| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 90.1 | passdown cmp b-shift 03/02/97 | FABSIX::M_PROVENCHER | | Sun Mar 02 1997 06:37 | 118 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 mqcs
BREAKIN WAFERS 54 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/running jd1131 pmd hot lot/xe0918 pmd
CMP.A1 24h MQCS COMPLETED : 03/01/97 @ 9:30 pm
CMP.A1 24hr MQCS NEXT DUE : 03/02/97 @ 9:30 pm
CMP.A2 (Strasbaugh 6DS-SP) -up/mqc(failed 24 hr mqc's. pad was changed on tool)
tool down_unsched at @ 5:00 am
CMP.A2 24hr MQCS COMPLETED: in process
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - up/running jd0931 m3/jl0993 m1
CMP.B1 24hr MQCS COMPLETED: 03/01/97 @ 9:30 am
CMP.B1 24hr MQCS NEXT DUE : 03/02/97 @ 9:30 am
CMP.B1 12hr MQCS COMPLETED: 03/02/97 @ 6:00 am
CMP.B1 12hr MQCS NEXT DUE : 03/02/97 @ 6:00 pm
CMP.B2 (Speedfam CMP-V) - up/mqc (jd1118 m3 /jl1046 m1 on tool)
CMP.B2 24hr MQCS COMPLETED: 24 hr mqc in process
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: 03/02/97 @ 6:00 am
CMP.B2 12hr MQCS NEXT DUE : 03/02/97 @ 6:00 pm
CMP.B3 (Speedfam CMP-V) - up/running xd0915 m3/jl1015 m1
CMP.B3 24hr MQCS COMPLETED: 03/01/97 @ 12:30 pm
CMP.B3 24hr MQCS NEXT DUE : 03/02/97 @ 12:30 pm
CMP.B3 12hr MQCS COMPLETED: 03/01/97 @ 10:30 pm
CMP.B3 12hr MQCS NEXT DUE : 03/02/97 @ 10:30 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 03/01/97 @ 9:30 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 03/02/97 @ 9:30 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 03/01/97 @ 9:30 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 03/02/97 @ 9:30 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 03/01/97 @ 9:30 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 03/02/97 @ 9:30 pm
Hot/B lots in area:
__________________
* jd1131 pmd (cmp.a1) *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* jd0930 Ild2 1.16 days *
jd0929 Ild2 1.16 days
jd1119 Ild1 1.02 days
zd0245 Ild1 1.86 days (hold lot)
Down Equipment:
---------------
* cmp.a2 pad change after failed 24 hr mqc's, running break ins *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* xd0915 #4,#9,#20 *
Hold Lots:
---------
* ze0245 Ild1 *
Monitor status:
--------------
1 boxes of 12K mqc wafers
4 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*18 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jl1066 pmd 24 wafers *
jl1069 pmd 24 wafers
jl0998 m1 24 wafers
jd0935 m3 21 wafers
jd0960 m3 21 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM
7 STRASBAUGH
5 PLATES F/S
|
| 90.2 | cmp passdown a shift | FABSIX::J_BLAIS | You have read | Sun Mar 02 1997 19:54 | 61 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number used Number Available
--------------- ----------- ----------------
MQC-12K MONS 17 2.5 boxes
BREAKIN WAFERS 20 5 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up idle 03/03/97 9:30pm NA
CMP.A2 up xe1063/24 03/03/97 8:40am NA
CMP.B1 up jd0931/24, jl0994/23 03/03/97 12:30pm 03/03/97 7:00am
CMP.B2 up jd0929/24, jd0930/24 03/03/97 9:00am 03/03/97 8:00am
CMP.B3 up jd1119/24, jd1120/23 03/03/97 7:00pm 03/03/97 7:00am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 03/02/97 @ 9:30 pm
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 03/02/97 @ 9:30 pm
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
xe1063/24 ze0245/14
lots in room: New specs/revs posted:
------------- ---------------------
17 lots
Lots/wafers processed
--------------------
xe0918/24
jl1046/24
jl1062/24
jl1090/24
xd0915/23
jl1015/24
jd1118/16
jl0993/22
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM
7 STRASBAUGH
5 PLATES F/S
|
| 90.3 | passdown b-shift 03/03/97 | FABSIX::M_PROVENCHER | | Mon Mar 03 1997 05:56 | 122 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 7 mqcs
BREAKIN WAFERS 46 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/mqc (pad change,first set of mqc's failed, 2nd
set in process) down @ 12:00 am
CMP.A1 24h MQCS COMPLETED : n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) -up/running xe1063 pmd hotlot/jl1080 pmd
CMP.A2 24hr MQCS COMPLETED: 03/02/97 @ 8:30 am
CMP.A2 24hr MQCS NEXT DUE : 03/03/97 @ 8:30 am
CMP.B1 (Speedfam CMP-V) - up/idle
CMP.B1 24hr MQCS COMPLETED: 03/02/97 @ 12:30 pm
CMP.B1 24hr MQCS NEXT DUE : 03/03/97 @ 12:30 pm
CMP.B1 12hr MQCS COMPLETED: 03/03/97 @ 5:00 am step height at 5:00 am (.068)
CMP.B1 12hr MQCS NEXT DUE : 03/03/97 @ 5:00 pm
CMP.B2 (Speedfam CMP-V) - up/running jd0928 m2/xd0989 m1
CMP.B2 24hr MQCS COMPLETED: 03/02/97 @ 9:00 am
CMP.B2 24hr MQCS NEXT DUE : 03/03/97 @ 9:00 am
CMP.B2 12hr MQCS COMPLETED: 03/03/97 @ 8:00 am
CMP.B2 12hr MQCS NEXT DUE : 03/03/97 @ 8:00 pm
CMP.B3 (Speedfam CMP-V) - up/running jl0995 m2/jl1047 m1
CMP.B3 24hr MQCS COMPLETED: 03/02/97 @ 7:00 pm
CMP.B3 24hr MQCS NEXT DUE : 03/03/97 @ 7:00 pm
CMP.B3 12hr MQCS COMPLETED: 03/03/97 @ 7:00 pm
CMP.B3 12hr MQCS NEXT DUE : 03/03/97 @ 7:00 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 03/02/97 @ 11:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 03/03/97 @ 11:00 pm
CMP-SCRUB.A2 (On-track scrubber) - dn/unsched (robot problems,eeg on top of it)
CMP-SCRUB.A2 24hr MQCS COMPLETED: 03/02/97 @ 11:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 03/03/97 @ 11:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 03/02/97 @ 11:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 03/03/97 @ 11:00 pm
Hot/B lots in area:
__________________
* xe01063 pmd (cmp.a2) *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* zd0245 Ild1 2.86 days (hold lot) *
Down Equipment:
---------------
* cmp.a1 pad change after failed 24 hr mqc's, pad changes failed 1st set of
mqc's, running break ins and 2nd set *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* ze0245 Ild1 *
jd0929 m2 (e.bodensieck)
jd0930 m2 (e.bodensieck)
Monitor status:
--------------
3 boxes of 12K mqc wafers
3 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*11 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jd1119 m1 24 wafers *
jl1039 m1 24 wafers
jl1047 m1 22 wafers
jl0994 m2 23 wafers
jd1120 m2 24 wafers
jd1130 m2 24 wafers (hotlot)
jd0929 m2 24 wafers
jd0930 m2 24 wafers
jd0931 m3 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM
7 STRASBAUGH
5 PLATES F/S
|
| 90.4 | Passdown "A" Shift | FABSIX::J_REISNER | | Mon Mar 03 1997 19:58 | 69 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitors Number Available
--------------- ----------------
MQC-12K MONS 2 boxes
BREAKIN WAFERS 4 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up JL1067 and JL1081 03/04/97 8:15am NA
CMP.A2 verify Failed MQC's 2X. Pad was changed- break-ins running
CMP.B1 up 03/04/97 3:25pm 03/04/97 7:15am
CMP.B2 up 03/4/97 10:30am 03/04/97 7:00am
CMP.B3 Eng Work almost complete on door upgrade
Pads changed will need full MQC's
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 03/02/97 @ 10:30 pm
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 03/03/97 @ 10:30 pm
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
ze0245
lots in room: New specs/revs posted:
------------- ---------------------
lots
Lots/wafers processed
--------------------
xd1022/23 hot
xe1063/24 hot
jd0929/24
jl1039/24
jl1080/24
jl1001/24
xd0989/23
jd0930/24
jl1047/22
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM
7 STRASBAUGH
5 PLATES F/S
|
| 90.5 | Cmp Passdown a Shift | FABSIX::J_BLAIS | You have read | Tue Mar 04 1997 19:34 | 66 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number used Number Available
--------------- ----------- ----------------
MQC-12K MONS 17 2 boxes
BREAKIN WAFERS 20 2 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up running jd1053,jl1084 03/05/97 4:30pm NA
CMP.A2 up running xd0947 03/05/97 12:00am NA
CMP.B1 up running jd1132 03/05/97 2:00am 03/05/97 4:00am
CMP.B2 DOWN EQUIPMENT UPGRADE will require full mqc when up
CMP.B3 up jd0856 03/05/97 2:00am 03/05/97 7:00am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 03/04/97 @ 9:30 pm
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 03/04/97 @ 9:30 pm
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
JD1132,JD1131 ze0245/14
lots in room: New specs/revs posted:
------------- ---------------------
17 lots
Lots Processed
jd0928/20
jl1037/24
jl1083/24
jl1080/24
jl1037/24
jl0889/6
JL1082/24
jl0980/23
jl0995/24
jd1017/24
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM
7 STRASBAUGH
5 PLATES F/S
|
| 90.6 | PASSDOWN | FABSIX::D_CAUSE | | Wed Mar 05 1997 07:39 | 34 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING JL1092 READY TO RUN (NO WAFERS RUN)
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING XD1024 (SEND AHEADS ONLY) AND JL1092
NEEDS DRG AND FINAL
CMP.B1 (Speedfam CMP-V) -UP/RUNNING XD1023 & JD0092 (SEND AHEADS ONLY)
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JL0997 & JL0956A FIRST PASS WILL
NEED 100% AND TOUCHUP
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JL1002 READY FOR TOUCHUP AND JL0977
NEEDS DRG AND FINAL
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:35
MQC WAFERS USED:27 WAFERS USED
MQC WAFERS AVAIL:1.5 BOXES
----------
|
| 90.7 | passdown cmp b-shift 03/09/97 | FABSIX::M_PROVENCHER | | Sun Mar 09 1997 05:59 | 120 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 16 mqcs
BREAKIN WAFERS 36 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/idle
CMP.A1 24h MQCS COMPLETED : 03/09/97 @ 5:00 am
CMP.A1 24hr MQCS NEXT DUE : 03/10/97 @ 5:00 am
CMP.A2 (Strasbaugh 6DS-SP) -up/running jl1087 100%/ jl1088 100%
removal rate 2352/100 sec
CMP.A2 24hr MQCS COMPLETED: 03/08/97 @ 6:30 am to be run this morning
CMP.A2 24hr MQCS NEXT DUE : 03/09/97 @ 6:30 am
CMP.B1 (Speedfam CMP-V) - up/running jl1080 m1 (touchup) /jd1029 m2 (start)
removal rate 4180/ 150 sec
CMP.B1 24hr MQCS COMPLETED: 03/09/97 @ 1:00 am
CMP.B1 24hr MQCS NEXT DUE : 03/10/97 @ 1:00 am
CMP.B1 12hr MQCS COMPLETED: 03/09/97 @ 5:00 am
CMP.B1 12hr MQCS NEXT DUE : 03/09/97 @ 5:00 pm
CMP.B2 (Speedfam CMP-V) - up/running jl1081 m1 (start)/jl1044 (start)
CMP.B2 24hr MQCS COMPLETED: 03/02/97 @ 9:00 am
CMP.B2 24hr MQCS NEXT DUE : 03/03/97 @ 9:00 am
CMP.B2 12hr MQCS COMPLETED: 03/03/97 @ 8:00 am
CMP.B2 12hr MQCS NEXT DUE : 03/03/97 @ 8:00 pm
CMP.B3 (Speedfam CMP-V) - dn/sched down for pad change after pad count went
over 2000 wafers
CMP.B3 24hr MQCS COMPLETED: in process
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 03/08/97 @ 10:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 03/09/97 @ 10:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 03/08/97 @ 10:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 03/09/97 @ 10:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 03/08/97 @ 10:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 03/09/97 @ 10:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
---------------
* cmp.b3 (pad change)*
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* yd0823a Ild2 *
yd0823 Ild2
Monitor status:
--------------
3 boxes of 12K mqc wafers
1 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*12 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jl1082 m1 24 wafers *
jl1080 m1 23 wafers
xm0948 m2 20 wafers
jl1042 m2 24 wafers
jl1043 m2 24 wafers
jl1019 m2 24 wafers
xd0914 m3 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
22 SPEEDFAM
2 STRASBAUGH
11 PLATES F/S
|
| 90.8 | update to passdown cmp.b3 | FABSIX::M_PROVENCHER | | Sun Mar 09 1997 05:57 | 121 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 16 mqcs
BREAKIN WAFERS 36 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/idle
CMP.A1 24h MQCS COMPLETED : 03/09/97 @ 5:00 am
CMP.A1 24hr MQCS NEXT DUE : 03/10/97 @ 5:00 am
CMP.A2 (Strasbaugh 6DS-SP) -up/running jl1087 100%/ jl1088 100%
removal rate 2352/100 sec
CMP.A2 24hr MQCS COMPLETED: 03/08/97 @ 6:30 am to be run this morning
CMP.A2 24hr MQCS NEXT DUE : 03/09/97 @ 6:30 am
CMP.B1 (Speedfam CMP-V) - up/running jl1080 m1 (touchup) /jd1029 m2 (start)
removal rate 4180/ 150 sec
CMP.B1 24hr MQCS COMPLETED: 03/09/97 @ 1:00 am
CMP.B1 24hr MQCS NEXT DUE : 03/10/97 @ 1:00 am
CMP.B1 12hr MQCS COMPLETED: 03/09/97 @ 5:00 am
CMP.B1 12hr MQCS NEXT DUE : 03/09/97 @ 5:00 pm
CMP.B2 (Speedfam CMP-V) - up/running jl1081 m1 (start)/jl1044 (start)
CMP.B2 24hr MQCS COMPLETED: 03/02/97 @ 9:00 am
CMP.B2 24hr MQCS NEXT DUE : 03/03/97 @ 9:00 am
CMP.B2 12hr MQCS COMPLETED: 03/03/97 @ 8:00 am
CMP.B2 12hr MQCS NEXT DUE : 03/03/97 @ 8:00 pm
CMP.B3 (Speedfam CMP-V) - dn/sched down for pad change after pad count went
over 2000 wafers carriers @ 1500, so they will
be changed as well
CMP.B3 24hr MQCS COMPLETED: in process
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 03/08/97 @ 10:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 03/09/97 @ 10:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 03/08/97 @ 10:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 03/09/97 @ 10:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 03/08/97 @ 10:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 03/09/97 @ 10:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
---------------
* cmp.b3 (pad change)*
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* yd0823a Ild2 *
yd0823 Ild2
Monitor status:
--------------
3 boxes of 12K mqc wafers
1 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*12 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jl1082 m1 24 wafers *
jl1080 m1 23 wafers
xm0948 m2 20 wafers
jl1042 m2 24 wafers
jl1043 m2 24 wafers
jl1019 m2 24 wafers
xd0914 m3 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
22 SPEEDFAM
2 STRASBAUGH
11 PLATES F/S
|
| 90.9 | passdown cmp b-shift 03/10/97 | FABSIX::M_PROVENCHER | | Mon Mar 10 1997 05:29 | 119 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 7 mqcs
BREAKIN WAFERS 45 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/jl1098 pmd
CMP.A1 24h MQCS COMPLETED : 03/10/97 @ 12:00 am (midnight)
CMP.A1 24hr MQCS NEXT DUE : 03/11/97 @ 12:00 am
CMP.A2 (Strasbaugh 6DS-SP) -up/running jl1097 pmd / jl1089 pmd
CMP.A2 24hr MQCS COMPLETED: 03/10/97 @ 10:00 pm
CMP.A2 24hr MQCS NEXT DUE : 03/11/97 @ 10:00 pm
CMP.B1 (Speedfam CMP-V) - up/idle
CMP.B1 24hr MQCS COMPLETED: 03/09/97 @ 1:00 am
CMP.B1 24hr MQCS NEXT DUE : due now
CMP.B1 12hr MQCS COMPLETED: 03/09/97 @ 9:00 pm
CMP.B1 12hr MQCS NEXT DUE : 03/10/97 @ 9:00 am
CMP.B2 (Speedfam CMP-V) - up/running jd1017 ?(at touchup)/jd1013 ?(at touchup)
CMP.B2 24hr MQCS COMPLETED: 03/09/97 @ 12:30 pm
CMP.B2 24hr MQCS NEXT DUE : 03/10/97 @ 12:30 pm
CMP.B2 12hr MQCS COMPLETED: 03/10/97 @ 7:30 am
CMP.B2 12hr MQCS NEXT DUE : 03/10/97 @ 7:30 pm
CMP.B3 (Speedfam CMP-V) - up running jd1132 m3 hotlot/jd1119 m2 (at touchup)
CMP.B3 24hr MQCS COMPLETED: 03/10/97 @ 7:30 am
CMP.B3 24hr MQCS NEXT DUE : 03/10/97 @ 7:30 pm
CMP.B3 12hr MQCS COMPLETED: 03/09/97 @ 5:00 pm
CMP.B3 12hr MQCS NEXT DUE : 03/10/97 @ 5:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 03/09/97 @ 10:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 03/10/97 @ 10:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 03/09/97 @ 10:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 03/10/97 @ 10:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle (tool down at 2 am up at 5:00 am)
CMP-SCRUB.A3 24hr MQCS COMPLETED: 03/10/97 @ 5:00 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 03/11/97 @ 5:00 am
Hot/B lots in area:
__________________
* jd1132 m3 cmp.b3 *
Hot lots coming to area:
-----------------------
* 1 more lot coming *
Static Lots in area:
-------------------
* none *
Down Equipment:
---------------
* none *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* yd0823a Ild2 *
yd0823 Ild2
xe0949 Ild1
Monitor status:
--------------
3 boxes of 12K mqc wafers
1 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*15 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jl1123 pmd 24 wafers b3
xd1020 pmd 23 wafers a1
jl1093 pmd 24 wafers b1
jl1096 pmd 24 wafers b1
jl1047 m2 22 wafers b2
jl0985 m3 24 wafers b1
xd0805 m3 22 wafers b1
# of carriers for strasbaugh/speedfam:
--------------------------------------
17 SPEEDFAM
0 STRASBAUGH
10 PLATES F/S
|
| 90.10 | CMP Passdown A shift | FABSIX::J_REISNER | | Mon Mar 10 1997 19:58 | 78 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 5 boxes
BREAKIN WAFERS 1 1/4 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up running JL1100 03/10/97 11:30pm NA
CMP.A2 up JL1099-will need final 5 03/10/97 09:40pm NA
CMP.B1 up running JL1085, YE0248 03/11/97 09:30am 03/10/97 8:30pm
CMP.B2 up JD1131 M3 will need more touch ups
pad change is needed after this lot
CMP.B3 up JD1132 03/11/97 07:15pm 03/11/97 7:15am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 03/09/97 @ 9:30 pm
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 03/10/97 @ 9:30 pm
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
JD1131 XE0988
lots in room: New specs/revs posted:
------------- ---------------------
14 lots + 3 reworks
NOTE:: YD0238 and YD0238A will need step heights from one wafer in each
of the groups noted in remarks and polished as per remark. Took lot off hold
per Eric. Please note that incoming thickness is 15.78K - ~15.9. Pre
measurements were taken on Thickness.A5.
NOTE: There are 3 rework lots in the area, XB0634, JL1088, and JL1087.
There are remarks noted in workstream.
Lots Processed
JL1097
JL1098
JL1094
XD0836
JD1132
JL1013
JL1048
JD1119
JD1017
JD1134 Hot Lot
# of carriers for strasbaugh/speedfam:
--------------------------------------
17 SPEEDFAM
0 STRASBAUGH
10 PLATES F/S
|
| 90.11 | passdown cmpo b-shift 03/11/97 | FABSIX::M_PROVENCHER | | Tue Mar 11 1997 05:55 | 127 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 7 mqcs
BREAKIN WAFERS 45 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/idle
CMP.A1 24h MQCS COMPLETED : 03/11/97 @ 3:30 am
CMP.A1 24hr MQCS NEXT DUE : 03/12/97 @ 3:30 am
CMP.A2 (Strasbaugh 6DS-SP) -up/running jl1086 pmd/ jl1141 pmd
down at 1:00 am for failed 24 hr mqc's pad was
changed. 1st set passed up at 5:30am
CMP.A2 24hr MQCS COMPLETED: 03/11/97 @ 5:30 pm
CMP.A2 24hr MQCS NEXT DUE : 03/12/97 @ 5:30 pm
CMP.B1 (Speedfam CMP-V) - up/running yd0238a ild2 / yd0823 ild2
CMP.B1 24hr MQCS COMPLETED: 03/10/97 @ 9:30 am
CMP.B1 24hr MQCS NEXT DUE : 03/11/97 @ 9:30 am
CMP.B1 12hr MQCS COMPLETED: 03/11/97 @ 12:30 am
CMP.B1 12hr MQCS NEXT DUE : 03/11/97 @ 12:30 pm
CMP.B2 (Speedfam CMP-V) - up/running jl1045 m2/ xd0893 m3
pad change due to low step height, 1st set of
mqc's failed for uniformity,passed 2nd set
tool down at 10:30 pm - up at 5:30 am
CMP.B2 24hr MQCS COMPLETED: 03/11/97 @ 5:30 am
CMP.B2 24hr MQCS NEXT DUE : 03/12/97 @ 5:30 am
CMP.B2 12hr MQCS COMPLETED: 03/10/97 @ 10:30 pm
CMP.B2 12hr MQCS NEXT DUE : 03/11/97 @ 10:30 am
CMP.B3 (Speedfam CMP-V) - up/running jd1120 m3 at touchup /jd0932 ild2
CMP.B3 24hr MQCS COMPLETED: 03/11/97 @ 7:00 pm
CMP.B3 24hr MQCS NEXT DUE : 03/12/97 @ 7:00 pm
CMP.B3 12hr MQCS COMPLETED: 03/11/97 @ 7:00 am
CMP.B3 12hr MQCS NEXT DUE : 03/11/97 @ 7:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 03/10/97 @ 11:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 03/11/97 @ 11:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 03/10/97 @ 11:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 03/11/97 @ 11:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 03/10/97 @ 11:00 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 03/11/97 @ 11:00 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* xe0988 pmd on hold 1.90 *
yd0238a m2 2.56 (cmp.b1)
yd0238 m2 2.56 (cmp.b1)
xe0949 m1 1.52
Down Equipment:
---------------
* thickness.a5 to go down this morning for lamp change, a warning (per pss) *
has been placed on this tool for possible cause foe scratching.
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* xe0988 pmd *
Monitor status:
--------------
3 boxes of 12K mqc wafers
1 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*13 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jl1028 pmd 6 wafers b1 (rework)
jl1087 pmd 9 wafers b1 (rework)
jl1100 pmd 22 wafers a1
jl1129 pmd 24 wafers a1
jl1008 m1 23 wafers b3
ye0248 m1 24 wafers b1
jl1085 m1 23 wafers b1
jd1131 m3 24 wafers b2 (hotlot)
# of carriers for strasbaugh/speedfam:
--------------------------------------
17 SPEEDFAM
0 STRASBAUGH
10 PLATES F/S
|
| 90.12 | cmp passdown a shift | FABSIX::J_BLAIS | You have read | Tue Mar 11 1997 19:58 | 65 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 2 boxes
BREAKIN WAFERS 2 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up running xe0988 03/12/97 7:30pm NA
CMP.A2 up running jl1122 03/12/97 5:30am NA
CMP.B1 up 03/12/97 9:00am 03/11/97 8:30pm
CMP.B2 up running xd0893 03/11/97 10:00pm 03/12/97 8:00am
CMP.B3 up running jl1140 03/12/97 7:45pm 03/12/97 7:30am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 03/10/97 @ 9:30 pm
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 03/11/97 @ 9:30 pm
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
lots in room: New specs/revs posted:
------------- ---------------------
lots
Lots Processed
JL1141/24
jd0932/23
xe1063/23
yd0238/12
yd0238a/12
jd1120/22
jl1045/24
jl1086/24
xe0631/22
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM
7 STRASBAUGH
5 PLATES F/S
|
| 90.13 | passdown cmp b-shift 03/12/97 | FABSIX::M_PROVENCHER | | Wed Mar 12 1997 05:29 | 120 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 mqcs
BREAKIN WAFERS 39 misc
CMP.A1 (Strasbaugh 6DS-SP) -dn/sched (tool down for pad change due to high wafer
count @400, tool is schedualled to go
down at @7:30 am
CMP.A1 24h MQCS COMPLETED : n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) -up/running jl1139 pmd/ jl1128 pmd
CMP.A2 24hr MQCS COMPLETED: 03/11/97 @ 7:00 pm
CMP.A2 24hr MQCS NEXT DUE : 03/12/97 @ 7:00 pm
CMP.B1 (Speedfam CMP-V) - up/running jl1083 m1/(watch step height 5 am at.065)
CMP.B1 24hr MQCS COMPLETED: 03/11/97 @ 9:30 am
CMP.B1 24hr MQCS NEXT DUE : 03/12/97 @ 9:30 am
CMP.B1 12hr MQCS COMPLETED: 03/11/97 @ 9:00 am
CMP.B1 12hr MQCS NEXT DUE : 03/12/97 @ 9:00 pm
CMP.B2 (Speedfam CMP-V) - up/running jl1056 m2 / jl1059 m2
CMP.B2 24hr MQCS COMPLETED: 03/11/97 @ 5:30 am
CMP.B2 24hr MQCS NEXT DUE : 03/12/97 @ 5:30 am (due now)
CMP.B2 12hr MQCS COMPLETED: 03/12/97 @ 7:00 am
CMP.B2 12hr MQCS NEXT DUE : 03/12/97 @ 7:00 pm
CMP.B3 (Speedfam CMP-V) - up/running jd1016 m2 /
CMP.B3 24hr MQCS COMPLETED: 03/11/97 @ 9:00 pm
CMP.B3 24hr MQCS NEXT DUE : 03/12/97 @ 9:00 pm
CMP.B3 12hr MQCS COMPLETED: 03/11/97 @ 7:00 am
CMP.B3 12hr MQCS NEXT DUE : 03/11/97 @ 7:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 03/11/97 @ 10:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 03/12/97 @ 10:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 03/11/97 @ 10:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 03/12/97 @ 10:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 03/11/97 @ 10:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 03/12/97 @ 10:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
---------------
* cmp.a1 (pad change) *
cmp.a2 24 hr mqc's
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
3 boxes of 12K mqc wafers
3 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*15 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jl1140 pmd 24 wafers
xe0988 pmd 22 wafers
xe0949 m1 20 wafers
xd0989 m2 23 wafers
jl1058 m2 24 wafers
jl1050 m2 24 wafers
xd0893 m3 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
17 SPEEDFAM
0 STRASBAUGH
10 PLATES F/S
|
| 90.14 | Cmp Passdown a Shift | FABSIX::J_BLAIS | You have read | Wed Mar 12 1997 19:40 | 71 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 4 boxes
BREAKIN WAFERS 2 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 mqc breakins/mqc NA
CMP.A2 up running jl1143 03/13/97 12:57pm NA
CMP.B1 up running xm1027 03/13/97 9:00am 03/12/97 7:55pm
CMP.B2 up running jd1031, xb0634 rew. 03/13/97 8:20am 03/13/97 7:20am
CMP.B3 up running jd1030 03/12/97 8:00pm 03/13/97 7:45am
Note: CMP.B1 has low pad step in will require a pad change when the lot is
complete.
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 03/11/97 @ 9:30 pm
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 03/12/97 @ 9:30 pm
CMP-SCRUB.A2 is down for a broken wafer in spin station.
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
lots in room: New specs/revs posted:
------------- ---------------------
8 lots N O M O R E S T I C K E R S ! ! ! per pat McP.
Lots Processed
xd1024/19
jd1016/22
jl1057/22
jl1058/24
jl0956a/18
jl1059/24
jl1128/24
jl1122/24
jl1143/24
jl113924
jl1056/24
jl1056/24
# of carriers for strasbaugh/speedfam:
--------------------------------------
17 SPEEDFAM
10 STRASBAUGH
0 PLATES F/S
|
| 90.15 | passdown cmp b-shift 03/16/97 | FABSIX::M_PROVENCHER | | Sun Mar 16 1997 06:39 | 119 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 7 mqcs
BREAKIN WAFERS 32 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/running jd1073 pmd
R/R to be determined
CMP.A1 24h MQCS COMPLETED : 03/15/97 @ 11:00 pm
CMP.A1 24hr MQCS NEXT DUE : 03/15/97 @ 11:00 pm
CMP.A2 (Strasbaugh 6DS-SP) -up/running jl1163 pmd/jd1107 pmd
r/r: 2043 to be determined
CMP.A2 24hr MQCS COMPLETED: 03/15/97 @ 1:00 pm
CMP.A2 24hr MQCS NEXT DUE : 03/16/97 @ 1:00 pm
CMP.B1 (Speedfam CMP-V) - up/idle
CMP.B1 24hr MQCS COMPLETED: 03/15/97 @ 8:30 am
CMP.B1 24hr MQCS NEXT DUE : 03/16/97 @ 8:30 am
CMP.B1 12hr MQCS COMPLETED: 03/16/97 @ 6:30 am
CMP.B1 12hr MQCS NEXT DUE : 03/16/97 @ 6:30 pm
CMP.B2 (Speedfam CMP-V) - up/mqc
CMP.B2 24hr MQCS COMPLETED: 03/15/97 @ 7:00 am (in process)
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: 03/16/97 @ 6:30 am
CMP.B2 12hr MQCS NEXT DUE : 03/16/97 @ 6:30 pm
CMP.B3 (Speedfam CMP-V) - up/running xe0902b m2/jd1102 pmd (both at touchup)
r/r-3027 150 sec r/r 14307 15 sec
CMP.B3 24hr MQCS COMPLETED: 03/15/97 @ 11:00 am
CMP.B3 24hr MQCS NEXT DUE : 03/16/97 @ 11:00 am
CMP.B3 12hr MQCS COMPLETED: 03/16/97 @ 7:00 am
CMP.B3 12hr MQCS NEXT DUE : 03/16/97 @ 7:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 03/15/97 @ 11:30 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 03/16/97 @ 11:30 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 03/15/97 @ 11:30 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 03/16/97 @ 11:30 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 03/15/97 @ 11:30 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 03/16/97 @ 11:30 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* jd0128 ILd3 (on hold) *
Down Equipment:
---------------
* none *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* xe0862 ILD3 5 wafers *
Hold Lots:
---------
* xm0861 ILD3 *
xm0948 ILD3
jd1028 ILD3
Monitor status:
--------------
3 boxes of 12K mqc wafers
2 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*10 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jl1150 pmd 24w
jl1161 pmd 24w
jl1145 pmd 23w
xd0896 m3 23w
xe0862 m3 18w
# of carriers for strasbaugh/speedfam:
--------------------------------------
20 SPEEDFAM
6 STRASBAUGH
1 PLATES F/S
|
| 90.16 | CMP PASSDOWN A SHIFT | FABSIX::J_BLAIS | You have read | Sun Mar 16 1997 19:29 | 66 |
| \ CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 2 boxes
BREAKIN WAFERS 2 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up 03/16/97 11:00pm NA
CMP.A2 verify new pad and carriers, breaking in pad. NA
CMP.B1 DWN running jd1108,xd0836 03/17/97 11:00am 03/16/97 8:10pm
CMP.B2 DWN crashed EE working on it ..
CMP.B3 up/mqc running jl1140 will be running 03/17/97 7:00am
Note: CMP.B1 just went down it lost a wafer from the carrier, no crash thou.
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 03/15/97 @ 9:30 pm
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 03/16/97 @ 9:30 pm
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
xm0861,xm0948
lots in room: New specs/revs posted:
------------- ---------------------
8 lots
Lots Processed
jd1102/24
jd1073/23
jd1107/24
jl1151/24
jl1163/23
jd1101/16
xe0902b/7
xe0862/18
# of carriers for strasbaugh/speedfam:
--------------------------------------
20 SPEEDFAM
6 STRASBAUGH
1 PLATES F/S
|
| 90.17 | passdown cmp b-shift 03/17/97 | FABSIX::M_PROVENCHER | | Mon Mar 17 1997 04:44 | 140 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 32 mqcs
BREAKIN WAFERS 52 misc
CMP.A1 (Strasbaugh 6DS-SP) -dn/verify breakins mqc running
a1 24 hr mqc's started @12 mid failed @16 and 17
%. down for pad change @1:30 am
CMP.A1 24h MQCS COMPLETED : in process
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) -up/running jd1127 pmd
r/r - s
a2 down at shift change, (pad change/pm)
up @12:00 midnight
CMP.A2 24hr MQCS COMPLETED: 03/17/97 @ 12:00 am (midnight)
CMP.A2 24hr MQCS NEXT DUE : 03/18/97 @ 12:00 am
CMP.B1 (Speedfam CMP-V) - up/running jl1083 m2 /
r/r -4027/160 s
b1 down (crash) prior to shift change, up at
11:30 pm
CMP.B1 24hr MQCS COMPLETED: 03/16/97 @ 11:30 pm
CMP.B1 24hr MQCS NEXT DUE : 03/17/97 @ 11:30 pm
CMP.B1 12hr MQCS COMPLETED: 03/17/97 @ 6:30 am
CMP.B1 12hr MQCS NEXT DUE : 03/18/97 @ 6:30 pm
CMP.B2 (Speedfam CMP-V) - up/running jl1129 m1
r/r -4504/160 s
b2 down (crash) prior to shift change, up @
2:00 am
CMP.B2 24hr MQCS COMPLETED: 03/17/97 @ 2:00 am
CMP.B2 24hr MQCS NEXT DUE : 03/18/97 @ 2:00 am
CMP.B2 12hr MQCS COMPLETED: 03/17/97 @ 6:30 am
CMP.B2 12hr MQCS NEXT DUE : 03/17/97 @ 6:30 pm
CMP.B3 (Speedfam CMP-V) - up/running jl1139 m1 / jl1141 m1
r/r -4076/160s r/r - (used same)/160 sec
b3 in 24hr mqc at shift change, mqc failed at 10
pm for bad unif on heads 2 and 4 and high
removal range. Carriers 2 and 4 replaced. 2nd
set pass unif/failed high removal range @483.
offsets performed, b3 up at @ 3am.
CMP.B3 24hr MQCS COMPLETED: 03/17/97 @ 3:00 am
CMP.B3 24hr MQCS NEXT DUE : 03/18/97 @ 3:00 am
CMP.B3 12hr MQCS COMPLETED: 03/17/97 @ 7:00 am
CMP.B3 12hr MQCS NEXT DUE : 03/17/97 @ 7:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 03/16/97 @ 11:30 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 03/17/97 @ 11:30 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 03/16/97 @ 11:30 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 03/17/97 @ 11:30 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 03/16/97 @ 11:30 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 03/17/97 @ 11:30 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* jd0128 ILd3 (on hold) *
Down Equipment:
---------------
* cmp.a1 *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* xm0861 ILD3 *
xm0948 ILD3
jd1028 ILD3
jl1114 pmd dc1018 (no recipe on uv1050) E. Bodensieck notified via mail
Monitor status:
--------------
4 boxes of 12K mqc wafers
1 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 7 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* XD0836 m2 24 wafers *
jd1108 pmd 24 wafers
jl1140 m1 24 wafers
jl1147 pmd 24 wafers
xm1072 pmd 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 SPEEDFAM
6 STRASBAUGH
1 PLATES F/S
|
| 90.18 | Cmp Passdown A Shift | FABSIX::J_BLAIS | You have read | Mon Mar 17 1997 20:00 | 71 |
| \ CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 4 boxes
BREAKIN WAFERS 2 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 DWN Semi-annual pm
CMP.A2 up jl1162 03/18/97 1:00am na
CMP.B1 up running jl1084,jd1074 03/17/97 10:30pm 03/17/97 10:00pm
CMP.B2 up idle 03/18/97 2:00am 03/17/97 7:30pm
CMP.B3 up/mqc jl1123 not moved in yet 03/18/97 2:45am 03/18/97 7:30am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 03/15/97 @ 9:30 pm
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 03/16/97 @ 9:30 pm
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
xm0861,xm0948
lots in room: New specs/revs posted:
------------- ---------------------
6 lots
Lots Processed
jd1133/24 hot
jl1141/24
jl1159/24
jl1139/24
jl1085/23
jd1127/24
jl1158/24
jl1083/24
jl1128/24
jd1028/22
jd1114/24
xd0989/23
jl1129/24
jd1126/24
# of carriers for strasbaugh/speedfam:
--------------------------------------
18 SPEEDFAM
6 STRASBAUGH
1 PLATES F/S
|
| 90.19 | passdown cmp b-shift 03/18/97 | FABSIX::M_PROVENCHER | | Tue Mar 18 1997 05:31 | 125 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/running jd1106 pmd/jl1160 pmd
tool was down for semi annual pm at shift change
up at 3:00 am
CMP.A1 24h MQCS COMPLETED : 03/18/97 @ 3:00 am
CMP.A1 24hr MQCS NEXT DUE : 03/19/97 @ 3:00 am
CMP.A2 (Strasbaugh 6DS-SP) -dn/sch tool to go
down/sched for pad change, pad wafer count will
reach 400 wafers. down @ 6:30 am
CMP.A2 24hr MQCS COMPLETED: when tool comes up
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - up/mqc 24 hr mqc's in process
CMP.B1 24hr MQCS COMPLETED: in process
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: 03/18/97 @ 6:30 am
CMP.B1 12hr MQCS NEXT DUE : 03/18/97 @ 6:30 pm
CMP.B2 (Speedfam CMP-V) - up/running xm1027 m2
CMP.B2 24hr MQCS COMPLETED: 03/17/97 @ 2:00 am (over due)
CMP.B2 24hr MQCS NEXT DUE : 03/18/97 @ 2:00 am
CMP.B2 12hr MQCS COMPLETED: 03/18/97 @ 6:30 am
CMP.B2 12hr MQCS NEXT DUE : 03/18/97 @ 6:30 pm
CMP.B3 (Speedfam CMP-V) - up/running xb0634 m1 start/xe1167 m1(hot lot) start
CMP.B3 24hr MQCS COMPLETED: 03/18/97 @ 3:00 am
CMP.B3 24hr MQCS NEXT DUE : 03/19/97 @ 3:00 am
CMP.B3 12hr MQCS COMPLETED: 03/18/97 @ 7:00 am
CMP.B3 12hr MQCS NEXT DUE : 03/18/97 @ 7:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 03/17/97 @ 11:30 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 03/18/97 @ 11:30 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 03/17/97 @ 11:30 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 03/18/97 @ 11:30 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 03/17/97 @ 11:30 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 03/18/97 @ 11:30 pm
Hot/B lots in area:
__________________
* xe1167 m1 (b3) *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* jd0128 ILd3 (on hold) *
Down Equipment:
---------------
* cmp.a2 pad change *
cmp.b1 24 hr mqc
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* xm0861 ILD3 *
xm0948 ILD3
jd1028 ILD3
Monitor status:
--------------
4 boxes of 12K mqc wafers
4 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 8 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jl1185 pmd 24 wafers *
jd1105 pmd 24 wafers
jl1084 m2 24 wafers
jl1123 m2 24 wafers
jd1124 pmd 24 wafers
jd1053 m2 24 wafers
xd0989 m3 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 SPEEDFAM
6 STRASBAUGH
1 PLATES F/S
|
| 90.20 | a-shift 03/18/97 | FABSIX::J_REISNER | | Tue Mar 18 1997 19:42 | 115 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) -up/running jd1075. Will be on scrubber @
shift change. Will need 100%
CMP.A1 24h MQCS COMPLETED : 03/18/97 @ 3:25 am
CMP.A1 24hr MQCS NEXT DUE : 03/19/97 @ 3:25 am
CMP.A2 (Strasbaugh 6DS-SP) -up/running TUP's on JL1153. Will need final 5
CMP.A2 24hr MQCS COMPLETED: 03/18/97 @ 1:40 pm
CMP.A2 24hr MQCS NEXT DUE : 03/19/97 @ 1:40 pm
CMP.B1 (Speedfam CMP-V) - up/Runnning TUP on JL1143-will need Final 5
CMP.B1 24hr MQCS COMPLETED: 03/18/97 @ 10:00 am
CMP.B1 24hr MQCS NEXT DUE : 03/19/97 @ 10:00 am
CMP.B1 12hr MQCS COMPLETED: 03/18/97 @ 3:50 pm
CMP.B1 12hr MQCS NEXT DUE : 03/19/97 @ 3:50 am
CMP.B2 (Speedfam CMP-V) - up/idle Doors upgraded today
CMP.B2 24hr MQCS COMPLETED: 03/18/97 @ 6:10 pm
CMP.B2 24hr MQCS NEXT DUE : 03/19/97 @ 6:10 pm
CMP.B2 12hr MQCS COMPLETED: 03/18/97 @ 7:10 pm
CMP.B2 12hr MQCS NEXT DUE : 03/19/97 @ 7:10 am
CMP.B3 (Speedfam CMP-V) - up/idle
CMP.B3 24hr MQCS COMPLETED: 03/18/97 @ 3:00 am
CMP.B3 24hr MQCS NEXT DUE : 03/19/97 @ 3:00 am
CMP.B3 12hr MQCS COMPLETED: 03/18/97 @ 7:00 pm
CMP.B3 12hr MQCS NEXT DUE : 03/19/97 @ 7:00 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 03/18/97 @ 12:05 am
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 03/19/97 @ 12:05 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 03/18/97 @ 12:05 am
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 03/19/97 @ 12:05 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 03/18/97 @ 12:05 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 03/19/97 @ 12:05 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
---------------
* none *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
5 1/2 boxes of 12K mqc wafers
2 1/2 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 8 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
JD1106
JL1160
JD1138
XB0364
JD1124
XM0861
JL1156
XM1027
XM0948
XE1167
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 SPEEDFAM
6 STRASBAUGH
1 PLATES F/S
|
| 90.21 | PASSDOWN | FABSIX::D_CAUSE | | Wed Mar 19 1997 07:26 | 31 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING JL1182 PMD SEND AHEADS ONLY
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING JD1136 READY TO RUN
CMP.B1 (Speedfam CMP-V) -UP/MQC AFTER WEEKLY PM
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JL1146 FIRST PASS
CMP.B3 (Speedfam CMP-V) - UP/MQC AFTER WEEKLY PM
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:10
MQC WAFERS USED:10 WAFERS USED
MQC WAFERS AVAIL:5 BOXES
----------
|
| 90.22 | PASSDOWN | FABSIX::D_CAUSE | | Thu Mar 20 1997 07:49 | 37 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING JL1191 READY TO RUN
CMP.B1 (Speedfam CMP-V) -UP/RUNNING XD1071 NEEDS DRG AND FINAL RR 3933 180 SEC
JD1151 100%ING ON THK.A4 RR 3930 180 SEC
NEEDS TOUCHUP
CMP.B2 (Speedfam CMP-V) - UP/RUNNING XD1109 RR 4560 TIME 150 WILL NEED 100%
& TOUCH UP, JL1140 RR 3716 180 SEC WILL NEED 100%
& TOUCHUP.
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JD1133 100% ON THK .A5 ***HOT LOT***
RR 3809 160 WILL NEED TOUCHUP
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:1
----------------
JD1133 CMP.B3 NEEDS TOUCH UP
BREAK IN WAFERS USED:10
MQC WAFERS USED:7 WAFERS USED
MQC WAFERS AVAIL:5 BOXES
----------
|
| 90.23 | PASSDOWN | FABSIX::D_CAUSE | | Fri Mar 21 1997 07:53 | 36 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING JL1152 SEND AHEADS DONE
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING JL1195 RUNNING TU
CMP.B1 (Speedfam CMP-V) -UP/MQC FAILED 3 TIMES FOR CARRIER DEV CARRIER #4
REPLACED AFTER LAST FAIL NEW DEV 20%!!!
ALL OTHER CARRIERS PASSED
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JD1135&JD1157 BOTH NEED TU 100% ON THKA5
RR 12350 RAN FOR 22 SEC
CMP.B3 (Speedfam CMP-V) - UP/RUNNING YD0241 & YD0238 M25 RAN FOR 1200 SEC
WILL NEED 100%
CMP-SCRUB.A1 (On-track scrubber) - DOWN/ INSIDE SCRUB STATION
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:10
MQC WAFERS USED:30 WAFERS USED
MQC WAFERS AVAIL:5 BOXES
----------
|
| 90.24 | PASSDOWN | FABSIX::D_CAUSE | | Sat Mar 22 1997 07:42 | 36 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -DOWN/AWAITING PARTS (CARRIERS FELL OFF AGAIN)
CMP.A2 (Strasbaugh 6DS-SP) -DOWN/RUNNING BREAKINS FAILED 24HR MQC
CMP.B1 (Speedfam CMP-V) -UP/RUNNING JD1107 RR 3666 180 SEC NEEDS FINAL
JD1077 RR 3366 180 SEC NEEDS 100% & TU
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JD1138 100% ON THK.A4 RR 3333 180 SEC
JD1101 NEEDS 100% ON THK.A5 AND TU
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JD1127 160 SEC RR 3488 IN TU WILL NEED
DRG AND FINAL. XD0892 400 SEC 2325
READY FOR T/U
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:***JL1284*** DUE SHORTLY AFTER SHIFT CHANGE
----------------
BREAK IN WAFERS USED:15
MQC WAFERS USED:9 WAFERS USED
MQC WAFERS AVAIL:5 BOXES
----------
|
| 90.25 | passdown cmp b-shift 03/23/97 | FABSIX::M_PROVENCHER | | Sun Mar 23 1997 06:30 | 132 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 14 mqcs
BREAKIN WAFERS 49 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running jl1204 pmd/jl1278 pmd
tool down at shift change, pad was changed
failed 1st set of mqc's (15/12% dev) passed
2nd set (6/7% dev). tool up at 2:00 am
tool currently idle
CMP.A1 24h MQCS COMPLETED : 03/23/97 @ 2:00 am
CMP.A1 24hr MQCS NEXT DUE : 03/24/97 @ 2:00 am
CMP.A2 (Strasbaugh 6DS-SP) - dn/sched
carrier count exceeded 500 wafers, carriers
changed, mqc's need to be run, tool down @ 7am
CMP.A2 24hr MQCS COMPLETED: when tool comes up
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - up/running JD1133 m3 HOT(at touch-up) RR:1950 t:300
XE1167 M2 HOT at start up
tool currently idle
CMP.B1 24hr MQCS COMPLETED: 03/22/97 @ 12:30 pm
CMP.B1 24hr MQCS NEXT DUE : 03/23/97 @ 12:30 pm
CMP.B1 12hr MQCS COMPLETED: 03/23/97 @ 2:30 am
CMP.B1 12hr MQCS NEXT DUE : 03/23/97 @ 2:30 pm
CMP.B2 (Speedfam CMP-V) - up/running XD1024 M2 100% .a5 see remarks
XE0586 M2 100% .a4 see remarks
tool currently idle
CMP.B2 24hr MQCS COMPLETED: 03/22/97 @ 6:00 pm
CMP.B2 24hr MQCS NEXT DUE : 03/23/97 @ 6:00 pm
CMP.B2 12hr MQCS COMPLETED: 03/23/97 @ 2:00 am
CMP.B2 12hr MQCS NEXT DUE : 03/23/97 @ 2:00 pm
CMP.B3 (Speedfam CMP-V) - dn/shed on tool jl1139 m2 \jd1125 m1
r/r:3854 t:170s \ r/r:3547 t:150s
pad count exceeded 2k down for pad change
tool currently idle
CMP.B3 24hr MQCS COMPLETED: 03/22/97 @ 11:00 pm
CMP.B3 24hr MQCS NEXT DUE : 03/23/97 @ 11:00 pm
CMP.B3 12hr MQCS COMPLETED: 03/23/97 @ 5:00 am
CMP.B3 12hr MQCS NEXT DUE : 03/23/97 @ 5:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 03/23/97 @ 1:30 am
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 03/24/97 @ 1:30 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 03/23/97 @ 1:30 am
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 03/24/97 @ 1:30 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 03/23/97 @ 1:30 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 03/24/97 @ 1:30 am
Hot/B lots in area:
__________________
*JD1133 M3 24w cmp.b1*
XE1167 M2 23w cmp.b1
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* xm1027 m2 1.00 days *
Down Equipment:
---------------
* cmp.a2 carrier change/mqc *
cmp.b3 pad change
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
*JL1160 M1 #4*
Hold Lots:
---------
* none *
Monitor status:
--------------
4 boxes of 12K mqc wafers
2 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*20 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jl1128 m2 24 wafers *
jl1160 m1 23 wafers
jl1192 pmd 24 wafers
jl1202 pmd 23 wafers
XE0902B m3 7 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
17 SPEEDFAM
9 STRASBAUGH
2 PLATES F/S
|
| 90.26 | Cmp PASSDOWN A SHIFT | FABSIX::J_BLAIS | You have read | Sun Mar 23 1997 19:39 | 66 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 3 boxes
BREAKIN WAFERS 3 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up xe1065,jl1278,jl1203 03/24/97 2:00am na
CMP.A2 up/mqc running mqc ------------- na
CMP.B1 uP Idle 03/24/97 6:00pm 03/23/97 9:00pm
CMP.B2 up xm1027 03/24/97 6:00pm 03/24/97 5:30am
CMP.B3 up Jd1108,jl1139 03/24/97 3:20pm 03/24/97 7:30am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 03/23/97 @ 1:30 am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 03/24/97 @ 1:30 am
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
none none
lots in room: New specs/revs posted:
------------- ---------------------
24 lots
Lots Processed
XE0902B/7
JD1125/24
JL1202/23
JL1192/24
XE0586/19
XE1167/23
JL1133/24
XD1024/18
JL1204/24
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 SPEEDFAM
6 STRASBAUGH
1 PLATES F/S
|
| 90.27 | passdown cmp b-shift 03/24/97 | FABSIX::M_PROVENCHER | | Mon Mar 24 1997 05:32 | 122 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 mqcs
BREAKIN WAFERS 39 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24h MQCS COMPLETED : post measurments in process
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - up/idle
CMP.A2 24hr MQCS COMPLETED: 03/23/97 @ 11:00 pm
CMP.A2 24hr MQCS NEXT DUE : 03/24/97 @ 11:00 pm
CMP.B1 (Speedfam CMP-V) - up/idle (pre measuring 2 lots for tool)
CMP.B1 24hr MQCS COMPLETED: 03/23/97 @ 6:00 pm
CMP.B1 24hr MQCS NEXT DUE : 03/24/97 @ 6:00 pm
CMP.B1 12hr MQCS COMPLETED: 03/23/97 @ 9:00 pm
CMP.B1 12hr MQCS NEXT DUE : 03/24/97 @ 9:00 am
CMP.B2 (Speedfam CMP-V) - up/running jd1105 m1/xd1115 m1
rr:3335 t:180s / rr: t:160s
CMP.B2 24hr MQCS COMPLETED: 03/23/97 @ 6:00 pm
CMP.B2 24hr MQCS NEXT DUE : 03/24/97 @ 6:00 pm
CMP.B2 12hr MQCS COMPLETED: 03/24/97 @ 5:30 am
CMP.B2 12hr MQCS NEXT DUE : 03/24/97 @ 5:30 pm
CMP.B3 (Speedfam CMP-V) - up/running jd1108 m1/jd1136 m1
CMP.B3 24hr MQCS COMPLETED: 03/23/97 @ 3:30 pm
CMP.B3 24hr MQCS NEXT DUE : 03/24/97 @ 3:30 pm
CMP.B3 12hr MQCS COMPLETED: 03/24/97 @ 7:30 am
CMP.B3 12hr MQCS NEXT DUE : 03/24/97 @ 7:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 03/24/97 @ 3:00 am
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 03/25/97 @ 3:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 03/24/97 @ 3:00 am
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 03/25/97 @ 3:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 03/24/97 @ 3:00 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 03/25/97 @ 3:00 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* 8 lots *
Down Equipment:
---------------
* none *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
4 boxes of 12K mqc wafers
1 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*20+ lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jl1278 pmd 6 wafers *
jl1203 pmd 24 wafers
xe1065 pmd 24 wafers
jd1171 pmd 24 wafers
jd1173 pmd 24 wafers
xm1027 m2 24 wafers
jl1139 m2 24 wafers
jd1074 m1 23 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
17 SPEEDFAM
7 STRASBAUGH
2 PLATES F/S
|
| 90.28 | CMP passdown - A shift | FABSIX::J_REISNER | | Mon Mar 24 1997 19:55 | 124 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - down/MQC's finally passed and system went
down for rotary union. Part replaced, pad
changed, condition cycles done. Brushes still
need to be installed.
CMP.A1 24hr MQCS COMPLETED : n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - up/running XE0987 *target 5500*pls. read remarks
115 secs. r/r 2307
XD1116 100% on Thickness.A5
SA's 80 secs. r/r 3052 lot @95 secs.
CMP.A2 24hr MQCS COMPLETED: 03/23/97 @ 11:00 pm
CMP.A2 24hr MQCS NEXT DUE : 03/24/97 @ 11:00 pm
CMP.B1 (Speedfam CMP-V) - up/running JL1142 and JL1143
CMP.B1 24hr MQCS COMPLETED: 03/24/97 @ 7:00 pm
CMP.B1 24hr MQCS NEXT DUE : 03/25/97 @ 7:00 pm
CMP.B1 12hr MQCS COMPLETED: 03/24/97 @ 9:20 am
CMP.B1 12hr MQCS NEXT DUE : 03/24/97 @ 9:20 pm
CMP.B2 (Speedfam CMP-V) - up/running XB0950 HOT LOT Running TUP's
CMP.B2 24hr MQCS COMPLETED: 03/24/97 @ 6:00 pm
CMP.B2 24hr MQCS NEXT DUE : 03/25/97 @ 6:00 pm
CMP.B2 12hr MQCS COMPLETED: 03/24/97 @ 5:00 pm
CMP.B2 12hr MQCS NEXT DUE : 03/25/97 @ 5:00 am
CMP.B3 (Speedfam CMP-V) - up/running JD1106 TUP then final 5
CMP.B3 24hr MQCS COMPLETED: 03/24/97 @ 7:00 pm
CMP.B3 24hr MQCS NEXT DUE : 03/25/97 @ 7:00 pm
CMP.B3 12hr MQCS COMPLETED: 03/24/97 @ 7:00 pm
CMP.B3 12hr MQCS NEXT DUE : 03/25/97 @ 7:00 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 03/24/97 @ 3:00 am
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 03/25/97 @ 3:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 03/24/97 @ 3:00 am
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 03/25/97 @ 3:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 03/24/97 @ 3:00 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 03/25/97 @ 3:00 am
Hot/B lots in area:
__________________
* XB0950 running on .B1 *
JL1284
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
---------------
* CMP.A1 *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* JD1114 on hold for Eric*
Monitor status:
--------------
5 1/4 boxes of 12K mqc wafers
6 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*20+ lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
JD1108
JD1105
XD1070
XD1115
JL1187A
JL1201
JD1136
JL0995A
JD1137
JL1210
JL1195
# of carriers for strasbaugh/speedfam:
--------------------------------------
17 SPEEDFAM
7 STRASBAUGH
2 PLATES F/S
|
| 90.29 | passdown cmp b-shift 03/25/97 | FABSIX::M_PROVENCHER | | Tue Mar 25 1997 05:35 | 132 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 mqcs
BREAKIN WAFERS 39 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running jd1172 pmd/ jd1179 pmd
time:100s rr:2492 / starting
12 50k wafers with newpad recipe, 6 breakin
wafers with mqc recipe, and mqc wafers, 1st set
in spec @ 4% unif. particles passed tool up
@ 12:30 am
CMP.A1 24h MQCS COMPLETED : 03/25/97 @ 12:30 am
CMP.A1 24hr MQCS NEXT DUE : 03/26/97 @ 12:30 am
CMP.A2 (Strasbaugh 6DS-SP) - dn/verify failed 24 hr mqc's pad changed. running
breakins and mqc'd
CMP.A2 24hr MQCS COMPLETED: in process
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - up/running jl1145 m2/jl1158 m2
both lots starting
CMP.B1 24hr MQCS COMPLETED: 03/24/97 @ 7:00 pm
CMP.B1 24hr MQCS NEXT DUE : 03/25/97 @ 7:00 pm
CMP.B1 12hr MQCS COMPLETED: 03/25/97 @ 12:00 am
CMP.B1 12hr MQCS NEXT DUE : 03/25/97 @ 12:00 pm
CMP.B2 (Speedfam CMP-V) - up/running jl1144 m2/
rr:@3700 t:170 /
CMP.B2 24hr MQCS COMPLETED: 03/24/97 @ 6:00 pm
CMP.B2 24hr MQCS NEXT DUE : 03/25/97 @ 6:00 pm
CMP.B2 12hr MQCS COMPLETED: 03/25/97 @ 5:30 am
CMP.B2 12hr MQCS NEXT DUE : 03/25/97 @ 5:30 pm
CMP.B3 (Speedfam CMP-V) - up/running xe0949 m2/
starting
CMP.B3 24hr MQCS COMPLETED: 03/24/97 @ 7:00 pm
CMP.B3 24hr MQCS NEXT DUE : 03/25/97 @ 7:00 pm
CMP.B3 12hr MQCS COMPLETED: 03/25/97 @ 7:00 am
CMP.B3 12hr MQCS NEXT DUE : 03/25/97 @ 7:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 03/25/97 @ 3:00 am
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 03/26/97 @ 3:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 03/25/97 @ 3:00 am
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 03/26/97 @ 3:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
problems with the wafer finger blade down at
9:30 pm to 11:00 pm. down again at 12:30 am
up @ 3:00 am
CMP-SCRUB.A3 24hr MQCS COMPLETED: 03/25/97 @ 3:30 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 03/26/97 @ 3:30 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* 4 lots *
Down Equipment:
---------------
* cmp.a2 pad change *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
4 boxes of 12K mqc wafers
4 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*19 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jd1106 m1 24 wafers
xb0950 m1 23 wafers (hotlot)
xe0987 pmd 24 wafers
jl1142 m2 23 wafers
jl1143 m2 24 wafers
xd1116 pmd 24 wafers
jl1284 m2 12 wafers (hotlot)
# of carriers for strasbaugh/speedfam:
--------------------------------------
17 SPEEDFAM
7 STRASBAUGH
2 PLATES F/S
|
| 90.30 | cmp passdown a shift | FABSIX::J_BLAIS | You have read | Tue Mar 25 1997 19:39 | 72 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 3 boxes
BREAKIN WAFERS 3 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up 03/26/97 12:00pm na
CMP.A2 up/mqc jl1170 03/26/97 11:41am na
CMP.B1 uP 03/26/97 6:00pm 03/26/97 7:00am
CMP.B2 up jd1075,jd1114 03/24/97 6:00pm 03/26/97 4:45am
CMP.B3 up/mqc xm01072 running mqc now
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 03/25/97 @ 1:30 am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 03/26/97 @ 1:30 am
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
none ze0251
lots in room: New specs/revs posted:
------------- ---------------------
lots na
Lots Processed
jl1145/23
jl1158/23
jd1180/24
jd1172/24
jl1158/24
jd1157/24
jl1144/24
jd1135/24
jl1103/23
jd1178/24
jd1179/23
jl1221/24
xe0949/19
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 SPEEDFAM
6 STRASBAUGH
1 PLATES F/S
|
| 90.31 | passdown cmp b-shift 03/26/97 | FABSIX::M_PROVENCHER | | Wed Mar 26 1997 05:50 | 125 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 mqcs
BREAKIN WAFERS 39 misc
CMP.A1 (Strasbaugh 6DS-SP) - dn/verify (failed 24 hr mqc's, pad was changed,
running breakins tool down at 4;00 am)
CMP.A1 24h MQCS COMPLETED : in process
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - up/running jl1222 pmd /xe1112 pmd
t:100 rr:2346 starting
CMP.A2 24hr MQCS COMPLETED: 03/25/97 @ 11:30 am
CMP.A2 24hr MQCS NEXT DUE : 03/26/97 @ 11:30 am
CMP.B1 (Speedfam CMP-V) - up/running xe0232a m3/ premeasuring jd1127 m2
CMP.B1 24hr MQCS COMPLETED: 03/25/97 @ 6:00 pm
CMP.B1 24hr MQCS NEXT DUE : 03/26/97 @ 6:00 pm
CMP.B1 12hr MQCS COMPLETED: 03/26/97 @ 7:00 am
CMP.B1 12hr MQCS NEXT DUE : 03/26/97 @ 7:00 pm
CMP.B2 (Speedfam CMP-V) - up/mqc (tool went down sched for pad change, due
to over 2000 wafers on both pads, failed
1st set, running 2nd set, tool down at @
CMP.B2 24hr MQCS COMPLETED: in process (post measuring at 5:45 am)
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: n/a
CMP.B2 12hr MQCS NEXT DUE : n/a
CMP.B3 (Speedfam CMP-V) - up/running xd1109 m2/premeasuring jl1202 m1
t:160 rr:3700 (tool was in mqc at shift change,
came up at 9pm)
CMP.B3 24hr MQCS COMPLETED: 03/25/97 @ 9:00 pm
CMP.B3 24hr MQCS NEXT DUE : 03/26/97 @ 9:00 pm
CMP.B3 12hr MQCS COMPLETED: 03/25/97 @ 9:00 pm
CMP.B3 12hr MQCS NEXT DUE : 03/26/97 @ 9:00 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 03/26/97 @ 5:00 am
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 03/27/97 @ 5:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 03/26/97 @ 5:00 am
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 03/27/97 @ 5:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 03/26/97 @ 5:00 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 03/27/97 @ 5:00 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
---------------
* cmp.b2 pad change *
cmp.a1 failed mqc's pad change
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
4 boxes of 12K mqc wafers
2 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 17 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jl1168 pmd 24 wafers *
jd1078 m2 24 wafers
jd1075 m1 24 wafers
jd1114 m1 24 wafers
jl1170 pmd 24 wafers
jl1209 m1 24 wafers
xe0918 m1 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
7 STRASBAUGH
2 PLATES F/S
|
| 90.32 | cmp passdown a shift | FABSIX::J_BLAIS | You have read | Wed Mar 26 1997 19:56 | 71 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- ----------------
MQC-12K MONS 5 boxes
BREAKIN WAFERS 2 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up jl1225 (RR 2237@110sec) 03/27/97 9:50am na
CMP.A2 VERIFY break-in new pad/carriers ----------------- na
CMP.B1 up/mqc XE1167(RR 1757@400SEC) running now 03/26/97 8:30pm
CMP.B2 up jd1138 RR 3994@150SEC) 03/27/97 8:20am 03/27/97 3:00am
CMP.B3 up jl1211 RR 3471@170SEC) 03/26/97 9:00om 03/27/97 5:50am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 03/26/97 @ 1:30 am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 03/27/97 @ 1:30 am
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
xe1167
lots in room: New specs/revs posted:
------------- ---------------------
16 lots na
Lots Processed
JL1196/24
XE1112/22
XE0918/24
XD1109/23
JD1078/24
JL1222/24
JL1202/23
YD0238A/11
JD1127/24
JL1212/24
JL1223/24
JD1126/24
YD0238/12
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 SPEEDFAM
6 STRASBAUGH
1 PLATES F/S
|
| 90.33 | PASSDOWN | FABSIX::D_CAUSE | | Fri Mar 28 1997 08:09 | 34 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING JL1220 FIRST PASS JD1176 SEND AHEADS
DONE
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING JL1215 READY TO RUN
CMP.B1 (Speedfam CMP-V) -UP/RUNNING JL1201 M1 FIRST PASS RR 3480 TIME 200
JD1137 M2 FIRST PASS RR 3000 TIME 200
CMP.B2 (Speedfam CMP-V) - UP/MQC BEING EVALUATED
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JD1173 M1 100'ING ON THK.A5
CMP-SCRUB.A1 (On-track scrubber) - DOWN/OUTSIDE BRUSH STATION
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:20
MQC WAFERS USED:14 WAFERS USED
MQC WAFERS AVAIL:5 BOXES
----------
|
| 90.34 | passdown cmp b-shift 03/30/97 | FABSIX::M_PROVENCHER | | Sun Mar 30 1997 07:45 | 123 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 6 mqcs
BREAKIN WAFERS 39 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24h MQCS COMPLETED : 03/29/97 @ 10:00 am
CMP.A1 24hr MQCS NEXT DUE : 03/30/97 @ 10:00 am
CMP.A2 (Strasbaugh 6DS-SP) - up/running jd1236 pmd
CMP.A2 24hr MQCS COMPLETED: 03/29/97 @ 2:00 pm
CMP.A2 24hr MQCS NEXT DUE : 03/30/97 @ 2:00 pm
CMP.B1 (Speedfam CMP-V) - up/running jl1178 m1/ jl1179 m1
both lots 100%ing
t:170 rr:3521 / t:170 rr:3433
CMP.B1 24hr MQCS COMPLETED: 03/30/97 @ 7:00 am
CMP.B1 24hr MQCS NEXT DUE : 03/31/97 @ 7:00 am
CMP.B1 12hr MQCS COMPLETED: 03/30/97 @ 4:00 am
CMP.B1 12hr MQCS NEXT DUE : 03/30/97 @ 4:00 pm
CMP.B2 (Speedfam CMP-V) - up/running jl1183 m2 (hotlot)
lot running will need 100%
t:180 rr:3774
CMP.B2 24hr MQCS COMPLETED: 03/29/97 @ 3:00 pm
CMP.B2 24hr MQCS NEXT DUE : 03/30/97 @ 3:00 pm
CMP.B2 12hr MQCS COMPLETED: 03/30/97 @ 4:00 am
CMP.B2 12hr MQCS NEXT DUE : 03/30/97 @ 4:00 pm
CMP.B3 (Speedfam CMP-V) - up/running jl1221 m1/
final 5ing
t:170 rr:3540
CMP.B3 24hr MQCS COMPLETED: 03/29/97 @ 1:00 pm
CMP.B3 24hr MQCS NEXT DUE : 03/30/97 @ 1:00 pm
CMP.B3 12hr MQCS COMPLETED: 03/30/97 @ 1:30 am
CMP.B3 12hr MQCS NEXT DUE : 03/30/97 @ 1:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 03/29/97 @ 11:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 03/30/97 @ 11:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 03/29/97 @ 11:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 03/30/97 @ 11:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 03/29/97 @ 11:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 03/30/97 @ 11:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
---------------
* having a problem with the thickness tools, numerous items, kicking out sites
goodness of fit issues, and backup recipes not working either *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
3 boxes of 12K mqc wafers
3 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*21 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
" " ILD3 t.d.c.o. per Kyle W.
Lots/wafers processed
--------------------
* jl1195 m2 24 wafers *
jd1172 m1 24 wafers
jl1255 pmd 24 wafers
jl1258 pmd 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
7 STRASBAUGH
2 PLATES F/S
|
| 90.35 | CMP Passdown "A" Shift | FABSIX::J_REISNER | | Sun Mar 30 1997 21:07 | 122 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - up/running JD1231 and JD1230
CMP.A1 24h MQCS COMPLETED : 03/30/97 @ 2:00 pm
CMP.A1 24hr MQCS NEXT DUE : 03/31/97 @ 2:00 pm
CMP.A2 (Strasbaugh 6DS-SP) - up/idle
CMP.A2 24hr MQCS COMPLETED: 03/30/97 @ 7:30 pm
CMP.A2 24hr MQCS NEXT DUE : 03/31/97 @ 7:30 pm
CMP.B1 (Speedfam CMP-V) - up/running JD1102 running TUP's
CMP.B1 24hr MQCS COMPLETED: 03/30/97 @ 7:00 am
CMP.B1 24hr MQCS NEXT DUE : 03/31/97 @ 7:00 am
CMP.B1 12hr MQCS COMPLETED: 03/30/97 @ 11:00 am
CMP.B1 12hr MQCS NEXT DUE : 03/30/97 @ 11:00 pm
CMP.B2 (Speedfam CMP-V) - up/running XE1063 (TUP's) and JL1153
CMP.B2 24hr MQCS COMPLETED: 03/30/97 @ 5:00 pm
CMP.B2 24hr MQCS NEXT DUE : 03/31/97 @ 5:00 pm
CMP.B2 12hr MQCS COMPLETED: 03/30/97 @ 5:00 pm
CMP.B2 12hr MQCS NEXT DUE : 03/31/97 @ 5:00 am
CMP.B3 (Speedfam CMP-V) - up/running JD1157 needs 100% (currently on
scrub.a1)
CMP.B3 24hr MQCS COMPLETED: 03/30/97 @ 2:30 pm
CMP.B3 24hr MQCS NEXT DUE : 03/31/97 @ 2:30 pm
CMP.B3 12hr MQCS COMPLETED: 03/30/97 @ 2:00 pm
CMP.B3 12hr MQCS NEXT DUE : 03/31/97 @ 2:00 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 03/29/97 @ 11:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 03/30/97 @ 11:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 03/29/97 @ 11:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 03/30/97 @ 11:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 03/29/97 @ 11:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 03/30/97 @ 11:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
---------------
* having a problem with the thickness tools, numerous items, kicking out sites
goodness of fit issues, and backup recipes not working either *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* JB1169 STI lot *
YD0241 - see PSS passdown
Monitor status:
--------------
1 3/4 boxes of 12K mqc wafers
2 1/4 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*23 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
" " ILD3 t.d.c.o. per Kyle W.
Lots/wafers processed
--------------------
* JD1179/23 ILD1
JL1183/24 ILD2
JL1221/24 ILD1
JD1178/24 ILD1
JD1236/24 PMD
JD1237/24 PMD
JD1284D/24 PMD
XB0782/24 ILD1
JL0955A/18 ILD2
JD1105/24 ILD2
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
7 STRASBAUGH
2 PLATES F/S
|
| 90.36 | passdown cmp b-shift 03/31/97 | FABSIX::M_PROVENCHER | | Mon Mar 31 1997 06:33 | 124 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 6 mqcs
BREAKIN WAFERS 38 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24h MQCS COMPLETED : 03/30/97 @ 2:00 pm
CMP.A1 24hr MQCS NEXT DUE : 03/31/97 @ 2:00 pm
CMP.A2 (Strasbaugh 6DS-SP) - up/idle
CMP.A2 24hr MQCS COMPLETED: 03/30/97 @ 7:30 pm
CMP.A2 24hr MQCS NEXT DUE : 03/31/97 @ 7:30 pm
CMP.B1 (Speedfam CMP-V) - up/mqc 24 hrs (hot lot jl1278 m1 on tool)
t: rr: / t: rr:
CMP.B1 24hr MQCS COMPLETED: in process
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: 03/30/97 @ 11:00 pm
CMP.B1 12hr MQCS NEXT DUE : 03/31/97 @ 11:00 am
CMP.B2 (Speedfam CMP-V) - up/running JD1103 M3 1st 300 sec/JD1106 M2
t: rr:
CMP.B2 24hr MQCS COMPLETED: 03/30/97 @ 5:00 pm
CMP.B2 24hr MQCS NEXT DUE : 03/31/97 @ 5:00 pm
CMP.B2 12hr MQCS COMPLETED: 03/31/97 @ 4:00 am
CMP.B2 12hr MQCS NEXT DUE : 03/31/97 @ 4:00 pm
CMP.B3 (Speedfam CMP-V) - up/running jd1136 m2/jl1213 m1
t:180 rr:2846 t:180 rr:3648
CMP.B3 24hr MQCS COMPLETED: 03/30/97 @ 2:30 pm
CMP.B3 24hr MQCS NEXT DUE : 03/31/97 @ 2:30 pm
CMP.B3 12hr MQCS COMPLETED: 03/31/97 @ 4:00 am
CMP.B3 12hr MQCS NEXT DUE : 03/31/97 @ 4:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 03/31/97 @ 3:00 am
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 04/01/97 @ 3:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 03/31/97 @ 3:00 am
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 04/01/97 @ 3:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 03/31/97 @ 3:00 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 04/01/97 @ 3:00 am
Hot/B lots in area:
__________________
* jl1278 m1 cmp.b1 *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
---------------
* cmp.b1 24 hr mqc *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* jd1114 ILD2 on hold for eric bodensieck *
Monitor status:
--------------
4 boxes of 12K mqc wafers
4 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*24 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
" " ILD3 t.d.c.o. per Kyle W.
Lots/wafers processed
--------------------
* jd1102 m2 24 wafers *
jl1153 m1 24 wafers
jd1231 pmd 24 wafers
jd1230 pmd 24 wafers
jl1209 m2 24 wafers
jl1212 m1 22 wafers
jd1157 m2 24 wafers
jd1136 m2 24 wafers
xe1063 m3 22 wafers
jl1185 m1 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
5 SPEEDFAM
7 STRASBAUGH
3 PLATES F/S
|