRASBAUGH
7 PLATES F/S
|
| 92.26 | Cmp Passdown | FABSIX::J_BLAIS | You have read | Mon May 19 1997 19:56 | 52 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 3 boxes
BREAKIN WAFERS 2 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up idle 05/19/97 7:30pm na
--------------------------------------------------------------------------------
CMP.A2 up/mqc new pad currently breaking it in will need full mqc(eng exp. )
--------------------------------------------------------------------------------
CMP.B1 Out on Vacation na na
--------------------------------------------------------------------------------
CMP.B2 up idle 05/20/97 3:40pm 05/20/97 7:20am
--------------------------------------------------------------------------------
CMP.B3 up running jd1543,jl1524 05/20/97 2:30pm 05/20/97 4:30am
--------------------------------------------------------------------------------
CMP.B4 up running jl1496 05/20/97 4:30pm 05/20/97 10:00pm
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
2 lots for eng.
lots in room: New specs/revs posted:
------------- ---------------------
7 lots
Lots Processed: (06)
jd1554/19
xe1291/23
jd1455/20
xe1333/24
jl1570/24
jl1574/24
|
| 92.27 | B shift passdown | FABSIX::S_MCREYNOLDS | | Tue May 20 1997 06:21 | 127 |
|
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 4 mqcs
BREAKIN WAFERS 41 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running JL1579 t:110 r/r:2344 22 wafers
CMP.A1 24h MQCS COMPLETED : 05/19/97 @ 12:00 am
CMP.A1 24hr MQCS NEXT DUE : 05/20/97 @ 12:00 am
CMP.A2 (Strasbaugh 6DS-SP) - up/running XE1433 t:100 r/r:2646 18 wafers
XE1504 t:100 r/r:2646 24 wafers
CMP.A2 24hr MQCS COMPLETED: 05/19/97 @ 09:30 pm
CMP.A2 24hr MQCS NEXT DUE : 05/20/97 @ 09:30 pm
CMP.B1 (Speedfam CMP-V) - dn/external
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - up/running YD0257 m23 see remarks
CMP.B2 24hr MQCS COMPLETED: 05/19/97 @ 3:30 pm
CMP.B2 24hr MQCS NEXT DUE : 05/20/97 @ 3:30 pm
CMP.B2 12hr MQCS COMPLETED: 05/20/97 @ 3:30 am
CMP.B2 12hr MQCS NEXT DUE : 05/20/97 @ 3:30 pm
CMP.B3 (Speedfam CMP-V) - up/JD1468 M2 T:180/JD1500 M2 T:180
CMP.B3 24hr MQCS COMPLETED: 05/19/97 @ 2:30 pm
CMP.B3 24hr MQCS NEXT DUE : 05/20/97 @ 2:30 pm
CMP.B3 12hr MQCS COMPLETED: 05/20/97 @ 5:00 am
CMP.B3 12hr MQCS NEXT DUE : 05/20/97 @ 5:00 pm
CMP.B4 (Speedfam CMP-V) -up/
CMP.B4 24hr MQCS COMPLETED: 05/19/97 @ 5:00 pm
CMP.B4 24hr MQCS NEXT DUE : 05/20/97 @ 5:00 pm
CMP.B4 12hr MQCS COMPLETED: 05/20/97 @ 4:00 am
CMP.B4 12hr MQCS NEXT DUE : 05/20/97 @ 4:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 05/19/97 @ 4:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 05/20/97 @ 4:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 05/19/97 @ 4:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 05/20/97 @ 4:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 05/19/97 @ 4:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 05/20/97 @ 4:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* see hold lots *
Down Equipment:
---------------
* cmp b1 (external) *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
--------------
* XD0990 PMD *
xe0863 ILD1
Monitor status:
--------------
4 boxes of 12K mqc wafers
� box of 50K breakin wafers
Number of product lots in room:
------------------------------
* 14 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* none *
Lots/wafers processed
--------------------
* JL1515 M1 24 wafers
JD1456 M2 24 wafers
JL1496 M2 23 wafers
JD1470 M2 24 WAFERS
JD1471 M2 24 WAFERS
JD1543 M2 24 wafers *HOT*
JD1524 M1 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
24 SPEEDFAM
6 STRASBAUGH
7 PLATES F/S
|
| 92.28 | Cmp passdown A Shift | FABSIX::J_BLAIS | You have read | Tue May 20 1997 20:53 | 56 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 2 boxes
BREAKIN WAFERS 0 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up running xd0990 05/21/97 8:00pm na
--------------------------------------------------------------------------------
CMP.A2 up 05/20/97 9:30
--------------------------------------------------------------------------------
CMP.B1 Out on Vacation na na
--------------------------------------------------------------------------------
CMP.B2 up running jd1379 05/21/97 7:20pm now
--------------------------------------------------------------------------------
CMP.B3 up/mqc was running xe0863 Breaking in new pad after DF calb.
--------------------------------------------------------------------------------
CMP.B4 up running jd1540, xe1368 05/21/97 7:40pm 05/21/97 7:40am
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
lots in room: New specs/revs posted:
------------- ---------------------
22 lots
Lots Processed: (10)
jd1471/24
xe1368/21
jl1500/24
xd1200/20
jd1468/24
xe1504/24
jl1579/22
xe1433/18
jl1576/24
jl1425/19
|
| 92.29 | B shift passdown | FABSIX::S_MCREYNOLDS | | Wed May 21 1997 07:05 | 128 |
|
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 5 mqcs
BREAKIN WAFERS 39 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24h MQCS COMPLETED : 05/20/97 @ 12:00 am
CMP.A1 24hr MQCS NEXT DUE : 05/21/97 @ 12:00 am
CMP.A2 (Strasbaugh 6DS-SP) - up/idle
CMP.A2 24hr MQCS COMPLETED: 05/20/97 @ 10:30 pm
CMP.A2 24hr MQCS NEXT DUE : 05/21/97 @ 10:30 pm
CMP.B1 (Speedfam CMP-V) - dn/external
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - up/running
CMP.B2 24hr MQCS COMPLETED: 05/20/97 @ 3:30 pm
CMP.B2 24hr MQCS NEXT DUE : 05/21/97 @ 3:30 pm
CMP.B2 12hr MQCS COMPLETED: 05/21/97 @ 3:00 am
CMP.B2 12hr MQCS NEXT DUE : 05/21/97 @ 3:00 pm
CMP.B3 (Speedfam CMP-V) - up/running
CMP.B3 24hr MQCS COMPLETED: 05/20/97 @ 11:30 am
CMP.B3 24hr MQCS NEXT DUE : 05/21/97 @ 11:30 am
CMP.B3 12hr MQCS COMPLETED: 05/21/97 @ 1:00 am
CMP.B3 12hr MQCS NEXT DUE : 05/21/97 @ 1:00 pm
CMP.B4 (Speedfam CMP-V) -dn/sched
barrel change, mqc's in process
CMP.B4 24hr MQCS COMPLETED: in process
CMP.B4 24hr MQCS NEXT DUE : n/a
CMP.B4 12hr MQCS COMPLETED: 05/21/97 @ 7:30 am
CMP.B4 12hr MQCS NEXT DUE : 05/21/97 @ 7:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 05/19/97 @ 4:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 05/20/97 @ 4:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 05/19/97 @ 4:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 05/20/97 @ 4:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle tool was down @ shift change up @9:30
CMP-SCRUB.A3 24hr MQCS COMPLETED: 05/19/97 @ 4:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 05/20/97 @ 4:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* see hold lots *
Down Equipment:
---------------
* cmp b1 (external) *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
--------------
* XD0990 PMD put per pss lot still in development stage *
YD0257 M3
Monitor status:
--------------
2 boxes of 12K mqc wafers
1 box of 50K breakin wafers
Number of product lots in room:
------------------------------
* 23 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* none *
Lots/wafers processed
--------------------
*JL1581 PMD 24 wafers
JD1379 M3 23 wafers
JD1462 M3 24 wafers
XE1368 m3 21 wafers
JD1540 m3 20 wafers
JL0718 M1 23 wafres
JL1097 M1 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
24 SPEEDFAM
6 STRASBAUGH
7 PLATES F/S
|
| 92.30 | Cmp Passdown A Shift | FABSIX::J_BLAIS | You have read | Wed May 21 1997 20:46 | 63 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 2 boxes
BREAKIN WAFERS 1 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up running jl1599@tup, jd1564 05/22/97 1:45am na
--------------------------------------------------------------------------------
CMP.A2 up just finished 1 so now idle. 05/22/97 1:30pm
--------------------------------------------------------------------------------
CMP.B1 Out on summer break na na
--------------------------------------------------------------------------------
CMP.B2 up running jl1525,jd1454 05/22/97 7:20pm 05/22/97 7:20pm
--------------------------------------------------------------------------------
CMP.B3 up running xd1478,jd1401 05/21/97 12:45pm 05/22/97 3:00am
--------------------------------------------------------------------------------
CMP.B4 up idle Mqc to be determined dependend on MSS 05/22/97 7:40am
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
MQC done.
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
xd0990 eng lot, metro. problems
lots in room: New specs/revs posted:
------------- ---------------------
29 lots
Lots Processed: (16)
jl1518/24
jl1526/24
jl1572/24
jd1379/23
jl1066/23
yd0257/23
jl1511/24
jl1512/23
xe0863/24
jd1540/20
jl1580/24
jl1097/24
jd1448/22
jd1451/22
jd1566/24
jl1602/24
|
| 92.31 | PASSDOWN | FABSIX::D_CAUSE | | Thu May 22 1997 08:39 | 52 |
|
D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/MQC FAILED MQC AFTER PAD CHANGE RIGHT CARRIER
ONLY AT 14.3% WILL NEED MORE BREAKINS AND
ANOTHER MQC.(PASSED PARTICLES)
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING **HOT LOT** JD1616 NEEDS 100% AND TU
LRR=2497 RRR=2607 TIME=121 116
XE1166 NEEDS TU 100%ED ON .A1
LRR=2446 RRR=2537 TIME=135 131
CMP.B1 (Speedfam CMP-V) -GONE TO AZ.
CMP.B2 (Speedfam CMP-V) - UP/RUNNING XD1336 M2 RUNNING T/U WILL NEED DRG
AND FINAL ON THK.A5 RR=4330 TIME=180
JD1449 M2 SCRUB.A3 NEEDS 100% AND
T/U ON THK.A5 RR=3352 TIME=220
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JD1458 M1 SENDAHEADS EVALUATING
TIME 180 SECS
JD1444 M3 100% ON .A5
CMP.B4 (Speedfam CMP-V) - UP/RUNNING JD1402 M1 100%ING ON .A4 RR=3360 T=225
JD1493 M1 SCRUB.A2 NEEDS 100% AND T/U
READ ON THK.A4 RR=3240 TIME=220
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE JD1493
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE JD1449
HOT lots in area:***1***
----------------
BREAK IN WAFERS USED:15
MQC WAFERS USED:10 WAFERS USED
----------
|
| 92.32 | | FABSIX::M_CADIEUX | KADOU | Fri May 23 1997 08:34 | 44 |
|
CMP D SHIFT PASSDOWN
CMP.A1(Strasbaugh 6DS-SP)-UP/RUNNING-1 -JD1551(ILD1) NEEDS 100% AND TU'S
CMP.A2(Strasbaugh 6DS-SP)-UP/RUNNING-1 -JD1457(ILD1) NEEDS 100% AND TU'S
CMP.B2(Speedfam CMP-V)-UP/RUNNING-2 -JD1542(ILD1) SA'S RUN
TIME=180 MEASURING ON.A5
-JD1453(ILD1) READY TO START
CMP.B3 (Speedfam CMP-V)-UP/RUNNING-2 -JD1458(ILD1) 5 NEW SA RAN @180 SEC
MEASURED ON.A5
-JD1444(ILD3) NEEDS TU'S
MEASURED ON.A5
CMP.B4 (Speedfam CMP-V)UP/RUNNING-1 -JD1468(ILD3) FIRST 400 SEC RAN
100%ING ON.A1
-JD1446(ILD3) TIME=600 SEC
LOT WAS PLACED ON HOLD FOR PROCESS
ENG. TO CHECK HIGH DEV.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (On-track scrubber) - DOWN/VENDOR
HOT LOTS IN AREA:
-------------------
JD1468(ILD3) ON.B4
-------------------
MQC WAFERS USED:30
-------------------
MQC WAFERS AVAIL:
-------------------
LOTS ON HOLD:XD1070
XD1116
___________________
|
| 92.33 | | FABSIX::M_CADIEUX | KADOU | Sat May 24 1997 08:34 | 53 |
|
CMP D SHIFT PASSDOWN
CMP.A1(Strasbaugh 6DS-SP)-UP/RUNNING-1 -JD1597(PMD) 100%ED ON .A1
NEEDS TU'S
CMP.A2(Strasbaugh 6DS-SP)-DOWN/VERIFY-U -FAILED 2ND MQC, BREAKIN IN AGAIN
NEED MQC'S RUN
ANNOTATIONS STILL OPEN:
12171-12172,12182,12183
CMP.B2(Speedfam CMP-V)-UP/RUNNING-2 -JL1509(ILD2) IN SCRUB.A2
NEEDS 100%, TIME=240 R.R.=3194
MEASURED ON.A5
-JL1499(ILD2) NEEDS TU'S
TIME=220 R.R=3535
MEASURED ON.A4
CMP.B3 (Speedfam CMP-V)-UP/RUNNING-3 -JL1508(ILD2) NEEDS TU'S
MEASURED ON.A5
-JL1519(ILD2),JD1534(ILD1)
WAFERS 1-5 ON BOTH LOTS HAVE
BEEN POLISHED, NEED NEW SA'S RUN
(PAD CHANGED)
CMP.B4 (Speedfam CMP-V)UP/RUNNING-2 -XD1383(ILD3) FIRST400 SEC RUN
IN SCRUB.A1
-JL1521(ILD2) RUNNING FIRST PASS
TIME=200 R.R=4000
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (On-track scrubber) - DOWN/REPAIR
HOT LOTS IN AREA:
-------------------
**NONE**
-------------------
MQC WAFERS USED:27
-------------------
MQC WAFERS AVAIL:2
-------------------
LOTS ON HOLD:XD1070
XD1116
JD1446
___________________
|
| 92.34 | Cmp passdown A Shift | FABSIX::J_BLAIS | You have read | Tue May 27 1997 20:43 | 53 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 4 boxes
BREAKIN WAFERS 2 boxes (eng wafers, use them if really needed)
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up IDLE 05/28/97 11:30am na
--------------------------------------------------------------------------------
CMP.A2 up/dwn mqc's failed for %dev. on going
--------------------------------------------------------------------------------
CMP.B1 Out on summer break na na
--------------------------------------------------------------------------------
CMP.B2 up running xe1291 05/28/97 10:20am 05/27/97 8:00pm
--------------------------------------------------------------------------------
CMP.B3 up running xd1116,xd1070 05/28/97 11:30am 05/27/97 8:00pm
--------------------------------------------------------------------------------
CMP.B4 up running jd1448,xe1432 05/28/97 1:00pm 05/27/97 8:00pm
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, (On-track scrubbers) - up/idle
MQC done.
CMP-SCRUB.A3 (On-track scrubbers) - Down/hard, board went up in smoke.
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
na xb1590,jd1459
lots in room: New specs/revs posted:
------------- ---------------------
19 lots
Lots Processed: (04)
jd1567/24
xe1480/24
jl1068/24
jl1569/24
|
| 92.35 | PASSDOWN | FABSIX::D_CAUSE | | Thu May 29 1997 08:36 | 47 |
|
D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.B1 (Speedfam CMP-V) -GONE TO AZ.
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JL1525 ILD2 RR3225 TIME=240
JD1532 ILD1 RR3375 TIME=225
BOTH WILL NEED 100% AND T/U
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JL0718 ILD2 NEEDS 100% AND T/U RR=2906
JL1187 ILD2 100%ING ON .A5 RR=2986
WILL NEED T/U
CMP.B4 (Speedfam CMP-V) - UP/VERIFY EVALUATEING 2ND MQC'S PARTICLES PASSED
FAILED FOR RANGE AND HAD ONE CARRIER
WITH HEAVY EDGE FAST REMOVAL
CMP-SCRUB.A1 (On-track scrubber) - DOWN CONTINUED PARTICLE PROBLEMS
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:***1***
----------------
JD1616
BREAK IN WAFERS USED:15
MQC WAFERS USED:22 WAFERS USED
----------
|
| 92.36 | PASSDOWN | FABSIX::D_CAUSE | | Fri May 30 1997 08:41 | 49 |
|
D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/MQC RUNNING MQC AFTER PAD CHANGE
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING JL1634 100%ING ON THK.A5 NEEDS MINOR T/U
CMP.B1 (Speedfam CMP-V) -GONE TO AZ.
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JD1402 ILD2 RR=3255 TIME=235
JD1493 ILD2 RR=3030 TIME=245
BOTH NEED 100% AND TOUCHUP
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JD1449 ILD3 RUNNING 1ST 400 SECONDS
XD1336 ILD3 RUNNING 1ST 400 SECONDS
CMP.B4 (Speedfam CMP-V) - UP/RUNNING JD1535 ILD1 S/A RUN AND READ ON .A5
TIME=200 RR=
NEEDS 1ST PASS
JL1579 ILD1 S/A RUN AND READ ON .A5
TIME=200 RR=
NEEDS 1ST PASS
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE JD1402
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE JD1493
HOT lots in area:
----------------
BREAK IN WAFERS USED:15
MQC WAFERS USED:5 WAFERS USED
----------
|
| 92.37 | PASSDOWN | FABSIX::D_CAUSE | | Sat May 31 1997 08:35 | 48 |
|
D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.B1 (Speedfam CMP-V) -GONE TO AZ.
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JD1471 ILD3 RUNNING FIRST 400 SECS
XE1479 ILD1 100%ING ON THK.A5 RR=2860
RUN TIME=265
CMP.B3 (Speedfam CMP-V) - DOWN/CRASH YE0263 ILD1 RUNNING 1ST PASS
3 WAFERS INVOLVED IN CRASH IN SCRUB
STATION 1 DUST OTHER 2 WILL NEED TO
BE LOOKED AT BY PSS.
JD1559 & JD1560 S/A DONE AND READ ON
THICKNESS .A1 RUN TIME=210 FOR BOTH
CMP.B4 (Speedfam CMP-V) - UP/RUNNING YD0257 ILD3 FINISHING T/U WILL NEED
TO GO ON HOLD (SEE REMARKS)
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:15
MQC WAFERS USED:0 WAFERS USED
----------
|