| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 89.1 | passdown cmp b-shift 02/02/97 | FABSIX::M_PROVENCHER | | Sun Feb 02 1997 05:34 | 114 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 5 mqcs
BREAKIN WAFERS 51 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/idle
CMP.A1 24hr MQCS COMPLETED: 02/01/97 @ 12:00 pm
CMP.A1 24hr MQCS NEXT DUE : 02/02/97 @ 12:00 pm
CMP.A2 (Strasbaugh 6DS-SP) -up/mqc breakin and mqc's in process
(down at 8:00 pm - up for mqc @ 4:00 am)
CMP.A2 24hr MQCS COMPLETED: in process
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - up/running xe0600 m3/ jl0849 m2
CMP.B1 24hr MQCS COMPLETED: 02/01/97 @ 12:30 pm
CMP.B1 24hr MQCS NEXT DUE : 02/02/97 @ 12:30 pm
CMP.B1 12hr MQCS COMPLETED: 02/01/97 @ 8:30 pm
CMP.B1 12hr MQCS NEXT DUE : 02/02/97 @ 8:30 am
CMP.B2 (Speedfam CMP-V) - up/running jd0731 m3/
CMP.B2 24hr MQCS COMPLETED: 02/01/97 @ 3:00 pm
CMP.B2 24hr MQCS NEXT DUE : 02/02/97 @ 3:00 pm
CMP.B2 12hr MQCS COMPLETED: 02/02/97 @ 5:00 am
CMP.B2 12hr MQCS NEXT DUE : 02/02/97 @ 5:00 pm
CMP.B3 (Speedfam CMP-V) - up/idle
CMP.B3 24hr MQCS COMPLETED: 02/01/97 @ 3:00 pm
CMP.B3 24hr MQCS NEXT DUE : 02/02/97 @ 3:00 pm
CMP.B3 12hr MQCS COMPLETED: 02/02/97 @ 5:00 am
CMP.B3 12hr MQCS NEXT DUE : 02/02/97 @ 5:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/01/97 @ 10:30 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 01/02/97 @ 10:30 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/01/97 @ 10:30 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/02/97 @ 10:30 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/01/97 @ 10:30 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/02/97 @ 10:30 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* xe0834 m1 1.75 days (on hold for eric b.) *
Down Equipment:
--------------
* cmp.a2 breakin/mqc *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* xe0834 (hold for eric b.) *
Monitor status:
--------------
4 boxes of 12K mqc wafers
2 boxes of 50K breakin wafers (more on order)
Number of product lots in room:
------------------------------
*3 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see t.d.c.o. located between cmp.b1, and cmp.b2 *
Lots/wafers processed
--------------------
* jl0943 pmd 24 wafers *
jl0923 pmd 24 wafers
jl0820 m2 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
17 SPEEDFAM
12 STRASBAUGH
2 PLATES F/S
|
| 89.2 | CMP PASSDOWN A SHIFT | FABSIX::J_BLAIS | A Fatal error has occurred and will Terminate You! | Sun Feb 02 1997 19:28 | 100 |
| CMP PASSDOWN
monitor wafer usage
-------------------
Type of monitor Number used Number Available
--------------- ----------- ----------------
MQC-12K MONS 19 5 boxes
BREAKIN WAFERS 20 3 Boxes
CMP.A1 (Strasbaugh 6DS-SP) - up/MQC
CMP.A1 24hr MQCS COMPLETED: RUNNING NOW
CMP.A1 24hr MQCS NEXT DUE :
CMP.A2 (Strasbaugh 6DS-SP) - up/running JD0933/24 PMD
CMP.A2 24hr MQCS COMPLETED: 02/02/97 @ 7:30 am
CMP.A2 24hr MQCS NEXT DUE : 02/03/97 @ 7:30 am
CMP.B1 (Speedfam CMP-V) - up/running JL0851/23 ILD2
CMP.B1 24hr MQCS COMPLETED: 01/02/97 @ 2:00 PM
CMP.B1 24hr MQCS NEXT DUE : 02/03/97 @ 2:00 PM
CMP.B1 12hr MQCS COMPLETED: 02/02/97 @ 4:00 PM
CMP.B1 12hr MQCS NEXT DUE : 02/03/97 @ 4:00 AM
CMP.B2 (Speedfam CMP-V) - DOWN/ LOAD CUP ALIGNMENT PROBLEM, EE WORKING IT.
RUNNING LOTS, JL0842/24 ILD2, JL0925/23 ILD2
CMP.B2 24hr MQCS COMPLETED: 02/02/97 @ 5:00 pm
CMP.B2 24hr MQCS NEXT DUE : 02/03/97 @ 5:00 pm
CMP.B2 12hr MQCS COMPLETED: 02/02/97 @ 5:00 PM
CMP.B2 12hr MQCS NEXT DUE : 02/03/97 @ 5:00 AM
CMP.B3 (Speedfam CMP-V) - up/Running XD0830/24 ILD2 HOT
CMP.B3 24hr MQCS COMPLETED: 02/02/97 @ 6:00 PM
CMP.B3 24hr MQCS NEXT DUE : 02/03/97 @ 6:00 PM
CMP.B3 12hr MQCS COMPLETED: 02/02/97 @ 7:30 PM
CMP.B3 12hr MQCS NEXT DUE : 02/03/97 @ 7:30 AM
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/01/97 @ 10:20 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 02/02/97 @ 10:20 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/01/97 @ 10:20 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/02/97 @ 10:20 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/01/97 @ 10:20 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/02/97 @ 10:20 pm
Hot/B lots in area: Hot lots coming to area: Static Lots in area:
__________________ ----------------------- -------------------
none XD0830/ILD2, JL0925/ILD2 XE0834 HOLD FOR ERIC.B
Open annotations:
Down Equipment lot#/tool/ooc# Scrap lots: Hold Lots:
-------------- ----------------- ---------- ---------
CMP.B2 None None XE0834
Number of product lots in room:
------------------------------
7 lots
New specs/revs posted:
---------------------
* please see t.d.c.o. located between cmp.b1, and cmp.b2 *
Lots/wafers processed
--------------------
JL0881/24 ILD1
XE0600/24 ILD3
JL0849/24 ILD2
JD0854/24 PMD
JL0907/24 ILD1
JL0850/24 ILD2
JL0857/24 ILD2
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
3 STRASBAUGH
2 PLATES F/S
|
| 89.3 | passdown cmp b-shift 02/03/97 | FABSIX::M_PROVENCHER | | Mon Feb 03 1997 06:00 | 119 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 5 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/idle
CMP.A1 24hr MQCS COMPLETED: 02/02/97 @ 9:00 pm
CMP.A1 24hr MQCS NEXT DUE : 02/03/97 @ 9:00 pm
CMP.A2 (Strasbaugh 6DS-SP) -dn unsched/ failed two sets of mqc's pad change
breakins and mqc's in process tool down
at 5:30 am
CMP.A2 24hr MQCS COMPLETED: 02/02/97 @ 7:30 am
CMP.A2 24hr MQCS NEXT DUE : 02/03/97 @ 7:30 am
CMP.B1 (Speedfam CMP-V) - up/idle
CMP.B1 24hr MQCS COMPLETED: 02/02/97 @ 4:00 pm
CMP.B1 24hr MQCS NEXT DUE : 02/03/97 @ 4:00 pm
CMP.B1 12hr MQCS COMPLETED: 02/03/97 @ 4:30 pm
CMP.B1 12hr MQCS NEXT DUE : 02/03/97 @ 4:30 am
CMP.B2 (Speedfam CMP-V) - up/running xe0757 m3/
CMP.B2 24hr MQCS COMPLETED: 02/02/97 @ 4:30 pm
CMP.B2 24hr MQCS NEXT DUE : 02/03/97 @ 4:30 pm
CMP.B2 12hr MQCS COMPLETED: 02/03/97 @ 3:30 am
CMP.B2 12hr MQCS NEXT DUE : 02/03/97 @ 3:30 pm
CMP.B3 (Speedfam CMP-V) - up/running xd0593 m2
CMP.B3 24hr MQCS COMPLETED: 02/02/97 @ 5:30 pm
CMP.B3 24hr MQCS NEXT DUE : 02/03/97 @ 5:30 pm
CMP.B3 12hr MQCS COMPLETED: 02/03/97 @ 4:30 am
CMP.B3 12hr MQCS NEXT DUE : 02/03/97 @ 4:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/02/97 @ 10:30 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 01/03/97 @ 10:30 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/02/97 @ 10:30 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/03/97 @ 10:30 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/02/97 @ 10:30 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/03/97 @ 10:30 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* xe0834 m1 2.75 days (on hold for eric b.) *
Down Equipment:
--------------
* cmp.a2 pad change after 2 failed mqc's *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* xe0834 (hold for eric b.) *
Monitor status:
--------------
4 boxes of 12K mqc wafers
2 boxes of 50K breakin wafers (more on order)
Number of product lots in room:
------------------------------
*2 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see t.d.c.o. located between cmp.b1, and cmp.b2 *
Lots/wafers processed
--------------------
* jd0933 pmd 24 wafers *
jl0940 pmd 24 wafers
jl0925 m2 23 wafers (hotlot)
xd0830 m2 24 wafers (hotlot)
jl0842 m2 24 wafers
jl0851 m2 23 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM
10 STRASBAUGH
3 PLATES F/S
|
| 89.4 | Cmp Passdown A Shift | FABSIX::J_BLAIS | You have read | Mon Feb 03 1997 19:47 | 95 |
| CMP PASSDOWN
monitor wafer usage
-------------------
Type of monitor Number used Number Available
--------------- ----------- ----------------
MQC-12K MONS 17 5 boxes
BREAKIN WAFERS 25 2 Boxes
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24hr MQCS COMPLETED: 02/02/97 @ 9:00PM
CMP.A1 24hr MQCS NEXT DUE : 02/03/97 @ 9:00PM
CMP.A2 (Strasbaugh 6DS-SP) - up/idle
CMP.A2 24hr MQCS COMPLETED: 02/03/97 @ 9:40 am
CMP.A2 24hr MQCS NEXT DUE : 02/04/97 @ 9:40 am
CMP.B1 (Speedfam CMP-V) - up/running JL0938
CMP.B1 24hr MQCS COMPLETED: 02/03/97 @ 2:15 PM
CMP.B1 24hr MQCS NEXT DUE : 02/04/97 @ 2:15 PM
CMP.B1 12hr MQCS COMPLETED: 02/03/97 @ 2:00 PM
CMP.B1 12hr MQCS NEXT DUE : 02/04/97 @ 2:00 AM
CMP.B2 (Speedfam CMP-V) -up/idle
CMP.B2 24hr MQCS COMPLETED: 02/03/97 @ 4:45 pm
CMP.B2 24hr MQCS NEXT DUE : 02/04/97 @ 4:45 pm
CMP.B2 12hr MQCS COMPLETED: 02/03/97 @ 11:00 AM
CMP.B2 12hr MQCS NEXT DUE : 02/03/97 @ 11:00 PM
CMP.B3 (Speedfam CMP-V) - up/idle
CMP.B3 24hr MQCS COMPLETED: 02/03/97 @ 7:00 PM
CMP.B3 24hr MQCS NEXT DUE : 02/04/97 @ 7:00 PM
CMP.B3 12hr MQCS COMPLETED: 02/03/97 @ 7:00 PM
CMP.B3 12hr MQCS NEXT DUE : 02/04/97 @ 7:00 AM
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/02/97 @ 10:20 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 02/03/97 @ 10:20 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/02/97 @ 10:20 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/03/97 @ 10:20 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/02/97 @ 10:20 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/03/97 @ 10:20 pm
Hot/B lots in area: Hot lots coming to area: Static Lots in area:
__________________ ----------------------- -------------------
none none xe0806 FSG splits
Open annotations:
Down Equipment lot#/tool/ooc# Scrap lots: Hold Lots:
-------------- ----------------- ---------- ---------
None None None xe0806 FSG splits
Number of product lots in room:
------------------------------
4 lots
New specs/revs posted:
---------------------
* please see t.d.c.o. located between cmp.b1, and cmp.b2 *
Lots/wafers processed
--------------------
XE0834/18 ILD1
XD0894/24 PMD
XD0593/21 ILD2
XE0757/23 ILD3
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
3 STRASBAUGH
2 PLATES F/S
|
| 89.5 | passdown cmp b-shift 02/04/97 | FABSIX::M_PROVENCHER | | Tue Feb 04 1997 05:33 | 114 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 5 mqcs
BREAKIN WAFERS 39 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/idle
CMP.A1 24hr MQCS COMPLETED: 02/03/97 @ 9:00 pm
CMP.A1 24hr MQCS NEXT DUE : 02/04/97 @ 9:00 pm
CMP.A2 (Strasbaugh 6DS-SP) -up/mqc failed first set of mqc's for unif 10.1 and
13.0 2nd set in process
CMP.A2 24hr MQCS COMPLETED: 02/03/97 @ :30 am
CMP.A2 24hr MQCS NEXT DUE : 02/04/97 @ :30 am
CMP.B1 (Speedfam CMP-V) - up/idle tool was scrubbed at 5 am
CMP.B1 24hr MQCS COMPLETED: 02/03/97 @ 2:00 pm
CMP.B1 24hr MQCS NEXT DUE : 02/04/97 @ 2:00 pm
CMP.B1 12hr MQCS COMPLETED: 02/03/97 @ 11:30 pm
CMP.B1 12hr MQCS NEXT DUE : 02/04/97 @ 11:30 am
CMP.B2 (Speedfam CMP-V) - up/idle
CMP.B2 24hr MQCS COMPLETED: 02/03/97 @ 5:00 pm
CMP.B2 24hr MQCS NEXT DUE : 02/04/97 @ 5:00 pm
CMP.B2 12hr MQCS COMPLETED: 02/04/97 @ 2:00 am
CMP.B2 12hr MQCS NEXT DUE : 02/04/97 @ 2:00 pm
CMP.B3 (Speedfam CMP-V) - up/idle
CMP.B3 24hr MQCS COMPLETED: 02/03/97 @ 7:00 pm
CMP.B3 24hr MQCS NEXT DUE : 02/04/97 @ 7:00 pm
CMP.B3 12hr MQCS COMPLETED: 02/04/97 @ 7:00 am
CMP.B3 12hr MQCS NEXT DUE : 02/04/97 @ 7:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/03/97 @ 10:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 02/04/97 @ 10:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/03/97 @ 10:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/04/97 @ 10:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/03/97 @ 10:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/04/97 @ 10:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* xe0806 m1 0.50 days (on hold for eric b.) *
Down Equipment:
--------------
* a2 in 2nd set of mqc's. 1st set failed unif 10.1 and 13.0 *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* jl0947 pmd 2 wafers on cmp.a2 *
Hold Lots:
---------
* xe0806 (hold for eric b.) *
Monitor status:
--------------
4 boxes of 12K mqc wafers
4 boxes of 50K breakin wafers (more on order)
Number of product lots in room:
------------------------------
* zero lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see t.d.c.o. located between cmp.b1, and cmp.b2 *
Lots/wafers processed
--------------------
* jl0938 pmd 24 wafers
jl0947 pmd 22 wafers
xd0914 pmd 23 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM
8 STRASBAUGH
3 PLATES F/S
|
| 89.6 | CMP PASSDOWN A SHIFT | FABSIX::J_BLAIS | You have read | Tue Feb 04 1997 19:56 | 95 |
| CMP PASSDOWN
monitor wafer usage
-------------------
Type of monitor Number used Number Available
--------------- ----------- ----------------
MQC-12K MONS 17 4 boxes
BREAKIN WAFERS 25 2 Boxes
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24hr MQCS COMPLETED: 02/03/97 @ 9:00PM
CMP.A1 24hr MQCS NEXT DUE : 02/04/97 @ 9:00PM
CMP.A2 (Strasbaugh 6DS-SP) - up/VERIFY
CMP.A2 24hr MQCS COMPLETED: BREAKING IN NOW WILL NEED MQC'S
CMP.A2 24hr MQCS NEXT DUE : NA
CMP.B1 (Speedfam CMP-V) - up/running JD0917/24 ILD3 HOT
CMP.B1 24hr MQCS COMPLETED: 02/04/97 @ 7:10 PM
CMP.B1 24hr MQCS NEXT DUE : 02/05/97 @ 7:10 PM
CMP.B1 12hr MQCS COMPLETED: 02/04/97 @ 7:55 AM
CMP.B1 12hr MQCS NEXT DUE : 02/04/97 @ 7:55 PM
CMP.B2 (Speedfam CMP-V) -up/running XE0806/24 ILD ENG LOT (FSG SPLITS)
CMP.B2 24hr MQCS COMPLETED: NEEDS PAD CHANGE BECAUSE OF THE FSG SPLITS
USES A DIFFERENT OXIDE WHICH CONTAMINATES THE PAD (BOTH PADS).
CMP.B2 24hr MQCS NEXT DUE : NA
CMP.B2 12hr MQCS COMPLETED: NA
CMP.B2 12hr MQCS NEXT DUE : NA
CMP.B3 (Speedfam CMP-V) - up/RUNNING XE0756/19 ILD3 (TUP)
CMP.B3 24hr MQCS COMPLETED: 02/03/97 @ 7:00 PM
CMP.B3 24hr MQCS NEXT DUE : NOW
CMP.B3 12hr MQCS COMPLETED: 02/04/97 @ 7:30 PM
CMP.B3 12hr MQCS NEXT DUE : 02/05/97 @ 7:30 AM
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/03/97 @ 10:20 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 02/04/97 @ 10:20 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/03/97 @ 10:20 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/04/97 @ 10:20 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/03/97 @ 10:20 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/04/97 @ 10:20 pm
Hot/B lots in area: Hot lots in the area Static Lots in area:
__________________ ----------------------- -------------------
none JD0917 ILD3 XB0782 STI LOT
Open annotations:
Down Equipment lot#/tool/ooc# Scrap lots: Hold Lots:
-------------- ----------------- ---------- ---------
None None None XB0782 STI LOT.
Number of product lots in room:
------------------------------
8 lots
New specs/revs posted:
---------------------
* please see t.d.c.o. located between cmp.b1, and cmp.b2 *
Lots/wafers processed
--------------------
JL0672/24 ILD1
JD0936/22 PMD
XM0803/21 ILD1
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
3 STRASBAUGH
2 PLATES F/S
|
| 89.7 | passdown cmp b-shift 02/09/97 | FABSIX::M_PROVENCHER | | Sun Feb 09 1997 05:41 | 118 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 1 mqcs
BREAKIN WAFERS 32 misc
CMP.A1 (Strasbaugh 6DS-SP) -dn/waiting for parts
CMP.A1 24hr MQCS COMPLETED: 02/08/97 @ 8:30 am
CMP.A1 24hr MQCS NEXT DUE : when it comes up
CMP.A2 (Strasbaugh 6DS-SP) -up/idle
CMP.A2 24hr MQCS COMPLETED: 02/08/97 @ 8:30 am
CMP.A2 24hr MQCS NEXT DUE : 02/09/97 @ 8:30 am
CMP.B1 (Speedfam CMP-V) - up/running jl0672 m2/jl0874 m2
CMP.B1 24hr MQCS COMPLETED: 02/08/97 @ 10:00 am
CMP.B1 24hr MQCS NEXT DUE : 02/09/97 @ 10:00 am
CMP.B1 12hr MQCS COMPLETED: 02/08/97 @ 9:00 pm
CMP.B1 12hr MQCS NEXT DUE : 02/09/97 @ 9:00 am
CMP.B2 (Speedfam CMP-V) - up/running jd0934 m1/xd0913 m1
CMP.B2 24hr MQCS COMPLETED: 02/08/97 @ 6:00 pm
CMP.B2 24hr MQCS NEXT DUE : 02/09/97 @ 6:00 pm
CMP.B2 12hr MQCS COMPLETED: 02/09/97 @ 7:00 am
CMP.B2 12hr MQCS NEXT DUE : 02/09/97 @ 7:00 pm
CMP.B3 (Speedfam CMP-V) - up/running xd0778 m3/jd0860 m2
CMP.B3 24hr MQCS COMPLETED: 02/08/97 @ 1:00 pm
CMP.B3 24hr MQCS NEXT DUE : 02/09/97 @ 1:00 pm
CMP.B3 12hr MQCS COMPLETED: 02/08/97 @ 8:00 pm
CMP.B3 12hr MQCS NEXT DUE : 02/09/97 @ 8:00 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/08/97 @ 11:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 02/09/97 @ 11:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/08/97 @ 11:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/09/97 @ 11:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/08/97 @ 11:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/09/97 @ 11:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.a1 (waiting for parts) *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
3 boxes of 12K mqc wafers
3 boxes of 50K breakin wafers (more on order)
Number of product lots in room:
------------------------------
*9 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jl0981 pmd 24 wafers *
jl0908 m1 24 wafers
jl0952 m1 22 wafers
jl0901 m1 24 wafers
jd0872 m2 24 wafers
jd0859 m2 23 wafers
jl0610 m2 23 wafers
xd0830 m3 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
17 SPEEDFAM
4 STRASBAUGH
9 PLATES F/S
|
| 89.8 | Cmp Passdown A SHIFT | FABSIX::J_BLAIS | You have read | Sun Feb 09 1997 19:36 | 101 |
| CMP PASSDOWN
monitor wafer usage
-------------------
Type of monitor Number used Number Available
--------------- ----------- ----------------
MQC-12K MONS 17 2 boxes
BREAKIN WAFERS 25 1 Box
CMP.A1 (Strasbaugh 6DS-SP) - DOWN for rotary union
CMP.A1 24hr MQCS COMPLETED:
CMP.A1 24hr MQCS NEXT DUE :
CMP.A2 (Strasbaugh 6DS-SP) - up/mqc
CMP.A2 24hr MQCS COMPLETED: Running now after pad change
CMP.A2 24hr MQCS NEXT DUE :
CMP.B1 (Speedfam CMP-V) - up/running XE0919/20 ILD1 HOT
CMP.B1 24hr MQCS COMPLETED: 02/09/97 @ 1:18 pm
CMP.B1 24hr MQCS NEXT DUE : 02/10/97 @ 1:18 pm
CMP.B1 12hr MQCS COMPLETED: 02/09/97 @ 8:00 am
CMP.B1 12hr MQCS NEXT DUE : 02/09/97 @ 8:00 pm
CMP.B2 (Speedfam CMP-V) -up/running JD0870/22 ILD1, JL0939/23 ILD1
CMP.B2 24hr MQCS COMPLETED: 02/09/97 @ 7:30 pm
CMP.B2 24hr MQCS NEXT DUE : 02/10/97 @ 7:30 pm
CMP.B2 12hr MQCS COMPLETED: 02/09/97 @ 3:30 pm
CMP.B2 12hr MQCS NEXT DUE : 02/10/97 @ 3:30 am
CMP.B3 (Speedfam CMP-V) - up/RUNNING) XD0892/24 ILD1
CMP.B3 24hr MQCS COMPLETED: 02/09/97 @ 6:00 PM
CMP.B3 24hr MQCS NEXT DUE : 02/10/97 @ 6:00 PM
CMP.B3 12hr MQCS COMPLETED: 02/09/97 @ 7:00 pm
CMP.B3 12hr MQCS NEXT DUE : 02/10/97 @ 7:00 AM
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/08/97 @ 11:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 02/09/97 @ 11:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/08/97 @ 11:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/09/97 @ 11:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/08/97 @ 11:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/09/97 @ 11:00 pm
Hot/B lots in area: Hot lots in the area Static Lots in area:
__________________ ----------------------- -------------------
none xe0919/20 ild1 none
Open annotations:
Down Equipment lot#/tool/ooc# Scrap lots: Hold Lots:
-------------- ----------------- ---------- ---------
None None None None
Number of product lots in room:
------------------------------
14 lots
New specs/revs posted:
---------------------
Lots/wafers processed
--------------------
XD0778/24 ILD3
JL0883/24 ILD2
JL0962/24 PMD
JL0901/24 ILD1
JD0934/24 ILD1
XD0913/24 ILD1
JD0860/23 ILD2
JL0672/24 ILD2
JL0874/24 ILD2
JD0859/23 ILD2
JL0969/24 PMD
XE0835/23 PMD
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
3 STRASBAUGH
2 PLATES F/S
|
| 89.9 | passdown cmp b-shift 02/10/97 | FABSIX::M_PROVENCHER | | Mon Feb 10 1997 05:52 | 125 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 9 mqcs
BREAKIN WAFERS 46 misc
CMP.A1 (Strasbaugh 6DS-SP) -dn/down for rotary union
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : when it comes up
CMP.A2 (Strasbaugh 6DS-SP) -up/
down at 12:00midnite (carrier changes), due to
wafers slipping out of the rightr carrier. the
count was greater than 300 wafers, so both were
changed. up at 1:30. down for crash at 3:30 am
CMP.A2 24hr MQCS COMPLETED: in process
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - up/running jl0907 m2/
down at 9pm for low vac/up at 10:30pm
CMP.B1 24hr MQCS COMPLETED: 02/09/97 @ 1:30 pm
CMP.B1 24hr MQCS NEXT DUE : 02/10/97 @ 1:30 pm
CMP.B1 12hr MQCS COMPLETED: 02/09/97 @ 8:00 pm
CMP.B1 12hr MQCS NEXT DUE : 02/10/97 @ 8:00 am
CMP.B2 (Speedfam CMP-V) - up/running (info not available)
CMP.B2 24hr MQCS COMPLETED: 02/09/97 @ 7:30 pm
CMP.B2 24hr MQCS NEXT DUE : 02/10/97 @ 7:30 pm
CMP.B2 12hr MQCS COMPLETED: 02/10/97 @ 4:00 am
CMP.B2 12hr MQCS NEXT DUE : 02/10/97 @ 4:00 pm
CMP.B3 (Speedfam CMP-V) - up/running jl0912 m2/jl0888 m2
CMP.B3 24hr MQCS COMPLETED: 02/09/97 @ 6:00 pm
CMP.B3 24hr MQCS NEXT DUE : 02/10/97 @ 6:00 pm
CMP.B3 12hr MQCS COMPLETED: 02/08/97 @ :00 pm
CMP.B3 12hr MQCS NEXT DUE : 02/09/97 @ 8:00 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/09/97 @ 11:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 02/10/97 @ 11:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/09/97 @ 11:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/10/97 @ 11:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/09/97 @ 11:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/10/97 @ 11:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.a1 (waiting for rotary union) *
cmp.a2 (breakin after crash & carrier changes)
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
3 boxes of 12K mqc wafers
1 box of 50K breakin wafers (more on order)
Number of product lots in room:
------------------------------
*11 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jl0939 m1 23 wafers *
jd0870 m1 22 wafers
xe0919 m1 20 wafers (hot lot)
jl0923 m1 24 wafers
jl0943 m1 24 wafers
jl0910 m1 24 wafers
jl0649 m2 6 wafers
jl0898 m2 24 wafers *
jl0881 m2 24 wafers *
# of carriers for strasbaugh/speedfam:
--------------------------------------
17 SPEEDFAM
2 STRASBAUGH
7 PLATES F/S
|
| 89.10 | CMP passdown "B" Shift | FABSIX::J_REISNER | | Mon Feb 10 1997 20:06 | 98 |
| CMP PASSDOWN
monitor wafer usage
-------------------
Type of monitor Number used Number Available
--------------- ----------- ----------------
MQC-12K MONS 17 2 1/2 boxes
BREAKIN WAFERS 25 2 Box
CMP.A1 (Strasbaugh 6DS-SP) - DOWN for rotary union
CMP.A1 24hr MQCS COMPLETED:
CMP.A1 24hr MQCS NEXT DUE :
CMP.A2 (Strasbaugh 6DS-SP) - DOWN for pad/carrier change
CMP.A2 24hr MQCS COMPLETED:
CMP.A2 24hr MQCS NEXT DUE :
CMP.B1 (Speedfam CMP-V) - up/running JD0935 - NEEDS TOUCH UP
CMP.B1 24hr MQCS COMPLETED: 02/09/97 @ 6:30 pm
CMP.B1 24hr MQCS NEXT DUE : 02/10/97 @ 6:30 pm
CMP.B1 12hr MQCS COMPLETED: 02/09/97 @ 8:30 PM
CMP.B1 12hr MQCS NEXT DUE : 02/10/97 @ 8:30 AM
CMP.B2 (Speedfam CMP-V) -DOWN/ pad change - pad step low
CMP.B2 24hr MQCS COMPLETED: needs MQC's
CMP.B2 24hr MQCS NEXT DUE :
CMP.B2 12hr MQCS COMPLETED:
CMP.B2 12hr MQCS NEXT DUE :
CMP.B3 (Speedfam CMP-V) - MQC/RUNNING JL0942 (at Thickness .A5 for 100%)
CMP.B3 24hr MQCS COMPLETED:
CMP.B3 24hr MQCS NEXT DUE :
CMP.B3 12hr MQCS COMPLETED: 02/10/97 @ 7:00 AM
CMP.B3 12hr MQCS NEXT DUE : 02/10/97 @ 7:00 PM
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/09/97 @ 11:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 02/10/97 @ 11:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/09/97 @ 11:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/10/97 @ 11:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/09/97 @ 11:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/10/97 @ 11:00 pm
Hot/B lots in area: Hot lots in the area Static Lots in area:
__________________ ----------------------- -------------------
none none none
Open annotations:
Down Equipment lot#/tool/ooc# Scrap lots: Hold Lots:
-------------- ----------------- ---------- ---------
CMP.B2 None None None
CMP.A2
Number of product lots in room:
------------------------------
11 lots
New specs/revs posted:
---------------------
Lots/wafers processed
--------------------
JL0938/24 ILD2
JL0881/24 ILD2
JL0898/24 ILD2
JL0888/24 ILD2
JL0970/24 PMD
JL0975/24 PMD
JL0912/23 ILD2
xd0915/23 ILD1
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
3 STRASBAUGH
2 PLATES F/S
|
| 89.11 | passdown cmp b-shift 02/11/97 | FABSIX::M_PROVENCHER | | Tue Feb 11 1997 05:14 | 120 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 18 mqcs
BREAKIN WAFERS 43 misc
CMP.A1 (Strasbaugh 6DS-SP) -dn/down for rotary union
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : when it comes up
CMP.A2 (Strasbaugh 6DS-SP) -up/idle
down at 8:pm after pad change. maint had tool
to check load cup problem. up at 4:am
CMP.A2 24hr MQCS COMPLETED: 02/11/97 @ 4:00 am
CMP.A2 24hr MQCS NEXT DUE : 02/12/97 @ 4:00 am
CMP.B1 (Speedfam CMP-V) - up/idle
CMP.B1 24hr MQCS COMPLETED: 02/10/97 @ 1:30 pm
CMP.B1 24hr MQCS NEXT DUE : 02/11/97 @ 1:30 pm
CMP.B1 12hr MQCS COMPLETED: 02/10/97 @ 8:30 pm
CMP.B1 12hr MQCS NEXT DUE : 02/11/97 @ 8:30 am
CMP.B2 (Speedfam CMP-V) - up/running xe0597 m1
down at 8:pm for pad changes, failed first set
of mqc's/changed id/od, and offsets, passed 2nd
set.
CMP.B2 24hr MQCS COMPLETED: 02/11/97 @ 4:30 am
CMP.B2 24hr MQCS NEXT DUE : 02/12/97 @ 4:30 am
CMP.B2 12hr MQCS COMPLETED: 02/11/97 @ 8:00 pm
CMP.B2 12hr MQCS NEXT DUE : 02/12/97 @ 8:00 am
CMP.B3 (Speedfam CMP-V) - up/running jd0854 m1/
CMP.B3 24hr MQCS COMPLETED: 02/10/97 @ 9:00 pm
CMP.B3 24hr MQCS NEXT DUE : 02/11/97 @ 9:00 pm
CMP.B3 12hr MQCS COMPLETED: 02/10/97 @ 9:00 pm
CMP.B3 12hr MQCS NEXT DUE : 02/11/97 @ 9:00 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/10/97 @ 11:30 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 02/11/97 @ 11:30 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/10/97 @ 11:30 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/11/97 @ 11:30 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/10/97 @ 11:30 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/11/97 @ 11:30 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.a1 (waiting for rotary union) *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* xe0614 m2 per M_Broomfield *
Monitor status:
--------------
3 boxes of 12K mqc wafers
4 boxes of 50K breakin wafers (more on order)
Number of product lots in room:
------------------------------
*2 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jd0935 pmd 24 wafers *
jd0960 pmd 21 wafers
jd0937 pmd 24 wafers
jd0929 pmd 24 wafers
jl0942 m1 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
17 SPEEDFAM
2 STRASBAUGH
7 PLATES F/S
|
| 89.12 | cmp passdown a shift | FABBIT::J_BLAIS | You have read | Tue Feb 11 1997 19:31 | 100 |
| CMP PASSDOWN
monitor wafer usage
-------------------
Type of monitor Number used Number Available
--------------- ----------- ----------------
MQC-12K MONS 7 3 boxes
BREAKIN WAFERS 30 3 Boxes
CMP.A1 (Strasbaugh 6DS-SP) down for rotary union
CMP.A1 24hr MQCS COMPLETED:
CMP.A1 24hr MQCS NEXT DUE :
CMP.A2 (Strasbaugh 6DS-SP) - down wafers keep sticking. EE still working it.
RUNNING JL0979/24 PMD
CMP.A2 24hr MQCS COMPLETED:
CMP.A2 24hr MQCS NEXT DUE :
CMP.B1 (Speedfam CMP-V) - Verify/MQC after scratches were found resulting in
a pad and carrier change. FSG Lot got
scratched.
CMP.B1 24hr MQCS COMPLETED: will be running..
CMP.B1 24hr MQCS NEXT DUE :
CMP.B1 12hr MQCS COMPLETED:
CMP.B1 12hr MQCS NEXT DUE :
CMP.B2 (Speedfam CMP-V) -up/running XD0593/21 ILD3
CMP.B2 24hr MQCS COMPLETED: 02/11/97 @ 4:00 am
CMP.B2 24hr MQCS NEXT DUE : 02/12/97 @ 4:00 am
CMP.B2 12hr MQCS COMPLETED: 02/11/97 @ 5:20 pm
CMP.B2 12hr MQCS NEXT DUE : 02/12/97 @ 5:20 am
CMP.B3 (Speedfam CMP-V) - up/RUNNING XE0614/20 ILD1
CMP.B3 24hr MQCS COMPLETED: 02/10/97 @ 9:00 PM
CMP.B3 24hr MQCS NEXT DUE : 02/11/97 @ 9:00 PM
CMP.B3 12hr MQCS COMPLETED: 02/11/97 @ 10:00 AM
CMP.B3 12hr MQCS NEXT DUE : 02/11/97 @ 10:00 PM
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/10/97 @ 11:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 02/11/97 @ 11:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/10/97 @ 11:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/11/97 @ 11:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/10/97 @ 11:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/11/97 @ 11:00 pm
Hot/B lots in area: Hot lots in the area Static Lots in area:
__________________ ----------------------- -------------------
none none none
Open annotations:
Down Equipment lot#/tool/ooc# Scrap lots: Hold Lots:
-------------- ----------------- ---------- ---------
None None None None
Number of product lots in room:
------------------------------
9 lots
New specs/revs posted:
---------------------
Lots/wafers processed
--------------------
JD0936/22 ILD1
XE0597/22 ILD1
JD0854/24 ILD1
JD0929/24 PMD
JD1032/24 PMD
JL0909/24 ILD2
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 SPEEDFAM
1 STRASBAUGH
2 PLATES F/S
|
| 89.13 | passdown cmp b-shift 02/12/97 | FABSIX::M_PROVENCHER | | Wed Feb 12 1997 05:52 | 119 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 26 mqcs
BREAKIN WAFERS 38 misc
CMP.A1 (Strasbaugh 6DS-SP) -dn/down for rotary union
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : when it comes up
CMP.A2 (Strasbaugh 6DS-SP) -up/running jl0968 pmd/jl0971 pmd
down at 8:pm. maint had tool til 4 am
to check back pressure problem.up at 5:30 am
CMP.A2 24hr MQCS COMPLETED: 02/12/97 @ 5:30 am
CMP.A2 24hr MQCS NEXT DUE : 02/13/97 @ 5:30 am
CMP.B1 (Speedfam CMP-V) - up/running xd0869 m2/
tool was down at 8:00 pm for pad/carrier change
failed 1st set of mqc's passed 2nd set up at
11:00 pm
CMP.B1 24hr MQCS COMPLETED: 02/11/97 @ 11:00 pm
CMP.B1 24hr MQCS NEXT DUE : 02/12/97 @ 11:00 pm
CMP.B1 12hr MQCS COMPLETED: 02/12/97 @ 11:00 pm
CMP.B1 12hr MQCS NEXT DUE : 02/13/97 @ 11:00 am
CMP.B2 (Speedfam CMP-V) - up/mqc (running xd0895 m2/xd0864 m2)
CMP.B2 24hr MQCS COMPLETED: in process
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: 02/12/97 @ 6:00 am
CMP.B2 12hr MQCS NEXT DUE : 02/13/97 @ 6:00 pm
CMP.B3 (Speedfam CMP-V) - up/mqc after pad change tool was down all night
CMP.B3 24hr MQCS COMPLETED: in process failed first set
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: 02/12/97 @ 8:00 pm
CMP.B3 12hr MQCS NEXT DUE : 02/13/97 @ 8:00 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/12/97 @ 3:00 am
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 02/13/97 @ 3:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/12/97 @ 3:00 am
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/13/97 @ 3:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/12/97 @ 3:00 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/13/97 @ 3:00 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.a1 (waiting for rotary union) *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* xe0614 m2 *
Monitor status:
--------------
1 boxes of 12K mqc wafers
2 boxes of 50K breakin wafers (more on order)
Number of product lots in room:
------------------------------
*15 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jl0979 pmd 24 wafers *
jl0982 pmd 24 wafers
xd0780 m3 11 wafers
xd0539 m3 22 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 SPEEDFAM
1 STRASBAUGH
2 PLATES F/S
|
| 89.14 | Cpm Passdown A Shift | FABSIX::J_BLAIS | You have read | Wed Feb 12 1997 20:06 | 96 |
| CMP PASSDOWN
monitor wafer usage
-------------------
Type of monitor Number used Number Available
--------------- ----------- ----------------
MQC-12K MONS 7 1 boxes
BREAKIN WAFERS 25 2 Boxes
CMP.A1 (Strasbaugh 6DS-SP) UP/MQC
CMP.A1 24hr MQCS COMPLETED: RUNNING
CMP.A1 24hr MQCS NEXT DUE :
CMP.A2 (Strasbaugh 6DS-SP) - DOWN
CMP.A2 24hr MQCS COMPLETED:
CMP.A2 24hr MQCS NEXT DUE :
CMP.B1 (Speedfam CMP-V) -up/running JD0959/24 PMD, JD0985/24 PMD
CMP.B1 24hr MQCS COMPLETED: 02/11/97 @ 11:00 PM
CMP.B1 24hr MQCS NEXT DUE : 02/12/97 @ 11:00 PM
CMP.B1 12hr MQCS COMPLETED: 02/12/97 @ 8:00 AM
CMP.B1 12hr MQCS NEXT DUE : 02/12/97 @ 8:00 PM
CMP.B2 (Speedfam CMP-V) - JL0973/24 ILD1, JL0880/24 ILD2
CMP.B2 24hr MQCS COMPLETED: 02/12/97 @ 6:00 am
CMP.B2 24hr MQCS NEXT DUE : 02/13/97 @ 6:00 am
CMP.B2 12hr MQCS COMPLETED: 02/12/97 @ 5:00 pm
CMP.B2 12hr MQCS NEXT DUE : 02/13/97 @ 5:00 am
CMP.B3 (Speedfam CMP-V) - up/RUNNING JL0972/23 PMD , JL0971/24 PMD
CMP.B3 24hr MQCS COMPLETED: 02/12/97 @ 10:00 PM
CMP.B3 24hr MQCS NEXT DUE : 02/13/97 @ 10:00 PM
CMP.B3 12hr MQCS COMPLETED: 02/11/97 @ 10:40 AM
CMP.B3 12hr MQCS NEXT DUE : 02/12/97 @ 10:40 PM
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/11/97 @ 11:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 02/12/97 @ 11:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/11/97 @ 11:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/12/97 @ 11:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/11/97 @ 11:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/12/97 @ 11:00 pm
Hot/B lots in area: Hot lots in the area Static Lots in area:
__________________ ----------------------- -------------------
none none XE0614/20 ILD2
Open annotations:
Down Equipment lot#/tool/ooc# Scrap lots: Hold Lots:
-------------- ----------------- ---------- ---------
None None None XE0614/20 ILD2
Number of product lots in room:
------------------------------
lots
New specs/revs posted:
---------------------
Lots/wafers processed
--------------------
JD0931/24
XD0864/24
XD0895/24
XD0780/11
JL0982/24
XE0869/22
JL0968/24
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 SPEEDFAM
1 STRASBAUGH
2 PLATES F/S
|
| 89.15 | PASSDOWN | FABSIX::D_CAUSE | | Thu Feb 13 1997 07:39 | 33 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING JD0986 100%ING ON .A5
JL0983 FIRST PASS
CMP.A2 (Strasbaugh 6DS-SP) -DOWN/EXTERNAL REPS WILL BE WORKING ON IT TODAY
CMP.B1 (Speedfam CMP-V) - UP/RUNNING JD0933 100%ING ON .A4 NEEDS TU
CMP.B2 (Speedfam CMP-V) - UP/MQC PARTICLES PASSED AND LOGGED NEEDS EVAL
ON THK.A5
CMP.B3 (Speedfam CMP-V) - UP/RUNNING XD0894 SA COMPLETE READY TO RUN
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:30
MQC WAFERS USED:13 WAFERS USED
MQC WAFERS AVAIL:2.5 BOXES
----------
|
| 89.21 | PASSDOWN | FABSIX::D_CAUSE | | Fri Feb 14 1997 07:37 | 35 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING JD0920 SEND AHEADS
CMP.A2 (Strasbaugh 6DS-SP) -DOWN/EXTERNAL REPS WORKING ON THIS AGAIN
CMP.B1 (Speedfam CMP-V) - UP/RUNNING YE0218 NEEDS 100% AND TU READ ON .A4
JD1032 **HOT LOT** READY TO RUN
CMP.B2 (Speedfam CMP-V) - UP/RUNNING XD0832 100%ED ON THK.A5
XD0582 FIRST PASS
CMP.B3 (Speedfam CMP-V) - UP/MQC 2000A RANGE FOR SEND AHEADS CHECKING MQC'S
LOT XD0585 ONLY SEND AHEADS HAVE BEEN RUN
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:1
----------------
**JD1032**
BREAK IN WAFERS USED:30
MQC WAFERS USED:15 WAFERS USED
MQC WAFERS AVAIL:2.5 BOXES
----------
|
| 89.22 | passdown | FABSIX::D_CAUSE | | Sat Feb 15 1997 08:11 | 33 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -DOWN/UNSCHEDULED FAILED 24HR MQC NEEDS PAD CHANGE
JL0977 HAS BEEN STARTED RECCOMEND 100%
CMP.A2 (Strasbaugh 6DS-SP) -DOWN/WORK CONTINUES ON THE GEARBOX
CMP.B1 (Speedfam CMP-V) - UP/RUNNING JL0994 100%ING ON THK.A4 NEEDS TU
CMP.B2 (Speedfam CMP-V) - UP/RUNNING XD0947 100%ED ON THK.A5 NEEDS TU
XD0599 NEEDS DRG AND FINAL
CMP.B3 (Speedfam CMP-V) - DOWN/MONTHLY PM
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:20
MQC WAFERS USED:15 WAFERS USED
MQC WAFERS AVAIL:2 BOXES
----------
|
| 89.23 | passdown cmp b-shift 02/16/97 | FABSIX::M_PROVENCHER | | Sun Feb 16 1997 06:29 | 122 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 6 mqcs
BREAKIN WAFERS 41 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/running jl1120 pmd hot lot
CMP.A1 24hr MQCS COMPLETED: 02/15/97 @ 2:00 pm
CMP.A1 24hr MQCS NEXT DUE : 02/16/97 @ 2:00 pm
CMP.A2 (Strasbaugh 6DS-SP) -dn/ gear box upgrade
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : when tool comes back up
CMP.B1 (Speedfam CMP-V) - up/running jl0953 m2/
CMP.B1 24hr MQCS COMPLETED: 02/16/97 @ 3:00 am
CMP.B1 24hr MQCS NEXT DUE : 02/17/97 @ 3:00 am
CMP.B1 12hr MQCS COMPLETED: 02/16/97 @ 7:30 am
CMP.B1 12hr MQCS NEXT DUE : 02/16/97 @ 7:30 pm
CMP.B2 (Speedfam CMP-V) - up/running jl0970 m1/jl0837b m2
CMP.B2 24hr MQCS COMPLETED: 02/15/97 @ 5:00 pm
CMP.B2 24hr MQCS NEXT DUE : 02/16/97 @ 5:00 pm
CMP.B2 12hr MQCS COMPLETED: 02/16/97 @ 6:00 am
CMP.B2 12hr MQCS NEXT DUE : 02/16/97 @ 6:00 pm
CMP.B3 (Speedfam CMP-V) - up/running jd0860 m3/ xd0804 m3
CMP.B3 24hr MQCS COMPLETED: 02/15/97 @ 5:00 pm
CMP.B3 24hr MQCS NEXT DUE : 02/16/97 @ 5:00 pm
CMP.B3 12hr MQCS COMPLETED: 02/16/97 @ 1:00 am
CMP.B3 12hr MQCS NEXT DUE : 02/16/97 @ 1:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/15/97 @ 11:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 02/16/97 @ 11:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/15/97 @ 11:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/16/97 @ 11:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/16/97 @ 11:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/17/97 @ 11:00 pm
Hot/B lots in area:
__________________
* jd1120 pmd cmp.a1 *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* jd0928 m1 2.86 days on hold high thk range (pre cmp) *
jd0930 m1 1.56 days on hold for e. bodensieck
Down Equipment:
--------------
* cmp.a2 (gear box upgrade) *
Open annotations:
lot#/tool/ooc#
----------------
* #4544 *
#4545
#4565 (per pss)
Scrap lots:
----------
* none *
Hold Lots:
---------
* jd0928 m1 2.86 days on hold high thk range (pre cmp) *
jd0930 m1 1.56 days on hold for e. bodensieck *
Monitor status:
--------------
� box of 12K mqc wafers
3 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*13 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jl1002 pmd 24 wafers *
jl1003 pmd 24 wafers
jl0976 m1 24 wafers
xd0805 m1 22 wafers
xe0579 m2 11 wafers
jl0908 m2 23 wafers
jl0901 m2 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
15 SPEEDFAM
6 STRASBAUGH
5 PLATES F/S
|
| 89.24 | CMP PASSDOWN A SHIFT | FABSIX::J_BLAIS | You have read | Sun Feb 16 1997 19:46 | 102 |
| CMP PASSDOWN
monitor wafer usage
-------------------
Type of monitor Number used Number Available
--------------- ----------- ----------------
MQC-12K MONS 12 1 boxes
BREAKIN WAFERS 20 2 Boxes
CMP.A1 (Strasbaugh 6DS-SP) DOWN FOR A PAD CHANGE, MQC'S FAILED.
CMP.A1 24hr MQCS COMPLETED: 02/16/97 @ 6:45 pm
CMP.A1 24hr MQCS NEXT DUE :
CMP.A2 (Strasbaugh 6DS-SP) - UP/MQC
CMP.A2 24hr MQCS COMPLETED: RUNNING NOW.
CMP.A2 24hr MQCS NEXT DUE :
CMP.B1 (Speedfam CMP-V) -up/running JD0935/24 ILD1, JL0981/24 ILD1
CMP.B1 24hr MQCS COMPLETED: 02/16/97 @ 3:00 am
CMP.B1 24hr MQCS NEXT DUE : 02/17/97 @ 3:00 am
CMP.B1 12hr MQCS COMPLETED: 02/16/97 @ 8:00 AM
CMP.B1 12hr MQCS NEXT DUE : 02/16/97 @ 8:00 PM
CMP.B2 (Speedfam CMP-V) - JL0960/21 ILD1
CMP.B2 24hr MQCS COMPLETED: 02/16/97 @ 7:00 pm
CMP.B2 24hr MQCS NEXT DUE : 02/17/97 @ 7:00 pm
CMP.B2 12hr MQCS COMPLETED: 02/16/97 @ 7:00 PM
CMP.B2 12hr MQCS NEXT DUE : 02/17/97 @ 7:00 AM
CMP.B3 (Speedfam CMP-V) - up/RUNNING JD0897/24 ILD2
CMP.B3 24hr MQCS COMPLETED: 02/16/97 @ 7:00 PM
CMP.B3 24hr MQCS NEXT DUE : 02/17/97 @ 7:00 PM
CMP.B3 12hr MQCS COMPLETED: 02/16/97 @ 7:00 PM
CMP.B3 12hr MQCS NEXT DUE : 02/17/97 @ 7:00 AM
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/15/97 @ 11:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 02/16/97 @ 11:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/15/97 @ 11:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/16/97 @ 11:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/15/97 @ 11:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/16/97 @ 11:00 pm
Hot/B lots in area: Hot lots in the area Static Lots in area:
__________________ ----------------------- -------------------
none none JD0928/20 ILD1,JD0930/24 ILD1
Open annotations:
Down Equipment lot#/tool/ooc# Scrap lots: Hold Lots:
-------------- ----------------- ---------- ---------
None None None JD0928, JD0930
Number of product lots in room:
------------------------------
8 lots
New specs/revs posted:
---------------------
Lots/wafers processed
--------------------
XE0579/11 ILD2
JD0860/23 ILD3
XD0804/24 ILD3
JD1120/23 PMD
JL1003/24 PMD
JL0970/23 ILD1
JL0953/24 ILD2
JL0837B/12 ILD2
JD0934/24 ILD2
JL0980/23 PMD
JL0962/24 ILD1
XE0903/24 PMD HOT
JL0980/23 PMD
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 SPEEDFAM
1 STRASBAUGH
2 PLATES F/S
|
| 89.25 | passdown cmp b-shift 02/17/97 | FABSIX::M_PROVENCHER | | Mon Feb 17 1997 05:20 | 122 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 14 mqcs
BREAKIN WAFERS 36 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/running jd0991 pmd/jd0992 pmd (up at 11:30 pm)
CMP.A1 24hr MQCS COMPLETED: 02/16/97 @ 11:30 pm
CMP.A1 24hr MQCS NEXT DUE : 02/17/97 @ 11:30 pm
CMP.A2 (Strasbaugh 6DS-SP) -up/running jl0998 pmd/jl1005 pmd (up at 10:00 pm)
CMP.A2 24hr MQCS COMPLETED: 02/16/97 @ 10:00 pm
CMP.A2 24hr MQCS NEXT DUE : 02/17/97 @ 10:00 pm
CMP.B1 (Speedfam CMP-V) - up/mqc pad change due to end of pad life. running
breakin,mqc, after pm.(down at 2:30 am)
CMP.B1 24hr MQCS COMPLETED: in process
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: 02/16/97 @ 9:00 pm
CMP.B1 12hr MQCS NEXT DUE : 02/17/97 @ 9:00 am
CMP.B2 (Speedfam CMP-V) - up/idle
CMP.B2 24hr MQCS COMPLETED: 02/16/97 @ 7:00 pm
CMP.B2 24hr MQCS NEXT DUE : 02/17/97 @ 7:00 pm
CMP.B2 12hr MQCS COMPLETED: 02/17/97 @ 5:00 am
CMP.B2 12hr MQCS NEXT DUE : 02/17/97 @ 5:00 pm
CMP.B3 (Speedfam CMP-V) - up/idle
CMP.B3 24hr MQCS COMPLETED: 02/16/97 @ 7:00 pm
CMP.B3 24hr MQCS NEXT DUE : 02/17/97 @ 7:00 pm
CMP.B3 12hr MQCS COMPLETED: 02/17/97 @ 1:30 am
CMP.B3 12hr MQCS NEXT DUE : 02/17/97 @ 1:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/16/97 @ 11:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 02/17/97 @ 11:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/16/97 @ 11:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/17/97 @ 11:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/16/97 @ 11:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/17/97 @ 11:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* jd0928 m1 3.86 days on hold high thk range (pre cmp) *
jd0930 m1 2.56 days on hold for e. bodensieck
Down Equipment:
--------------
* cmp.b1 (mqc after pad change) *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* jd0928 m1 3.86 days on hold high thk range (pre cmp) *
jd0930 m1 2.56 days on hold for e. bodensieck *
Monitor status:
--------------
� box of 12K mqc wafers
3 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*6 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jl0997 pmd 24 wafers *
jl0975 m1 24 wafers
jd0960 m1 21 wafers
jl0981 m1 24 wafers
jl0935 m1 24 wafers
jl0978 m1 22 wafers
jd0897 m2 23 wafers
jl0923 m2 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
6 STRASBAUGH
5 PLATES F/S
|
| 89.26 | CMP Passdown "A" Shift | FABSIX::J_REISNER | | Mon Feb 17 1997 20:05 | 105 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number Available
--------------- -----------
MQC-12K MONS 1/2 box
BREAKIN WAFERS 1 Box
CMP.A1 (Strasbaugh 6DS-SP) Down for sticking carrier
CMP.A1 24hr MQCS COMPLETED:
CMP.A1 24hr MQCS NEXT DUE :
CMP.A2 (Strasbaugh 6DS-SP) -Running JD1028
CMP.A2 24hr MQCS COMPLETED: 02/16/97 @ 10:00 PM
CMP.A2 24hr MQCS NEXT DUE : 02/17/97 @ 10:00 PM
CMP.B1 (Speedfam CMP-V) -up/running JD0929/JL117A(HOT LOT)
CMP.B1 24hr MQCS COMPLETED: 02/18/97 @ 1:30 pm
CMP.B1 24hr MQCS NEXT DUE : 02/18/97 @ 1:30 pm
CMP.B1 12hr MQCS COMPLETED: 02/17/97 @ 8:00 AM
CMP.B1 12hr MQCS NEXT DUE : currently running, needs 12 hour MQC when
finished
CMP.B2 (Speedfam CMP-V) - Running JL0979/XE0919-HOT-2 wafers need touch-up)
CMP.B2 24hr MQCS COMPLETED: 02/16/97 @ 7:00 pm
CMP.B2 24hr MQCS NEXT DUE : DUE - Were running and were trashed when tool
alarmed for no slurry
CMP.B2 12hr MQCS COMPLETED: 02/17/97 @ 7:45 PM
CMP.B2 12hr MQCS NEXT DUE : 02/18/97 @ 7:45 AM
CMP.B3 (Speedfam CMP-V) - up/RUNNING JD0928
CMP.B3 24hr MQCS COMPLETED: 02/16/97 @ 10:00 PM
CMP.B3 24hr MQCS NEXT DUE : 02/17/97 @ 10:00 PM
CMP.B3 12hr MQCS COMPLETED: 02/16/97 @ 01:15 AM
CMP.B3 12hr MQCS NEXT DUE : 02/17/97 @ 01:15 AM
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/16/97 @ 11:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 02/17/97 @ 11:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/16/97 @ 11:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/17/97 @ 11:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/16/97 @ 11:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/17/97 @ 11:00 pm
Hot/B lots in area: Hot lots in the area Static Lots in area:
__________________ ----------------------- -------------------
none JL117A, XE0919 none
Open annotations:
Down Equipment lot#/tool/ooc# Scrap lots: Hold Lots:
-------------- ----------------- ---------- ---------
CMP.A1 CMP.A1/#4829 None none
Number of product lots in room:
------------------------------
12 lots
New specs/revs posted:
---------------------
Lots/wafers processed
--------------------
JL0998/24 PMD
JD0992/24 PMD
JD0991/24 PMD
JL0997/24 PMD
JL0943/24 ILD2
JL1004/24 PMD
JL1005/24 PMD
JD0935/24 ILD1
JD0937/24 ILD1
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 SPEEDFAM
1 STRASBAUGH
2 PLATES F/S
|
| 89.27 | passdown cmp b-shift 02/18/97 | FABSIX::M_PROVENCHER | | Tue Feb 18 1997 05:51 | 120 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 16 mqcs
BREAKIN WAFERS 39 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/running xd0989 pmd/jl1011 pmd
CMP.A1 24hr MQCS COMPLETED: 02/17/97 @ 11:00 pm
CMP.A1 24hr MQCS NEXT DUE : 02/18/97 @ 11:00 pm
CMP.A2 (Strasbaugh 6DS-SP) -up/mqc failed 24 hr mqc's, pad was changed, ran
breakins, and mqc's. failed for high uniform-
-ity 22% left 11% right eeg checked d/f
(down at 11:00 pm)
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - up/running jd1032 m2 hot lot/
CMP.B1 24hr MQCS COMPLETED: 02/17/97 @ 1:30 pm
CMP.B1 24hr MQCS NEXT DUE : 02/18/97 @ 1:30 pm
CMP.B1 12hr MQCS COMPLETED: 02/17/97 @ 8:30 pm
CMP.B1 12hr MQCS NEXT DUE : 02/18/97 @ 8:30 am
CMP.B2 (Speedfam CMP-V) - up/running xd0864 m3/jl0910 m2
CMP.B2 24hr MQCS COMPLETED: 02/17/97 @ 10:00 pm
CMP.B2 24hr MQCS NEXT DUE : 02/18/97 @ 10:00 pm
CMP.B2 12hr MQCS COMPLETED: 02/18/97 @ 7:00 am
CMP.B2 12hr MQCS NEXT DUE : 02/18/97 @ 7:00 pm
CMP.B3 (Speedfam CMP-V) - up/running jl0972 m1/
CMP.B3 24hr MQCS COMPLETED: 02/17/97 @ 11:30 pm
CMP.B3 24hr MQCS NEXT DUE : 02/18/97 @ 11:30 pm
CMP.B3 12hr MQCS COMPLETED: 02/18/97 @ 1:30 am
CMP.B3 12hr MQCS NEXT DUE : 02/18/97 @ 1:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/17/97 @ 11:30 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 02/18/97 @ 11:30 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/17/97 @ 11:30 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/18/97 @ 11:30 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/17/97 @ 11:30 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/18/97 @ 11:30 pm
Hot/B lots in area:
__________________
* jl1032 m2 hotlot *
Hot lots coming to area:
-----------------------
* jl1101 pmd *
Static Lots in area:
-------------------
* jd0930 ild1 *
Down Equipment:
--------------
* cmp.a2 failed mqc's *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* jd0928 ild1 for eric bodensieck post measure *
jd0929 ild1 for eric bodensieck post measure
Monitor status:
--------------
1 box of 12K mqc wafers
2 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 11 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jd1028 pmd 24 wafers
xm0948 pmd 24 wafers
jd0928 m1 20 wafers
jd0929 m1 24 wafers
jl1117a m1 6 wafers (hot lot)
xe0919 m3 19 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
6 STRASBAUGH
5 PLATES F/S
|
| 89.28 | Cmp Passdown A Shift | FABSIX::J_BLAIS | You have read | Tue Feb 18 1997 19:42 | 99 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number used Number Available
--------------- ----------- ----------------
MQC-12K MONS 7 1 boxes
BREAKIN WAFERS 15 2 Boxes
CMP.A1 (Strasbaugh 6DS-SP) Down for PAd Change...
CMP.A1 24hr MQCS COMPLETED:
CMP.A1 24hr MQCS NEXT DUE :
CMP.A2 (Strasbaugh 6DS-SP) -DOWN for table alignment...
CMP.A2 24hr MQCS COMPLETED:
CMP.A2 24hr MQCS NEXT DUE :
CMP.B1 (Speedfam CMP-V) -up/running
CMP.B1 24hr MQCS COMPLETED: 02/18/97 @ 7:30 pm
CMP.B1 24hr MQCS NEXT DUE : 02/19/96 @ 7:30 pm
CMP.B1 12hr MQCS COMPLETED: 02/18/97 @ 7:30 pm
CMP.B1 12hr MQCS NEXT DUE : 02/19/97 @ 7:30 am
CMP.B2 (Speedfam CMP-V) -up/running JL0910/22 ILD2,JL0939/23 ILD2
CMP.B2 24hr MQCS COMPLETED: 02/17/97 @ 10:00 pm
CMP.B2 24hr MQCS NEXT DUE : 02/18/97 @ 10:00 pm
CMP.B2 12hr MQCS COMPLETED: 02/18/97 @ 7:30 pm
CMP.B2 12hr MQCS NEXT DUE : 02/19/97 @ 7:30 am
CMP.B3 (Speedfam CMP-V) - up/RUNNING JD0930/24 ILD1
CMP.B3 24hr MQCS COMPLETED: 02/17/97 @ 11:00 PM
CMP.B3 24hr MQCS NEXT DUE : 02/18/97 @ 11:00 PM
CMP.B3 12hr MQCS COMPLETED: 02/18/97 @ 1:30 am
CMP.B3 12hr MQCS NEXT DUE : now
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/17/97 @ 11:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 02/18/97 @ 11:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/18/97 @ 11:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/18/97 @ 11:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/17/97 @ 11:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/18/97 @ 11:00 pm
Hot/B lots in area: Hot lots in the area Static Lots in area:
__________________ ----------------------- -------------------
none none none
Open annotations:
Down Equipment lot#/tool/ooc# Scrap lots: Hold Lots:
-------------- ----------------- ---------- ---------
None None None None
Number of product lots in room:
------------------------------
13 lots
New specs/revs posted:
---------------------
Lots/wafers processed
--------------------
XD0864/24 ILD3
JD1118/22 PMD
XD0989/23 PMD
JL1011/24 PMD
JL0972/23 ILD1
JL0982/24 ILD1
JD01031/24 ILD1
JD0870/22 ILD2
JD0928/20 ILD1
JD0929/24 ILD1
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 SPEEDFAM
1 STRASBAUGH
2 PLATES F/S
|
| 89.29 | PASSDOWN D SHIFT | FABSIX::D_CAUSE | | Wed Feb 19 1997 07:38 | 32 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING JD1029 100%ED ON A4 READY FOR TU
CMP.A2 (Strasbaugh 6DS-SP) -DOWN/WORK CONTINUES ON THE GEARBOX
CMP.B1 (Speedfam CMP-V) - UP/RUNNING JL0973 & JL0965 FIRST PASS NEED 100% AND
TOUCHUP
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JL0942 100%ED ON THK.A5 NEEDS TU
CMP.B3 (Speedfam CMP-V) - UP/RUNNING XD0895 FIRST 400 SEC DONE
CMP-SCRUB.A1 (On-track scrubber) - UP/RUNNING XE0834 NEEDS DRG AND FINAL
CMP-SCRUB.A2 (On-track scrubber) - UP/RUNNING JL1014 NEEDS DRG AND FINAL
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:20
MQC WAFERS USED:20 WAFERS USED
MQC WAFERS AVAIL:3.5 BOXES
----------
|
| 89.30 | PASSDOWN | FABSIX::D_CAUSE | | Fri Feb 21 1997 07:38 | 35 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -DOWN/UNSCHEDULED FAILED MQC NEEDS PAD CHANGE
AND FULL MQC
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING JL1042 NEEDS 100% AND TOUCH UP
CMP.B1 (Speedfam CMP-V) -DOWN/ UNSCHEDULED CRASH AT 7:20 PAD BEING CHANGED
WILL NEED FULL MQC LOT JL1019 NEEDS TU
CMP.B2 (Speedfam CMP-V) - DOWN/ UNSCHEDULED INFRENODE AND VACUUM ERRORS
RUNNING VERIFY WAFERS AND MQC'S JD0984
HAS 2 RUNS FOR TOUCH UP
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JL0974 SA READING ON .A4
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:20
MQC WAFERS USED:26 WAFERS USED
MQC WAFERS AVAIL:2.5 BOXES
----------
|
| 89.31 | passdown cmp b-shift 02/23/97 | FABSIX::M_PROVENCHER | | Sun Feb 23 1997 05:46 | 115 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 14 mqcs
BREAKIN WAFERS 32 misc
CMP.A1 (Strasbaugh 6DS-SP) -dn/maint (down all night) when it comes up it will
need breakins and mqc's, new pad installed
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : when tool comes up
CMP.A2 (Strasbaugh 6DS-SP) -up/running xe0949 pmd (eng lot see remark op#1983)
CMP.A2 24hr MQCS COMPLETED: 02/23/97 @ 4:30 am
CMP.A2 24hr MQCS NEXT DUE : 02/24/97 @ 4:30 am
CMP.B1 (Speedfam CMP-V) - up/idle
CMP.B1 24hr MQCS COMPLETED: 02/22/97 @ 11:00 pm
CMP.B1 24hr MQCS NEXT DUE : 02/23/97 @ 11:00 pm
CMP.B1 12hr MQCS COMPLETED: 02/22/97 @ 11:00 pm
CMP.B1 12hr MQCS NEXT DUE : 02/23/97 @ 11:00 am
CMP.B2 (Speedfam CMP-V) - up/running xe0614 m3/jd0935 m2
CMP.B2 24hr MQCS COMPLETED: 02/22/97 @ 9:30 pm
CMP.B2 24hr MQCS NEXT DUE : 02/23/97 @ 9:30 pm
CMP.B2 12hr MQCS COMPLETED: 02/22/97 @ 8:30 pm
CMP.B2 12hr MQCS NEXT DUE : 02/23/97 @ 8:30 am
CMP.B3 (Speedfam CMP-V) - up/idle
CMP.B3 24hr MQCS COMPLETED: 02/22/97 @ 5:00 pm
CMP.B3 24hr MQCS NEXT DUE : 02/23/97 @ 5:00 pm
CMP.B3 12hr MQCS COMPLETED: 02/23/97 @ 5:30 am
CMP.B3 12hr MQCS NEXT DUE : 02/23/97 @ 5:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/23/97 @ 1:00 am
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 02/24/97 @ 1:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/23/97 @ 1:00 am
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/24/97 @ 1:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/23/97 @ 1:00 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/24/97 @ 1:00 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none * there is another ild1/2 rework lot coming though, check remarks
Static Lots in area:
-------------------
* jd0957 E.Bodensieck lot for post step height see remark op3079 and mail
message that eric sent. *
Down Equipment:
--------------
* cmp.a1 down to maint, robot problems *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* xb0950 sti lot *
Monitor status:
--------------
2 boxes of 12K mqc wafers
4 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 3 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jl0957 m1 24 wafers *
jl0977 m1 24 wafers
jl0995 m1 24 wafers
xd0833 m3 24 wafers (rework from films)
# of carriers for strasbaugh/speedfam:
--------------------------------------
18 SPEEDFAM
1 STRASBAUGH
8 PLATES F/S
|
| 89.32 | exit Cmp Passdown a Shift | FABSIX::J_BLAIS | You have read | Sun Feb 23 1997 19:28 | 90 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number used Number Available
--------------- ----------- ----------------
MQC-12K MONS 7 3 boxes
BREAKIN WAFERS 15 5 Boxes
CMP.A1 (Strasbaugh 6DS-SP) -up/idle
CMP.A1 24hr MQCS COMPLETED: 02/23/97 @ 2:45 pm
CMP.A1 24hr MQCS NEXT DUE : 02/24/97 @ 2:45 pm
CMP.A2 (Strasbaugh 6DS-SP) -up/idle
CMP.A2 24hr MQCS COMPLETED: 02/23/97 @ 4:30 am
CMP.A2 24hr MQCS NEXT DUE : 02/24/97 @ 4:30 am
CMP.B1 (Speedfam CMP-V) -up/running jl0980, jl0962
CMP.B1 24hr MQCS COMPLETED: 02/22/97 @ 11:00 pm
CMP.B1 24hr MQCS NEXT DUE : 02/23/97 @ 11:00 pm
CMP.B1 12hr MQCS COMPLETED: 02/23/97 @ 8:30 am
CMP.B1 12hr MQCS NEXT DUE : 02/23/97 @ 8:30 pm
CMP.B2 (Speedfam CMP-V) -up/running jl1000
CMP.B2 24hr MQCS COMPLETED: 02/22/97 @ 9:30 pm
CMP.B2 24hr MQCS NEXT DUE : 02/23/97 @ 9:30 pm
CMP.B2 12hr MQCS COMPLETED: 02/23/97 @ 8:30 am
CMP.B2 12hr MQCS NEXT DUE : 02/23/97 @ 8:30 pm
CMP.B3 (Speedfam CMP-V) - up/RUNNING yd0238a
CMP.B3 24hr MQCS COMPLETED: 02/23/97 @ 7:00 PM
CMP.B3 24hr MQCS NEXT DUE : 02/24/97 @ 7:00 PM
CMP.B3 12hr MQCS COMPLETED: 02/23/97 @ 7:30 pm
CMP.B3 12hr MQCS NEXT DUE : 02/24/97 @ 7:30 am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 02/23/97 @ 1:00 am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 02/24/97 @ 1:00 am
Hot/B lots in area: Hot lots in the area Static/Hold Lots in area:
__________________ ----------------------- -------------------------
none none xb0950/24
Open annotations:
Down Equipment lot#/tool/ooc# Scrap lots: lots in room:
-------------- ----------------- ---------- -------------
None None None 5 lots
New specs/revs posted:
---------------------
Lots/wafers processed
--------------------
jd0957/24
jl0998/24
jd0935/24
jd0960/21
xe0614/20
jd0934/24
jl1001/24
xe0949/23
jl1003/24
# of carriers for strasbaugh/speedfam:
--------------------------------------
18 SPEEDFAM
1 STRASBAUGH
8 PLATES F/S
|
| 89.33 | passdown cmp b-shift 02/24/97 | FABSIX::M_PROVENCHER | | Mon Feb 24 1997 05:31 | 114 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 11 mqcs
BREAKIN WAFERS 28 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/idle
CMP.A1 24hr MQCS COMPLETED: 02/23/97 @ 3:00 pm
CMP.A1 24hr MQCS NEXT DUE : 02/24/97 @ 3:00 pm
CMP.A2 (Strasbaugh 6DS-SP) -up/idle
CMP.A2 24hr MQCS COMPLETED: 02/23/97 @ 7:00 pm
CMP.A2 24hr MQCS NEXT DUE : 02/24/97 @ 7:00 pm
CMP.B1 (Speedfam CMP-V) - up/running jl0981 m1 at touch up/
CMP.B1 24hr MQCS COMPLETED: 02/23/97 @ 11:30 pm
CMP.B1 24hr MQCS NEXT DUE : 02/24/97 @ 11:30 pm
CMP.B1 12hr MQCS COMPLETED: 02/23/97 @ 11:30 pm
CMP.B1 12hr MQCS NEXT DUE : 02/24/97 @ 11:30 am
CMP.B2 (Speedfam CMP-V) - up/running jd1118 m2 (Hotlot) at touch up/
CMP.B2 24hr MQCS COMPLETED: 02/23/97 @ 10:00 pm
CMP.B2 24hr MQCS NEXT DUE : 02/24/97 @ 10:00 pm
CMP.B2 12hr MQCS COMPLETED: 02/23/97 @ 8:30 pm
CMP.B2 12hr MQCS NEXT DUE : 02/24/97 @ 8:30 am
CMP.B3 (Speedfam CMP-V) - up/idle
CMP.B3 24hr MQCS COMPLETED: 02/23/97 @ 7:00 pm
CMP.B3 24hr MQCS NEXT DUE : 02/24/97 @ 7:00 pm
CMP.B3 12hr MQCS COMPLETED: 02/24/97 @ 5:30 am
CMP.B3 12hr MQCS NEXT DUE : 02/24/97 @ 5:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/24/97 @ 1:00 am
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 02/25/97 @ 1:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle down at @ 10:00 pm up at @ 2:00 am
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/24/97 @ 3:00 am
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/25/97 @ 3:00 am
CMP-SCRUB.A3 (On-track scrubber) - dn/unsched at 5:00 am. eeg on it now.
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/24/97 @ 1:00 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/25/97 @ 1:00 am
Hot/B lots in area:
__________________
* jd1118 m2 (cmp.b2) *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp-scrub.a3 *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* xb0950 sti lot *
Monitor status:
--------------
3 boxes of 12K mqc wafers
3 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 2 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jl0980 m1 23 wafers *
jl1000 m1 24 wafers
yd0238a m1 12 wafers
jl0994 m1 23 wafers
jl0962 m2 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
18 SPEEDFAM
0 STRASBAUGH
8 PLATES F/S
|
| 89.34 | CMP Passdown "A" Shift | FABSIX::J_REISNER | | Mon Feb 24 1997 19:39 | 86 |
| CMP PASSDOWN
Type of monitor Number Available
--------------- -----------
MQC-12K MONS 2 boxes
BREAKIN WAFERS 5 1/2 Boxes
CMP.A1 (Strasbaugh 6DS-SP) -up/idle
CMP.A1 24hr MQCS COMPLETED: 02/24/97 @ 5:10 pm
CMP.A1 24hr MQCS NEXT DUE : 02/25/97 @ 5:10 pm
CMP.A2 (Strasbaugh 6DS-SP) -up/idle
CMP.A2 24hr MQCS COMPLETED: 02/23/97 @ 7:45 pm
CMP.A2 24hr MQCS NEXT DUE : 02/24/97 @ 7:45 pm
CMP.B1 (Speedfam CMP-V) -up/running JL0978 needs 100%
CMP.B1 24hr MQCS COMPLETED: 02/23/97 @ 11:30 pm
CMP.B1 24hr MQCS NEXT DUE : 02/24/97 @ 11:30 pm
CMP.B1 12hr MQCS COMPLETED: 02/24/97 @ 08:10 am
CMP.B1 12hr MQCS NEXT DUE : 02/24/97 @ 08:10 pm
CMP.B2 (Speedfam CMP-V) -up/running JL0975 - 100% / JL0997 running
CMP.B2 24hr MQCS COMPLETED: 02/23/97 @ 10:20 pm
CMP.B2 24hr MQCS NEXT DUE : 02/24/97 @ 10:20 pm
CMP.B2 12hr MQCS COMPLETED: 02/24/97 @ 8:45 am
CMP.B2 12hr MQCS NEXT DUE : 02/24/97 @ 8:45 pm
CMP.B3 (Speedfam CMP-V) - up/RUNNING JD0856
CMP.B3 24hr MQCS COMPLETED: 02/23/97 @ 7:45 PM
CMP.B3 24hr MQCS NEXT DUE : 02/24/97 @ 7:45 PM
CMP.B3 12hr MQCS COMPLETED: 02/24/97 @ 1:00 pm
CMP.B3 12hr MQCS NEXT DUE : 02/25/97 @ 1:00 am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 02/24/97 @ 1:00 am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 02/25/97 @ 1:00 am
Hot/B lots in area: Hot lots in the area Static/Hold Lots in area:
__________________ ----------------------- -------------------------
none none XB0950 - STI lot
Open annotations:
Down Equipment lot#/tool/ooc# Scrap lots: lots in room:
-------------- ----------------- ---------- -------------
None None None 6 lots
New specs/revs posted:
---------------------
Lots/wafers processed
--------------------
JD1118/16
XD0915/23
JL0981/24
JL0976/24
YD0238/12
JL1002/24
# of carriers for strasbaugh/speedfam:
--------------------------------------
18 SPEEDFAM
0 STRASBAUGH
8 PLATES F/S
|
| 89.35 | passdown cmp b-shift 02/25/97 | FABSIX::M_PROVENCHER | | Tue Feb 25 1997 05:48 | 114 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 11 mqcs
BREAKIN WAFERS 28 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/idle
CMP.A1 24hr MQCS COMPLETED: 02/24/97 @ 5:00 pm
CMP.A1 24hr MQCS NEXT DUE : 02/25/97 @ 5:00 pm
CMP.A2 (Strasbaugh 6DS-SP) -up/idle
CMP.A2 24hr MQCS COMPLETED: 02/24/97 @ 10:00 pm
CMP.A2 24hr MQCS NEXT DUE : 02/25/97 @ 10:00 pm
CMP.B1 (Speedfam CMP-V) - up/running jd0992 m1
CMP.B1 24hr MQCS COMPLETED: 02/24/97 @ 11:30 pm
CMP.B1 24hr MQCS NEXT DUE : 02/25/97 @ 11:30 pm
CMP.B1 12hr MQCS COMPLETED: 02/24/97 @ 11:30 pm
CMP.B1 12hr MQCS NEXT DUE : 02/25/97 @ 11:30 am
CMP.B2 (Speedfam CMP-V) - up/running xd0947 m2/jl0979 m2
CMP.B2 24hr MQCS COMPLETED: 02/24/97 @ 10:00 pm
CMP.B2 24hr MQCS NEXT DUE : 02/25/97 @ 10:00 pm
CMP.B2 12hr MQCS COMPLETED: 02/25/97 @ 1:30 am
CMP.B2 12hr MQCS NEXT DUE : 02/25/97 @ 1:30 pm
CMP.B3 (Speedfam CMP-V) - up/running xd0599 m2/ jl0982 m2
CMP.B3 24hr MQCS COMPLETED: 02/2/97 @ 7:00 pm
CMP.B3 24hr MQCS NEXT DUE : 02/2/97 @ 7:00 pm
CMP.B3 12hr MQCS COMPLETED: 02/2/97 @ 5:30 am
CMP.B3 12hr MQCS NEXT DUE : 02/2/97 @ 5:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/25/97 @ 3:00 am
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 02/26/97 @ 3:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/25/97 @ 3:00 am
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/26/97 @ 3:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/25/97 @ 3:00 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/26/97 @ 3:00 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* xb0950 sti lot *
Monitor status:
--------------
2 boxes of 12K mqc wafers
4 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 6 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jl0997 m1 24 wafers *
jl1011 m1 24 wafers
jd0856 m2 24 wafers
jl0975 m2 24 wafers
jl0978 m2 22 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
18 SPEEDFAM
0 STRASBAUGH
8 PLATES F/S
|
| 89.36 | Cmp Passdown A Shift | FABSIX::J_BLAIS | You have read | Tue Feb 25 1997 19:49 | 82 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number used Number Available
--------------- ----------- ----------------
MQC-12K MONS 7 3 boxes
BREAKIN WAFERS 20 6 Boxes
CMP.A1 (Strasbaugh 6DS-SP) -up/mqc
CMP.A1 24hr MQCS COMPLETED: running
CMP.A1 24hr MQCS NEXT DUE :
CMP.A2 (Strasbaugh 6DS-SP) -up/idle
CMP.A2 24hr MQCS COMPLETED: 02/24/97 @ 10:00 pm
CMP.A2 24hr MQCS NEXT DUE : 02/25/97 @ 10:00 pm
CMP.B1 (Speedfam CMP-V) -up/running jl0968/23 jl1014/24 hot
CMP.B1 24hr MQCS COMPLETED: 02/24/97 @ 11:30 pm
CMP.B1 24hr MQCS NEXT DUE : 02/25/97 @ 11:30 pm
CMP.B1 12hr MQCS COMPLETED: 02/25/97 @ 4:30 pm
CMP.B1 12hr MQCS NEXT DUE : 02/26/97 @ 4:30 am
CMP.B2 (Speedfam CMP-V) -up/running jl0649b/12
CMP.B2 24hr MQCS COMPLETED: 02/24/97 @ 10:00 pm
CMP.B2 24hr MQCS NEXT DUE : 02/25/97 @ 10:00 pm
CMP.B2 12hr MQCS COMPLETED: 02/25/97 @ 2:30 pm
CMP.B2 12hr MQCS NEXT DUE : 02/26/97 @ 2:30 am
CMP.B3 (Speedfam CMP-V) - up/RUNNING xe0555/24, jl0972/23
CMP.B3 24hr MQCS COMPLETED: 02/24/97 @ 10:00 PM
CMP.B3 24hr MQCS NEXT DUE : 02/25/97 @ 10:00 PM
CMP.B3 12hr MQCS COMPLETED: 02/25/97 @ 5:30 pm
CMP.B3 12hr MQCS NEXT DUE : 02/26/97 @ 5:30 am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 02/25/97 @ 1:00 am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 02/26/97 @ 1:00 am
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
jl1014 xb0950
lots in room: New specs/revs posted:
------------- ---------------------
7 lots
Lots/wafers processed
--------------------
xd0947/22
xd0599/19
jl0979/24
jl0982/24
jd1130/24
jd0992/24
xm0948/24
jd1017/24
jd1121/24 hot
xe0834/15
# of carriers for strasbaugh/speedfam:
--------------------------------------
18 SPEEDFAM
0 STRASBAUGH
8 PLATES F/S
|
| 89.37 | passdown cmp b-shift 02/26/97 | FABSIX::M_PROVENCHER | | Wed Feb 26 1997 05:57 | 126 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 29 mqcs
BREAKIN WAFERS 74 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/idle(failed 24 hr mqc's. pad was changed on tool.
passed 2nd set of mqc's. down at 12:30 am
up at 5:30 am
CMP.A1 24h MQCS COMPLETED : 02/26/97 @ 5:30 am
CMP.A1 24hr MQCS NEXT DUE : 02/27/97 @ 5:30 am
CMP.A2 (Strasbaugh 6DS-SP) -up/idle(failed 24 hr mqc's. pad was changed on tool)
passed 2nd set of mqc's. down at 1:00 am
up at 5:30 am
CMP.A2 24hr MQCS COMPLETED: 02/26/97 @ 5:00 am
CMP.A2 24hr MQCS NEXT DUE : 02/27/97 @ 5:00 am
CMP.B1 (Speedfam CMP-V) - up/mqc's (tool shut down twice during night for
invertor era. pad was changed by maint,
and wafers sensors were checked. failed 1st
set of mqc's. adjustments were made and
2nd set in process.) tool down at 11:30 pm
tool should be up by 7:30 am.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - up/running jd0916 m1/jd1028 m1
tool went sched.down for a pad change, due to
low step height failed 1st set of mqc's,
adjustments made to id/od, and offsets. 2nd set
passed.(tool down at 11:30 pm/ up at 4:00 am)
CMP.B2 24hr MQCS COMPLETED: 02/26/97 @ 4:00 am
CMP.B2 24hr MQCS NEXT DUE : 02/27/97 @ 4:00 am
CMP.B2 12hr MQCS COMPLETED: 02/26/97 @ 4:00 am
CMP.B2 12hr MQCS NEXT DUE : 02/26/97 @ 4:00 pm
CMP.B3 (Speedfam CMP-V) - up/running jd1031 m1/xe0555 m3
CMP.B3 24hr MQCS COMPLETED: 02/26/97 @ 12:00 am
CMP.B3 24hr MQCS NEXT DUE : 02/27/97 @ 12:00 am
CMP.B3 12hr MQCS COMPLETED: 02/26/97 @ 12:00 am
CMP.B3 12hr MQCS NEXT DUE : 02/26/97 @ 12:00 pm (noon)
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 02/26/97 @ 1:30 am
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 02/27/97 @ 1:30 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 02/26/97 @ 1:30 am
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 02/27/97 @ 1:30 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 02/26/97 @ 1:30 am
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 02/27/97 @ 1:30 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
---------------
* cmp.b1 pad change after tool shut down (x2) *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* xb0950 sti lot *
Monitor status:
--------------
2 boxes of 12K mqc wafers
4 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
*4 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see strasbaugh t.d.c.o. per eric bodensieck *
Lots/wafers processed
--------------------
* jl0649b m1 12 wafers *
jl0972 m2 23 wafers
jl0968 m2 23 wafers
jl1014 m1 24 wafers (hot lot)
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 SPEEDFAM
0 STRASBAUGH
8 PLATES F/S
|
| 89.38 | Cmp Passdown A Shift | FABSIX::J_BLAIS | You have read | Wed Feb 26 1997 19:50 | 62 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitor Number used Number Available
--------------- ----------- ----------------
MQC-12K MONS 7 2.5 boxes
BREAKIN WAFERS 25 2 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up idle 02/27/97 5:30am NA
CMP.A2 up jl1008 02/27/97 5:00am NA
CMP.B1 up jl0870, jl1006 02/27/97 7:00am 02/27/97 6:20am
CMP.B2 up jl1005 02/27/97 4:00am 02/27/97 6:00am
CMP.B3 up jl0971 02/26/97 12:00am 02/27/97 7:30am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 02/25/97 @ 1:00 am
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 02/26/97 @ 1:00 am
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
xd0913, ze0244
lots in room: New specs/revs posted:
------------- ---------------------
15 lots
Lots/wafers processed
--------------------
xe0555/24
jd1031/24
jd0916/23
jd1031/23
jd1028/24
xd1023/24
jl1039/24
jl1004/24
xd0946/24
jl1045/24
# of carriers for strasbaugh/speedfam:
--------------------------------------
18 SPEEDFAM
0 STRASBAUGH
8 PLATES F/S
|
| 89.39 | PASSDOWN | FABSIX::D_CAUSE | | Thu Feb 27 1997 07:48 | 34 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING JD1034 NEEDS 100% AND TU
CMP.A2 (Strasbaugh 6DS-SP) -DOWN/FAILED 24 HR MQC NEEDS FULL MQC LOT JD1016
100% ON THK.A4 NEEDS TU
CMP.B1 (Speedfam CMP-V) -UP/RUNNING XE0903 NEEDS 100% AND TOUCHUP
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JD1032 LOT HAS BAD READINGS ON BOTH
UV1050'S WILL NEED ADJUSTMENT AND REDO 100%
JL1013 FINISHED POLISHING NEEDS DRG AND FINAL
CMP.B3 (Speedfam CMP-V) - UP/MQC
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:20
MQC WAFERS USED:16 WAFERS USED
MQC WAFERS AVAIL:4.5 BOXES
----------
|
| 89.40 | PASSDOWN | FABSIX::D_CAUSE | | Sat Mar 01 1997 07:35 | 32 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING JL1079 NEEDS 100% AND TU
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING JL1057 READY TO RUN
CMP.B1 (Speedfam CMP-V) -UP/RUNNING YE0227 WILL NEED 100% AND TOUCHUP
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JD1029 AND JD0961 FIRST PASS
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JD0933 FIRST PASS AND JD0985 SEND AHEADS
ARE DONE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:30
MQC WAFERS USED:12 WAFERS USED
MQC WAFERS AVAIL:1.5 BOXES
----------
|
| 89.41 | CMP 03/04/97 | FABSIX::S_MCREYNOLDS | | Tue Mar 04 1997 07:01 | 64 |
| CMP PASSDOWN
Monitor wafer usage
-------------------
Type of monitors Number Available
--------------- ----------------
MQC-12K MONS 2 boxes
BREAKIN WAFERS 4 boxes
24hr MQC 12hr MQC
Tool Status Processing/Comments Next Due Next Due
------ ------ ---------------------- ---------------- ---------------
CMP.A1 up IDLE 03/05/97 8:15am NA
CMP.A2 up RUNNING JL1082 pmd 03/06/97 12:00am NA
CMP.B1 up RUNNING XD0947 m3/jd0856 m3 03/05/97 2:15am 03/04/97 7:15pm
CMP.B2 up running JL1037 m1/JL0997 m2 03/04/97 10:30am 03/04/97 7:00am
CMP.B3 Eng running JL0980 m2 03/05/97 2:15am 03/04/97 7:15pm
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 (On-track scrubbers) - up/idle
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS COMPLETED: 03/03/97 @ 11:30 pm
CMP-SCRUB.A1, SCRUB.A2, SCRUB.A3 24hr MQCS NEXT DUE : 03/04/97 @ 11:30 pm
Hot lots/ B Lots in the area: Static/Hold Lots in area:
_____________________________ _________________________
ze0245 yd0241
lots in room: New specs/revs posted:
------------- ---------------------
12
Lots/wafers processed
--------------------
JL1003 M@ 24w
JL1067 PMD 24w
JL1081 PMD 24w
JL1083 PMD 24w
JL0889 M1 6w HOT
JL0995 m2 24w
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM
7 STRASBAUGH
5 PLATES F/S
|