| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 91.1 | cmp passdown a shift | FABSIX::J_BLAIS | You have read | Mon Mar 31 1997 20:46 | 84 |
| Note: We had a major back-up on the thickness tools, thickness.a5 had 6 (Six)
lots backed up, thickness.a4 had 4+ backed up which caused 5+ hours of
idle time on the polishing tools. contributors were a lot of ild3 lots
that usually require a lot of repetitive 100% testing also 2 ILD3 lots
were remarked for 100% post thickness measurement. There was a
consistent back-up by 1-6 lots through the whole shift. Another
contributor was that we only have 2 thickness tools which were giving
us trouble for pattern req which had to be re-taught. Also our 3rd
thickness tool is still not available to us, we sure could of used it.
CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 4 boxes
BREAKIN WAFERS 5 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 MQC Needs MQC possible pad change too na
--------------------------------------------------------------------------------
CMP.A2 dwn needs pad/carriers replaced ------------- na
--------------------------------------------------------------------------------
CMP.B1 up running xd0836, xe0949. 04/01/97 9:00am 04/01/97 7:30am
--------------------------------------------------------------------------------
CMP.B2 up idle, mqc pre-loaded ready to go now 04/01/97 7:15am
--------------------------------------------------------------------------------
CMP.B3 up runing jd1135 sa only RR 3402@170s now 04/01/97 7:30am
runing yd0241 100% mea. on .a5 now
MQC preread but not ran pre readings are in .a4 under cmp.b4 pre.
we has a big back up on thickness tools so it would of been
impossible to run them, sorry.
-------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 03/31/97 @ 1:30 am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 04/01/97 @ 1:30 am
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
jl1396@Films now eta 9:30pm
lots in room: New specs/revs posted:
------------- ---------------------
lots na
Lots Processed
jl1212/
jd1106/24
jd1103/24
jl1256/24
jl1259/24
jl1257/24
jl1250/24
jd1278/6
jl1213/24
jl1160/23
# of carriers for strasbaugh/speedfam:
--------------------------------------
05 SPEEDFAM
7 STRASBAUGH
3 PLATES F/S
|
| 91.2 | cmp passdown a shift | FABSIX::J_BLAIS | You have read | Tue Apr 01 1997 20:54 | 65 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 4 boxes
BREAKIN WAFERS 4 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up running jd1233 need 100%mea 04/02/97 2:00pm na
rr 2572@100 sec
--------------------------------------------------------------------------------
CMP.A2 up idle 04/02/97 4:00pm na
--------------------------------------------------------------------------------
CMP.B1 up idle 04/02/97 4:00pm 04/02/97 12:00am
--------------------------------------------------------------------------------
CMP.B2 up running xd1115 04/02/07 11:00am 04/01/97 9:40pm
rr 4204@150 sec.
--------------------------------------------------------------------------------
CMP.B3 DWN Wafer crash, pad/carriers (2) replaced will need full MQC
was running jd1135, it will need tup.
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 04/01/97 @ 7:00 am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 04/02/97 @ 7:00 am
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
jb1169 hold for eng.
lots in room: New specs/revs posted:
------------- ---------------------
31 lots reduced in coming thickness for ild3...
Lots Processed
yd0241/11
jl1396/24 hot.
# of carriers for strasbaugh/speedfam:
--------------------------------------
3 SPEEDFAM
7 STRASBAUGH
3 PLATES F/S
|
| 91.3 | PASSDOWN | FABSIX::D_CAUSE | | Wed Apr 02 1997 08:36 | 45 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING JL1268 100% ING ON THK.A5 NEEDS T/U
CMP.B1 (Speedfam CMP-V) -UP/RUNNING JD1108 FIRST PASS RR 3466 180 SEC
JD1175 FIRST PASS RR 3600 180 SEC
CMP.B2 (Speedfam CMP-V) - UP/RUNNING T/U ON XM1113 RR 3900 180 SECS
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JL1196 100%ING ON THK.A4 NEEDS T/U
REM. RATE 3330 200 SEC
JL1222 100%ING ON THK.A4 NEEDS T/U
REM. RATE 3532 200 SEC
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:20
MQC WAFERS USED:11 WAFERS USED
MQC WAFERS AVAIL:4 BOXES
----------
|
| 91.4 | PASSDOWN | FABSIX::D_CAUSE | | Sat Apr 05 1997 08:23 | 44 |
|
D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/MQC PAD CHANGE RUNNING BREAKINS MQC WAFERS
ARE BESIDE THE TOOL AND WERE READ ON A5
CMP.A2 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.B1 (Speedfam CMP-V) -UP/RUNNING JL1172 RUNNING SEND AHEADS 180 SEC
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JD1126 AND JL1152 SEND AHEADS 180 SEC
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JL1201 NEEDS TOUCH UP
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:10
MQC WAFERS USED:8 WAFERS USED
MQC WAFERS AVAIL:4 BOXES
----------
|
| 91.5 | passdown cmp b-shift 04/06/97 | FABSIX::M_PROVENCHER | | Sun Apr 06 1997 07:43 | 122 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 1 mqcs
BREAKIN WAFERS 35 misc
CMP.A1 (Strasbaugh 6DS-SP) - dn/repair rotary union in process of being replaced
t: rr: / t: rr:
CMP.A1 24h MQCS COMPLETED : 04/05/97 @ 9:30 am
CMP.A1 24hr MQCS NEXT DUE : 04/06/97 @ 9:30 am
CMP.A2 (Strasbaugh 6DS-SP) - up/idle (jd1240 pmd and jl1272 pmd premeasuring)
t: rr: / t: rr:
CMP.A2 24hr MQCS COMPLETED: 04/05/97 @ 9:30 am
CMP.A2 24hr MQCS NEXT DUE : 04/06/97 @ 9:30 am
CMP.B1 (Speedfam CMP-V) - up/running jl1153 m1/
t:180 rr:/
CMP.B1 24hr MQCS COMPLETED: 04/05/97 @ 4:00 pm
CMP.B1 24hr MQCS NEXT DUE : 04/06/97 @ 4:00 pm
CMP.B1 12hr MQCS COMPLETED: 04/06/97 @ 6:00 am
CMP.B1 12hr MQCS NEXT DUE : 04/06/97 @ 6:00 pm
CMP.B2 (Speedfam CMP-V) - up/running YD0238 m3 12w/JD1074 m3 23w
t:300 rr:2400/t:300 rr:2733
CMP.B2 24hr MQCS COMPLETED: 04/05/97 @ 1:30 pm
CMP.B2 24hr MQCS NEXT DUE : 04/06/97 @ 1:30 pm
CMP.B2 12hr MQCS COMPLETED: 04/06/97 @ 6:30 am
CMP.B2 12hr MQCS NEXT DUE : 04/06/97 @ 6:30 pm
CMP.B3 (Speedfam CMP-V) - up/running jl1213 dc1040 m2/jl1091 dc1044 m1
t:160 rr:3502 / t: rr:
CMP.B3 24hr MQCS COMPLETED: 04/05/97 @ 7:00 pm
CMP.B3 24hr MQCS NEXT DUE : 04/06/97 @ 7:00 pm
CMP.B3 12hr MQCS COMPLETED: 04/06/97 @ 6:00 am
CMP.B3 12hr MQCS NEXT DUE : 04/06/97 @ 6:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 04/05/97 @ 9:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 04/06/97 @ 9:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 04/05/97 @ 9:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 04/06/97 @ 9:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 04/05/97 @ 9:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 04/06/97 @ 9:00 pm
Hot/B lots in area:
__________________
* jl1396 m1 *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* yd0238 m3 (cmp.b2)
yd0238a m3 (cmp.b1) *
Down Equipment:
---------------
* none *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* jd1311 pmd (hotlot) #1 broke at cmp-scrub.a1 on spin station/stress fracture *
Hold Lots:
---------
* yd0238a on hold for pss, slow removal rate, range has become high. *
Monitor status:
--------------
4 boxes of 12K mqc wafers
2� boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*20 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
" " ILD3 t.d.c.o. per Kyle W.
Lots/wafers processed
--------------------
* jl1212 m2 22 wafers *
JL1267 pmd 24 wafers
jd1311 (Hotlot) PMD 23W
JL1271 pmd 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
15 SPEEDFAM
11 STRASBAUGH
2 PLATES F/S
|
| 91.6 | cmp passdown a shift | FABSIX::J_BLAIS | You have read | Sun Apr 06 1997 20:52 | 67 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 2.5 boxes
BREAKIN WAFERS 1.5 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up idle, just passed MQC's 04/07/97 7:30pm na
--------------------------------------------------------------------------------
CMP.A2 up jd1240,jl1272 04/07/97 1:45pm na
--------------------------------------------------------------------------------
CMP.B1 up jl1153,jl1274 04/07/97 4:00pm 04/07/97 6:00am
--------------------------------------------------------------------------------
CMP.B2 up jd1235,xd1115 04/07/97 4:15pm 04/07/97 3:15am
--------------------------------------------------------------------------------
CMP.B3 up jl1396 04/07/97 4:15pm 04/07/97 6:00am
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 04/05/97 @ 9:00 pm
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 04/06/97 @ 9:00 pm
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
jl1274,jl1396 yd0238a.
lots in room: New specs/revs posted:
------------- ---------------------
31 lots reduced in coming thickness for ild3...
Lots Processed
xb0782/24
jd1074/23
jd1074/23
jl1212/22
yd0238/12
jl1213/24
jl1284d/6
jl1091/24
# of carriers for strasbaugh/speedfam:
--------------------------------------
13 SPEEDFAM
11 STRASBAUGH
2 PLATES F/S
|
| 91.7 | passdown cmp b-shift 04/07/97 | FABSIX::M_PROVENCHER | | Mon Apr 07 1997 06:36 | 134 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 1 mqcs
BREAKIN WAFERS 42 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running jl1293 pmd 24w r/r 2402 t:100
jl1273 pmd 24w r/r 2490 t:100
CMP.A1 24h MQCS COMPLETED : 04/06/97 @ 7:30 pm
CMP.A1 24hr MQCS NEXT DUE : 04/07/97 @ 7:30 pm
CMP.A2 (Strasbaugh 6DS-SP) - up/running jl1264 pmd 24w r/r 2240 t;100
CMP.A2 24hr MQCS COMPLETED: 04/06/97 @ 1:30 pm
CMP.A2 24hr MQCS NEXT DUE : 04/07/97 @ 1:30 pm
CMP.B1 (Speedfam CMP-V) - up/running jl1093 m1/jd1107 m3 (first 300 sec)
t:200 rr: /t:300 rr:
CMP.B1 24hr MQCS COMPLETED: 04/06/97 @ 4:00 pm
CMP.B1 24hr MQCS NEXT DUE : 04/07/97 @ 4:00 pm
CMP.B1 12hr MQCS COMPLETED: 04/07/97 @ 5:00 am
CMP.B1 12hr MQCS NEXT DUE : 04/07/97 @ 5:00 pm
CMP.B2 (Speedfam CMP-V) - up/running jl1268 m1/jl1250 m1
t:160 rr: /t:160 rr:
CMP.B2 24hr MQCS COMPLETED: 04/06/97 @ 4:00 pm
CMP.B2 24hr MQCS NEXT DUE : 04/07/97 @ 4:00 pm
CMP.B2 12hr MQCS COMPLETED: 04/07/97 @ 3:00 am
CMP.B2 12hr MQCS NEXT DUE : 04/07/97 @ 3:00 pm
CMP.B3 (Speedfam CMP-V) - up/running jd1237 m1/
t:180 rr:2814 / t: rr:
CMP.B3 24hr MQCS COMPLETED: 04/06/97 @ 4:00 pm
CMP.B3 24hr MQCS NEXT DUE : 04/07/97 @ 4:00 pm
CMP.B3 12hr MQCS COMPLETED: 04/07/97 @ 5:00 am
CMP.B3 12hr MQCS NEXT DUE : 04/07/97 @ 5:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 04/06/97 @ 9:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 04/07/97 @ 9:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 04/06/97 @ 9:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 04/07/97 @ 9:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 04/06/97 @ 9:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 04/07/97 @ 9:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* yd0238a m3 *
XD1024 m3
jd1230 m1
xe1065 m1
jd1107 m3 (b1)
Down Equipment:
---------------
* none *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* yd0238a on hold for pss, slow removal rate, range has become high. *
jd1230 m1
jd1231 m1 both lots will need sort wafer # to slot#, 100% thick, and place on
hold for e.bodensieck
Monitor status:
--------------
3 boxes of 12K mqc wafers
4 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*30+ lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
" " ILD3 t.d.c.o. per Kyle W.
Lots/wafers processed
--------------------
* JL1240 pmd 24 wafers
JL1272 pmd 24 wafers
JL1274 pmd 24 wafers hotlot
JL1273 pmd 24 wafers
JD1235 m1 24 wafers
jL1153 m2 17 wafers
jD1178 m2 24 wafers
XD1115 m3 24 wafers
jL1396 m1 12 wafers hotlot
JL1090 m1 24 wafers
jL1092 m1 24 wafers
jL1117 m1 18 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
13 SPEEDFAM
11 STRASBAUGH
2 PLATES F/S
|
| 91.8 | A shift CMP Passdown | FABSIX::J_REISNER | | Mon Apr 07 1997 20:57 | 126 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - down/needs pad change
CMP.A1 24h MQCS COMPLETED :
CMP.A1 24hr MQCS NEXT DUE :
CMP.A2 (Strasbaugh 6DS-SP) - up/idle
CMP.A2 24hr MQCS COMPLETED: 04/07/97 @ 7:00 pm
CMP.A2 24hr MQCS NEXT DUE : 04/08/97 @ 7:00 pm
CMP.B1 (Speedfam CMP-V) - up/running XM1113 m2/jd1107 m3
CMP.B1 24hr MQCS COMPLETED: 04/06/97 @ 4:00 pm
CMP.B1 24hr MQCS NEXT DUE : 04/07/97 @ 4:00 pm
CMP.B1 12hr MQCS COMPLETED: 04/07/97 @ 7:30 pm
CMP.B1 12hr MQCS NEXT DUE : 04/08/97 @ 7:00 am
CMP.B2 (Speedfam CMP-V) - up/idle
CMP.B2 24hr MQCS COMPLETED: 04/07/97 @ 7:15 pm
CMP.B2 24hr MQCS NEXT DUE : 04/08/97 @ 7:15 pm
CMP.B2 12hr MQCS COMPLETED: 04/07/97 @ 7:30 pm
CMP.B2 12hr MQCS NEXT DUE : 04/08/97 @ 7:30 am
CMP.B3 (Speedfam CMP-V) - up/mqc 1st MQC popped range chart. Offsets
adjusted. Needs 2nd set run (pre reading
on Thickness.A5)
running XE1065 m1 needs TUP
CMP.B3 24hr MQCS COMPLETED:
CMP.B3 24hr MQCS NEXT DUE :
CMP.B3 12hr MQCS COMPLETED: 04/07/97 @ 5:30 pm
CMP.B3 12hr MQCS NEXT DUE : 04/08/97 @ 5:30 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 04/06/97 @ 9:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 04/07/97 @ 9:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 04/06/97 @ 9:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 04/07/97 @ 9:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 04/06/97 @ 9:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 04/07/97 @ 9:00 pm
Hot/B lots in area:
__________________
* XE1198 *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* yd0238a m3 * will run tomorrow am
XD1024 m3\
jd1230 m1 \ Eric will send a note out on these lots
jd1231 m1 - Eric is running
YD0241 will polish tomorrow
Down Equipment:
---------------
* none *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* yd0238a on hold *will run tomorrow am*
Monitor status:
--------------
3 boxes of 12K mqc wafers
5 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*30+ lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
" " ILD3 t.d.c.o. per Kyle W.
Lots/wafers processed
--------------------
* JL1264/24 PMD
JL1293/24 PMD
JL1304/24 PMD
JD1237/24 ILD1
JL1250/24 ILD1
JL1268/24 ILD1
JL1300/24 PMD
JL1117/18 ILD1
JD1178/24 ILD2
JL1269/21 PMD
JL109324 ILD1
JL1303/24 PMD
# of carriers for strasbaugh/speedfam:
--------------------------------------
13 SPEEDFAM
11 STRASBAUGH
2 PLATES F/S
|
| 91.9 | passdown cmp b-shift 04/08/97 | FABSIX::M_PROVENCHER | | Tue Apr 08 1997 06:47 | 136 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 11 mqcs
BREAKIN WAFERS 37 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle down at shift change (pad change) up at
12:30 am
CMP.A1 24h MQCS COMPLETED : 04/08/97 @ 12:30 am
CMP.A1 24hr MQCS NEXT DUE : 04/09/97 @ 12:30 am
CMP.A2 (Strasbaugh 6DS-SP) - up/idle
CMP.A2 24hr MQCS COMPLETED: 04/07/97 @ 7:00 pm
CMP.A2 24hr MQCS NEXT DUE : 04/08/97 @ 7:00 pm
CMP.B1 (Speedfam CMP-V) - up/running jd1177 m2/t:190 rr:3326
jd1105 m3/t:350 rr:
CMP.B1 24hr MQCS COMPLETED: 04/07/97 @ 5:00 pm
CMP.B1 24hr MQCS NEXT DUE : 04/08/97 @ 5:00 pm
CMP.B1 12hr MQCS COMPLETED: 04/08/97 @ 4:30 am
CMP.B1 12hr MQCS NEXT DUE : 04/08/97 @ 4:30 pm
CMP.B2 (Speedfam CMP-V) - up/running JD1106 M3/t:300 rr:
JL1223 M2/t:160 rr:4374
CMP.B2 24hr MQCS COMPLETED: 04/07/97 @ 7:00 pm
CMP.B2 24hr MQCS NEXT DUE : 04/08/97 @ 7:00 pm
CMP.B2 12hr MQCS COMPLETED: 04/08/97 @ 7:00 am
CMP.B2 12hr MQCS NEXT DUE : 04/08/97 @ 7:00 pm
CMP.B3 (Speedfam CMP-V) - up/running xd1109 m3/t:350 rr:2400
jl1224 m2/t:190 rr:
tool in mqc at shift change, failed 1st set of
mqc (24hr). tool up at 11:00 pm
CMP.B3 24hr MQCS COMPLETED: 04/07/97 @ 11:00 pm
CMP.B3 24hr MQCS NEXT DUE : 04/08/97 @ 11:00 pm
CMP.B3 12hr MQCS COMPLETED: 04/08/97 @ 4:30 am
CMP.B3 12hr MQCS NEXT DUE : 04/08/97 @ 4:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 04/07/97 @ 10:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 04/08/97 @ 10:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 04/07/97 @ 10:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 04/08/97 @ 10:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 04/07/97 @ 10:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 04/08/97 @ 10:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* jd1233 m1 1.34 days
jd1106 m3 1.42 days
xd1104 m1 1.53 days
xd1024 m3 2.59 days eric b.lot
jd1102 m3 1.14 days
jl1252 m1 1.56 days
yd0241 m4 1.68 days
Down Equipment:
---------------
* none *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* yd0238a on hold for pss, slow removal rate, range has become high. *
jd1230 m1 run 150 sec 100% thk and stp ht. on hold for/per e.bodensieck
jd1231 m1" "
Monitor status:
--------------
3 boxes of 12K mqc wafers
4 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*27 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
" " ILD3 t.d.c.o. per Kyle W.
Lots/wafers processed
--------------------
* JL1222 m2 24 wafers *
XE1065 m1 24 wafers
JD1247 pmd 24 wafers
JL1270 pmd 24 wafers
JL1294 pmd 24 wafers
xm1113 m2 24 wafers
jd1107 m3 23 wafers
XE1198 m2 21 wafers *HOT*
jl1228 m2 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
13 SPEEDFAM
9 STRASBAUGH
2 PLATES F/S
|
| 91.10 | cmp passdown a shift | FABSIX::J_BLAIS | You have read | Tue Apr 08 1997 21:11 | 67 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 2.0 boxes
BREAKIN WAFERS 1.5 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up 04/08/97 12:00pm na
--------------------------------------------------------------------------------
CMP.A2 up running breakins/mqc na
--------------------------------------------------------------------------------
CMP.B1 Un Schld Down for wafer slip out+head 2 not rotating
--------------------------------------------------------------------------------
CMP.B2 up/MQC running mqc's now 04/08/97 7:45am
--------------------------------------------------------------------------------
CMP.B3 Schld DWN for pad and conditioner change. max life reached on pad.
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 04/07/97 @ 9:00 pm
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 04/08/97 @ 9:00 pm
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
jd1311 jd1230,jd1231 Erib B. is working on them
lots in room: New specs/revs posted:
------------- ---------------------
29 lots reduced in coming thickness for ild3...
Lots Processed
jd1105/24
jl1224/24
jd1177/24
jd1246/24
jl1306/24
jl1223/24
jl1228/23
yd0238a/11
xd1109/20
# of carriers for strasbaugh/speedfam:
--------------------------------------
13 SPEEDFAM
09 STRASBAUGH
2 PLATES F/S
|
| 91.11 | passdown cmp b-shift 04/09/97 | FABSIX::M_PROVENCHER | | Wed Apr 09 1997 06:46 | 132 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 24 mqcs
BREAKIN WAFERS 45 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24h MQCS COMPLETED : 04/09/97 @ 1:00 am
CMP.A1 24hr MQCS NEXT DUE : 04/10/97 @ 1:00 am
CMP.A2 (Strasbaugh 6DS-SP) - up/idle
tool down at shift change (pm monthly), which
includes pad change. failed 1st set of mqc's
passed 2nd set. up at 12:30 am
CMP.A2 24hr MQCS COMPLETED: 04/09/97 @ 12:30 pm
CMP.A2 24hr MQCS NEXT DUE : 04/10/97 @ 12:30 pm
CMP.B1 (Speedfam CMP-V) - up/running xd1024 m3 touchup
tool in mqc(24hr) at shift change. up at 11:30pm
CMP.B1 24hr MQCS COMPLETED: 04/08/97 @ 11:30 pm
CMP.B1 24hr MQCS NEXT DUE : 04/09/97 @ 11:30 pm
CMP.B1 12hr MQCS COMPLETED: 04/08/97 @ 4:30 am *
CMP.B1 12hr MQCS NEXT DUE : 04/08/97 @ 4:30 pm *
CMP.B2 (Speedfam CMP-V) - up/running JL1396 M2 t:160s *HOT*
JL1274 M1 t:160s *HOT*
tool had to go down for overdue 24hr mqc's
@ 8:30 pm. tool up at 9:30pm
CMP.B2 24hr MQCS COMPLETED: 04/08/97 @ 9:30 pm
CMP.B2 24hr MQCS NEXT DUE : 04/09/97 @ 9:30 pm
CMP.B2 12hr MQCS COMPLETED: 04/08/97 @ 7:00 am
CMP.B2 12hr MQCS NEXT DUE : 04/08/97 @ 7:00 pm
CMP.B3 (Speedfam CMP-V) - up/mqc
tool down/sched at shift change maint changed
and calibrated the pad conditioner, pad change
breakin & mqc's. failed 1st set (uniformity)
running 2nd set
CMP.B3 24hr MQCS COMPLETED: in process
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: 04/09/97 @ 7:00 am
CMP.B3 12hr MQCS NEXT DUE : 04/09/97 @ 7:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 04/09/97 @ 1:00 am
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 04/10/97 @ 1:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 04/09/97 @ 1:00 am
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 04/10/97 @ 1:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 04/09/97 @ 1:00 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 04/10/97 @ 1:00 am
Hot/B lots in area:
__________________
* JL1396 M2 *
JL1274 M1 *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* lots *
Down Equipment:
---------------
* cmp.b3 2nd set of mqc's *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
--------------
Monitor status:
--------------
3 boxes of 12K mqc wafers
3 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*25 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
" " ILD3 t.d.c.o. per Kyle W.
Lots/wafers processed
--------------------
* YD0241 m3 11 wafers
JD1106 M3 24 wafers
jd1311 m1 23 wafers hotlot
jd1230 m1 24 wafers
jd1231 m1 24 wafers
jl1266 pmd 24 wafers
JL1225 M2 24 wafers
JL1226 M2 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
13 SPEEDFAM
9 STRASBAUGH
2 PLATES F/S
|
| 91.12 | cmp passdown a shift | FABSIX::J_BLAIS | You have read | Wed Apr 09 1997 21:06 | 70 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 3.0 boxes
BREAKIN WAFERS 4.0 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up idle 04/10/97 1:00am na
--------------------------------------------------------------------------------
CMP.A2 up idle 04/10/97 1:00am na
--------------------------------------------------------------------------------
CMP.B1 up idle 04/09/97 11:00pm 04/09/97 9:30pm
--------------------------------------------------------------------------------
CMP.B2 up running xe1112 ild1 04/09/97 10:00pm 04/10/97 7:00am
running xd1071 ild2
--------------------------------------------------------------------------------
CMP.B3 UnSchld DWN very low removal rate will need pad change/full MQC's
running jl1251 RR 3383@180 sec when tool is up.
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 04/08/97 @ 9:00 pm
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 04/09/97 @ 9:00 pm
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
lots in room: New specs/revs posted:
------------- ---------------------
23 lots reduced in coming thickness for ild3...
Lots Processed
xb1024/18
jl1396/12
jd1108/11
jl1274/24
xm1194/11
xm1164/11
jl1227/24
jd1102/24
# of carriers for strasbaugh/speedfam:
--------------------------------------
13 SPEEDFAM
09 STRASBAUGH
2 PLATES F/S
|
| 91.13 | passdown cmp b-shift 04/13/97 | FABSIX::M_PROVENCHER | | Sun Apr 13 1997 07:28 | 130 |
| < CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 28 mqcs
BREAKIN WAFERS 45 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running JL1346 pmd 24w t:100 r/r:2590
jd1307 pmd 24w t:100 r/r:2360
tool down at shift change, due to pad change,
mqc's
up at 10:00 pm
CMP.A1 24h MQCS COMPLETED : 04/12/97 @ 10:00 pm
CMP.A1 24hr MQCS NEXT DUE : 04/13/97 @ 10:00 pm
CMP.A2 (Strasbaugh 6DS-SP) - up/running XD1205 pmd 23w t:90 r/r:2400
JD1297 pmd 24w t:100 r/r:2210
CMP.A2 24hr MQCS COMPLETED: 04/12/97 @ 1:00 pm
CMP.A2 24hr MQCS NEXT DUE : 04/13/97 @ 1:00 pm
CMP.B1 (Speedfam CMP-V) - up/running xe1198 ild3 t:400 rr:2250
xm1113 opr#2003 t:180 rr:3209
tool in mqc(24hr) at shift change. failed 1st
set of mqc passed 2nd set. up at 11:30 pm
CMP.B1 24hr MQCS COMPLETED: 04/12/97 @ 11:30 pm
CMP.B1 24hr MQCS NEXT DUE : 04/13/97 @ 11:30 pm
CMP.B1 12hr MQCS COMPLETED: 04/13/97 @ 6:00 am
CMP.B1 12hr MQCS NEXT DUE : 04/14/97 @ 6:00 pm
CMP.B2 (Speedfam CMP-V) - dn/unsch tool went down at 5:00 am for inverter era
in interval #5 (wafer slipped out of carrier
#1). carrier was replaced, and mqc's are in
process. no wafers lost.
JD1075 (see remarks and read the specs) ILD23 rr1683 T400s
XB0782 M3 rr3629 t:300 this lot was on the tool when it went down
CMP.B2 24hr MQCS COMPLETED: in process when maint gives back tool
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: 04/13/97 @ 6:30 am
CMP.B2 12hr MQCS NEXT DUE : 04/14/97 @ 6:30 pm
CMP.B3 (Speedfam CMP-V) - up/running jd1237 m2 t:180 rr:2631
CMP.B3 24hr MQCS COMPLETED: 04/12/97 @ 5:30 pm
CMP.B3 24hr MQCS NEXT DUE : 04/13/97 @ 5:30 pm
CMP.B3 12hr MQCS COMPLETED: 04/12/97 @ 9:00 pm
CMP.B3 12hr MQCS NEXT DUE : 04/13/97 @ 9:00 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 04/12/97 @ 9:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 04/13/97 @ 9:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 04/12/97 @ 9:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 04/13/97 @ 9:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 04/12/97 @ 9:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 04/13/97 @ 9:00 pm
Hot/B lots in area:
__________________
* *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* lots *
Down Equipment:
---------------
* cmp.b4 *
cmp.b2 24 hr mqc's, new carrier
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
--------------
Monitor status:
--------------
3 boxes of 12K mqc wafers
3 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*16 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
" " ILD3 t.d.c.o. per Kyle W.
Lots/wafers processed
--------------------
* JD1289 pmd 23 wafers
JL1322 pmd 24 wafers
JD1298 pmd 24 wafers
JD1214 pmd 24 wafers
JL1270 m1 24 wafers
jd1246 m1 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
13 SPEEDFAM
9 STRASBAUGH
2 PLATES F/S
|
| 91.14 | cmp passdown a shif | FABSIX::J_BLAIS | You have read | Sun Apr 13 1997 20:58 | 73 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 3.0 boxes
BREAKIN WAFERS 3.0 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up running jl1319 04/13/97 9:00pm na
--------------------------------------------------------------------------------
CMP.A2 up idle 04/14/97 7:45pm na
--------------------------------------------------------------------------------
CMP.B1 up running jl1119 04/13/97 12:00pm 04/14/97 7:40pm
--------------------------------------------------------------------------------
CMP.B2 up running jd1177,jl1269 04/14/97 8:30am 04/14/97 8:30am
--------------------------------------------------------------------------------
CMP.B3 up/MQC running MQC,xm1194, xd1021 running 04/14/97 6:30pm
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 04/12/97 @ 11:00pm
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 04/03/97 @ 11:00pm
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
lots in room: New specs/revs posted:
------------- ---------------------
15 lots reduced in coming thickness for ild3...
Lots Processed
xe1243/24
jl1329/23
jd1307/24
jl1346/24
xd1205/23
jd1237/24
xb0782/22
jd1297/24
jl1331/23
jl1117/17
xm1113/24
xe1198/21
jd1308/24 hot
# of carriers for strasbaugh/speedfam:
--------------------------------------
13 SPEEDFAM
09 STRASBAUGH
2 PLATES F/S
|
| 91.15 | passdown cmp b-shift 04/14/97 | FABSIX::M_PROVENCHER | | Mon Apr 14 1997 07:03 | 136 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 26 mqcs
BREAKIN WAFERS 42 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running JL1317 t:100 r/r:2350
tool down at 11 pm for pad change (failed mqc's)
up at 3am
CMP.A1 24h MQCS COMPLETED : 04/14/97 @ 3:00 am
CMP.A1 24hr MQCS NEXT DUE : 04/15/97 @ 3:00 am
CMP.A2 (Strasbaugh 6DS-SP) - up/running JL1328 t:100 r/r:2260
tool crash at 11:30pm came back up at
at 5am
CMP.A2 24hr MQCS COMPLETED: 04/14/97 @ 5:00 am
CMP.A2 24hr MQCS NEXT DUE : 04/15/97 @ 5:00 am
CMP.B1 (Speedfam CMP-V) - up/running jl1252 m2 t:180 rr:
jd1296 m1 t:180 rr:
CMP.B1 24hr MQCS COMPLETED: 04/14/97 @ 3:00 pm
CMP.B1 24hr MQCS NEXT DUE : 04/15/97 @ 3:00 pm
CMP.B1 12hr MQCS COMPLETED: 04/14/97 @ 3:00 am
CMP.B1 12hr MQCS NEXT DUE : 04/14/97 @ 3:00 pm
CMP.B2 (Speedfam CMP-V) - up/mqc (Jd1232 m2 /JD1311 M3 on tool)
tool placed into mqc early, due to one carrier
being over agressive on removal.this was noticed
on touch ups and send aheads on a different lot
tool in mqc at 4 am. failed for high removal
(carrier 1 and 5 were high)
range (447) running offset prog. and 2nd set of
mqc's
CMP.B2 24hr MQCS COMPLETED: in process
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: 04/14/97 @ 12:30 am
CMP.B2 12hr MQCS NEXT DUE : 04/14/97 @ 12:30 pm
CMP.B3 (Speedfam CMP-V) - up/running jd1312 m1 t:180 rr:3243
CMP.B3 24hr MQCS COMPLETED: 04/14/97 @ 8:30 pm
CMP.B3 24hr MQCS NEXT DUE : 04/15/97 @ 8:30 pm
CMP.B3 12hr MQCS COMPLETED: 04/14/97 @ 7:00 am
CMP.B3 12hr MQCS NEXT DUE : 04/14/97 @ 7:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 04/14/97 @ 12:00 am
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 04/15/97 @ 12:00 am
CMP-SCRUB.A2 (On-track scrubber) - dn/unsched robot problems down at 5:30 am
tool was down @11pm back up @ 2am
CMP-SCRUB.A2 24hr MQCS COMPLETED: 04/14/97 @ 12:00 am
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 04/15/97 @ 12:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle tool went down briefly @3:30 back up
@ 4am
CMP-SCRUB.A3 24hr MQCS COMPLETED: 04/14/97 @ 12:00 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 04/15/97 @ 12:00 am
Hot/B lots in area:
__________________
* jd1311 m3 (next available tool) *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
---------------
*cmp.b2 mqc's *
cmp-scrub.a2 robot problems
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* jl1330 pmd 1 wafer (crash cmp.a2) *
Hold Lots:
--------------
* none *
Monitor status:
--------------
2 boxes of 12K mqc wafers
2 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*16 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
" " ILD3 t.d.c.o. per Kyle W.
Lots/wafers processed
--------------------
* jl1191 m1 24 wafers *
JD1177 M3 24 wafers
JL1269 M1 21 wafers
JL1319 pmd 24 wafers
JL1354 pmd 24 wafers
JL1330 pmd 23 wafers
jd1230 m2 24 wafers
jd1247 m1 24 wafers
xm1164 m1 11 wafers
xd1021 m1 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
8 SPEEDFAM
7 STRASBAUGH
2 PLATES F/S
|
| 91.16 | cmp passdown a shift | FABSIX::J_BLAIS | You have read | Mon Apr 14 1997 21:12 | 73 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 3.0 boxes
BREAKIN WAFERS 3.0 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up running jl1339, jl1355 04/15/97 3:00am na
--------------------------------------------------------------------------------
CMP.A2 up idle 04/15/97 5:00am na
--------------------------------------------------------------------------------
CMP.B1 up running jd1174,jd1172 04/15/97 3:00am 04/15/97 3:00am
--------------------------------------------------------------------------------
CMP.B2 up running jd1232,jd1176 04/15/97 10:00am 04/14/97 10:00pm
--------------------------------------------------------------------------------
CMP.B3 up/MQC running xm1194 04/14/97 8:00pm 04/15/97 6:45pm
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 04/14/97 @ 11:00pm
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 04/15/97 @ 11:00pm
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
lots in room: New specs/revs posted:
------------- ---------------------
15 lots reduced in coming thickness for ild3...
Lots Processed
jl1337/24
jl1252/24
jl1340/24
jl1296/24
jl1338/24
jl1332/23
jl1343/24
jl1320/24
jd1312/24
jl1328/24
jd1248/24
jl1317/24
xd1021/24
# of carriers for strasbaugh/speedfam:
--------------------------------------
13 SPEEDFAM
09 STRASBAUGH
2 PLATES F/S
|
| 91.17 | passdown cmp b-shift 04/15/97 | FABSIX::M_PROVENCHER | | Tue Apr 15 1997 06:22 | 128 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 13 mqcs
BREAKIN WAFERS 37 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24h MQCS COMPLETED : 04/15/97 @ 4:00 am
CMP.A1 24hr MQCS NEXT DUE : 04/16/97 @ 4:00 am
CMP.A2 (Strasbaugh 6DS-SP) - up/idle
CMP.A2 24hr MQCS COMPLETED: 04/15/97 @ 5:00 am
CMP.A2 24hr MQCS NEXT DUE : 04/16/97 @ 5:00 am
CMP.B1 (Speedfam CMP-V) - up/idle
CMP.B1 24hr MQCS COMPLETED: 04/15/97 @ 5:00 am
CMP.B1 24hr MQCS NEXT DUE : 04/16/97 @ 5:00 am
CMP.B1 12hr MQCS COMPLETED: 04/15/97 @ 3:00 am
CMP.B1 12hr MQCS NEXT DUE : 04/15/97 @ 3:00 pm
CMP.B2 (Speedfam CMP-V) - up/running xd1168 m3 running t:350 rr:
jl1271 m2 running t:160 rr:
CMP.B2 24hr MQCS COMPLETED: 04/14/97 @ 10:00 am
CMP.B2 24hr MQCS NEXT DUE : 04/15/97 @ 10:00 am
CMP.B2 12hr MQCS COMPLETED: 04/14/97 @ 10:30 am
CMP.B2 12hr MQCS NEXT DUE : 04/15/97 @ 10:30 pm
CMP.B3 (Speedfam CMP-V) - up/running xm1194 m2 rr2277 t179
jd1233 m2 rr2719 t170
CMP.B3 24hr MQCS COMPLETED: 04/14/97 @ 10:00 pm
CMP.B3 24hr MQCS NEXT DUE : 04/15/97 @ 10:00 pm
CMP.B3 12hr MQCS COMPLETED: 04/14/97 @ 10:00 pm
CMP.B3 12hr MQCS NEXT DUE : 04/15/97 @ 10:00 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 04/15/97 @ 1:30 am
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 04/16/97 @ 1:30 am
CMP-SCRUB.A2 (On-track scrubber) -
CMP-SCRUB.A2 24hr MQCS COMPLETED: 04/15/97 @ 1:30 am
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 04/16/97 @ 1:30 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle (tool was down til 5:00 am).
CMP-SCRUB.A3 24hr MQCS COMPLETED: 04/14/97 @ 12:00 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 04/15/97 @ 12:00 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
---------------
* cmp-scrub.a3 down until 5:00 am *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
--------------
* none *
Monitor status:
--------------
3 boxes of 12K mqc wafers
3 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*7 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
" " ILD3 t.d.c.o. per Kyle W.
Lots/wafers processed
--------------------
* JD1232 m2 22 wafers
JD1311 M3 23 wafers
JD1176 M3 21 wafers
jl1356 pmd 24 wafers
jl1355 pmd 24 wafers
jl1354 pmd 24 wafers
jl1321 pmd 24 wafers
jl1339 pmd 24 wafers
jd1174 m3 24 wafers
jd1172 m3 24 wafers
JD1175 M3 20 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
8 SPEEDFAM
7 STRASBAUGH
2 PLATES F/S
|
| 91.18 | a-shift passdown 4-15 | FABSIX::B_SAVAGEAU | | Tue Apr 15 1997 20:59 | 13 |
| CMP PASSDOWN 4-15 A-SHIFT
CMP.A1 STATUS MQC (running breakins)
CMP.A2 STATUS IDLE
CMP.B1 STATUS IDLE
CMP.B2 STATUS Down (transformer blew while running product)
2 lots in process JD1289 ILD1
XD1024 ILD2
CMP.B3 STATUS Running JD1286 ILD1
CMP.B4 STATUS ENG
The remaining tools in room are up.
|
| 91.19 | | FABSIX::M_CADIEUX | KADOU | Thu Apr 17 1997 08:52 | 52 |
|
CMP D SHIFT PASSDOWN
CMP.A1(Strasbaugh 6DS-SP)-UP/RUNNING-1 -JL1363(PMD) RUNNING FIRST PASS
REM.RATE=2435 RUNTIME=100
NEEDS 100% AND TOUCH-UP
CMP.A2(Strasbaugh 6DS-SP)-UP/RUNNING-1 -JL1351(PMD) SA' RUN 100 SEC
NEED EVALUATION
CMP.B1(Speedfam CMP-V)-UP/RUNNING-2 -**JD1312(HOT)**(ILD2)
NEEDS TOUCH-UP, READ ON.A4
RUN TIME=180 REM.RATE=3474
-XD1104(ILD2) NEEDS SCRUB AND FINAL
MEASURED ON.A4
REM.RATE=3176 RUN TIME=170
CMP.B2(Speedfam CMP-V)-UP/RUNNING-1 -JD1246(ILD2) SA' READ ON.A5
READY FOR FIRST PASS
RUN TIME=180
CMP.B3 (Speedfam CMP-V)-UP/RUNNING-2 -XD1205(ILD1) SA'S READ ON.A4
READY FOR FIRST PASS
REM.RATE=3399 RUN TIME=180
-JL1161(ILD2) SA'S READ ON.A4
READY FOR FIRST PASS
REM.RATE=3166 RUN TIME=180
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (On-track scrubber) - UP/IDLE
HOT LOTS IN AREA:
----------------
**JD1312(ILD2)**RUNNING ON B1
----------------
MQC WAFERS USED: 24
-------------------
MQC WAFERS AVAIL:3.5
-------------------
LOTS ON HOLD=NONE
-------------------
|
| 91.20 | | FABSIX::M_CADIEUX | KADOU | Fri Apr 18 1997 08:51 | 46 |
|
CMP D SHIFT PASSDOWN
CMP.A1(Strasbaugh 6DS-SP)-UP/IDLE -
CMP.A2(Strasbaugh 6DS-SP)-UP/RUNNING-2 -JD1238(PMD)FIRST PASS
READ ON.A
REM.RATE=2150 RUN TIME=100
CMP.B1(Speedfam CMP-V)-UP/IDLE **HOT** -JL1341(ILD1) IN SCRUB.A1
NEEDS FINAL, ON.A5
REM.RATE-4129 RUN TIME=170
CMP.B2(Speedfam CMP-V)-UP/MQC -READ ON.A1, FAILED FIRST MQC
READY TO RUN
ANNOTATION STILL OPEN:9696
CMP.B3 (Speedfam CMP-V)-UP/RUNNING-2 -JL1186(ILD1) 100%ING ON.A4
REM.RATE=3166 RUN TIME=180
-JL1270(ILD2) ON SCRUB.A3
NEED 100%ON.A5
REM.RATE=2866 RUN TIME=180
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (On-track scrubber) - UP/IDLE
HOT LOTS IN AREA:
----------------
**JL1341**RUN ON .B1
------------------
MQC WAFERS USED: 4 BOXES
-------------------
MQC WAFERS AVAIL:12
-------------------
LOTS ON HOLD=NONE
-------------------
|
| 91.21 | | FABSIX::M_CADIEUX | KADOU | Sat Apr 19 1997 08:45 | 53 |
|
CMP D SHIFT PASSDOWN
CMP.A1(Strasbaugh 6DS-SP)-UP/RUNNING-1 -JL1320(ILD1) 100%ING ON.A5
NEEDS TOUCH-UPS, RUN TIME=6 MIN.
CMP.A2(Strasbaugh 6DS-SP)-UP/RUNNING-1 -JL1389(PMD) SA'S READIN ON.A1
RUN TIME=100
CMP.B2(Speedfam CMP-V)-UP/RUNNING-2 -JD1297(ILD1) READY TO RUN
-JD1287(ILD1 READY FOR FIRST PASS
MEASURED ON.A4
RUN TIME=180 REM.RATE=3570
CMP.B3 (Speedfam CMP-V)-UP/RUNNING-1 -JD1214(ILD1) SA' ON.A5
RUN TIME=200
CMP.B4 (Speedfam CMP-V)
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (On-track scrubber) - UP/IDLE
HOT LOTS IN AREA:
----------------
NONE
------------------
MQC WAFERS USED:18
-------------------
MQC WAFERS AVAIL:2.5
-------------------
LOTS ON HOLD=JL1331
JL1147
JL1191
JL1015
-------------------
|
| 91.22 | passdown cmp b-shift 04/20/97 | FABSIX::M_PROVENCHER | | Sun Apr 20 1997 07:06 | 141 |
| < CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 31 mqcs
BREAKIN WAFERS 67 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running Jl1394 pmd t:165 sec rr:1900
CMP.A1 24h MQCS COMPLETED : 04/19/97 @ 11:00 pm
CMP.A1 24hr MQCS NEXT DUE : 04/20/97 @ 11:00 pm
CMP.A2 (Strasbaugh 6DS-SP) - up/mqc
CMP.A2 24hr MQCS COMPLETED: in process
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - sched/dn/to be shipped out
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - up/running jd1312 m3 t:400 rr:2100
jd1307 m1 t:160 rr:4125
tool down at 9pm, due to crash on secondary pad,
up at 2:30 am. down at 3:00 am, multihead problem
up at 3:30 am
CMP.B2 24hr MQCS COMPLETED: 04/20/97 @ 2:30 am
CMP.B2 24hr MQCS NEXT DUE : 04/21/97 @ 2:30 am
CMP.B2 12hr MQCS COMPLETED: 04/20/97 @ 2:30 am
CMP.B2 12hr MQCS NEXT DUE : 04/20/97 @ 2:30 pm
CMP.B3 (Speedfam CMP-V) - up/running jl1341 m2 (hotlot)
CMP.B3 24hr MQCS COMPLETED: 04/19/97 @ 10:30 pm
CMP.B3 24hr MQCS NEXT DUE : 04/20/97 @ 10:30 pm
CMP.B3 12hr MQCS COMPLETED: 04/20/97 @ 7:00 pm
CMP.B3 12hr MQCS NEXT DUE : 04/20/97 @ 7:00 am
CMP.B4 (Speedfam CMP-V) - up/ENG
A barrel of 12% solids was hooked up to previous
pad to run MQC so the tool could be handed over
to production.
tool down at shift change for pad change, failed
particles. up at 2:30 am
This tool can be used in an emergency, if b2,or
b3 are down for a good chunk of time. per Matt
VanHanehem
please keep to up/eng, per b.tower
CMP.B4 24hr MQCS COMPLETED: 04/20/97 @ 2:30 am
CMP.B4 24hr MQCS NEXT DUE : 04/21/97 @ 2:30 am
CMP.B4 12hr MQCS COMPLETED: 04/20/97 @ 2:30 am
CMP.B4 12hr MQCS NEXT DUE : 04/20/97 @ 2:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 04/20/97 @ 3:00 am
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 04/21/97 @ 3:00 am
CMP-SCRUB.A2 (On-track scrubber) -
CMP-SCRUB.A2 24hr MQCS COMPLETED: 04/20/97 @ 3:30 am
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 04/21/97 @ 3:30 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 04/20/97 @ 3:00 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 04/21/97 @ 3:00 am
Hot/B lots in area:
__________________
* jd1312 m3 cmp.b2 *
jl1341 m2 cmp.b3
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
*16 lots *
Down Equipment:
---------------
* cmp.b1 *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* jd1312 m3 (hotlot) #8 cmp.b2 *
Hold Lots:
--------------
* none *
Monitor status:
--------------
1� boxes of 12K mqc wafers
1� boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 33 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see t.d.c.o. regarding 1 pass lot processing *
Lots/wafers processed
--------------------
* jl1377 m1 24 wafer *
JL1371 pmd 24 wafers
JL1372 pmd 22 wafers
JL1374 pmd 24 wafers
JL1390 pmd 24 wafers
JL1391 pmd 24 wafers
JL1392 pmd 24 wafers
JL1393 pmd 24 wafers
JL1394 pmd 24 wafers
jl1332 m1 23 wafers
jl1319 m1 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
11 STRASBAUGH
0 PLATES F/S
|
| 91.23 | Cmp Passdown A Shift | FABSIX::J_BLAIS | You have read | Sun Apr 20 1997 20:57 | 73 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 2.0 boxes
BREAKIN WAFERS 2.0 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up 04/20/97 11:00pm na
--------------------------------------------------------------------------------
CMP.A2 up 04/20/97 10:00pm na
--------------------------------------------------------------------------------
CMP.B1 Schld Down na na
--------------------------------------------------------------------------------
CMP.B2 up running jd1460b,xd1021 04/21/97 2:30am 04/21/97 6:00am
--------------------------------------------------------------------------------
CMP.B3 up running jd1296,jl1255 04/21/97 10:30pm 04/21/97 5:40am
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 04/20/97 @ 2:00am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 04/21/97 @ 2:00am
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
lots in room: New specs/revs posted:
------------- ---------------------
26 lots new expanded range on cmos6 lite.
Lots Processed
jl1008/17
xe1291/24
jd1239/16
jl1321/24
jl1330/23
jd1312/23
jl1341/12
xd1020/17
jd1307/24
jd1248/24
jl1394/24
jl1393/24
jl1269/21
# of carriers for strasbaugh/speedfam:
--------------------------------------
13 SPEEDFAM
09 STRASBAUGH
2 PLATES F/S
|
| 91.24 | passdown cmp b-shift 04/21/97 | FABSIX::M_PROVENCHER | | Mon Apr 21 1997 06:24 | 136 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 16 mqcs
BREAKIN WAFERS 44 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24h MQCS COMPLETED : 04/21/97 @ 2:30 am
CMP.A1 24hr MQCS NEXT DUE : 04/22/97 @ 2:30 am
CMP.A2 (Strasbaugh 6DS-SP) - up/idle
CMP.A2 24hr MQCS COMPLETED: 04/20/97 @ 3:00 pm
CMP.A2 24hr MQCS NEXT DUE : 04/21/97 @ 3:00 pm
CMP.B1 (Speedfam CMP-V) - sched/dn/to be shipped out
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - up/running Jd1075 M3 t:300 rr:2111
yd0257 m1 @ start up
CMP.B2 24hr MQCS COMPLETED: in process *
CMP.B2 24hr MQCS NEXT DUE : n/a *
CMP.B2 12hr MQCS COMPLETED: 04/21/97 @ 6:00 am
CMP.B2 12hr MQCS NEXT DUE : 04/21/97 @ 6:00 pm
CMP.B3 (Speedfam CMP-V) - dn/unsched loud vibration followed by two loud
bangs. possible belt slippage? witnessed by
maint tool down at 3:30 am
CMP.B3 24hr MQCS COMPLETED: 04/20/97 @ 11:00 pm
CMP.B3 24hr MQCS NEXT DUE : 04/21/97 @ 11:00 pm
CMP.B3 12hr MQCS COMPLETED: 04/20/97 @ 7:00 pm (not performed for obvious
CMP.B3 12hr MQCS NEXT DUE : 04/20/97 @ 7:00 am reasons).
CMP.B4 (Speedfam CMP-V) - up/ENG
A new barrel was installed near the end of day
shift. passed all mqc's with flying colors
(particles, and dev/rate).
This tool can be used in an emergency, if b2,or
b3 are down for a good chunk of time. per Matt
VanHanehem
please keep to up/eng, per b.tower
CMP.B4 24hr MQCS COMPLETED: 04/21/97 @ 2:30 am
CMP.B4 24hr MQCS NEXT DUE : 04/22/97 @ 2:30 am
CMP.B4 12hr MQCS COMPLETED: 04/20/97 @ 8:30 pm
CMP.B4 12hr MQCS NEXT DUE : 04/21/97 @ 8:30 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 04/21/97 @ 3:00 am
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 04/22/97 @ 3:00 am
CMP-SCRUB.A2 (On-track scrubber) -
CMP-SCRUB.A2 24hr MQCS COMPLETED: 04/21/97 @ 3:30 am
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 04/22/97 @ 3:30 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 04/21/97 @ 3:00 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 04/22/97 @ 3:00 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
*14 lots *
Down Equipment:
---------------
* cmp.b1 *
cmp.b3
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* jd1296 m2 #2,#15 (broke on receive cassette cmp.b3) *
Hold Lots:
--------------
* none *
Monitor status:
--------------
3 boxes of 12K mqc wafers
3 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*26 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see t.d.c.o. regarding modified single pass lot processing *
Lots/wafers processed
--------------------
* XD1021 m3 24 wafers
jl1255 m1 24 wafers
JD1460b M1 6 wafers (HOTLOT)
XM1164 M3 11 wafers
xm1194 m3 10 wafers
jl1189 m1 24 wafers
jd1296 m2 22 wafers
jl1349 m1 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
11 STRASBAUGH
0 PLATES F/S
|
| 91.25 | cmp passdown a shift | FABSIX::J_BLAIS | You have read | Mon Apr 21 1997 20:46 | 58 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 2.0 boxes
BREAKIN WAFERS 2.0 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up idle 04/22/97 2:40am na
--------------------------------------------------------------------------------
CMP.A2 up idle 04/22/97 8:55am na
--------------------------------------------------------------------------------
CMP.B1 Schld Down na na
--------------------------------------------------------------------------------
CMP.B2 up running xe1366,jd1075 04/22/97 6:40am 04/22/97 7:30am
--------------------------------------------------------------------------------
CMP.B3 up idle 04/21/97 11:30pm 04/22/97 7:30am
--------------------------------------------------------------------------------
CMP.B4 up-eng running jl1352 04/22/97 2:30am 04/22/97 7:30am
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 04/21/97 @ 2:00am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 04/22/97 @ 2:00am
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
xe1366,xe1334 yd0257,xb1443
lots in room: New specs/revs posted:
------------- ---------------------
26 lots new expanded range on cmos6 lite.
Lots Processed
jd1247/24
jd1289/23
jd1114/21
jl1146/24
jl1361/24
jl1362/24
jl1146/24
jd1308/24
|
| 91.26 | passdown cmp b-shift 04/22/97 | FABSIX::M_PROVENCHER | | Tue Apr 22 1997 06:57 | 139 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 21 mqcs
BREAKIN WAFERS 61 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24h MQCS COMPLETED : 04/22/97 @ 3:30 am
CMP.A1 24hr MQCS NEXT DUE : 04/23/97 @ 3:30 am
CMP.A2 (Strasbaugh 6DS-SP) - up/idle
CMP.A2 24hr MQCS COMPLETED: 04/22/97 @ 9:00 am
CMP.A2 24hr MQCS NEXT DUE : 04/23/97 @ 9:00 am
CMP.B1 (Speedfam CMP-V) - sched/dn/to be shipped out
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - up/running jd1285 m2
jd1299 m1 @start up
CMP.B2 24hr MQCS COMPLETED: in process
CMP.B2 24hr MQCS NEXT DUE : in process
CMP.B2 12hr MQCS COMPLETED: 04/22/97 @ 6:30 am
CMP.B2 12hr MQCS NEXT DUE : 04/22/97 @ 6:30 pm
CMP.B3 (Speedfam CMP-V) - up/running
mqc after pad changes 1st and secondary pad.
carriers 1,3,4,5 changed. failed 1st set of
mqc's, (head 4 only) for deviation. carrier
4 replaced 2nd set in passed tool down at
@ 12:00 am up at 5:30 am
CMP.B3 24hr MQCS COMPLETED: 04/22/97 @ 5:30 am
CMP.B3 24hr MQCS NEXT DUE : 04/23/97 @ 5:30 am
CMP.B3 12hr MQCS COMPLETED: 04/22/97 @ 5:30 am
CMP.B3 12hr MQCS NEXT DUE : 04/22/97 @ 5:30 am
CMP.B4 (Speedfam CMP-V) - up/ENG
A new barrel was installed during day
shift.
This tool can be used in an emergency, if b2,or
b3 are down for a good chunk of time. per Matt
VanHanehem
please keep to up/eng, per b.tower
CMP.B4 24hr MQCS COMPLETED: 04/22/97 @ 5:00 am
CMP.B4 24hr MQCS NEXT DUE : 04/23/97 @ 5:00 am
CMP.B4 12hr MQCS COMPLETED: 04/22/97 @ 5:00 am
CMP.B4 12hr MQCS NEXT DUE : 04/22/97 @ 5:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 04/22/97 @ 2:00 am
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 04/23/97 @ 2:00 am
CMP-SCRUB.A2 (On-track scrubber) -
CMP-SCRUB.A2 24hr MQCS COMPLETED: 04/22/97 @ 2:30 am
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 04/23/97 @ 2:30 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 04/22/97 @ 2:00 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 04/23/97 @ 2:00 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* lots *
Down Equipment:
---------------
* cmp.b1 *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
--------------
* none *
Monitor status:
--------------
3 boxes of 12K mqc wafers
3 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 28 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see t.d.c.o. regarding modified single pass lot processing *
Lots/wafers processed
--------------------
* jl1352 m1 24 wafers
jd1075 m3 24 wafers,
xe1366 m1 23 wafers (hotlot)
jd1075 m3 24 wafers
jl1148 m2 24 wafers
jl1149 m2 24 wafers
xe1026 m1 24 wafers
JD1286 m2 24 wafers
XE1344 m2 23 wafers (hotlot)
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 SPEEDFAM
11 STRASBAUGH
0 PLATES F/S
|
| 91.27 | Cmp Passdown A Shift | FABSIX::J_BLAIS | You have read | Tue Apr 22 1997 20:43 | 72 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 4.0 boxes
BREAKIN WAFERS 6.0 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up idle 04/23/97 3:00am na
--------------------------------------------------------------------------------
CMP.A2 up idle 04/23/97 10:00am na
--------------------------------------------------------------------------------
CMP.B1 Schld Down na na
--------------------------------------------------------------------------------
CMP.B2 up running jd1285,jl1316 04/23/97 7:30am 04/23/97 7:00am
--------------------------------------------------------------------------------
CMP.B3 up running jd1295 04/23/97 5:20am 04/23/97 7:30am
--------------------------------------------------------------------------------
CMP.B4 up-eng idle 04/23/97 4:00am 04/23/97 7:30am
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 04/22/97 @ 2:00am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 04/23/97 @ 2:00am
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
xb1342 Jd1230*,Jd1231*
* Eric B working it.
lots in room: New specs/revs posted:
------------- ---------------------
26 lots new expanded range on cmos6 lite.
Lots Processed
jl1259/24
jl1353/20
jl1318/24
jd1299/24
jl1365/23
jl1149/24
jl1395/24
jd1399/24
xe1334/23
jd1377/24
jl1257/24
jl1267/24
jl1148/24
xe1026/24
jd1232/22
jl1397/24
jl1155/24
jl1339/12
|
| 91.28 | passdown cmp b-shift 04/23/97 | FABSIX::M_PROVENCHER | | Wed Apr 23 1997 05:56 | 138 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 21 mqcs
BREAKIN WAFERS 52 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24h MQCS COMPLETED : 04/23/97 @ 4:00 am
CMP.A1 24hr MQCS NEXT DUE : 04/24/97 @ 4:00 am
CMP.A2 (Strasbaugh 6DS-SP) - up/idle
CMP.A2 24hr MQCS COMPLETED: 04/23/97 @ 9:00 am
CMP.A2 24hr MQCS NEXT DUE : 04/24/97 @ 9:00 am
CMP.B1 (Speedfam CMP-V) - sched/dn/to be shipped out today
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - up/mqc/idle at 6:30 am
CMP.B2 24hr MQCS COMPLETED: in process
CMP.B2 24hr MQCS NEXT DUE : in process
CMP.B2 12hr MQCS COMPLETED: 04/23/97 @ 4:30 am
CMP.B2 12hr MQCS NEXT DUE : 04/23/97 @ 4:30 pm
CMP.B3 (Speedfam CMP-V) - up/mqc
on tool jl1264 m1 t: rr:
jd1249 m2 t: rr:
CMP.B3 24hr MQCS COMPLETED: 04/22/97 @ 5:30 am
CMP.B3 24hr MQCS NEXT DUE : 04/23/97 @ 5:30 am
CMP.B3 12hr MQCS COMPLETED: 04/22/97 @ 9:30 pm
CMP.B3 12hr MQCS NEXT DUE : 04/23/97 @ 9:30 am
CMP.B4 (Speedfam CMP-V) -up/eng tool down at 2:30 am head not homeing over
polish table. up at 3:15 am
This tool can be used in an emergency, if b2,or
b3 are down for a good chunk of time. per Matt
VanHanehem
please keep to up/eng, per b.tower
CMP.B4 24hr MQCS COMPLETED: 04/22/97 @ 5:00 am late in process at 7:00am
CMP.B4 24hr MQCS NEXT DUE : 04/23/97 @ 5:00 am " "
CMP.B4 12hr MQCS COMPLETED: 04/22/97 @ 5:00 am " "
CMP.B4 12hr MQCS NEXT DUE : 04/22/97 @ 5:00 pm " "
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 04/23/97 @ 2:30 am
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 04/24/97 @ 2:30 am
CMP-SCRUB.A2 (On-track scrubber) -
CMP-SCRUB.A2 24hr MQCS COMPLETED: 04/23/97 @ 2:30 am
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 04/24/97 @ 2:30 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 04/23/97 @ 2:30 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 04/24/97 @ 2:30 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* lots *
Down Equipment:
---------------
* cmp.b1 *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
--------------
* jd1231 m2 *
Monitor status:
--------------
4 boxes of 12K mqc wafers
3 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*13 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see t.d.c.o. regarding modified single pass lot processing *
Lots/wafers processed
--------------------
* jl1363 m1 23 wafers *
jl1156 m2 24 wafers
jl1350 m1 23 wafers
jl1150 m2 24 wafers
jl1263 m1 24 wafers
jd1231 m2 24 wafers
jd1295 m1 24 wafers
JL1373 PMD 24 wafers
JL1324 PMD 24 wafers
jl1007 m2 24 wafers
JD1285 m2 22 wafers
JL1316 m1 24 wafers
JL1301 m1 24 wafers
jl1293 m1 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 SPEEDFAM
11 STRASBAUGH
0 PLATES F/S
|
| 91.29 | Cmp Passdown A Shift | FABSIX::J_BLAIS | You have read | Wed Apr 23 1997 20:55 | 57 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 4.0 boxes
BREAKIN WAFERS 4.0 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up idle 04/24/97 4:00am na
--------------------------------------------------------------------------------
CMP.A2 up idle 04/24/97 2:00pm na
--------------------------------------------------------------------------------
CMP.B1 Schld Down na na
--------------------------------------------------------------------------------
CMP.B2 up running jl1364,jl1184 04/24/97 2:00pm 04/24/97 4:00am
--------------------------------------------------------------------------------
CMP.B3 up running jl1193,jl1317 04/23/97 5:20am 04/24/97 6:20am
--------------------------------------------------------------------------------
CMP.B4 un-Schld Down, system freezes up. 04/24/97 12:00pm 04/23/97 7:30am
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 04/23/97 @ 2:00am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 04/24/97 @ 2:00am
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
xe1291,jd1231
lots in room: New specs/revs posted:
------------- ---------------------
17 lots new expanded range on cmos6 lite.
Lots Processed
jl0889a/18
jl1375/24
jl1151/24
jl1410/24
jd1249/24
jl1007/23
jd1460b/6
jl1264/19
|
| 91.30 | | FABSIX::M_CADIEUX | KADOU | Thu Apr 24 1997 08:47 | 56 |
|
CMP D SHIFT PASSDOWN
CMP.A1(Strasbaugh 6DS-SP)-DOWN/VERIFY-U -BREAKING IN NEW PAD
READ ON.A1
-JL1387(ILD1) RAN FOR 6 MIN.
STILL @12K
CMP.A2(Strasbaugh 6DS-SP)-UP/RUNNING-1 -JD1326(ILD1) RUNNING 3RD 3 MIN. RUN
NEEDS 100% AND TOUCH-UP
CMP.B2(Speedfam CMP-V)-UP/MQC -RUNNING FIRST MQC
READ ON.A1
-XE1112(ILD2) NEEDS TOUCH-UPS
100%ED ON.A5
REM.RATE=2851 RUN TIME=235
-YE0233(ILD2) NEEDS TOUCH-UPS
100%ING ON.A4
REM.RATE=2767 RUN TIME=255
CMP.B3 (Speedfam CMP-V)-UP/MQC -SECOND MQC READING ON.A5
FAILED FIRST RUN FOR RANGE
READ ON.A5, PARTICLES PASSED
-JD1298(ILD2) NEEDS 100%
AND TOUCH-UP R.R=2898 RUN TIME=250
CMP.B4 (Speedfam CMP-V)DOWN/REPAIR -UNLOAD FLIPPER DROPPING WAFERS
-NEEDS FULL BREAKIN AND MQC
READ ON.A1
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (On-track scrubber) - DOWN/REPAIR
HOT LOTS IN AREA:
-------------------
NONE
-------------------
MQC WAFERS USED:18
-------------------
MQC WAFERS AVAIL:4.5
-------------------
LOTS ON HOLD:
NONE
___________________
|
| 91.31 | PASSDOWN | FABSIX::D_CAUSE | | Fri Apr 25 1997 08:39 | 50 |
|
D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/MQC CARRIERS AND PAD CHANGED 2 LOTS RUNNING
JL1413 ONLY SEND AHEADS HAVE BEEN RUN
JL1416 WAFERS NEED T/U READ 100% ON .A4
CMP.A2 (Strasbaugh 6DS-SP) -UP/MQC PAD AND CARRIER CHANGE AFTER ENG AND
REPAIR OF LEFT SEND ELEVATOR
CMP.B1 (Speedfam CMP-V) -GONE TO AZ.
CMP.B2 (Speedfam CMP-V) - UP/RUNNING-1 -JD1246(ILD3) READING ON.A5
NEEDS TOUCH-UPS REM.RATE=2320
CMP.B3 (Speedfam CMP-V) - UP/RUNNING RAN 1ST PASS ON LOT JL1320 AND JL1329.
NEEDS 100%
CMP.B4 (Speedfam CMP-V)- UP/RUNNING HOT LOT JD1460B ILD3 RAN 1ST 300SECONDS
READING ON .A4
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - DOWN
HOT lots in area:
----------------
BREAK IN WAFERS USED:15
MQC WAFERS USED:8 WAFERS USED
MQC WAFERS AVAIL:4 BOXES
----------
|
| 91.32 | | FABSIX::M_CADIEUX | KADOU | Sat Apr 26 1997 08:37 | 45 |
|
CMP D SHIFT PASSDOWN
CMP.A1(Strasbaugh 6DS-SP)-UP/IDLE -
CMP.A2(Strasbaugh 6DS-SP)-UP/IDLE -
CMP.B2(Speedfam CMP-V)-UP/RUNNING-2 -JL1321(ILD1) 100%ING ON.A1
R.R.=3858 RUN TIME=200
-JL1162(ILD1) READY TO RUN
CMP.B3 (Speedfam CMP-V)-UP/RUNNING-1 -**XE1334(ILD2) HOT LOT**
100%ING ON .A4
R.R.=3480 TIME=212
CMP.B4 (Speedfam CMP-V)DOWN -REPLACED CARRIERS, DUE TO HIGH STD
ON PRODUCT
-JL1332(ILD2) SA ALREADY RUN
READ ON.A4
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (On-track scrubber) - UP/IDLE
HOT LOTS IN AREA:
-------------------
**XE1334(ILD2)**RAN ON.B3
-------------------
MQC WAFERS USED:10
-------------------
MQC WAFERS AVAIL:3
-------------------
LOTS ON HOLD:
NONE
___________________
|
| 91.33 | passdown cmp b-shift 04/27/97 | FABSIX::M_PROVENCHER | | Sun Apr 27 1997 06:41 | 144 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 2 mqcs
BREAKIN WAFERS 32 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running jl1412 pmd t:110 rr:
CMP.A1 24h MQCS COMPLETED : 04/26/97 @ 9:30 pm
CMP.A1 24hr MQCS NEXT DUE : 04/27/97 @ 9:30 pm
CMP.A2 (Strasbaugh 6DS-SP) - up/running JL1437 pmd t: 110 r/r: 2128
CMP.A2 24hr MQCS COMPLETED: 04/26/97 @ 3:00 pm
CMP.A2 24hr MQCS NEXT DUE : 04/27/97 @ 3:00 pm
CMP.B1 (Speedfam CMP-V) - dn/external
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - up/running Jd1288 M2 t:160 rr:4178
CMP.B2 24hr MQCS COMPLETED: 04/26/97 @ 5:00 pm
CMP.B2 24hr MQCS NEXT DUE : 04/27/97 @ 5:00 pm
CMP.B2 12hr MQCS COMPLETED: 04/27/97 @ 5:00 am
CMP.B2 12hr MQCS NEXT DUE : 04/27/97 @ 5:00 pm
CMP.B3 (Speedfam CMP-V) - up/running jd1325 m1/t:185 rr:3404
CMP.B3 24hr MQCS COMPLETED: 04/26/97 @ 4:00 pm
CMP.B3 24hr MQCS NEXT DUE : 04/27/97 @ 4:00 pm
CMP.B3 12hr MQCS COMPLETED: 04/27/97 @ 4:00 am
CMP.B3 12hr MQCS NEXT DUE : 04/27/97 @ 4:00 pm
CMP.B4 (Speedfam CMP-V) -up/eng running jd1399 m1/t:185 rr:
jd1377 m1/t:185 rr:
This tool can be used in an emergency, if b2,or
b3 are down for a good chunk of time. per Matt
VanHanehem
please keep to up/eng, per b.tower
CMP.B4 24hr MQCS COMPLETED: 04/26/97 @ 7:00 pm
CMP.B4 24hr MQCS NEXT DUE : 04/27/97 @ 7:00 pm
CMP.B4 12hr MQCS COMPLETED: 04/27/97 @ 7:00 am
CMP.B4 12hr MQCS NEXT DUE : 04/27/97 @ 7:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 04/26/97 @ 5:30 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 04/27/97 @ 5:30 pm
CMP-SCRUB.A2 (On-track scrubber) -
tool down at 1:30 am for heatlamp failure
up @ 2:30 am
CMP-SCRUB.A2 24hr MQCS COMPLETED: 04/26/97 @ 5:30 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 04/27/97 @ 5:30 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 04/26/97 @ 5:30 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 04/27/97 @ 5:30 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* few *
Down Equipment:
---------------
* cmp b1 (external) *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
--------------
* jd1297 on hold for eng, per pss, high std_dev *
Monitor status:
--------------
1 boxes of 12K mqc wafers
3 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*18 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see t.d.c.o. regarding modified single pass lot processing *
Lots/wafers processed
--------------------
* jl1371 m1 24 wafers
jl1372 m1 21 wafers
jl1332 m2 23 wafers
jl1390 m1 24 wafers
jl1393 m1 24 wafers
jl1394 m1 24 wafers
jd1297 m2 24 wafers
jl1391 m1 24 wafers
JD1247 m3 24 wafers
XE1025 pmd 24 wafers
JD1381 pmd 24 wafers
JD1384 pmd 24 wafers
JL1418 pmd 24 wafers
JL1437 pmd 24 wafers
XE1065 m3 24 wafers
JD1239 m1 23 wafers
jl1255 m2 24 wafers
jl1412 pmd 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
18 SPEEDFAM
7 STRASBAUGH
4 PLATES F/S
|
| 91.34 | Cmp Passdown A Shift | FABSIX::J_BLAIS | You have read | Sun Apr 27 1997 20:33 | 69 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 1.5 boxes
BREAKIN WAFERS 5.0 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up idle 04/27/97 9:00pm na
--------------------------------------------------------------------------------
CMP.A2 up MQC currently running.... na
--------------------------------------------------------------------------------
CMP.B1 Schld Down na na
--------------------------------------------------------------------------------
CMP.B2 up idle 04/28/97 5:00pm 04/28/97 5:00am
--------------------------------------------------------------------------------
CMP.B3 up running jl1349,jl1352 04/28/97 5:00am 04/28/97 5:00am
--------------------------------------------------------------------------------
CMP.B4 up/MQC running jl1218 04/27/97 7:00pm 04/28/97 7:30am
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 04/27/97 @ 7:00pm
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 04/28/97 @ 7:00pm
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
lots in room: New specs/revs posted:
------------- ---------------------
4 lots new expanded range on cmos6 lite.
Lots Processed
jl1330/23
jl1361/24
jd1377/23
jl1365/23
jd1325/24
jl1415/24
jd1288/24
jl1412/24
jl1300/24
jl1394/24
jd1239/23
jl1390/24
jl1255/24
jl1393/24
jl1437/24
xd1200/20
jd1399/24
jl1257/24
jd1406/24
|
| 91.35 | passdown cmp b-shift 04/28/97 | FABSIX::M_PROVENCHER | | Mon Apr 28 1997 06:15 | 134 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 24 mqcs
BREAKIN WAFERS 38 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running JL1428 pmd T:110 rr:2230
CMP.A1 24h MQCS COMPLETED : 04/28/97 @ 1:30 am
CMP.A1 24hr MQCS NEXT DUE : 04/29/97 @ 1:30 am
CMP.A2 (Strasbaugh 6DS-SP) - up/running JL1439 pmd T:110 rr:2100
CMP.A2 24hr MQCS COMPLETED: 04/27/97 @ 10:00 pm
CMP.A2 24hr MQCS NEXT DUE : 04/28/97 @ 10:00 pm
CMP.B1 (Speedfam CMP-V) - dn/external
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - up/idle
CMP.B2 24hr MQCS COMPLETED: 04/27/97 @ 5:00 pm
CMP.B2 24hr MQCS NEXT DUE : 04/28/97 @ 5:00 pm
CMP.B2 12hr MQCS COMPLETED: 04/28/97 @ 5:00 am
CMP.B2 12hr MQCS NEXT DUE : 04/28/97 @ 5:00 pm
CMP.B3 (Speedfam CMP-V) - up/idle
tool went down for pad change on both
primary, and 2nd pad, failed 1st set of
mqc's for uniformity, change id/od
ran 2nd set, up at 4:00 am
CMP.B3 24hr MQCS COMPLETED: 04/28/97 @ 4:00 am
CMP.B3 24hr MQCS NEXT DUE : 04/29/97 @ 4:00 am
CMP.B3 12hr MQCS COMPLETED: 04/28/97 @ 4:00 am
CMP.B3 12hr MQCS NEXT DUE : 04/28/97 @ 4:00 pm
CMP.B4 (Speedfam CMP-V) -up/eng running jd1307 m2 t:185 rr:3715
tool failed for particles, scrubbed tool,
ran 2nd set, tool passed up at 2:30 am
This tool can be used in an emergency, if b2,or
b3 are down for a good chunk of time. per Matt
VanHanehem
please keep to up/eng, per b.tower
CMP.B4 24hr MQCS COMPLETED: 04/28/97 @ 2:30 am
CMP.B4 24hr MQCS NEXT DUE : 04/29/97 @ 2:30 am
CMP.B4 12hr MQCS COMPLETED: 04/28/97 @ 6:00 am
CMP.B4 12hr MQCS NEXT DUE : 04/28/97 @ 6:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 04/27/97 @ 7:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 04/28/97 @ 7:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 04/27/97 @ 7:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 04/28/97 @ 7:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 04/27/97 @ 7:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 04/28/97 @ 7:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* zb0246 sti lot on hold for eng *
Down Equipment:
---------------
* cmp b1 (external) *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
--------------
* xb1369 sti lot on hold for eng *
zb0246 sti lot " "
Monitor status:
--------------
2 boxes of 12K mqc wafers
5 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*4 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see t.d.c.o. regarding modified single pass lot processing *
Lots/wafers processed
--------------------
* jl1349 m2 24 wafers *
jl1352 m2 24 wafers
jl1218 m2 24 wafers
jd1287 m2 23 wafers
JL1256 m1 24 wafers
jl1267 m2 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
18 SPEEDFAM
7 STRASBAUGH
4 PLATES F/S
|
| 91.36 | Cmp Passdown A Shift | FABSIX::J_BLAIS | You have read | Mon Apr 28 1997 20:23 | 57 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 2.5 boxes
BREAKIN WAFERS 5.0 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up idle 04/29/97 1:30am na
--------------------------------------------------------------------------------
CMP.A2 up idle 04/28/97 8:00pm na
--------------------------------------------------------------------------------
CMP.B1 Schld Down na na
--------------------------------------------------------------------------------
CMP.B2 up idle 04/29/97 7:00pm 04/29/97 7:00am
--------------------------------------------------------------------------------
CMP.B3 up idle 04/29/97 3:45am 04/29/97 7:00am
--------------------------------------------------------------------------------
CMP.B4 up Was down most of the day for slurry pump problems up at ~7:00pm
will need full MQC's
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 04/28/97 @ 7:00pm
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 04/29/97 @ 7:00pm
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
XB1369,ZB0246 (STI LOTS)
lots in room: New specs/revs posted:
------------- ---------------------
5 lots new expanded range on cmos6 lite.
Lots Processed
jl1294/24
jd1469/24
jd1285/22
jl1089/24
jd1386/23
jl1439/24
jl1428/24
JD1286/24
|
| 91.37 | passdown cmp b-shift 04/29/97 | FABSIX::M_PROVENCHER | | Tue Apr 29 1997 06:20 | 134 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 mqcs
BREAKIN WAFERS 31 misc
CMP.A1 (Strasbaugh 6DS-SP) - dn/unsched (tool down at @5 am due to exposed
wiring in the harness)
CMP.A1 24h MQCS COMPLETED : 04/28/97 @ 11:30 am
CMP.A1 24hr MQCS NEXT DUE : 04/29/97 @ 11:30 am
CMP.A2 (Strasbaugh 6DS-SP) - up/idle
CMP.A2 24hr MQCS COMPLETED: 04/28/97 @ 7:00 pm
CMP.A2 24hr MQCS NEXT DUE : 04/29/97 @ 7:00 pm
CMP.B1 (Speedfam CMP-V) - dn/external
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - up/running JL1373 M1 t:160/jl1220 m1
CMP.B2 24hr MQCS COMPLETED: 04/28/97 @ 7:00 pm
CMP.B2 24hr MQCS NEXT DUE : 04/29/97 @ 7:00 pm
CMP.B2 12hr MQCS COMPLETED: 04/29/97 @ 7:00 am
CMP.B2 12hr MQCS NEXT DUE : 04/29/97 @ 7:00 pm
CMP.B3 (Speedfam CMP-V) - up/idle
CMP.B3 24hr MQCS COMPLETED: 04/29/97 @ 4:00 am
CMP.B3 24hr MQCS NEXT DUE : 04/30/97 @ 4:00 am
CMP.B3 12hr MQCS COMPLETED: 04/29/97 @ 7:00 am
CMP.B3 12hr MQCS NEXT DUE : 04/29/97 @ 7:00 pm
CMP.B4 (Speedfam CMP-V) -up/eng running jl1293 m2 t:190 rr:
This tool can be used in an emergency, if b2,or
b3 are down for a good chunk of time. per Matt
VanHanehem
please keep to up/eng, per b.tower
CMP.B4 24hr MQCS COMPLETED: 04/29/97 @ 1:30 am
CMP.B4 24hr MQCS NEXT DUE : 04/30/97 @ 1:30 am
CMP.B4 12hr MQCS COMPLETED: 04/29/97 @ 6:00 am
CMP.B4 12hr MQCS NEXT DUE : 04/29/97 @ 6:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 04/28/97 @ 7:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 04/29/97 @ 7:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
tool down at 1:00 am, maint looking at
it. up at 2:00 am
CMP-SCRUB.A2 24hr MQCS COMPLETED: 04/28/97 @ 7:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 04/29/97 @ 7:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 04/28/97 @ 7:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 04/29/97 @ 7:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* zb0246 sti lot on hold for eng *
Down Equipment:
---------------
* cmp b1 (external) *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
--------------
* xb1369 sti lot on hold for eng *
zb0246 sti lot " "
xb1213 sti lot " "
Monitor status:
--------------
4� boxes of 12K mqc wafers
5 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*6 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see t.d.c.o. regarding modified single pass lot processing *
Lots/wafers processed
--------------------
* xd1382 pmd 23 wafers *
jl1427 pmd 24 wafers
jl1263 m2 24 wafers
jl1259 m2 24 wafers
jl1414 pmd 24 wafers
jl1419 pmd 24 wafers
jl1363 m2 23 wafers
jl1438 pmd 24 wafers
JD1308 M3 13 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
18 SPEEDFAM
7 STRASBAUGH
4 PLATES F/S
|
| 91.38 | Cmp Passdown A Shift | FABSIX::J_BLAIS | You have read | Tue Apr 29 1997 20:41 | 67 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 5 boxes
BREAKIN WAFERS 3 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up idle 04/30/97 2:30pm na
--------------------------------------------------------------------------------
CMP.A2 up MQC running **/**/97 na
--------------------------------------------------------------------------------
CMP.B1 Schld Down na na
--------------------------------------------------------------------------------
CMP.B2 up running xe1366 04/30/97 7:00pm 04/30/97 7:00am
--------------------------------------------------------------------------------
CMP.B3 up idle 04/30/97 4:20am 04/30/97 7:30am
--------------------------------------------------------------------------------
CMP.B4 up running jl1364 @tup 04/30/97 1:20 am 04/30/97 7:30am
--------------------------------------------------------------------------------
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 04/29/97 @ 7:30pm
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 04/30/97 @ 7:30pm
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
XE1366 XB1213,ZB0246 (STI LOTS)
lots in room: New specs/revs posted:
------------- ---------------------
13 lots new expanded range on cmos6 lite.
Lots Processed
xe1335/24
jl1420/24
xe1199/19
jl1465/24
jl1373/23
xe1366/23
jl1370/24
jl1411/24
xe1334/23
jd1404/22
jl1375/24
jl1350/23
jl1220/24
jl1214/24
jl1304/24
jl1293/24
jl1417/21
jl1362/24
jl1438/24
jl1353/19
|
| 91.39 | PASSDOWN | FABSIX::D_CAUSE | | Wed Apr 30 1997 08:33 | 51 |
|
D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING **HOT LOT** JD1472 READY FOR TOUCHUP
RR= LS-1989 RS-2898 100% READ ON .A5
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING JD1403 100%ING ON .A5
100 SEC RR= LS-2411 RS-2477
CMP.B1 (Speedfam CMP-V) -GONE TO AZ.
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JL1139 ILD2 SEND AHEADS READ ON THK.A1
180 SEC "USE DEC TIN14" TO MEASURE
JD1309 ILD2 100% ON THK.A5
180 SEC RR-3330
CMP.B3 (Speedfam CMP-V) - UP/RUNNING RAN 1ST PASS ON LOT JD1326 RR =2316.
100% READ ON .A4
CMP.B4 (Speedfam CMP-V)- UP/VERIFY FAILED 24 HOUR MQC'S WEEKLY PM COMPLETE
AND NEW PAD CUNNING FULL BREAKIN AND MQC
WAFERS PRE-READ ON THK.A1
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:1
----------------
BREAK IN WAFERS USED:20
MQC WAFERS USED:17 WAFERS USED
MQC WAFERS AVAIL:4.5 BOXES
----------
|
| 91.40 | PASSDOWN | FABSIX::D_CAUSE | | Thu May 08 1997 08:32 | 47 |
|
D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING JL1490 M1 WILL NEED 100% AND T/U
JL1517 PMD SA READ ON THK.A5 100 SEC
CMP.A2 (Strasbaugh 6DS-SP) -UP/ENG RUNNING TESTS WITH 18% SLURRY
CMP.B1 (Speedfam CMP-V) -GONE TO AZ.
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JD1378 100%ING ON THK.A5 RR=3572 TIME 210
JL1410 RUNNING SEND AHEADS 180 SEC
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JL1423 SEND AHEADS READING ON THK.A1
RUN FOR 200 SEC... JL1418 NEEDS FINAL
CMP.B4 (Speedfam CMP-V)- UP/MQC EVALUATEING ON THK.A4 JD1283 M3 NEEDS T/U
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - DOWN/REPAIR STILL DROPPING WAFERS IN SPIN
STATION
HOT lots in area:2
----------------
BREAK IN WAFERS USED:20
MQC WAFERS USED: 5 WAFERS USED
----------
|
| 91.41 | PASSDOWN | FABSIX::D_CAUSE | | Fri May 09 1997 08:42 | 47 |
|
D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING JL1519 SEND AHEADS READ ON THK.A5
TIME:100 SECS
CMP.A2 (Strasbaugh 6DS-SP) -UP/MQC NEEDS EVALUATION ON THK.A5
CMP.B1 (Speedfam CMP-V) -GONE TO AZ.
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JL0697 FIRST PASS TIME: 230 RR=3222
JL1489 SEND AHEADS DONE ON .A5 185 SEC
CMP.B3 (Speedfam CMP-V) - UP/RUNNING XE1026 FIRST PASS RR=4482
XE1025 SEND AHEADS RUN READINGS ON .A5
RUN FOR 170 SECS
CMP.B4 (Speedfam CMP-V)- UP/RUNNING JL1419 NEEDS FINAL MEASUREMENTS
TIME=200 RR=3450
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:15
MQC WAFERS USED: 10 WAFERS USED
----------
|