| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 88.1 | passdown cmp b-shift 01/05/97 | FABSIX::M_PROVENCHER | | Sun Jan 05 1997 07:06 | 116 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 mqcs
BREAKIN WAFERS 33 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/running jl0796 pmd/jl0798 pmd
CMP.A1 24hr MQCS COMPLETED: 01/04/97 @ 10:00 am
CMP.A1 24hr MQCS NEXT DUE : 01/05/97 @ 10:00 am
CMP.A2 (Strasbaugh 6DS-SP) -up/mqc failed 1st set for high, centerslow unif.
running 2nd set
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - up/running jd0740 m1/jl0742 m2
CMP.B1 24hr MQCS COMPLETED: 01/05/97 @ 2:30 am
CMP.B1 24hr MQCS NEXT DUE : 01/06/97 @ 2:30 am
CMP.B1 12hr MQCS COMPLETED: 01/04/97 @ 8:30 pm
CMP.B1 12hr MQCS NEXT DUE : 01/05/97 @ 8:30 am
CMP.B2 (Speedfam CMP-V) - up/running jl0743 m1/jl0715 m2
CMP.B2 24hr MQCS COMPLETED: 01/04/97 @ 1:00 pm
CMP.B2 24hr MQCS NEXT DUE : 01/05/97 @ 1:00 pm
CMP.B2 12hr MQCS COMPLETED: 01/05/97 @ 2:00 am
CMP.B2 12hr MQCS NEXT DUE : 01/05/97 @ 2:00 pm
CMP.B3 (Speedfam CMP-V) - up/running jd0732 m2
CMP.B3 24hr MQCS COMPLETED: 01/04/97 @ 10:30 am
CMP.B3 24hr MQCS NEXT DUE : 01/05/97 @ 10:30 am
CMP.B3 12hr MQCS COMPLETED: 01/04/97 @ 8:30 pm
CMP.B3 12hr MQCS NEXT DUE : 01/05/97 @ 8:30 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 12/05/97 @ 12:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 12/05/97 @ 12:00 noon
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 12/05/97 @ 12:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 12/05/97 @ 12:00 noon
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 12/05/97 @ 12:00 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 12/05/97 @ 12:00 noon
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* xd0590 ILD4 1.60 days *
Down Equipment:
--------------
* none *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
8 boxes of 12K mqc wafers
7 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 12 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* None *
Lots/wafers processed
--------------------
* jd0785 pmd 24 wafers *
jd0788 pmd 24 wafers
jl0794 pmd 24 wafers
jl0770 m1 24 wafers
jd0839 m1 23 wafers
xd0632 m2 21 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 SPEEDFAM
11 STRASBAUGH
2 PLATES F/S
|
| 88.2 | A-shift CMP passdown 1/05/97 | FABSIX::J_SADIN | Freedom isn't free. | Sun Jan 05 1997 19:34 | 114 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 30 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JL0801 (pmd).
CMP.A1 24hr MQCS COMPLETED: 1pm 1/05
CMP.A1 24hr MQCS NEXT DUE : 1pm 1/06
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0766 (pmd) and XD0804 (pmd).
CMP.A2 24hr MQCS COMPLETED: 2pm 1/05
CMP.A2 24hr MQCS NEXT DUE : 2pm 1/06
CMP.B1 (Speedfam CMP-V) - RUNNING: JL0692 (m2) and JL0748 (m2).
CMP.B1 24hr MQCS COMPLETED: 2am 1/05
CMP.B1 24hr MQCS NEXT DUE : 2am 1/06
CMP.B1 12hr MQCS COMPLETED: 2am 1/05
CMP.B1 12hr MQCS NEXT DUE : 2pm 1/05
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0739 (m1) and JD0709 (m3).
CMP.B2 24hr MQCS COMPLETED: 6pm 1/05
CMP.B2 24hr MQCS NEXT DUE : 6pm 1/06
CMP.B2 12hr MQCS COMPLETED: 6pm 1/05
CMP.B2 12hr MQCS NEXT DUE : 6am 1/06
CMP.B3 (Speedfam CMP-V) - RUNNING: XD0778 (pmd).
CMP.B3 24hr MQCS COMPLETED: 2pm 1/05
CMP.B3 24hr MQCS NEXT DUE : 2pm 1/06
CMP.B3 12hr MQCS COMPLETED: 2pm 1/05
CMP.B3 12hr MQCS NEXT DUE : 2am 1/06
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9am 1/05
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9pm 1/05
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9am 1/05
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9pm 1/05
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9am 1/05
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9pm 1/05
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
XD0590 - 2.18DAYS ON HOLD FOR ERIC BODENSIECK
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0590 - HOLD FOR ERIC BODENSIECK
Monitor status:
--------------
6 boxes of 50k breakin wafers
7 boxes of 12k mqc wafers
Number of product lots in room:
------------------------------
12
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0798 - PMD - 24WFRS
JL0796 - PMD - 24
JD0692 - M2 - 24
JL0771 - M1 - 24
JL0742 - M2 - 24
JD0740 - M1 - 23
JL0743 - M2 - 24
JL0715 - M2 - 24
JL0749 - M2 - 04
JL0773 - M1 - 24
JD0732 - M1 - 21
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 SPEEDFAM
11 STRASBAUGH
2 PLATES F/S
|
| 88.3 | passdown cmp b-shift 01/06/97 | FABSIX::M_PROVENCHER | | Mon Jan 06 1997 05:44 | 118 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 6 mqcs
BREAKIN WAFERS 38 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/idle
CMP.A1 24hr MQCS COMPLETED: 01/05/97 @ 1:00 pm
CMP.A1 24hr MQCS NEXT DUE : 01/06/97 @ 1:00 pm
CMP.A2 (Strasbaugh 6DS-SP) -up/idle
CMP.A2 24hr MQCS COMPLETED: 01/05/97 @ 2:00 pm
CMP.A2 24hr MQCS NEXT DUE : 01/06/97 @ 2:00 pm
CMP.B1 (Speedfam CMP-V) - up/idle
CMP.B1 24hr MQCS COMPLETED: 01/06/97 @ 2:30 am
CMP.B1 24hr MQCS NEXT DUE : 01/07/97 @ 2:30 am
CMP.B1 12hr MQCS COMPLETED: 01/05/97 @ 9:00 pm
CMP.B1 12hr MQCS NEXT DUE : 01/06/97 @ 9:00 am
CMP.B2 (Speedfam CMP-V) - up/idle
CMP.B2 24hr MQCS COMPLETED: 01/05/97 @ 6:00 pm
CMP.B2 24hr MQCS NEXT DUE : 01/06/97 @ 6:00 pm
CMP.B2 12hr MQCS COMPLETED: 01/06/97 @ 6:00 am
CMP.B2 12hr MQCS NEXT DUE : 01/06/97 @ 6:00 pm
CMP.B3 (Speedfam CMP-V) - up/idle
CMP.B3 24hr MQCS COMPLETED: 01/05/97 @ 2:00 pm
CMP.B3 24hr MQCS NEXT DUE : 01/06/97 @ 2:00 pm
CMP.B3 12hr MQCS COMPLETED: 01/05/97 @ 9:00 pm
CMP.B3 12hr MQCS NEXT DUE : 01/06/97 @ 9:00 am
CMP-SCRUB.A1 (On-track scrubber) - up/running jd0709 m3
CMP-SCRUB.A1 12hr MQCS COMPLETED: 12/05/97 @ 10:30 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 12/06/97 @ 10:30 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 12/05/97 @ 10:30 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 12/06/97 @ 10:30 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 12/05/97 @ 10:30 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 12/06/97 @ 10:30 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* XD0590 - 2.60 DAYS ON HOLD FOR ERIC BODENSIECK *
Down Equipment:
--------------
* none *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* xd0590 on hold for eric bodensieck *
Monitor status:
--------------
6 boxes of 12K mqc wafers
6 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 1 lot (when this passdown was sent out) *
New specs/revs posted:
---------------------
* None *
Lots/wafers processed
--------------------
* jd0766 pmd 24 wafers *
jl0801 pmd 24 wafers
xd0804 pmd 24 wafers
xd0805 pmd 24 wafers
jd0739 m1 8 wafers
jl0772 m1 23 wafers
jl0754 m1 24 wafers
jl0748 m2 24 wafers
jd0709 m3 18 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 SPEEDFAM
11 STRASBAUGH
2 PLATES F/S
|
| 88.4 | A-shift CMP passdown 1/06/97 | FABSIX::J_SADIN | Freedom isn't free. | Mon Jan 06 1997 19:47 | 108 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 30 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A1 24hr MQCS COMPLETED: 4pm 1/06
CMP.A1 24hr MQCS NEXT DUE : 4pm 1/07
CMP.A2 (Strasbaugh 6DS-SP) - MQC: running 24hr mqcs after pad change.
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0682 (m2).
CMP.B1 24hr MQCS COMPLETED: 3am 1/06
CMP.B1 24hr MQCS NEXT DUE : 3am 1/07
CMP.B1 12hr MQCS COMPLETED: 3am 1/06
CMP.B1 12hr MQCS NEXT DUE : 3pm 1/06
CMP.B2 (Speedfam CMP-V) - IDLE.
CMP.B2 24hr MQCS COMPLETED: 7pm 1/06
CMP.B2 24hr MQCS NEXT DUE : 7pm 1/07
CMP.B2 12hr MQCS COMPLETED: 7pm 1/06
CMP.B2 12hr MQCS NEXT DUE : 7am 1/07
CMP.B3 (Speedfam CMP-V) - RUNNING: JL0747 (m2).
CMP.B3 24hr MQCS COMPLETED: 3pm 1/06
CMP.B3 24hr MQCS NEXT DUE : 3pm 1/07
CMP.B3 12hr MQCS COMPLETED: 3pm 1/06
CMP.B3 12hr MQCS NEXT DUE : 3am 1/07
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9am 1/06
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9pm 1/06
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9am 1/06
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9pm 1/06
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9am 1/06
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9pm 1/06
Hot/B lots in area:
__________________
JD0729 - M3 HOT (done polishing)
Hot lots coming to area:
-----------------------
JD0783 - M2 DEP
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A2 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 50K breakin wafers
6 boxes of 12K mqc wafers
Number of product lots in room:
------------------------------
7 (two are STI eng lots)
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0729 - M3 - 23
JD0710 - M2 - 22
XD0590 - M4 - 19
JL0777 - M1 - 24
JL0774 - M1 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 SPEEDFAM
11 STRASBAUGH
2 PLATES F/S
|
| 88.5 | passdown cmp b-shift 01/07/97 | FABSIX::M_PROVENCHER | | Tue Jan 07 1997 05:58 | 117 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 8 mqcs
BREAKIN WAFERS 34 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/idle
CMP.A1 24hr MQCS COMPLETED: 01/06/97 @ 4:00 pm
CMP.A1 24hr MQCS NEXT DUE : 01/07/97 @ 4:00 pm
CMP.A2 (Strasbaugh 6DS-SP) -up/idle
CMP.A2 24hr MQCS COMPLETED: 01/06/97 @ 10:00 pm
CMP.A2 24hr MQCS NEXT DUE : 01/07/97 @ 10:00 pm
CMP.B1 (Speedfam CMP-V) - up/idle
CMP.B1 24hr MQCS COMPLETED: 01/07/97 @ 3:30 am
CMP.B1 24hr MQCS NEXT DUE : 01/08/97 @ 3:30 am
CMP.B1 12hr MQCS COMPLETED: 01/07/97 @ 3:00 am
CMP.B1 12hr MQCS NEXT DUE : 01/07/97 @ 3:00 pm
CMP.B2 (Speedfam CMP-V) - up/idle
CMP.B2 24hr MQCS COMPLETED: 01/06/97 @ 7:00 pm
CMP.B2 24hr MQCS NEXT DUE : 01/07/97 @ 7:00 pm
CMP.B2 12hr MQCS COMPLETED: 01/07/97 @ 7:00 am
CMP.B2 12hr MQCS NEXT DUE : 01/07/97 @ 7:00 pm
CMP.B3 (Speedfam CMP-V) - up/idle
CMP.B3 24hr MQCS COMPLETED: 01/06/97 @ 3:00 pm
CMP.B3 24hr MQCS NEXT DUE : 01/07/97 @ 3:00 pm
CMP.B3 12hr MQCS COMPLETED: 01/06/97 @ 10:30 pm
CMP.B3 12hr MQCS NEXT DUE : 01/07/97 @ 10:30 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 12/07/97 @ 5:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 12/07/97 @ 10:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 12/07/97 @ 5:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 12/07/97 @ 5:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 12/07/97 @ 5:00 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 12/07/97 @ 5:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* xb0634 sti lot *
xd0599 sti lot
Monitor status:
--------------
5 boxes of 12K mqc wafers
1 box of 50K breakin wafers 2 on order @ 9:00 pm
Number of product lots in room:
------------------------------
* no lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* None *
Lots/wafers processed
--------------------
* jl0811 pmd 24 wafers *
jl0802 pmd 24 wafers
jl0776 m1 24 wafers
jd0764 m1 21 wafers
jd0682 m2 24 wafers
jd0733 m2 24 wafers
jl0747 m2 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 SPEEDFAM
11 STRASBAUGH
2 PLATES F/S
|
| 88.6 | A-shift CMP passdown 1/07/97 | FABSIX::J_SADIN | Freedom isn't free. | Tue Jan 07 1997 19:18 | 113 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 25 mqcs
BREAKIN WAFERS 30 misc
CMP.A1 (Strasbaugh 6DS-SP) - VERIFY: running breakins and mqcs after pad
change.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - MQC: running mqcs after pad/carrier change
(post monthly pm).
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0783 (m2).
CMP.B1 24hr MQCS COMPLETED: 3am 1/07
CMP.B1 24hr MQCS NEXT DUE : 3am 1/08
CMP.B1 12hr MQCS COMPLETED: 3am 1/07
CMP.B1 12hr MQCS NEXT DUE : 3pm 1/07
CMP.B2 (Speedfam CMP-V) - RUNNING: XE0553 (m2 - transferred from CMP.B3).
CMP.B2 24hr MQCS COMPLETED: 7pm 1/06
CMP.B2 24hr MQCS NEXT DUE : 7pm 1/07
CMP.B2 12hr MQCS COMPLETED: 7am 1/07
CMP.B2 12hr MQCS NEXT DUE : 7pm 1/07
CMP.B3 (Speedfam CMP-V) - MQC: running mqcs after pad/conditioner change.
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9am 1/07
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9pm 1/07
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9am 1/07
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9pm 1/07
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9am 1/07
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9pm 1/07
Hot/B lots in area:
__________________
JD0783 - M2
Hot lots coming to area:
-----------------------
XD0831 - UPP_ILD1 1
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - VERIFY
CMP.A2 - MQC
CMP.B3 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
4.5 boxes of 12K mqc wafers
0.5 boxes of 50K breakin wafers (more on order)
Number of product lots in room:
------------------------------
9
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0789 - PMD - 24WFRS
XB0634 - STI - 24
XD0599 - STI - 23
XM0612 - M3 - 22
JD0736 - M2 - 24
JL0775 - M1 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 SPEEDFAM
9 STRASBAUGH
2 PLATES F/S
|
| 88.7 | PASSDOWN | FABSIX::D_CAUSE | | Fri Jan 10 1997 07:37 | 32 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) -DOWN/MQC RUNNING BREAKIN WILL NEED FULL MQC
JD0763 READY FOR TOUCHUP
CMP.B1 (Speedfam CMP-V) - UP/RUNNING JD0762 FIRST PASS
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JL0767 100%ING ON .A5
CMP.B3 (Speedfam CMP-V) - UP/MQC EVALUATING 3RD MQC
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:20
MQC WAFERS USED:20 WAFERS USED
MQC WAFERS AVAIL:6 BOXES
----------
|
| 88.8 | PASSDOWN | FABSIX::D_CAUSE | | Sat Jan 11 1997 07:40 | 33 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING JL0800 READY FOR TOUCHUP
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING JL0828 READY TO RUN
CMP.B1 (Speedfam CMP-V) - UP/IDLE
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JD0783 **HOT** M3 TOUCHUP
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JL0799 100%ING ON .A5/JD0786 NEEDS
100% AND TOUCHUP
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:1
----------------
***JD0783** M3
BREAK IN WAFERS USED:20
MQC WAFERS USED:0 WAFERS USED
MQC WAFERS AVAIL:5 BOXES
----------
|
| 88.9 | passdown cmp b-shift 01/12/97 | FABSIX::M_PROVENCHER | | Sun Jan 12 1997 06:29 | 122 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 27 mqcs
BREAKIN WAFERS 31 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/mqc after pad change (tool has been down all
night, failing for lg particles,scratches,and
high uniformity breakins and mqc's are in
process).
CMP.A1 24hr MQCS COMPLETED: in process
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) -up/running jd0815 pmd
CMP.A2 24hr MQCS COMPLETED: 01/11/97 @ 4:30 pm
CMP.A2 24hr MQCS NEXT DUE : 01/12/97 @ 4:30 pm
CMP.B1 (Speedfam CMP-V) - up/running jl0745 m2
CMP.B1 24hr MQCS COMPLETED: 01/11/97 @ 9:30 pm
CMP.B1 24hr MQCS NEXT DUE : 01/12/97 @ 3:30 pm
CMP.B1 12hr MQCS COMPLETED: 01/11/97 @ 11:30 pm
CMP.B1 12hr MQCS NEXT DUE : 01/12/97 @ 11:30 am
CMP.B2 (Speedfam CMP-V) - up/running jl0744 m2/jd0839 m2 hotlot
CMP.B2 24hr MQCS COMPLETED: 01/11/97 @ 2:00 pm
CMP.B2 24hr MQCS NEXT DUE : 01/12/97 @ 2:00 pm
CMP.B2 12hr MQCS COMPLETED: 01/12/97 @ 7:00 am
CMP.B2 12hr MQCS NEXT DUE : 01/12/97 @ 7:00 pm
CMP.B3 (Speedfam CMP-V) - up/mqc after pad change (tool has been down all
night failed two sets of mqc's prior. breakins
and mqc's in process
CMP.B3 24hr MQCS COMPLETED: in process
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 01/12/97 @ 2:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 01/12/97 @ 2:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 01/12/97 @ 2:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 01/12/97 @ 2:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 01/12/97 @ 2:00 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 01/12/97 @ 2:00 pm
Hot/B lots in area:
__________________
* jd0839 m2 *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.a1 all night *
cmp.b3 all night
thickness.a4 down at 11:30 pm
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
3 boxes of 12K mqc wafers
3 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 12 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* None *
Lots/wafers processed
--------------------
* jl0890 pmd 24 wafers hotlot *
jl0842 pmd 24 wafers
xd0831 m1 24 wafers hotlot
jd0838 m2 11 wafers
jl0770 m2 24 wafers
xd0573 m3 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM
7 STRASBAUGH
2 PLATES F/S
|
| 88.10 | A-shift CMP passdown 1/12/97 | FABSIX::J_SADIN | Freedom isn't free. | Sun Jan 12 1997 19:23 | 113 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 25 mqcs
BREAKIN WAFERS 30 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JL0840 (pmd).
CMP.A1 24hr MQCS COMPLETED: 7am 1/12
CMP.A1 24hr MQCS NEXT DUE : 7am 1/13
CMP.A2 (Strasbaugh 6DS-SP) - MQC: running mqcs
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - IDLE.
CMP.B1 24hr MQCS COMPLETED: 11pm 1/11
CMP.B1 24hr MQCS NEXT DUE : 11pm 1/12
CMP.B1 12hr MQCS COMPLETED: 11pm 1/11
CMP.B1 12hr MQCS NEXT DUE : 11am 1/12
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0632 (m3) and XD0759 (m3).
CMP.B2 24hr MQCS COMPLETED: 6pm 1/12
CMP.B2 24hr MQCS NEXT DUE : 6pm 1/13
CMP.B2 12hr MQCS COMPLETED: 6pm 1/12
CMP.B2 12hr MQCS NEXT DUE : 6am 1/13
CMP.B3 (Speedfam CMP-V) - RUNNING: XM0630 (m2) and JL0801 (m1).
CMP.B3 24hr MQCS COMPLETED: 12pm 1/12
CMP.B3 24hr MQCS NEXT DUE : 12pm 1/13
CMP.B3 12hr MQCS COMPLETED: 12pm 1/12
CMP.B3 12hr MQCS NEXT DUE : 12am 1/13
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 11am 1/12
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 11pm 1/12
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 11am 1/12
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 11pm 1/12
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 11am 1/12
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 11pm 1/12
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A2 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2.5 boxes of 50K breakin wafers
4 boxes of 12K mqc wafers
Number of product lots in room:
------------------------------
12
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0837A - PMD - 6WFRS
XD0593 - PMD - 21
JD0815 - PMD - 23
YD0214 - M1 - 24
JL0773 - M2 - 24
JL0745 - M2 - 24
JD0839 - M3 - 22
JL0744 - M2 - 23
JL0794 - M1 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM
7 STRASBAUGH
2 PLATES F/S
|
| 88.11 | passdown cmp b-shift 01/13/97 | FABSIX::M_PROVENCHER | | Mon Jan 13 1997 05:41 | 117 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 mqcs
BREAKIN WAFERS 38 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/idle
CMP.A1 24hr MQCS COMPLETED: in process (post readings)
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) -up/running jl0845 pmd
CMP.A2 24hr MQCS COMPLETED: 01/13/97 @ 2:00 am
CMP.A2 24hr MQCS NEXT DUE : 01/14/97 @ 2:00 am
CMP.B1 (Speedfam CMP-V) - up/running jd0732 m2/xd0804 m1
CMP.B1 24hr MQCS COMPLETED: 01/13/97 @ 12:00 pm
CMP.B1 24hr MQCS NEXT DUE : 01/14/97 @ 12:00 pm
CMP.B1 12hr MQCS COMPLETED: 01/13/97 @ 12:00 pm
CMP.B1 12hr MQCS NEXT DUE : 01/13/97 @ 12:00 am (noon)
CMP.B2 (Speedfam CMP-V) - up/running jl0793 m1/jd0785 m1
CMP.B2 24hr MQCS COMPLETED: 01/12/97 @ 2:00 pm
CMP.B2 24hr MQCS NEXT DUE : 01/13/97 @ 2:00 pm
CMP.B2 12hr MQCS COMPLETED: 01/13/97 @ 2:00 am
CMP.B2 12hr MQCS NEXT DUE : 01/13/97 @ 2:00 pm
CMP.B3 (Speedfam CMP-V) - up/running jl0798 m1/jl0793 m1
CMP.B3 24hr MQCS COMPLETED: 01/13/97 @ 12:30 am
CMP.B3 24hr MQCS NEXT DUE : 01/13/97 @ 12:30 am
CMP.B3 12hr MQCS COMPLETED: 01/13/97 @ 12:30 am
CMP.B3 12hr MQCS NEXT DUE : 01/13/97 @ 12:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 01/13/97 @ 5:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 01/13/97 @ 5:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 01/13/97 @ 5:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 01/13/97 @ 5:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 01/13/97 @ 5:00 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 01/13/97 @ 5:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.a2 down at 8:30 pm, up at 2:00 am *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12K mqc wafers (2 on order)
2 boxes of 50K breakin wafers (2 on order)
Number of product lots in room:
------------------------------
* 10 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* None *
Lots/wafers processed
--------------------
* jl0841 pmd 22 wafers *
xm0630 m2 24 wafers
jl0772 m2 23 wafers
jl0774 m2 24 wafers
xd0759 m3 23 wafers
xd0632 m3 21 wafers
jl0801 m1 24 wafers
jl0844 pmd 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM
5 STRASBAUGH
2 PLATES F/S
|
| 88.12 | A-shift CMP passdown 1/13/97 | FABSIX::J_SADIN | Freedom isn't free. | Mon Jan 13 1997 19:30 | 113 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A1 24hr MQCS COMPLETED: 2pm 1/13
CMP.A1 24hr MQCS NEXT DUE : 2pm 1/14
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 24hr MQCS COMPLETED: 2am 1/13
CMP.A2 24hr MQCS NEXT DUE : 2am 1/14
CMP.B1 (Speedfam CMP-V) - RUNNING: XE0628 (m2).
CMP.B1 24hr MQCS COMPLETED: 12am 1/13
CMP.B1 24hr MQCS NEXT DUE : 12am 1/14
CMP.B1 12hr MQCS COMPLETED: 12am 1/13
CMP.B1 12hr MQCS NEXT DUE : 12pm 1/14
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0682 (m3).
CMP.B2 24hr MQCS COMPLETED: 6pm 1/13
CMP.B2 24hr MQCS NEXT DUE : 6pm 1/14
CMP.B2 12hr MQCS COMPLETED: 6pm 1/13
CMP.B2 12hr MQCS NEXT DUE : 6am 1/14
CMP.B3 (Speedfam CMP-V) - IDLE.
CMP.B3 24hr MQCS COMPLETED: 2pm 1/13
CMP.B3 24hr MQCS NEXT DUE : 2pm 1/14
CMP.B3 12hr MQCS COMPLETED: 2pm 1/13
CMP.B3 12hr MQCS NEXT DUE : 2am 1/14
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 10am 1/13
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 10pm 1/13
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 10am 1/13
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 10pm 1/13
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 10am 1/13
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 10pm 1/13
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
3 boxes of 50K breakin wafers
3 boxes of 12K mqc wafers
Number of product lots in room:
------------------------------
2
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0845 - PMD - 22WFRS
XD0780 - M1 - 11
JD0732 - M2 - 21
XD0804 - M1 - 24
JD0792 - M1 - 24
JD0785 - M1 - 24
XE0756 - M1 - 19
JL0793 - M1 - 24
JL0846 - PMD - 24
JL0798 - M1 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM
5 STRASBAUGH
2 PLATES F/S
|
| 88.13 | passdown cmp b-shift 01/14/97 | FABSIX::M_PROVENCHER | | Tue Jan 14 1997 05:27 | 111 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 8 mqcs
BREAKIN WAFERS 28 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/running jl0843 pmd/jl0847 pmd
CMP.A1 24hr MQCS COMPLETED: 01/13/97 @ 2:00 pm
CMP.A1 24hr MQCS NEXT DUE : 01/14/97 @ 2:00 pm
CMP.A2 (Strasbaugh 6DS-SP) -up/idle
CMP.A2 24hr MQCS COMPLETED: 01/14/97 @ 2:00 am
CMP.A2 24hr MQCS NEXT DUE : 01/15/97 @ 2:00 am
CMP.B1 (Speedfam CMP-V) - up/running xd0607 m1/jd0765 m2
CMP.B1 24hr MQCS COMPLETED: 01/14/97 @ 2:00 am
CMP.B1 24hr MQCS NEXT DUE : 01/14/97 @ 2:00 pm
CMP.B1 12hr MQCS COMPLETED: 01/14/97 @ 2:00 am
CMP.B1 12hr MQCS NEXT DUE : 01/15/97 @ 2:00 am
CMP.B2 (Speedfam CMP-V) - up/running jd0692 m3/jd0765 m2
CMP.B2 24hr MQCS COMPLETED: 01/13/97 @ 6:00 pm
CMP.B2 24hr MQCS NEXT DUE : 01/14/97 @ 6:00 pm
CMP.B2 12hr MQCS COMPLETED: 01/14/97 @ 6:00 am
CMP.B2 12hr MQCS NEXT DUE : 01/14/97 @ 6:00 pm
CMP.B3 (Speedfam CMP-V) - up/running xm0613 m3
CMP.B3 24hr MQCS COMPLETED: 01/13/97 @ 2:00 pm
CMP.B3 24hr MQCS NEXT DUE : 01/14/97 @ 2:00 pm
CMP.B3 12hr MQCS COMPLETED: 01/14/97 @ 2:00 am
CMP.B3 12hr MQCS NEXT DUE : 01/14/97 @ 2:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 01/13/97 @ 9:30 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 01/14/97 @ 9:30 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 01/13/97 @ 9:30 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 01/14/97 @ 9:30 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 01/13/97 @ 9:30 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 01/14/97 @ 9:30 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12K mqc wafers (2 on order)
2 boxes of 50K breakin wafers (2 on order)
Number of product lots in room:
------------------------------
* 7 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* None *
Lots/wafers processed
--------------------
* xe0628 m2 22 wafers *
jd0682 m3 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM
5 STRASBAUGH
2 PLATES F/S
|
| 88.14 | passdown cmp b-shift 01/15/97 | FABSIX::M_PROVENCHER | | Wed Jan 15 1997 05:58 | 115 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 mqcs
BREAKIN WAFERS 34 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/running Jl0852 pmd
CMP.A1 24hr MQCS COMPLETED: 01/14/97 @ 6:00 pm
CMP.A1 24hr MQCS NEXT DUE : 01/15/97 @ 6:00 pm
CMP.A2 (Strasbaugh 6DS-SP) -up/idle
CMP.A2 24hr MQCS COMPLETED: 01/15/97 @ 4:00 am
CMP.A2 24hr MQCS NEXT DUE : 01/16/97 @ 4:00 am
CMP.B1 (Speedfam CMP-V) - up/idle
CMP.B1 24hr MQCS COMPLETED: 01/15/97 @ 3:00 am
CMP.B1 24hr MQCS NEXT DUE : 01/16/97 @ 3:00 am
CMP.B1 12hr MQCS COMPLETED: 01/15/97 @ 3:00 am
CMP.B1 12hr MQCS NEXT DUE : 01/15/97 @ 3:00 pm
CMP.B2 (Speedfam CMP-V) - up/running
CMP.B2 24hr MQCS COMPLETED: 01/14/97 @ 6:00 pm
CMP.B2 24hr MQCS NEXT DUE : 01/15/97 @ 6:00 pm
CMP.B2 12hr MQCS COMPLETED: 01/15/97 @ 6:00 am
CMP.B2 12hr MQCS NEXT DUE : 01/15/97 @ 6:00 pm
CMP.B3 (Speedfam CMP-V) - up/running jl0796 m1
CMP.B3 24hr MQCS COMPLETED: 01/14/97 @ 3:00 pm
CMP.B3 24hr MQCS NEXT DUE : 01/15/97 @ 3:00 pm
CMP.B3 12hr MQCS COMPLETED: 01/14/97 @ 8:00 pm
CMP.B3 12hr MQCS NEXT DUE : 01/15/97 @ 8:00 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 01/15/97 @ 4:30 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 01/15/97 @ 4:30 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 01/15/97 @ 4:30 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 01/15/97 @ 4:30 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 01/15/97 @ 4:30 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 01/15/97 @ 4:30 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12K mqc wafers (2 on order)
2 boxes of 50K breakin wafers (2 on order)
Number of product lots in room:
------------------------------
* 7 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* None *
Lots/wafers processed
--------------------
* xe0834 pmd 24 wafers *
jl0851 pmd 24 wafers
jl0890 m1 24 wafers (hot lot)
xd0778 m1 24 wafers
jd0710 m3 22 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM
5 STRASBAUGH
2 PLATES F/S
|
| 88.15 | CMP PASSDOWN A SHIFT | FABSIX::J_BLAIS | A Fatal error has occurred and will Terminate You! | Wed Jan 15 1997 19:34 | 117 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/running XD0832/24 PMD
CMP.A1 24hr MQCS COMPLETED: 01/14/97 @ 6:00 pm
CMP.A1 24hr MQCS NEXT DUE : 01/15/97 @ will be running now.
CMP.A2 (Strasbaugh 6DS-SP) -up/idle
CMP.A2 24hr MQCS COMPLETED: 01/15/97 @ 4:00 am
CMP.A2 24hr MQCS NEXT DUE : 01/16/97 @ 4:00 am
CMP.B1 (Speedfam CMP-V) - up/running jl0755/23 ILD
CMP.B1 24hr MQCS COMPLETED: 01/15/97 @ 3:00 am
CMP.B1 24hr MQCS NEXT DUE : 01/16/97 @ 3:00 am
CMP.B1 12hr MQCS COMPLETED: 01/15/97 @ 3:00 am
CMP.B1 12hr MQCS NEXT DUE : 01/15/97 @ NOW
CMP.B2 (Speedfam CMP-V) - up/running Jd0814/24 ILD1
CMP.B2 24hr MQCS COMPLETED: 01/15/97 @ 4:00 pm
CMP.B2 24hr MQCS NEXT DUE : 01/16/97 @ 4:00 pm
CMP.B2 12hr MQCS COMPLETED: 01/15/97 @ 4:00 pm
CMP.B2 12hr MQCS NEXT DUE : 01/16/97 @ 4:00 am
CMP.B3 (Speedfam CMP-V) - up/idle
CMP.B3 24hr MQCS COMPLETED: 01/15/97 @ 5:00 pm
CMP.B3 24hr MQCS NEXT DUE : 01/16/97 @ 5:00 pm
CMP.B3 12hr MQCS COMPLETED: 01/15/97 @ 5:00 pm
CMP.B3 12hr MQCS NEXT DUE : 01/16/97 @ 5:00 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 01/15/97 @ 11:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 01/15/97 @ 11:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 01/15/97 @ 11:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 01/15/97 @ 11:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 01/15/97 @ 11:00 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 01/15/97 @ 11:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12K mqc wafers (2 on order)
1.2 boxes of 50K breakin wafers (2 on order)
Number of product lots in room:
------------------------------
* 4 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* None *
Lots/wafers processed
--------------------
XD0758/24 ILD2
JL0820/24 PMD
JL0849/24 PMD
JL0796/20 ILD1
JD0788/24 ILD1
JL0852/24 PMD
JL0776/24 ILD2
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM
5 STRASBAUGH
2 PLATES F/S
|
| 88.16 | PASSDOWN | FABSIX::D_CAUSE | | Thu Jan 16 1997 07:42 | 34 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/MQC RUNNING PARTICLE CHECK AFTER FILTER CHANGE
CMP.A2 (Strasbaugh 6DS-SP) -UP/MQC RUNNING PARTICLE CHECK AFTER FILTER CHANGE
CMP.B1 (Speedfam CMP-V) - UP/MQC RUNNING PARTICLE CHECK AFTER FILTER CHANGE
JD0809 READY TO RUN
CMP.B2 (Speedfam CMP-V) - DOWN/CHILLER NOT ADJUSTING JUST COMPLETED WEEKLY
PM WITH PAD AND CONDITIONER CHANGE NEEDS FULL MQC
CMP.B3 (Speedfam CMP-V) - UP/MQC RUNNING PARTICLE CHECK AFTER FILTER CHANGE
JD0735 M3 100%ING ON .A5
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:15
MQC WAFERS USED:22 WAFERS USED
MQC WAFERS AVAIL:2 BOXES
----------
|
| 88.17 | PASSDOWN | FABSIX::D_CAUSE | | Fri Jan 17 1997 07:44 | 33 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING JL0853 FINAL TOUCHUP
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING XD0582 FIRST PASS
CMP.B1 (Speedfam CMP-V) - UP/RUNNING JL0866 TOUCHUP/JD0766 NEEDS 100% & TU
CMP.B2 (Speedfam CMP-V) - UP/RUNNING YE0223 NEEDS 100% & TOUCHUP
CMP.B3 (Speedfam CMP-V) - UP/RUNNING XD0633 NEEDS 100% AND TOUCHUP/YE0227
NEEDS 100% AND TOUCH UP READ REMARK
BEFORE 100%
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:25
MQC WAFERS USED:6 WAFERS USED
MQC WAFERS AVAIL:6 WAFERS LEFT WE ORDERED 100
----------
|
| 88.18 | PASSDOWN | FABSIX::D_CAUSE | | Sat Jan 18 1997 07:45 | 32 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING JL0879 READY FOR TOUCHUP
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING XE0807 READY TO RUN
CMP.B1 (Speedfam CMP-V) - UP/RUNNING XE0553 READY FOR TU 100%ED ON .A5 M3
XD0626 READY FOR TU 100%ED ON .A5 M3
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JD0761 READY TO RUN
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JL0775 FIRST PASS LOT READ REMARK
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:30
MQC WAFERS USED:16 WAFERS USED
MQC WAFERS AVAIL:3 BOXES
----------
|
| 88.19 | passdown cmp b-shift 01/19/97 | FABSIX::M_PROVENCHER | | Sun Jan 19 1997 06:07 | 117 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 8 mqcs
BREAKIN WAFERS 39 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/mqc (failed first set for uniformity running
2nd set)
CMP.A1 24hr MQCS COMPLETED: in process
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) -up/running jd0589 pmd
CMP.A2 24hr MQCS COMPLETED: 01/18/97 @ 3:00 pm
CMP.A2 24hr MQCS NEXT DUE : 01/19/97 @ 3:00 pm
CMP.B1 (Speedfam CMP-V) - up/running jl0827 m1/
CMP.B1 24hr MQCS COMPLETED: 01/18/97 @ 11:00 am
CMP.B1 24hr MQCS NEXT DUE : 01/19/97 @ 11:00 am
CMP.B1 12hr MQCS COMPLETED: 01/18/97 @ 11:00 pm
CMP.B1 12hr MQCS NEXT DUE : 01/19/97 @ 11:00 am
CMP.B2 (Speedfam CMP-V) - up/running jl0787 m2/
CMP.B2 24hr MQCS COMPLETED: 01/18/97 @ 2:00 pm
CMP.B2 24hr MQCS NEXT DUE : 01/19/97 @ 2:00 pm
CMP.B2 12hr MQCS COMPLETED: 01/18/97 @ 2:00 am
CMP.B2 12hr MQCS NEXT DUE : 01/19/97 @ 2:00 pm
CMP.B3 (Speedfam CMP-V) - up/running xd0831 m2/jl0810 m1
CMP.B3 24hr MQCS COMPLETED: 01/14/97 @ 3:00 pm
CMP.B3 24hr MQCS NEXT DUE : 01/15/97 @ 3:00 pm
CMP.B3 12hr MQCS COMPLETED: 01/14/97 @ 8:00 pm
CMP.B3 12hr MQCS NEXT DUE : 01/15/97 @ 8:00 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 01/18/97 @ 9:00 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 01/19/97 @ 9:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 01/18/97 @ 9:00 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 01/19/97 @ 9:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 01/18/97 @ 9:00 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 01/19/97 @ 9:00 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* xe0614 m1 1.60 days *
Down Equipment:
--------------
* none *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* xe0614 m1 on hold *
Monitor status:
--------------
4 boxes of 12K mqc wafers
1 box of 50K breakin wafers
Number of product lots in room:
------------------------------
* lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* None *
Lots/wafers processed
--------------------
* jd0878 pmd 24 wafers *
jl0819 m1 24 wafers
xl0525b m1 6 wafers (hotlot)
jl0800 m2 21 wafers
jd0734 m3 23 wafers
jd0735 m3 22 wafers
jd0838 m3 11 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
17 SPEEDFAM
7 STRASBAUGH
3 PLATES F/S
|
| 88.20 | Cmp Passdown A Shift | FABSIX::J_BLAIS | A Fatal error has occurred and will Terminate You! | Sun Jan 19 1997 19:30 | 121 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 18 mqcs
BREAKIN WAFERS 00 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/idle
CMP.A1 24hr MQCS COMPLETED: 01/19/97 @ 2:30pm
CMP.A1 24hr MQCS NEXT DUE : 01/20/97 @ 2:30pm
CMP.A2 (Strasbaugh 6DS-SP) -up/running JL0871/23 PMD
CMP.A2 24hr MQCS COMPLETED: 01/19/97 @ 3:00 pm
CMP.A2 24hr MQCS NEXT DUE : 01/20/97 @ 3:00 pm
CMP.B1 (Speedfam CMP-V) - up/running JL0905/24 ILD1 *****HOT*******
CMP.B1 24hr MQCS COMPLETED: 01/19/97 @ 1:00 pm
CMP.B1 24hr MQCS NEXT DUE : 01/20/97 @ 1:00 pm
CMP.B1 12hr MQCS COMPLETED: 01/19/97 @ 11:00 am
CMP.B1 12hr MQCS NEXT DUE : 01/19/97 @ 11:00 pm
CMP.B2 (Speedfam CMP-V) - up/running JD0732/21 ILD3
CMP.B2 24hr MQCS COMPLETED: 01/19/97 @ 3:00 pm
CMP.B2 24hr MQCS NEXT DUE : 01/20/97 @ 3:00 pm
CMP.B2 12hr MQCS COMPLETED: 01/19/97 @ 4:00 pm
CMP.B2 12hr MQCS NEXT DUE : 01/20/97 @ 4:00 am
CMP.B3 (Speedfam CMP-V) - up/running XD0831/23 ILD2
CMP.B3 24hr MQCS COMPLETED: 01/19/97 @ 7:00 am
CMP.B3 24hr MQCS NEXT DUE : 01/20/97 @ 7:00 am
CMP.B3 12hr MQCS COMPLETED: 01/19/97 @ 7:00 pm
CMP.B3 12hr MQCS NEXT DUE : 01/20/97 @ 7:00 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 01/19/97 @ 9:30 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 01/19/97 @ 9:30 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 01/19/97 @ 9:30 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 01/19/97 @ 9:30 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 01/19/97 @ 9:30 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 01/19/97 @ 9:30 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* xe0614 m1 2.2 days *
Down Equipment:
--------------
* none *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* xe0614 m1 on hold *
Monitor status:
--------------
4 boxes of 12K mqc wafers
1 box of 50K breakin wafers
Number of product lots in room:
------------------------------
6 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* None *
Lots/wafers processed
--------------------
JL0735/22 ILD3
JD0787/24 ILD2
JD0739/8 ILD2
JL0810/21 ILD1
JL0827/24 ILD1
JL0840/24 ILD1
JL0821/24 ILD1
JL0798/24 ILD2
JD0859/23 PMD
JL0799/24 ILD2
# of carriers for strasbaugh/speedfam:
--------------------------------------
17 SPEEDFAM
5 STRASBAUGH
3 PLATES F/S
|
| 88.21 | PASSDOWN CMP B-SHIFT 01/20/97 | FABSIX::M_PROVENCHER | | Mon Jan 20 1997 07:03 | 117 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 6 mqcs
BREAKIN WAFERS 27 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/idle
CMP.A1 24hr MQCS COMPLETED: 01/19/97 @ 2:00 pm
CMP.A1 24hr MQCS NEXT DUE : 01/20/97 @ 2:00 pm
CMP.A2 (Strasbaugh 6DS-SP) -up/idle
CMP.A2 24hr MQCS COMPLETED: 01/19/97 @ 2:00 pm
CMP.A2 24hr MQCS NEXT DUE : 01/20/97 @ 2:00 pm
CMP.B1 (Speedfam CMP-V) - dn/down_unsched due to infranor problem.
down since @ 2:30 am
CMP.B1 24hr MQCS COMPLETED: 01/19/97 @ 1:00 pm
CMP.B1 24hr MQCS NEXT DUE : 01/20/97 @ 1:00 pm
CMP.B1 12hr MQCS COMPLETED: 01/19/97 @ 11:00 pm
CMP.B1 12hr MQCS NEXT DUE : 01/20/97 @ 11:00 am
CMP.B2 (Speedfam CMP-V) - up/running jl0801 m2 (transfered from b1)
/jl0841 m1
CMP.B2 24hr MQCS COMPLETED: 01/19/97 @ 4:00 pm
CMP.B2 24hr MQCS NEXT DUE : 01/20/97 @ 4:00 pm
CMP.B2 12hr MQCS COMPLETED: 01/20/97 @ 7:00 am
CMP.B2 12hr MQCS NEXT DUE : 01/20/97 @ 7:00 pm
CMP.B3 (Speedfam CMP-V) - up/running jl0828 m1/jl0829 m1 (both at touchup)
CMP.B3 24hr MQCS COMPLETED: 01/20/97 @ to be run after touch up
CMP.B3 24hr MQCS NEXT DUE : 01/21/97 @ n/a
CMP.B3 12hr MQCS COMPLETED: 01/20/97 @ 7:30 am
CMP.B3 12hr MQCS NEXT DUE : 01/20/97 @ 7:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 01/19/97 @ 9:00 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 01/20/97 @ 9:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 01/19/97 @ 9:00 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 01/20/97 @ 9:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 01/19/97 @ 9:00 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 01/20/97 @ 9:00 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* xe0614 m1 2.66 days *
Down Equipment:
--------------
* cmp.b1 down to maint *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* xe0614 m1 on hold *
Monitor status:
--------------
3 boxes of 12K mqc wafers
� box of 50K breakin wafers (more on order, 2 lots to be depped on 1st shift)
Number of product lots in room:
------------------------------
* 7 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* None *
Lots/wafers processed
--------------------
* jl0871 pmd 23 wafers *
jl0905 m1 24 wafers (hot lot)
xd0831 m2 23 wafers
jl0723 m3 21 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
17 SPEEDFAM
5 STRASBAUGH
3 PLATES F/S
* Lot jl0777 is here as a rework. 6 wafers need to be polished to a range of
14400 to 16600 ang. wafer to be worked on were not specified. b-shift pss will
talk to kyle w. about this. any questions, please see kyle w.
|
| 88.22 | CMP Passdown A Shift | FABSIX::J_BLAIS | A Fatal error has occurred and will Terminate You! | Mon Jan 20 1997 19:31 | 127 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 25 mqcs
BREAKIN WAFERS 125 (Mostly CMP.B4) misc
(For EE Evail.)
CMP.A1 (Strasbaugh 6DS-SP) -up/mqc
CMP.A1 24hr MQCS COMPLETED: 01/19/97 @ running breakins after pad change
then MQC
CMP.A1 24hr MQCS NEXT DUE : 01/20/97 @ to be determined.
CMP.A2 (Strasbaugh 6DS-SP) -up/mqc
CMP.A2 24hr MQCS COMPLETED: 01/19/97 Failed first set running more breakins
and will try again.
CMP.A2 24hr MQCS NEXT DUE : 01/20/97 to be determined.
CMP.B1 (Speedfam CMP-V)
CMP.B1 24hr MQCS COMPLETED: 01/20/97 @ 4:00 pm
CMP.B1 24hr MQCS NEXT DUE : 01/21/97 @ 4:00 pm
CMP.B1 12hr MQCS COMPLETED: 01/20/97 @ 7:30 pm
CMP.B1 12hr MQCS NEXT DUE : 01/21/97 @ 7:30 am
CMP.B2 (Speedfam CMP-V) - up/running XD0760/24 ILD2
CMP.B2 24hr MQCS COMPLETED: 01/20/97 @ 5:00 pm
CMP.B2 24hr MQCS NEXT DUE : 01/21/97 @ 5:00 pm
CMP.B2 12hr MQCS COMPLETED: 01/20/97 @ 7:30 pm
CMP.B2 12hr MQCS NEXT DUE : 01/21/97 @ 7:30 am
CMP.B3 (Speedfam CMP-V) - up/running YD0214/24 ILD2
CMP.B3 24hr MQCS COMPLETED: 01/20/97 @ 10:00am
CMP.B3 24hr MQCS NEXT DUE : 01/21/97 @ 10:00am
CMP.B3 12hr MQCS COMPLETED: 01/20/97 @ 7:30 pm
CMP.B3 12hr MQCS NEXT DUE : 01/21/97 @ 7:30 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 01/20/97 @ 8:00 pm **** NOW A 24 HR MQC ***
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 01/21/97 @ 8:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 01/20/97 @ 8:00 pm *** NOW A 24 HR MQC ***
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 01/21/97 @ 8:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 01/20/97 @ 8:00 pm **** NOW A 24 HR MQC ***
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 01/21/97 @ 8:00 pm
Hot lots in area:
__________________
JL0956/6 ILD1
Xe0902/11 PMD
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
Down Equipment:
--------------
Open annotations:
lot#/tool/ooc#
----------------
None
Scrap lots:
----------
* none *
Hold Lots:
---------
Eng ran lot and put back on hold XE0614/20 ILD1
Monitor status:
--------------
2 boxes of 12K mqc wafers
2 box of 50K breakin wafers (more on order,)
Number of product lots in room:
------------------------------
* 5 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* None *
Notes
--------------------
1. Only Thickness.a4 is set up for DC1024
2. Please read message concerning 1 pass lots...
3. Scrubber are now on a frequency of 1/ 24 Hours starting tonight at shift
change.
Lots/wafers processed
--------------------
JD0829/24 ILD1
JD0732/21 ILD3
JL0801/24 ILD2
JL0828/23 ILD1
JL0841/24 ILD1
JL0794/24 ILD2
# of carriers for strasbaugh/speedfam:
--------------------------------------
17 SPEEDFAM
5 STRASBAUGH
3 PLATES F/S
|
| 88.23 | passdown cmp b-shift 01/21/97 | FABSIX::M_PROVENCHER | | Tue Jan 21 1997 05:44 | 115 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 9 mqcs
BREAKIN WAFERS 37 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/running jl0584 pmd (tool was down until 11 pm)
CMP.A1 24hr MQCS COMPLETED: 01/20/97 @ 11:00 pm
CMP.A1 24hr MQCS NEXT DUE : 01/21/97 @ 11:00 pm
CMP.A2 (Strasbaugh 6DS-SP) -up/mqc in process 2 sets of mqc's failed, pad was
changed breakins and mqc's now in process. tool
was down all night
CMP.A2 24hr MQCS COMPLETED: in process
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - up/running xe0628 (touchup)
CMP.B1 24hr MQCS COMPLETED: 01/20/97 @ 4:00 pm
CMP.B1 24hr MQCS NEXT DUE : 01/21/97 @ 4:00 pm
CMP.B1 12hr MQCS COMPLETED: 01/21/97 @ 7:30 am
CMP.B1 12hr MQCS NEXT DUE : 01/21/97 @ 7:30 pm
CMP.B2 (Speedfam CMP-V) - up/running jd0816 m1/jd0817 m1
CMP.B2 24hr MQCS COMPLETED: 01/20/97 @ 5:00 pm
CMP.B2 24hr MQCS NEXT DUE : 01/21/97 @ 5:00 pm
CMP.B2 12hr MQCS COMPLETED: 01/21/97 @ 7:30 am
CMP.B2 12hr MQCS NEXT DUE : 01/21/97 @ 7:30 pm
CMP.B3 (Speedfam CMP-V) - up/running xd0607 m3 (hot lot)/jl0826 m1
CMP.B3 24hr MQCS COMPLETED: 01/20/97 @ 10:00 am
CMP.B3 24hr MQCS NEXT DUE : 01/21/97 @ 10:00 am
CMP.B3 12hr MQCS COMPLETED: 01/21/97 @ 7:30 am
CMP.B3 12hr MQCS NEXT DUE : 01/21/97 @ 7:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 01/20/97 @ 9:00 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 01/21/97 @ 9:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 01/20/97 @ 9:00 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 01/21/97 @ 9:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 01/20/97 @ 9:00 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 01/21/97 @ 9:00 am
Hot/B lots in area:
__________________
* xd0607 m3 (b3) *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* xe0614 m1 2.66 days *
Down Equipment:
--------------
* cmp.a2 down mqc *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* xe0614 m1 on hold *
Monitor status:
--------------
3 boxes of 12K mqc wafers
1 box of 50K breakin wafers (more on order)
Number of product lots in room:
------------------------------
* 14 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* None *
Lots/wafers processed
--------------------
* xe0902 pmd 11 wafers (hot lot) *
jl0952 m1 6 wafers (hot lot)
jl0845 m1 22 wafers
jd0791 m2 22 wafers
xd0760 m2 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
17 SPEEDFAM
2 STRASBAUGH
3 PLATES F/S
|
| 88.24 | cmp passdown a shift | FABSIX::J_BLAIS | A Fatal error has occurred and will Terminate You! | Tue Jan 21 1997 20:09 | 119 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 19 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/idle
CMP.A1 24hr MQCS COMPLETED: 01/20/97 @ 8:00 pm
CMP.A1 24hr MQCS NEXT DUE : 01/21/97 @ 8:00 pm
CMP.A2 (Strasbaugh 6DS-SP) -up/running JL0884 PMD
CMP.A2 24hr MQCS COMPLETED: 01/21/97 @ 3:00 pm
CMP.A2 24hr MQCS NEXT DUE : 01/22/97 @ 3:00 pm
CMP.B1 (Speedfam CMP-V) - up/idle
CMP.B1 24hr MQCS COMPLETED: 01/21/97 @ 4:30 pm
CMP.B1 24hr MQCS NEXT DUE : 01/22/97 @ 4:30 pm
CMP.B1 12hr MQCS COMPLETED: 01/21/97 @ 7:30 am
CMP.B1 12hr MQCS NEXT DUE : now
CMP.B2 (Speedfam CMP-V) - up/idle
CMP.B2 24hr MQCS COMPLETED: 01/21/97 @ 12:20 pm
CMP.B2 24hr MQCS NEXT DUE : 01/22/97 @ 12:20 pm
CMP.B2 12hr MQCS COMPLETED: 01/21/97 @ 7:30 am
CMP.B2 12hr MQCS NEXT DUE : now
CMP.B3 (Speedfam CMP-V) - Down/
CMP.B3 24hr MQCS COMPLETED: 01/21/97 @ 1:00 pm
CMP.B3 24hr MQCS NEXT DUE : 01/22/97 @ 1:00 pm
CMP.B3 12hr MQCS COMPLETED: 01/21/97 @ 7:30 am
CMP.B3 12hr MQCS NEXT DUE : 01/21/97 @ 7:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 01/20/97 @ 9:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 01/21/97 @ 9:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 01/20/97 @ 9:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 01/21/97 @ 9:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 01/20/97 @ 9:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 01/21/97 @ 9:00 pm
Hot lots in area:
__________________
xd0607 m3 (b3) *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
Down Equipment:
--------------
cmp.b3 down keep getting error message saying wafer loss detected but there
is no wafer loss ee is working on it.
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
Monitor status:
--------------
2 boxes of 12K mqc wafers
2 box of 50K breakin wafers
Number of product lots in room:
------------------------------
* 11 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* None *
Lots/wafers processed
--------------------
JL0791/12 ILD2
JL0584/24 PMD
XE0628/22 ILD3
XL0525B/6 ILD2
XE0614/20 ILD1
JD0817/24 ILD1
JL0826/20 ILD1
JD0855/24 PMD
JD0816/23 ILD1
# of carriers for strasbaugh/speedfam:
--------------------------------------
17 SPEEDFAM
2 STRASBAUGH
3 PLATES F/S
|
| 88.25 | PASSDOWN | FABSIX::D_CAUSE | | Wed Jan 22 1997 07:39 | 32 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING JL0886 READY TO RUN
CMP.A2 (Strasbaugh 6DS-SP) -DOWN/VERIFY-U NEEDS FULL MQC AFTER CRASH
CMP.B1 (Speedfam CMP-V) - UP/RUNNING JL0842 READY FOR TU 100% ON .A5
JL0852 READY FOR TU 100% ON .A5
CMP.B2 (Speedfam CMP-V) - UP/VERIFY-S RUNNING PARTICLE CHECK AFTER PM
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JL0793 100% ON .A4
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:35
MQC WAFERS USED:15 WAFERS USED
MQC WAFERS AVAIL:2 BOXES
----------
|
| 88.26 | PASSDOWN | FABSIX::D_CAUSE | | Thu Jan 23 1997 07:50 | 32 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING JL0874 100% ON .A4 NEEDS TU
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING JD0815 NEEDS FINAL
JL0885 FIRST PASS
CMP.B1 (Speedfam CMP-V) - UP/IDLE
CMP.B2 (Speedfam CMP-V) - UP/RUNNING XD0758 FIRST 400 SECS
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JL0851 FIRST PASS
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:30
MQC WAFERS USED:3 WAFERS USED
MQC WAFERS AVAIL:1.5 BOXES
----------
|
| 88.27 | passdown | FABSIX::D_CAUSE | | Fri Jan 24 1997 07:48 | 35 |
| D SHIFT PASSDOWN
********* PLEASE ADD K_WANG AND R_THOMPSON TO YOUR CMP DIST LIST************
CMP.A1 (Strasbaugh 6DS-SP) -DOWN/FAILED 24HR MQC PAD BEING CHANGED
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING JL0867 100% ON .A4 NEEDS TU
CMP.B1 (Speedfam CMP-V) - UP/RUNNING XE0600 FIRST PASS
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JD0761 100%ED ON .A5 READY FOR TU
JL0820 IN SCRUB.A2 NEEDS 100% AND TU
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JL0848 100%ING ON .A5 FOR TU
JL0849 IN SCRUB.A3 WILL NEED 100% AND TU
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:30
MQC WAFERS USED:17 WAFERS USED
MQC WAFERS AVAIL: 3 BOXES
----------
|
| 88.28 | passdown cmp b-shift 01/26/97 | FABSIX::M_PROVENCHER | | Sun Jan 26 1997 06:21 | 116 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 8 mqcs
BREAKIN WAFERS 35 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/running jl0907 pmd/xe0863 pmd
CMP.A1 24hr MQCS COMPLETED: 01/25/97 @ 9:00 am
CMP.A1 24hr MQCS NEXT DUE : 01/26/97 @ 9:00 am
CMP.A2 (Strasbaugh 6DS-SP) -up/running xm0803 pmd/xd0864 pmd
CMP.A2 24hr MQCS COMPLETED: 01/25/97 @ 11:00 pm
CMP.A2 24hr MQCS NEXT DUE : 01/26/97 @ 11:00 pm
CMP.B1 (Speedfam CMP-V) - up/running jd0808 m2
CMP.B1 24hr MQCS COMPLETED: 01/25/97 @ 10:00 am
CMP.B1 24hr MQCS NEXT DUE : 01/26/97 @ 10:00 am
CMP.B1 12hr MQCS COMPLETED: 01/25/97 @ 9:00 pm
CMP.B1 12hr MQCS NEXT DUE : 01/26/97 @ 9:00 am
CMP.B2 (Speedfam CMP-V) - up/running jd0808 m2/ jd0787 m3
CMP.B2 24hr MQCS COMPLETED: 01/25/97 @ 11:00 am
CMP.B2 24hr MQCS NEXT DUE : 01/26/97 @ 11:00 am
CMP.B2 12hr MQCS COMPLETED: 01/25/97 @ 11:00 pm
CMP.B2 12hr MQCS NEXT DUE : 01/26/97 @ 11:00 am
CMP.B3 (Speedfam CMP-V) - up/mqc (24 hr mqc's are in process)
CMP.B3 24hr MQCS COMPLETED: in process
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: 01/25/97 @ 9:00 pm
CMP.B3 12hr MQCS NEXT DUE : 01/26/97 @ 9:00 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 01/25/97 @ 9:00 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 01/26/97 @ 9:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 01/25/97 @ 9:00 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 01/26/97 @ 9:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 01/25/97 @ 9:00 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 01/26/97 @ 9:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.b3 24 hr mqc's *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* jd0789 (#15) 1 wafer *
jl0824 (#14) 1 wafer
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12K mqc wafers
1 box of 50K breakin wafers (more on order)
Number of product lots in room:
------------------------------
*9 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see t.d.c.o. located between cmp.b1, and cmp.b2 *
Lots/wafers processed
--------------------
* xd0865 pmd 24 wafers *
jd0917 pmd 24 wafers hotlot
jl0853 m1 24 wafers
xd0832 m1 24 wafers
xd0869 m1 23 wafers
jl0824 m2 23 wafers
xe0756 m2 19 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
8 STRASBAUGH
2 PLATES F/S
|
| 88.29 | CMP Passdown A shift | FABSIX::J_BLAIS | A Fatal error has occurred and will Terminate You! | Sun Jan 26 1997 19:27 | 100 |
| CMP PASSDOWN
monitor wafer usage
-------------------
Type of monitor Number used Number Available
--------------- ----------- ----------------
MQC-12K MONS 19 96 (4 boxes)
BREAKIN WAFERS 30 120 (5 Boxes)
CMP.A1 (Strasbaugh 6DS-SP) -verify/MQC
CMP.A1 24hr MQCS COMPLETED: running now
CMP.A1 24hr MQCS NEXT DUE :
CMP.A2 (Strasbaugh 6DS-SP) -verify/MQC After crash.
CMP.A2 24hr MQCS COMPLETED: running now
CMP.A2 24hr MQCS NEXT DUE :
CMP.B1 (Speedfam CMP-V) - up/running
CMP.B1 24hr MQCS COMPLETED: 01/26/97 @ 10:00 am
CMP.B1 24hr MQCS NEXT DUE : 01/27/97 @ 10:00 am
CMP.B1 12hr MQCS COMPLETED: 01/26/97 @ 9:00 am
CMP.B1 12hr MQCS NEXT DUE : 01/26/97 @ 9:00 pm
CMP.B2 (Speedfam CMP-V) - up/running JD0808/24 ILD2, JD0787/24 ILD3
CMP.B2 24hr MQCS COMPLETED: 01/26/97 @ 3:00 pm
CMP.B2 24hr MQCS NEXT DUE : 01/27/97 @ 3:00 pm
CMP.B2 12hr MQCS COMPLETED: 01/26/97 @ 9:30 am
CMP.B2 12hr MQCS NEXT DUE : 01/26/97 @ 9:30 pm
CMP.B3 (Speedfam CMP-V) - up/mqc running JL0878/23 ILD1, JD0859/23 ILD1
CMP.B3 24hr MQCS COMPLETED: 01/26/97 @ 7:30 am
CMP.B3 24hr MQCS NEXT DUE : 01/27/97 @ 7:30 am
CMP.B3 12hr MQCS COMPLETED: 01/26/97 @ 9:00 am
CMP.B3 12hr MQCS NEXT DUE : 01/26/97 @ 9:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 01/25/97 @ 9:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 01/26/97 @ 9:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 01/25/97 @ 9:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 01/26/97 @ 9:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 01/25/97 @ 9:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 01/26/97 @ 9:00 pm
Hot/B lots in area: Hot lots coming to area: Static Lots in area:
__________________ ----------------------- -------------------
none none none
Open annotations:
Down Equipment lot#/tool/ooc# Scrap lots: Hold Lots:
-------------- ----------------- ---------- ---------
cmp.a1, cmp.a2 None None None
Number of product lots in room:
------------------------------
9 lots
New specs/revs posted:
---------------------
* please see t.d.c.o. located between cmp.b1, and cmp.b2 *
Lots/wafers processed
--------------------
JL0873/24 ILD
JL0912/23 PMD
XD0864/24 PMD
XE0863/24 PMD
JL0909/24 PMD
JL0881/24 PMD
XD0865/24 PMD
XM0803/23 PMD
JL0907/24 PMD
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
6 STRASBAUGH
2 PLATES F/S
|
| 88.30 | passdown cmp b-shift 01/27/97 | FABSIX::M_PROVENCHER | | Mon Jan 27 1997 05:38 | 122 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 8 mqcs
BREAKIN WAFERS 39 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/running jl0911 pmd
CMP.A1 24hr MQCS COMPLETED: 01/26/97 @ 8:30 am
CMP.A1 24hr MQCS NEXT DUE : 01/27/97 @ 8:30 am
CMP.A2 (Strasbaugh 6DS-SP) -dn/verify (down at 4:00 am due to crash) pad and
CMP.A2 24hr MQCS COMPLETED: 01/26/97 @ 9:00 pm
CMP.A2 24hr MQCS NEXT DUE : 01/27/97 @ 9:00 pm
CMP.B1 (Speedfam CMP-V) - up/running jd0814 m2/jl0823 m1
CMP.B1 24hr MQCS COMPLETED: 01/25/97 @ 10:00 am
CMP.B1 24hr MQCS NEXT DUE : 01/26/97 @ 10:00 am
CMP.B1 12hr MQCS COMPLETED: 01/26/97 @ 9:00 pm
CMP.B1 12hr MQCS NEXT DUE : 01/27/97 @ 9:00 am
pad step height checked 9:00 pm (.087),count(395)
and at 3:00 am (.085),count (475)
CMP.B2 (Speedfam CMP-V) - up/running xe0609 m3/ye0230 m1
CMP.B2 24hr MQCS COMPLETED: 01/25/97 @ 11:00 am
CMP.B2 24hr MQCS NEXT DUE : 01/26/97 @ 11:00 am
CMP.B2 12hr MQCS COMPLETED: 01/26/97 @ 9:00 pm
CMP.B2 12hr MQCS NEXT DUE : 01/27/97 @ 9:00 am
pad step height checked 9:00 pm (.095),count(160)
and at 3:00 am (.093),count(265)
CMP.B3 (Speedfam CMP-V) - up/mqc (24 hr mqc's are in process)
CMP.B3 24hr MQCS COMPLETED: 01/26/97 @ 7:30 am
CMP.B3 24hr MQCS NEXT DUE : 01/27/97 @ 7:30 am
CMP.B3 12hr MQCS COMPLETED: 01/26/97 @ 11:30 pm
CMP.B3 12hr MQCS NEXT DUE : 01/27/97 @ 11:30 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 01/26/97 @ 10:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 01/27/97 @ 10:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 01/26/97 @ 10:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 01/27/97 @ 10:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 01/26/97 @ 10:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 01/27/97 @ 10:00 pm
Hot/B lots in area:
__________________
* xe0902 m2 (b1) *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.b3 24 hr mqc's *
cmp.a2 crash
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* xd0585 pmd 2 wafers (from crash on a2)
Hold Lots:
---------
* none *
Monitor status:
--------------
3� boxes of 12K mqc wafers
2 boxes of 50K breakin wafers (more on order)
Number of product lots in room:
------------------------------
*10 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see t.d.c.o. located between cmp.b1, and cmp.b2 *
Lots/wafers processed
--------------------
* xd0585 pmd 22 wafers *
jl0880 pmd 24 wafers
jd0859 m1 23 wafers
jl0878 m1 23 wafers
jl0649a m1 6 wafers
jd0808 m2 24 wafers
xe0902 m2 9 wafers
jd0787 m3 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
3 STRASBAUGH
2 PLATES F/S
|
| 88.31 | CMP Passdown A Shift | FABSIX::J_BLAIS | A Fatal error has occurred and will Terminate You! | Mon Jan 27 1997 19:30 | 100 |
| CMP PASSDOWN
monitor wafer usage
-------------------
Type of monitor Number used Number Available
--------------- ----------- ----------------
MQC-12K MONS 17 76 (3.2 boxes)
BREAKIN WAFERS 20 120 (5 Boxes)
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24hr MQCS COMPLETED: 01/26/97 @ 8:30PM
CMP.A1 24hr MQCS NEXT DUE : 01/27/97 @ 8:30PM
CMP.A2 (Strasbaugh 6DS-SP) - up/idle
CMP.A2 24hr MQCS COMPLETED: 01/27/97 @ 7:00 PM
CMP.A2 24hr MQCS NEXT DUE : 01/28/97 @ 7:00 PM
CMP.B1 (Speedfam CMP-V) - up/running JD0817/24 ILD2, JL0810/21 ILD2
CMP.B1 24hr MQCS COMPLETED: 01/27/97 @ 1:00 PM
CMP.B1 24hr MQCS NEXT DUE : 01/28/97 @ 1:00 PM
CMP.B1 12hr MQCS COMPLETED: 01/27/97 @ 9:00 am
CMP.B1 12hr MQCS NEXT DUE : 01/27/97 @ 9:00 pm
CMP.B2 (Speedfam CMP-V) - up/running XD0831/21 ILD3, JD0855/24 ILD2 HOT
CMP.B2 24hr MQCS COMPLETED: 01/27/97 @ 5:00 pm
CMP.B2 24hr MQCS NEXT DUE : 01/28/97 @ 5:00 pm
CMP.B2 12hr MQCS COMPLETED: 01/27/97 @ 9:30 am
CMP.B2 12hr MQCS NEXT DUE : 01/27/97 @ 9:30 pm
CMP.B3 (Speedfam CMP-V) - up/Running XM0630/24 ILD3?2
CMP.B3 24hr MQCS COMPLETED: 01/27/97 @ 8:30 am
CMP.B3 24hr MQCS NEXT DUE : 01/28/97 @ 8:30 am
CMP.B3 12hr MQCS COMPLETED: 01/27/97 @ 3:00 PM
CMP.B3 12hr MQCS NEXT DUE : 01/28/97 @ 3:00 AM
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 01/26/97 @ 10:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 01/27/97 @ 10:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 01/26/97 @ 10:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 01/27/97 @ 10:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 01/26/97 @ 10:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 01/27/97 @ 10:00 pm
Hot/B lots in area: Hot lots coming to area: Static Lots in area:
__________________ ----------------------- -------------------
none JD0855, JL0899 none
Open annotations:
Down Equipment lot#/tool/ooc# Scrap lots: Hold Lots:
-------------- ----------------- ---------- ---------
None None None None
Number of product lots in room:
------------------------------
8 lots
New specs/revs posted:
---------------------
* please see t.d.c.o. located between cmp.b1, and cmp.b2 *
Lots/wafers processed
--------------------
JL0880/24 PMD
XE0902/9 ILD2 HOT
YE0230/24 ILD1
JD0813/22 ILD2
JL0795/24 ILD2
JL0911/24 PMD
JD0814/23 ILD2
XE0609/21 ILD3
JL0819/24 ILD2
JL0924/24 PMD
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
3 STRASBAUGH
2 PLATES F/S
|
| 88.32 | passdown cmp b-shift 01/28/97 | FABSIX::M_PROVENCHER | | Tue Jan 28 1997 05:48 | 121 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 mqcs
BREAKIN WAFERS 59 misc
CMP.A1 (Strasbaugh 6DS-SP) -dn/unsched dn failed 2 sets of mqc's eeg to change
pad. breakins and new mqc's are in process tool
was down all night.
CMP.A1 24hr MQCS COMPLETED: in process
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) -up running xd0893 pmd/jl0922 pmd
CMP.A2 24hr MQCS COMPLETED: 01/27/97 @ 7:00 pm
CMP.A2 24hr MQCS NEXT DUE : 01/28/97 @ 7:00 pm
CMP.B1 (Speedfam CMP-V) - up/running jl0866 m1 100%ing before touchups/
jl0760 m3 100%ing before touchups
CMP.B1 24hr MQCS COMPLETED: 01/27/97 @ 1:00 pm
CMP.B1 24hr MQCS NEXT DUE : 01/28/97 @ 1:00 pm
CMP.B1 12hr MQCS COMPLETED: 01/27/97 @ 9:00 pm
CMP.B1 12hr MQCS NEXT DUE : 01/28/97 @ 9:00 am
pad step height checked 9:00 pm (.080),count(675)
and at 5:00 am (.073),count (840)
CMP.B2 (Speedfam CMP-V) - up/running xd0831 m3/
CMP.B2 24hr MQCS COMPLETED: 01/27/97 @ 5:00 pm
CMP.B2 24hr MQCS NEXT DUE : 01/28/97 @ 5:00 pm
CMP.B2 12hr MQCS COMPLETED: 01/27/97 @ 9:00 pm
CMP.B2 12hr MQCS NEXT DUE : 01/28/97 @ 9:00 am
pad step height checked 9:00 pm (.084),count(529)
and at 4:00 am (.081),count(659)
CMP.B3 (Speedfam CMP-V) - up/running xm0630 m3 at touchup/
jl0899 m1 hotlot at touchup
CMP.B3 24hr MQCS COMPLETED: 01/27/97 @ 8:30 am
CMP.B3 24hr MQCS NEXT DUE : 01/28/97 @ 8:30 am
CMP.B3 12hr MQCS COMPLETED: 01/28/97 @ 3:30 am
CMP.B3 12hr MQCS NEXT DUE : 01/28/97 @ 3:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 01/27/97 @ 11:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 01/28/97 @ 11:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 01/27/97 @ 11:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 01/28/97 @ 11:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 01/27/97 @ 11:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 01/28/97 @ 11:00 pm
Hot/B lots in area:
__________________
* jl0899 m1 (b3) *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* Thickness.a4 (no vacuum on robot finger)
cmp.a1 (failed mqc's)
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* xe0579 (hold at op# 1981 per M_Broomfield) *
Monitor status:
--------------
3 boxes of 12K mqc wafers
2 boxes of 50K breakin wafers (more on order)
Number of product lots in room:
------------------------------
*17 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see t.d.c.o. located between cmp.b1, and cmp.b2 *
Lots/wafers processed
--------------------
* jd0817 m2 24 wafers *
jd0855 m2 24 wafers (hotlot)
xm0630 m3 24 wafers
xd0831 m3 21 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
3 STRASBAUGH
2 PLATES F/S
|
| 88.33 | CMP Passdown A Shift. | FABSIX::J_BLAIS | A Fatal error has occurred and will Terminate You! | Tue Jan 28 1997 19:37 | 103 |
| CMP PASSDOWN
monitor wafer usage
-------------------
Type of monitor Number used Number Available
--------------- ----------- ----------------
MQC-12K MONS 17 48 (2 boxes)
BREAKIN WAFERS 25 120 (5 Boxes)
CMP.A1 (Strasbaugh 6DS-SP) - up/running XD0892/24 PMD, JL0904/24 PMD
CMP.A1 24hr MQCS COMPLETED: 01/28/97 @ 10:00am
CMP.A1 24hr MQCS NEXT DUE : 01/29/97 @ 10:00pm
CMP.A2 (Strasbaugh 6DS-SP) - DOWN for a pad change after eng. experiment.
CMP.A2 24hr MQCS COMPLETED: mqc after pad change.
CMP.A2 24hr MQCS NEXT DUE :
CMP.B1 (Speedfam CMP-V) - up/running JD0860/24 ILD1, Jd0917/24 ILD1 HOT
CMP.B1 24hr MQCS COMPLETED: 01/28/97 @ 3:00 PM
CMP.B1 24hr MQCS NEXT DUE : 01/29/97 @ 3:00 PM
CMP.B1 12hr MQCS COMPLETED: 01/28/97 @ 8:15 am
CMP.B1 12hr MQCS NEXT DUE : 01/28/97 @ 8:15 pm
CMP.B2 (Speedfam CMP-V) - up/MQC running JD0785/24 ILD3
CMP.B2 24hr MQCS COMPLETED: running now
CMP.B2 24hr MQCS NEXT DUE :
CMP.B2 12hr MQCS COMPLETED: 01/28/97 @ 5:00 PM
CMP.B2 12hr MQCS NEXT DUE : 01/29/97 @ 5:00 AM
CMP.B3 (Speedfam CMP-V) - up/Running XD0781/22 ILD3
CMP.B3 24hr MQCS COMPLETED: 01/28/97 @ 4:45 PM
CMP.B3 24hr MQCS NEXT DUE : 01/29/97 @ 4:45 PM
CMP.B3 12hr MQCS COMPLETED: 01/28/97 @ 4:00 PM
CMP.B3 12hr MQCS NEXT DUE : 01/29/97 @ 4:00 AM
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 01/27/97 @ 11:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 01/28/97 @ 11:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 01/27/97 @ 11:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 01/28/97 @ 11:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 01/27/97 @ 11:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 01/28/97 @ 11:00 pm
Hot/B lots in area: Hot lots coming to area: Static Lots in area:
__________________ ----------------------- -------------------
none JD0917, JL0925 none
Open annotations:
Down Equipment lot#/tool/ooc# Scrap lots: Hold Lots:
-------------- ----------------- ---------- ---------
cmp.a2 pad change None None None
Number of product lots in room:
------------------------------
12 lots
New specs/revs posted:
---------------------
* please see t.d.c.o. located between cmp.b1, and cmp.b2 *
Lots/wafers processed
--------------------
JL0899/24 ILD1 HOT
JD0786/24 ILD3
JL0875/23 ILD1
JL0925/23 PMD HOT
XD0893/24 PMD
XD0896/24 PMD
JL0922/24 PMD
JD0897/24 PMD
XD0760/24 ILD3
JL0866/24 ILD1
JL0821/24 ILD2
JL0822/24 ILD2 ?? Should be out the door at shift's end.
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
3 STRASBAUGH
2 PLATES F/S
|
| 88.34 | passdown cmp b-shift 01/29/97 | FABSIX::M_PROVENCHER | | Wed Jan 29 1997 06:03 | 121 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 5 mqcs
BREAKIN WAFERS 38 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/running jl0927 pmd
CMP.A1 24hr MQCS COMPLETED: 01/28/97 @ 10:00 am
CMP.A1 24hr MQCS NEXT DUE : 01/29/97 @ 10:00 am
CMP.A2 (Strasbaugh 6DS-SP) -up/idle
CMP.A2 24hr MQCS COMPLETED: 01/29/97 @ 3:30 am
CMP.A2 24hr MQCS NEXT DUE : 01/30/97 @ 3:30 am
CMP.B1 (Speedfam CMP-V) - up/running jl0845 ild2
CMP.B1 24hr MQCS COMPLETED: 01/28/97 @ 3:00 pm
CMP.B1 24hr MQCS NEXT DUE : 01/29/97 @ 3:00 pm
CMP.B1 12hr MQCS COMPLETED: 01/28/97 @ 9:00 pm
CMP.B1 12hr MQCS NEXT DUE : 01/29/97 @ 9:00 am
pad step height checked 9:00 pm (.068),count(1071)
and at 3:00 am (.066),count (1141)
CMP.B2 (Speedfam CMP-V) - up/running jl0887 m1/jl0886 m1
CMP.B2 24hr MQCS COMPLETED: 01/28/97 @ 9:00 pm
CMP.B2 24hr MQCS NEXT DUE : 01/29/97 @ 9:00 pm
CMP.B2 12hr MQCS COMPLETED: 01/29/97 @ 5:00 am
CMP.B2 12hr MQCS NEXT DUE : 01/29/97 @ 5:00 pm
pad step height checked 9:00 pm (.076),count(729)
and at 3:00 am (.069),count(814)
CMP.B3 (Speedfam CMP-V) - up/running jl0884 m1/
CMP.B3 24hr MQCS COMPLETED: 01/28/97 @ 5:00 pm
CMP.B3 24hr MQCS NEXT DUE : 01/29/97 @ 5:00 pm
CMP.B3 12hr MQCS COMPLETED: 01/29/97 @ 3:00 am
CMP.B3 12hr MQCS NEXT DUE : 01/29/97 @ 3:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 01/28/97 @ 11:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 01/29/97 @ 11:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 01/28/97 @ 11:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 01/29/97 @ 11:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 01/28/97 @ 11:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 01/29/97 @ 11:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* xe0579 m1 1.35 days (on hold for eng) *
Down Equipment:
--------------
* none *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* jl0822 m2 1 wafer *
Hold Lots:
---------
* xe0579 (hold at op# 1981 per M_Broomfield) *
Monitor status:
--------------
2 boxes of 12K mqc wafers
2 boxes of 50K breakin wafers (more on order)
Number of product lots in room:
------------------------------
*9 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* please see t.d.c.o. located between cmp.b1, and cmp.b2 *
Lots/wafers processed
--------------------
* jl0904 pmd 24 wafers *
xd0892 pmd 24 wafers
jd0917 m1 24 wafers (hotlot)
jd0860 m1 24 wafers
jl0837a m1 6 wafers
jl0871 m1 23 wafers
jl0822 m2 23 wafers
jl0840 m2 24 wafers
jd0785 m3 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
3 STRASBAUGH
2 PLATES F/S
|
| 88.35 | cmp passdown a shift | FABSIX::J_BLAIS | A Fatal error has occurred and will Terminate You! | Wed Jan 29 1997 19:45 | 101 |
| CMP PASSDOWN
monitor wafer usage
-------------------
Type of monitor Number used Number Available
--------------- ----------- ----------------
MQC-12K MONS 19 2 boxes
BREAKIN WAFERS 35 3 Boxes
CMP.A1 (Strasbaugh 6DS-SP) - up/running JL0941/24 PMD
CMP.A1 24hr MQCS COMPLETED: 01/29/97 @ 7:30pm
CMP.A1 24hr MQCS NEXT DUE : 01/30/97 @ 7:30pm
CMP.A2 (Strasbaugh 6DS-SP) - up/running JL0952/24 PMD
CMP.A2 24hr MQCS COMPLETED: 01/29/97 @ 3:30 am
CMP.A2 24hr MQCS NEXT DUE : 01/30/97 @ 3:30 am
CMP.B1 (Speedfam CMP-V) - up/running XD0830/24 ILD1 HOT, JL0846/24 ILD2
CMP.B1 24hr MQCS COMPLETED: 01/29/97 @ 3:00 PM
CMP.B1 24hr MQCS NEXT DUE : 01/30/97 @ 3:00 PM
CMP.B1 12hr MQCS COMPLETED: 01/29/97 @ 12:15 AM
CMP.B1 12hr MQCS NEXT DUE : 01/29/97 @ 9:00 PM
CMP.B2 (Speedfam CMP-V) - up/RUNNING YD0214/19 ILD3, JL0877/23 ILD1
CMP.B2 24hr MQCS COMPLETED: 01/28/97 @ 9:00 pm
CMP.B2 24hr MQCS NEXT DUE : 01/29/97 @ 9:00 pm
CMP.B2 12hr MQCS COMPLETED: 01/29/97 @ 9:30 AM
CMP.B2 12hr MQCS NEXT DUE : 01/29/97 @ 9:30 PM
CMP.B3 (Speedfam CMP-V) - up/Running JL0827/24 ILD2,
CMP.B3 24hr MQCS COMPLETED: 01/29/97 @ 7:00 PM
CMP.B3 24hr MQCS NEXT DUE : 01/30/97 @ 7:00 PM
CMP.B3 12hr MQCS COMPLETED: 01/29/97 @ 7:30 PM
CMP.B3 12hr MQCS NEXT DUE : 01/30/97 @ 7:30 AM
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 24hr MQCS COMPLETED: 01/28/97 @ 11:00 pm
CMP-SCRUB.A1 24hr MQCS NEXT DUE : 01/29/97 @ 11:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 24hr MQCS COMPLETED: 01/28/97 @ 11:00 pm
CMP-SCRUB.A2 24hr MQCS NEXT DUE : 01/29/97 @ 11:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 24hr MQCS COMPLETED: 01/28/97 @ 11:00 pm
CMP-SCRUB.A3 24hr MQCS NEXT DUE : 01/29/97 @ 11:00 pm
Hot/B lots in area: Hot lots coming to area: Static Lots in area:
__________________ ----------------------- -------------------
none XD0830 none
Open annotations:
Down Equipment lot#/tool/ooc# Scrap lots: Hold Lots:
-------------- ----------------- ---------- ---------
None None None None
Number of product lots in room:
------------------------------
13 lots
New specs/revs posted:
---------------------
* please see t.d.c.o. located between cmp.b1, and cmp.b2 *
Lots/wafers processed
--------------------
JL0927/24 PMD
XD0781/22 ILD3
JL0884/24 ILD1
JL0871/23 ILD1
JL0887/24 ILD1
JL0886/22 ILD1
XE0579/11 ILD1
JL0584/24 ILD1
JL0906/24 PMD
JL0845/24 ILD2
JL0845/22 ILD2
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
3 STRASBAUGH
2 PLATES F/S
|
| 88.36 | PASSDOWN | FABSIX::D_CAUSE | | Sat Feb 01 1997 07:46 | 36 |
| D SHIFT PASSDOWN
********* PLEASE ADD K_WANG AND R_THOMPSON TO YOUR CMP DIST LIST************
CMP.A1 (Strasbaugh 6DS-SP) -UP/MQC MQC WAFERS BEING EVALUATED
CMP.A2 (Strasbaugh 6DS-SP) -DOWN/ROBOT SMASHED A WAFER IN THE SEND CASSETTE
LOT XD0915 HALF THE LOT HAS BEEN RUN
CMP.B1 (Speedfam CMP-V) - UP/RUNNING XD0582 AND JL0844 FIRST PASS
CMP.B2 (Speedfam CMP-V) - UP/RUNNING XD0895 AND HOT LOT JD0917 BOTH LOTS 100%
ON THK.A5
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JD0816 AND YE0227 SEND AHEADS HAVE BEEN
RUN FOR BOTH LOTS AND TIMES CALCULATED
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:1
----------------
BREAK IN WAFERS USED:40
MQC WAFERS USED:12 WAFERS USED
MQC WAFERS AVAIL: 7.5 BOXES
----------
|
| 88.37 | PASSDOWN | FABSIX::D_CAUSE | | Wed Feb 05 1997 07:40 | 31 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING JL0912 100% ON THK.A5
CMP.A2 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/RUNNING XD0780 RUNNING SEND AHEADS
CMP.B2 (Speedfam CMP-V) - UP/RUNNING MQC'S AFTER PM SECOND SET
CMP.B3 (Speedfam CMP-V) - UP/IDLE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:40
MQC WAFERS USED:19 WAFERS USED
MQC WAFERS AVAIL:2.5 BOXES
----------
|
| 88.38 | PASSDOWN | FABSIX::D_CAUSE | | Thu Feb 06 1997 07:33 | 31 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING XE0919*** HOT LOT SEE REMARKS***
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING JL0924 NEEDS 100% AND TOUCHUP
CMP.B1 (Speedfam CMP-V) - UP/RUNNING JD0818 NEEDS TOUCHUP
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JL0880 AND JD0815 FIRST PASS
CMP.B3 (Speedfam CMP-V) - UP/JD0808 2ND 400 SEC AND JL0867 100% ON THK.A4
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:1
----------------
BREAK IN WAFERS USED:40
MQC WAFERS USED:40 WAFERS USED
MQC WAFERS AVAIL:3.5 BOXES
----------
|
| 88.39 | PASSDOWN | FABSIX::D_CAUSE | | Fri Feb 07 1997 07:35 | 36 |
| D SHIFT PASSDOWN
************************ALL TOOLS HAVE BEEN MQC'ED*****************************
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING JD0856 NEEDS 100% AND TOUCHUP
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING XD0599 NEEDS 100% AND TOUCHUP
CMP.B1 (Speedfam CMP-V) - UP/RUNNING XD0585 READY TO RUN
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JL0922 NEEDS DRG AND FINAL
CMP.B3 (Speedfam CMP-V) - UP/RUNNING YE0233 NOT READING PROPERLY 0N UV1050
LOT HAS BEEN POLISHED AND NEEDS TOUCHUP. JD0814
RAN FOR 800 SECS AND NOT EVEN CLOSE (19K)
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:40
MQC WAFERS USED:25 WAFERS USED
MQC WAFERS AVAIL:4 BOXES
----------
|
| 88.40 | PASSDOWN | FABSIX::D_CAUSE | | Sat Feb 08 1997 07:49 | 32 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/MQC NEEDS EVAL
CMP.A2 (Strasbaugh 6DS-SP) -UP/MQC NEEDS MQC WAFERS RUN
CMP.B1 (Speedfam CMP-V) - UP/RUNNING JL00900 IN SCRUB.A1 NEEDS 100% AND TU
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JL0904 SEND AHEADS IN SCRUB.A2
JL0906 WAFERS IN SCRUB.A3 NEED DRG AND FINAL
CMP.B3 (Speedfam CMP-V) - UP/RUNNING XD0830 READY TO RUN
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
----------------
BREAK IN WAFERS USED:40
MQC WAFERS USED:19 WAFERS USED
MQC WAFERS AVAIL:2 BOXES
----------
|