| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 84.1 | passdown 11-03-96 | FABSIX::S_MCREYNOLDS | | Sun Nov 03 1996 06:29 | 114 |
|
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 28 MQC'S
BREAKIN WAFERS 37 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/MQC
CMP.A1 24hr MQCS COMPLETED: in process
CMP.A1 24hr MQCS NEXT DUE : N/A
CMP.A2 (Strasbaugh 6DS-SP) - UP/running JD0615 PMD/JD0578 M1
CMP.A2 24hr MQCS COMPLETED: 11/02/96 @ 09:00am
CMP.A2 24hr MQCS NEXT DUE : 11/03/96 @ 09:00am
CMP.B1 (Speedfam CMP-V) - : up/mqc
CMP.B1 24hr MQCS COMPLETED: in process
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - : unsched down/crash @ 6:00 am
CMP.B2 24hr MQCS COMPLETED: n/a
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: n/a
CMP.B2 12hr MQCS NEXT DUE : n/a
CMP.B3 (Speedfam CMP-V) - : up/running xd0589 m3 hotlot/jd0558 m3
CMP.B3 24hr MQCS COMPLETED: 11/03/96 @ 5:00 am
CMP.B3 24hr MQCS NEXT DUE : 11/04/96 @ 5:00 am
CMP.B3 12hr MQCS COMPLETED: 11/03/96 @ 5:00 am
CMP.B3 12hr MQCS NEXT DUE : 11/03/96 @ 5:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 11/03/96 @ 3:00 AM
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 11/03/96 @ 3:00 PM
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 11/03/96 @ 3:00 AM
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 11/03/96 @ 3:00 PM
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 11/03/96 @ 3:00 AM
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 11/03/96 @ 3:00 PM
Hot/B lots in area:
__________________
* XD0589 ILD3 cmp.b3 *
Hot lots coming to area:
-----------------------
*none*
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.a1 mqc*
cmp.b1 mqc
cmp.b2 mqc crash
Scrap lots:
----------
* jd0553 1 wafer (crash b2) *
Hold Lots:
----------
* none *
Monitor status:
--------------
1� boxes of 12k mqc wafers.
1 box of 50K breakin wafers
Number of product lots in room:
------------------------------
* 15 lots *
New specs/revs posted:
---------------------
* SEE *NEW* TDCO BY CMP.B1 *
NEW TIMES FOR SPEEDFAMS ONLY
Lots/wafers processed:
---------------------
* jd0617 pmd 24 wafers *
jl0628 pmd 23 wafers
jd0591 m1 24 wafers
jd0563 m3 21 wafers
jd0523 m3 21 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 speedfam carriers
9 strasbaugh carriers
? strasbaugh plates
|
| 84.2 | A-shift CMP passdown 11/03/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Nov 03 1996 19:30 | 115 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE. (just finished two pmds)
CMP.A1 24hr MQCS COMPLETED: 9am 11/3
CMP.A1 24hr MQCS NEXT DUE : 9am 11/4
CMP.A2 (Strasbaugh 6DS-SP) - IDLE. (just back from mqcs after pad/carrier
change)
CMP.A2 24hr MQCS COMPLETED: 7pm 11/3
CMP.A2 24hr MQCS NEXT DUE : 7pm 11/4
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0614 (m1) and XD0581 (m2).
CMP.B1 24hr MQCS COMPLETED: 10am 11/3
CMP.B1 24hr MQCS NEXT DUE : 10am 11/4
CMP.B1 12hr MQCS COMPLETED: 10am 11/3
CMP.B1 12hr MQCS NEXT DUE : 10pm 11/3
CMP.B2 (Speedfam CMP-V) - RUNNING: XE0557 (m3).
CMP.B2 24hr MQCS COMPLETED: 11am 11/3
CMP.B2 24hr MQCS NEXT DUE : 11am 11/4
CMP.B2 12hr MQCS COMPLETED: 11am 11/3
CMP.B2 12hr MQCS NEXT DUE : 11pm 11/3
CMP.B3 (Speedfam CMP-V) - RUNNING: JL0593 (m2).
CMP.B3 24hr MQCS COMPLETED: 5am 11/3
CMP.B3 24hr MQCS NEXT DUE : 5am 11/4
CMP.B3 12hr MQCS COMPLETED: 4pm 11/3
CMP.B3 12hr MQCS NEXT DUE : 5am 11/4
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 4am 11/3
CMP-SCRUB.A1 12hr MQCS NEXT DUE : now
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 4am 11/3
CMP-SCRUB.A2 12hr MQCS NEXT DUE : now
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 4am 11/3
CMP-SCRUB.A3 12hr MQCS NEXT DUE : now
Hot/B lots in area:
__________________
XD0581 - M2
XD0589 - M3
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
JL0586 - 1.0DAYS
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
� box of 12K mqc wafers
0 boxes of 50K breakin wafers
(more wafers on order!)
Number of product lots in room:
------------------------------
13
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0648A - PMD - 6WFRS
XD0595 - PMD - 24
JL0649A - PMD - 6
JD0615 - PMD - 24
JD0578 - M2 - 23
JD0587 - M2 - 22
JD0574 - M2 - 24
XD0589 - M3 - 23
JD0558 - M3 - 23
JD0581 - M3 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM CARRIERS
7 STRASBAUGH CARRIERS
|
| 84.3 | passdown cmp b-shift 11/04/96 | FABSIX::M_PROVENCHER | | Mon Nov 04 1996 06:53 | 117 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 6 MQC'S
BREAKIN WAFERS 48 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24hr MQCS COMPLETED: 11/03/96 @ 9:00 am
CMP.A1 24hr MQCS NEXT DUE : 11/04/96 @ 9:00 am
CMP.A2 (Strasbaugh 6DS-SP) - up/running jd0484 pmd hot lot/jd0616 m1
CMP.A2 24hr MQCS COMPLETED: 11/03/96 @ 7:00 pm
CMP.A2 24hr MQCS NEXT DUE : 11/04/96 @ 7:00 pm
CMP.B1 (Speedfam CMP-V) - : up/idle
CMP.B1 24hr MQCS COMPLETED 11/03/96 @ 10:00 am
CMP.B1 24hr MQCS NEXT DUE : 11/04/96 @ 10:00 am
CMP.B1 12hr MQCS COMPLETED: 11/04/96 @ 2:30 am
CMP.B1 12hr MQCS NEXT DUE : 11/04/96 @ 2:30 pm
CMP.B2 (Speedfam CMP-V) - : up/idle
CMP.B2 24hr MQCS COMPLETED: 11/03/96 @ 11:00 am
CMP.B2 24hr MQCS NEXT DUE : 11/04/96 @ 11:00 am
CMP.B2 12hr MQCS COMPLETED: 11/04/96 @ 2:30 am
CMP.B2 12hr MQCS NEXT DUE : 11/04/96 @ 2:30 pm
CMP.B3 (Speedfam CMP-V) - : up/running xe0578 m1
CMP.B3 24hr MQCS COMPLETED: 11/04/96 @ 6:00 am
CMP.B3 24hr MQCS NEXT DUE : 11/05/96 @ 6:00 am
CMP.B3 12hr MQCS COMPLETED: 11/04/96 @ 7:00 am
CMP.B3 12hr MQCS NEXT DUE : 11/04/96 @ 7:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:11/04/96 @ 9:00 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE :11/04/96 @ 9:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:11/04/96 @ 9:00 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE :11/04/96 @ 9:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:11/04/96 @ 9:00 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE :11/04/96 @ 9:00 am
Hot/B lots in area:
__________________
* jd0484 pmd *
Hot lots coming to area:
-----------------------
* xd0558 m2 *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
----------
*
Monitor status:
--------------
0 boxes of 12k mqc wafers 1 box w/thk of 13k/ 1 box due at shift change
1 box of 50K breakin wafers 2 ordered @ 7:00 am
lot in the room
------------------------------
* 8 lots *
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE E.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* jd0455 pmd 24 wafers *
jl0649apmd 6 wafers
jd0614 m1 23 wafers
jd0631 m1 23 wafers
xd0591 m1 22 wafers
xd0581 m2 23 wafers hot lot
jl0586 m2 24 wafers
jl0593 m2 22 wafers
jd0588 m2 24 wafers
jl0598 m2 21 wafers
xe0557 m3 17 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 speedfam carriers
7 strasbaugh carriers
? strasbaugh plates shimmed + filmed
|
| 84.4 | A-shift CMP passdown 11/04/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Nov 04 1996 19:41 | 115 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 15 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: XD0560 (pmd).
CMP.A1 24hr MQCS COMPLETED: 7pm 11/3
CMP.A1 24hr MQCS NEXT DUE : now (running along with lot)
CMP.A2 (Strasbaugh 6DS-SP) - VERIFY: monthly pm complete. Conditioning run
done. Needs breakins and mqcs.
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - MQC: running mqcs after software change. Back on
old version that matches .b2 and .b3.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - RUNNING: running rework lot JD0559 (m3) and
XD0592 (pmd).
CMP.B2 24hr MQCS COMPLETED: 11am 11/04
CMP.B2 24hr MQCS NEXT DUE : 11am 11/05
CMP.B2 12hr MQCS COMPLETED: 8am 11/04
CMP.B2 12hr MQCS NEXT DUE : 8pm 11/04
CMP.B3 (Speedfam CMP-V) - RUNNING: XD0567 (m3) and JL0612 (m1).
CMP.B3 24hr MQCS COMPLETED: 6am 11/04
CMP.B3 24hr MQCS NEXT DUE : 6am 11/05
CMP.B3 12hr MQCS COMPLETED: 5pm 11/04
CMP.B3 12hr MQCS NEXT DUE : 5am 11/05
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 5pm 11/04
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 5am 11/05
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 5pm 11/04
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 5am 11/05
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 5pm 11/04
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 5am 11/05
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A2 - VERIFY AFTER MONTHLY PM.
CMP.B1 - MQC AFTER SOFTWARE CHANGE.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1.5 boxes of 12K mqc wafers.
0 boxes of 50K breakin wafers.
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0594 - PMD - 24WFRS
XD0591 - M1 - 24
JD0616 - M1 - 23
JD0449A - PMD - 18
JL0622 - M1 - 24
JD0619 - M1 - 22
XD0588 - M2 - 24
XE0578 - M1 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
5 STRASBAUGH
9 SPEEDFAM
|
| 84.5 | passdown cmp b-shift 11/05/96 | FABSIX::M_PROVENCHER | | Tue Nov 05 1996 06:33 | 122 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 21 MQC'S
BREAKIN WAFERS 46 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/mqc (failed 2 sets of mqc's for increasingly
bad uniformity. pad/conditioning disc was
changed new pad recipe w/6 50k wafers.
waiting for post readings).
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - up/running jd0634 pmd/jl0638 pmd ( right carrier
was releasing wafers upon liftoff.
maint took apart carrier, and fixed
vacuum problem. should be ok.
CMP.A2 24hr MQCS COMPLETED: 11/05/96 @ 12:30 am
CMP.A2 24hr MQCS NEXT DUE : 11/06/96 @ 12:00 am
CMP.B1 (Speedfam CMP-V) - : up/running jl0597 m2/ye0199 m3
CMP.B1 24hr MQCS COMPLETED 11/05/96 @ 3:30 am
CMP.B1 24hr MQCS NEXT DUE : 11/06/96 @ 3:30 am
CMP.B1 12hr MQCS COMPLETED: 11/05/96 @ 3:30 am
CMP.B1 12hr MQCS NEXT DUE : 11/05/96 @ 3:30 pm
CMP.B2 (Speedfam CMP-V) - : up/running xd0574 m2/xd0563 m3
CMP.B2 24hr MQCS COMPLETED: 11/04/96 @ 11:00 am
CMP.B2 24hr MQCS NEXT DUE : 11/05/96 @ 11:00 am
CMP.B2 12hr MQCS COMPLETED: 11/04/96 @ 10:00 pm
CMP.B2 12hr MQCS NEXT DUE : 11/05/96 @ 10:00 am
CMP.B3 (Speedfam CMP-V) - : up/mqc running (secondary pad was changed. it
exceeded 2000 w ).
CMP.B3 24hr MQCS COMPLETED: in process
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: 11/05/96 @ 6:30 am
CMP.B3 12hr MQCS NEXT DUE : 11/05/96 @ 6:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:11/05/96 @ 5:30 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE :11/05/96 @ 5:30 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:11/05/96 @ 5:30 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE :11/05/96 @ 5:30 pm
CMP-SCRUB.A3 (On-track scrubber) - up/running xd0567 m3
CMP-SCRUB.A3 12hr MQCS COMPLETED:11/05/96 @ 5:30 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE :11/05/96 @ 5:30 pm
Hot/B lots in area:
__________________
* jd0484 pmd *
Hot lots coming to area:
-----------------------
* xd0603 pmd *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.a1 mqc after pad change *
cmp.b3 24 hr mqc
Scrap lots:
----------
* none *
Hold Lots:
----------
* none *
Monitor status:
--------------
� box of 12k mqc wafers none processed
1 box of 50K breakin wafers one box due @ 9:00 am
lot in the room
------------------------------
* 9 lots *
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE E.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* xd0560 pmd 24 wafers *
xd0592 pmd 24 wafers
jl0649 pmd 12 wafers
jl0637 pmd 24 wafers
jl0612 m1 21 wafers
jl0599 m2 24 wafers
jd0559 m3 18 wafers rework
xd0567 m3 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 speedfam carriers
7 strasbaugh carriers
? strasbaugh plates shimmed + filmed
|
| 84.6 | A-shift CMP passdown 11/05/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Nov 05 1996 19:40 | 110 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 15 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JL0620 (m1).
CMP.A1 24hr MQCS COMPLETED: 3pm 11/05
CMP.A1 24hr MQCS NEXT DUE : 3pm 11/06
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0635 (pmd).
CMP.A2 24hr MQCS COMPLETED: 12am 11/05
CMP.A2 24hr MQCS NEXT DUE : 12am 11/06
CMP.B1 (Speedfam CMP-V) - RUNNING: YE0199 (m3).
CMP.B1 24hr MQCS COMPLETED: 3am 11/05
CMP.B1 24hr MQCS NEXT DUE : 3am 11/06
CMP.B1 12hr MQCS COMPLETED: 3am 11/05
CMP.B1 12hr MQCS NEXT DUE : now
CMP.B2 (Speedfam CMP-V) - RUNNING: JL0597 (m2).
CMP.B2 24hr MQCS COMPLETED: 7pm 11/05
CMP.B2 24hr MQCS NEXT DUE : 7pm 11/06
CMP.B2 12hr MQCS COMPLETED: 10pm 11/04
CMP.B2 12hr MQCS NEXT DUE : now
CMP.B3 (Speedfam CMP-V) - RUNNING: JD0590 (m3).
CMP.B3 24hr MQCS COMPLETED: 9am 11/05
CMP.B3 24hr MQCS NEXT DUE : 9am 11/06
CMP.B3 12hr MQCS COMPLETED: 9am 11/05
CMP.B3 12hr MQCS NEXT DUE : 9pm 11/05
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 6am 11/05
CMP-SCRUB.A1 12hr MQCS NEXT DUE : now
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 6am 11/05
CMP-SCRUB.A2 12hr MQCS NEXT DUE : now
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 6am 11/05
CMP-SCRUB.A3 12hr MQCS NEXT DUE : now
Hot/B lots in area:
__________________
JD0590 - M3
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
� box of 12K mqc wafers
1 box of 50K breakin wafers
(more 12K's and 50K's waiting at dielectrics for dep)
Number of product lots in room:
------------------------------
11
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0634 - PMD - 24
JL0638 - PMD - 24
XD0603 - PMD - 24
XD0574 - M2 - 23
XD0563 - M3 - 18
JD0635 - PMD - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
7 STRASBAUGH
|
| 84.7 | passdown cmp b-shift 11/06/96 | FABSIX::M_PROVENCHER | | Wed Nov 06 1996 06:44 | 114 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 8 MQC'S
BREAKIN WAFERS 49 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running jl0648b pmd/
CMP.A1 24hr MQCS COMPLETED: 11/05/96 @ 3:00 pm
CMP.A1 24hr MQCS NEXT DUE : 11/06/96 @ 3:00 pm
CMP.A2 (Strasbaugh 6DS-SP) - up/running jl0644 pmd/
CMP.A2 24hr MQCS COMPLETED: 11/06/96 @ 12:30 am
CMP.A2 24hr MQCS NEXT DUE : 11/07/96 @ 12:00 am
CMP.B1 (Speedfam CMP-V) - : up/running jl0607 m2
CMP.B1 24hr MQCS COMPLETED 11/06/96 @ 6:30 am
CMP.B1 24hr MQCS NEXT DUE : 11/07/96 @ 6:30 am
CMP.B1 12hr MQCS COMPLETED: 11/05/96 @ 10:00 pm
CMP.B1 12hr MQCS NEXT DUE : 11/06/96 @ 10:00 am
CMP.B2 (Speedfam CMP-V) - : up/running jd0589 m2/ jl0608 m2 both at touch up
CMP.B2 24hr MQCS COMPLETED: 11/05/96 @ 7:00 pm
CMP.B2 24hr MQCS NEXT DUE : 11/06/96 @ 7:00 pm
CMP.B2 12hr MQCS COMPLETED: 11/05/96 @ 10:00 pm
CMP.B2 12hr MQCS NEXT DUE : 11/06/96 @ 10:00 am
CMP.B3 (Speedfam CMP-V) - : up/mqc running jd0562 m3/
CMP.B3 24hr MQCS COMPLETED: 11/05/96 @ 9:00 am
CMP.B3 24hr MQCS NEXT DUE : 11/06/96 @ 9:00 am
CMP.B3 12hr MQCS COMPLETED: 11/05/96 @ 8:30 pm
CMP.B3 12hr MQCS NEXT DUE : 11/06/96 @ 8:30 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:11/05/96 @ 9:30 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE :11/06/96 @ 9:30 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:11/05/96 @ 9:30 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE :11/06/96 @ 9:30 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:11/05/96 @ 9:30 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE :11/06/96 @ 9:30 am
Hot/B lots in area:
__________________
* jd0590 (at final thk) *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
----------
* xd0590 on hold for eng per eng *
xd0513 for eric b.
Monitor status:
--------------
2� boxes of 12k mqc wafers two ordered @ 5 am
3 boxes of 50K breakin wafers none ordered
lot in the room
------------------------------
* 13 lots *
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE E.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* jl0597 m2 22 waf
jd0635 pmd 24 waf
ye0199 m3 22 waf
jl0645 pmd 24 waf
jd0633 pmd 22 waf
jd0590 m3 24 waf (hot lot)
jl0620 m1 24 waf
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 speedfam carriers
7 strasbaugh carriers
? strasbaugh plates shimmed + filmed
|
| 84.8 | A-shift CMP passdown 11/06/96 | FABSIX::J_SADIN | Freedom isn't free. | Wed Nov 06 1996 19:22 | 111 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: XD0590 (m1).
CMP.A1 24hr MQCS COMPLETED: 3pm 11/05
CMP.A1 24hr MQCS NEXT DUE : Will need pad/carrier change after lot is
completed.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JL0632A (m1 - touchup).
CMP.A2 24hr MQCS COMPLETED: 8am 11/06
CMP.A2 24hr MQCS NEXT DUE : 8am 11/07
CMP.B1 (Speedfam CMP-V) - RUNNING: JL0594 (m2).
CMP.B1 24hr MQCS COMPLETED: 6:30am 11/06
CMP.B1 24hr MQCS NEXT DUE : 6:30am 11/07
CMP.B1 12hr MQCS COMPLETED: 7:30pm 11/06
CMP.B1 12hr MQCS NEXT DUE : 7:30am 11/07
CMP.B2 (Speedfam CMP-V) - MQC: running mqcs. lots JL0625 (m1) and XD0534 (m3)
are moved into the system and in process also.
CMP.B2 24hr MQCS COMPLETED: n/a
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: n/a
CMP.B2 12hr MQCS NEXT DUE : n/a
CMP.B3 (Speedfam CMP-V) - RUNNING: JD0566 (m3).
CMP.B3 24hr MQCS COMPLETED: 12pm 11/06
CMP.B3 24hr MQCS NEXT DUE : 12pm 11/07
CMP.B3 12hr MQCS COMPLETED: 10am 11/06
CMP.B3 12hr MQCS NEXT DUE : 10pm 11/06
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 2pm 11/06
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 2am 11/07
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 2pm 11/06
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 2am 11/07
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 2pm 11/06
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 2am 11/07
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
XD0588 - DEP_M3
XD0581 - DEP_ILD3 2
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0513 - HOLD FOR ERIC BODENSIECK. NEEDS FINAL TOUCHUPS AND P2'S.
Monitor status:
--------------
3 boxes of 12K mqc wafers
3 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
15
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0644 - PMD - 24WFRS
JL0607 - M2 - 23
JD0589 - M2 - 24
JL0608 - M2 - 22
JD0562 - M3 - 21
JL0606 - M2 - 21
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM CARRIERS
7 STRASBAUGH CARRIERS
|
| 84.9 | passdown cmp b-shift 11/10/96 | FABSIX::M_PROVENCHER | | Sun Nov 10 1996 06:55 | 111 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 17 MQC'S
BREAKIN WAFERS 31 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24hr MQCS COMPLETED: 11/09/96 @ 8:30 am
CMP.A1 24hr MQCS NEXT DUE : 11/10/96 @ 8:30 am
CMP.A2 (Strasbaugh 6DS-SP) - up/idle
CMP.A2 24hr MQCS COMPLETED: 11/10/96 @ 4:00 am
CMP.A2 24hr MQCS NEXT DUE : 11/11/96 @ 4:00 am
CMP.B1 (Speedfam CMP-V) - : up/idle
CMP.B1 24hr MQCS COMPLETED 11/09/96 @ 1:30 pm
CMP.B1 24hr MQCS NEXT DUE : 11/10/96 @ 1:30 pm
CMP.B1 12hr MQCS COMPLETED: 11/10/96 @ 1:30 am
CMP.B1 12hr MQCS NEXT DUE : 11/10/96 @ 1:30 pm
CMP.B2 (Speedfam CMP-V) - : up/idle
CMP.B2 24hr MQCS COMPLETED: 11/10/96 @ 1:00 am
CMP.B2 24hr MQCS NEXT DUE : 11/11/96 @ 1:00 am
CMP.B2 12hr MQCS COMPLETED: 11/10/96 @ 1:00 am
CMP.B2 12hr MQCS NEXT DUE : 11/10/96 @ 1:00 pm
CMP.B3 (Speedfam CMP-V) - : up/idle
CMP.B3 24hr MQCS COMPLETED: 11/09/96 @ 11:00 am
CMP.B3 24hr MQCS NEXT DUE : 11/10/96 @ 11:00 am
CMP.B3 12hr MQCS COMPLETED: 11/09/96 @ 11:30 pm
CMP.B3 12hr MQCS NEXT DUE : 11/10/96 @ 11:30 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:11/09/96 @ 10:00 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE :11/10/96 @ 10:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:11/09/96 @ 10:00 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE :11/10/96 @ 10:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:11/09/96 @ 10:00 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE :11/10/96 @ 10:30 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
----------
* jd0525 on hold for frank k. *
Monitor status:
--------------
4� boxes of 12k mqc wafers none ordered
1 boxe of 50K breakin wafers two ordered, one delivered, one on its way
lot in the room
------------------------------
* 0 lots (at time this passdown was sent)*
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE E.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* jd0591 m2 24 wafers
jd0577 m3 23 wafers
jl0641 pmd 24 wafers
jl0640 pmd 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
11 speedfam carriers
11 strasbaugh carriers
5 strasbaugh plates shimmed + filmed
|
| 84.10 | A-shift CMP passdown 11/10/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Nov 10 1996 19:43 | 108 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 mqcs
BREAKIN WAFERS 14 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A1 24hr MQCS COMPLETED: 6pm 11/10
CMP.A1 24hr MQCS NEXT DUE : 6pm 11/11
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JL0636 (pmd).
CMP.A2 24hr MQCS COMPLETED: 4am 11/10
CMP.A2 24hr MQCS NEXT DUE : 4am 11/11
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0587 (m3).
CMP.B1 24hr MQCS COMPLETED: 8:30am 11/10
CMP.B1 24hr MQCS NEXT DUE : 8:30am 11/11
CMP.B1 12hr MQCS COMPLETED: 8:30am 11/10
CMP.B1 12hr MQCS NEXT DUE : 8:30pm 11/10
CMP.B2 (Speedfam CMP-V) - MQC: running mqcs after crash on pad.
CMP.B2 24hr MQCS COMPLETED: n/a
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: n/a
CMP.B2 12hr MQCS NEXT DUE : n/a
CMP.B3 (Speedfam CMP-V) - RUNNING: JD0573 (m3) and JL0639 (pmd).
CMP.B3 24hr MQCS COMPLETED: 12pm 11/10
CMP.B3 24hr MQCS NEXT DUE : 12pm 11/11
CMP.B3 12hr MQCS COMPLETED: 11pm 11/09
CMP.B3 12hr MQCS NEXT DUE : now
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 6pm 11/10
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 6am 11/11
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 6pm 11/10
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 6am 11/11
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 6pm 11/10
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 6am 11/11
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
JD0655 - DEP_M1
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B2 - MQC AFTER CRASH
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1 box 50K breakin wafers
3 boxes of 12K mqc wafers
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XE0577 - M2 - 24WFRS
XD0594 - M1 - 24
XD0595 - M1 - 20
JD0577 - M3 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
8 SPEEDFAM
9 STRASBAUGH
5 STRASBAUGH PLATES
|
| 84.11 | passdown cmp b-shift 11/11/96 | FABSIX::M_PROVENCHER | | Mon Nov 11 1996 06:25 | 111 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 8 MQC'S
BREAKIN WAFERS 36 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/jl0643 pmd touchup
CMP.A1 24hr MQCS COMPLETED: 11/10/96 @ 6:00 pm
CMP.A1 24hr MQCS NEXT DUE : 11/11/96 @ 6:00 pm
CMP.A2 (Strasbaugh 6DS-SP) - up/jd0650 pmd
CMP.A2 24hr MQCS COMPLETED: 11/11/96 @ 5:00 am
CMP.A2 24hr MQCS NEXT DUE : 11/12/96 @ 5:00 am
CMP.B1 (Speedfam CMP-V) - : up/running jd0616 m2
CMP.B1 24hr MQCS COMPLETED 11/10/96 @ 8:30 am
CMP.B1 24hr MQCS NEXT DUE : 11/11/96 @ 8:30 am
CMP.B1 12hr MQCS COMPLETED: 11/10/96 @ 9:00 pm
CMP.B1 12hr MQCS NEXT DUE : 11/11/96 @ 9:00 am
CMP.B2 (Speedfam CMP-V) - : up/running jd0587 m3 touchup
CMP.B2 24hr MQCS COMPLETED: 11/10/96 @ 9:30 pm
CMP.B2 24hr MQCS NEXT DUE : 11/11/96 @ 9:30 pm
CMP.B2 12hr MQCS COMPLETED: 11/11/96 @ 4:00 am
CMP.B2 12hr MQCS NEXT DUE : 11/11/96 @ 4:00 pm
CMP.B3 (Speedfam CMP-V) - : up/idle
CMP.B3 24hr MQCS COMPLETED: 11/10/96 @ 12:00 noon
CMP.B3 24hr MQCS NEXT DUE : 11/11/96 @ 12:00 noon
CMP.B3 12hr MQCS COMPLETED: 11/10/96 @ 11:30 pm
CMP.B3 12hr MQCS NEXT DUE : 11/11/96 @ 11:30 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:11/11/96 @ 6:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE :11/11/96 @ 6:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:11/11/96 @ 6:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE :11/11/96 @ 6:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:11/11/96 @ 6:00 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE :11/11/96 @ 6:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* jd0655 m1 *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
----------
* jd0525 on hold for frank k. *
Monitor status:
--------------
4 boxes of 12k mqc wafers two ordered @ 9:00 pm (in a7 stocker)
� box of 50K breakin wafers two ordered,@ 9:00 pm (in a7 stocker)
lot in the room
------------------------------
* 4 lots (at time this passdown was sent)*
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE E.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* jl0642 pmd 24 wafers
jl0639 pmd 24 wafers
jl0636 pmd 24 wafers
jd0573 m3 23 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 speedfam carriers
7 strasbaugh carriers
5 strasbaugh plates shimmed + filmed
|
| 84.12 | A-shift CMP passdown 11/11/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Nov 11 1996 19:29 | 113 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: running 24hr mqcs.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JL0518 (pmd).
CMP.A2 24hr MQCS COMPLETED: 5am 11/11
CMP.A2 24hr MQCS NEXT DUE : 5am 11/12
CMP.B1 (Speedfam CMP-V) - DOWN: needs pad change. Failed 24hr mqcs with bad
unif.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - RUNNING: JL0612 (m2).
CMP.B2 24hr MQCS COMPLETED: 10pm 11/10
CMP.B2 24hr MQCS NEXT DUE : 10pm 11/11
CMP.B2 12hr MQCS COMPLETED: 6pm 11/11
CMP.B2 12hr MQCS NEXT DUE : 6am 11/12
CMP.B3 (Speedfam CMP-V) - RUNNING: JL0648A (m1).
CMP.B3 24hr MQCS COMPLETED: 2pm 11/11
CMP.B3 24hr MQCS NEXT DUE : 2pm 11/12
CMP.B3 12hr MQCS COMPLETED: 11pm 11/10
CMP.B3 12hr MQCS NEXT DUE : now
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 5pm 11/11
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 5am 11/12
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 5pm 11/11
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 5am 11/12
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 5pm 11/11
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 5am 11/12
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1 box 50K breakin wafers
4 boxes of 12K mqc wafers
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0650 - PMD - 23WFRS
JD0616 - M2 - 22
JD0587 - M3 - 22
JL0643 - PMD - 23
JL0628 - M1 - 23
JD0630 - PMD - 24
JD0631 - M2 - 23
JD0573 - M3 - 19
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 SPEEDFAM
7 STRASBAUGH
5 STRASBAUGH PLATES
|
| 84.13 | passdown cmp b-shift 11/12/96 | FABSIX::M_PROVENCHER | | Tue Nov 12 1996 06:49 | 115 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 19 MQC'S
BREAKIN WAFERS 38 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running jd0651 pmd
CMP.A1 24hr MQCS COMPLETED: 11/11/96 @ 7:00 pm
CMP.A1 24hr MQCS NEXT DUE : 11/12/96 @ 7:00 pm
CMP.A2 (Strasbaugh 6DS-SP) - up/mqc (in process)
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - : down/failed for uniformity,pad change, and carriers
#1,and #2 are in process of being changed
CMP.B1 24hr MQCS COMPLETED n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - : up/running jl0614 m2
CMP.B2 24hr MQCS COMPLETED: 11/11/96 @ 9:00 am
CMP.B2 24hr MQCS NEXT DUE : 11/12/96 @ 9:00 am
CMP.B2 12hr MQCS COMPLETED: 11/11/96 @ 6:00 pm
CMP.B2 12hr MQCS NEXT DUE : 11/12/96 @ now
CMP.B3 (Speedfam CMP-V) - : up/idle jl0637 at touchup
CMP.B3 24hr MQCS COMPLETED: 11/11/96 @ 2:30 pm
CMP.B3 24hr MQCS NEXT DUE : 11/12/96 @ 2:30 pm
CMP.B3 12hr MQCS COMPLETED: 11/12/96 @ 5:00 am
CMP.B3 12hr MQCS NEXT DUE : 11/12/96 @ 5:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:11/12/96 @ 4:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE :11/12/96 @ 4:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:11/12/96 @ 4:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE :11/12/96 @ 4:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:11/12/96 @ 4:00 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE :11/12/96 @ 4:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.b1 mqc *
cmp.a2 24 hr qmc
Scrap lots:
----------
* jl0637 m1 (2 wafers, mapping tool on cmp.b3 #1, and #4 ) *
Hold Lots:
----------
* jd0525 on hold for frank k. *
Monitor status:
--------------
4 boxes of 12k mqc wafers
2 box of 50K breakin wafers
lot in the room
------------------------------
* 4 lots (at time this passdown was sent)*
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE E.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* jl0648a m1 6 wafers
jl0518 pmd 24 wafers
jl0656 pmd 24 wafers
jl0657 pmd 24 wafers
jl0637 m1 21 wafers
jl0612 m2 21 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
5 speedfam carriers
7 strasbaugh carriers
5 strasbaugh plates shimmed + filmed
|
| 84.14 | A-shift CMP passdown 11/12/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Nov 12 1996 19:34 | 110 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 25 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A1 24hr MQCS COMPLETED: 8pm 11/11
CMP.A1 24hr MQCS NEXT DUE : 8pm 11/12
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 24hr MQCS COMPLETED: 7am 11/12
CMP.A2 24hr MQCS NEXT DUE : 7am 11/13
CMP.B1 (Speedfam CMP-V) - RUNNING: JL0620 (m2).
CMP.B1 24hr MQCS COMPLETED: 1pm 11/12
CMP.B1 24hr MQCS NEXT DUE : 1pm 11/13
CMP.B1 12hr MQCS COMPLETED: 10am 11/12
CMP.B1 12hr MQCS NEXT DUE : 10pm 11/12
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0522 (m4).
CMP.B2 24hr MQCS COMPLETED: 11am 11/12
CMP.B2 24hr MQCS NEXT DUE : 11am 11/13
CMP.B2 12hr MQCS COMPLETED: 11am 11/12
CMP.B2 12hr MQCS NEXT DUE : 11pm 11/12
CMP.B3 (Speedfam CMP-V) - RUNNING: XD0590 (m2).
CMP.B3 24hr MQCS COMPLETED: 6pm 11/12
CMP.B3 24hr MQCS NEXT DUE : 6pm 11/13
CMP.B3 12hr MQCS COMPLETED: 6pm 11/12
CMP.B3 12hr MQCS NEXT DUE : 6am 11/13
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 7:30pm 11/12
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 7:30am 11/13
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 7:30pm 11/12
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 7:30am 11/13
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 7:30pm 11/12
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 7:30am 11/13
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
JD0619 - on hold per management. See today's mail message regarding ILD2
lots.
Monitor status:
--------------
1 box 50K breakin wafers
3 boxes 12K mqc wafers
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0651 - PMD - 24WFRS
JD0522 - M4 - 7
JD0525 - M4 - 7
JL0658 - PMD - 24
XD0590 - M2 - 22
JL0637 - M1 - 21
# of carriers for strasbaugh/speedfam:
--------------------------------------
5 SPEEDFAM
7 STRASBAUGH
5 STRASBAUGH PLATES
|
| 84.15 | passdown cmp b-shift 11/17/96 | FABSIX::S_MCREYNOLDS | | Sun Nov 17 1996 06:39 | 80 |
|
CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 16
BREAKIN WAFERS 35 MISC
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING JL0643 M1
MQC's done: 11/17 3:00am
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING JL0639 M1
MQC's done: 11/16 11:00pm
CMP.B1 (SPEEDFAM CMP-V) - UP/RUNNING JD0618 M2-TOUCH UP/JD0579 M3
24hr MQC's done:3:00pm
12hr MQC's done:3:00am
CMP.B2 (SPEEDFAM CMP-V) - DOWN/parts
24hr MQC's done:n/a
12hr MQC's done:n/a
CMP.B3 (SPEEDFAM CMP-V) - UP/RUNNING XE0578-TOUCH UPS/XD0580 M3
24hr MQC's done:3:00pm
12hr MQC's done:5:00pm
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC DONE
Hot/B lots in area:
________________________
*JD0469 M2*
Hot lots coming to area:
------------------------
*NONE*
Static Lots in area:
--------------------
*NONE*
Down Equipment:
--------------
*NONE*
Scrap lots:
-----------
*NONE*
Hold Lots:
------------
*JD0619*
Monitor status:
---------------
*3 BOXES OF MQC WAFERS*
Number of product lots in room:
------------------------------
*8 LOTS*
New specs/revs posted:
---------------------
*NONE*
Lots/wafers processed:
-----------------------
1 lot
|
| 84.16 | A-shift CMP passdown 11/17/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Nov 17 1996 19:44 | 114 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 8 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: XE0602 (pmd).
CMP.A1 24hr MQCS COMPLETED: 3:30am 11/17
CMP.A1 24hr MQCS NEXT DUE : 3:30am 11/18
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JL0636 (m1).
CMP.A2 24hr MQCS COMPLETED: 11pm 11/16
CMP.A2 24hr MQCS NEXT DUE : 11pm 11/17
CMP.B1 (Speedfam CMP-V) - DOWN: crashed wafers in the unload station. Now
equipment has found a malfunctioning 3 way valve. All pneumatic lines are
full of DI water. We do not have a valve in stock. Reps are working with
equipment group.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - DOWN: down for head drift problems.
CMP.B2 24hr MQCS COMPLETED: n/a
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: n/a
CMP.B2 12hr MQCS NEXT DUE : n/a
CMP.B3 (Speedfam CMP-V) - RUNNING: XD0580 (m3).
CMP.B3 24hr MQCS COMPLETED: 7pm 11/17
CMP.B3 24hr MQCS NEXT DUE : 7pm 11/18
CMP.B3 12hr MQCS COMPLETED: 7pm 11/17
CMP.B3 12hr MQCS NEXT DUE : 7am 11/18
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 2pm 11/17
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 2am 11/18
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 2pm 11/17
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 2am 11/18
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 2pm 11/17
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 2am 11/18
Hot/B lots in area:
__________________
JD0469 - M2
Hot lots coming to area:
-----------------------
JD0653 - DEP_ILD1 2
Static Lots in area:
-------------------
JD0619 - M2 - 5.8DAYS
Down Equipment:
--------------
CMP.B1 - BAD THREE WAY VALVE. NONE IN STOCK.
CMP.B2 - HEAD DRIFT PROBLEMS.
Scrap lots:
----------
* none *
Hold Lots:
---------
JD0619 - M2 (HOLD DUE TO PHOTO RETICLE ISSUE)
Monitor status:
--------------
2.5 boxes of 12K mqc wafers
3 boxes of 50K breakin wafers.
Number of product lots in room:
------------------------------
9
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0643 - M1 - 23WFRS
JD0469 - M2 - 22
JL0639 - M1 - 24
JL0518 - M1 - 19
XE0578 - M2 - 23
JD0618 - M2 - 24
JD0579 - M3 - 17
# of carriers for strasbaugh/speedfam:
--------------------------------------
???????? CHECK REBUILD ROOM
|
| 84.17 | A-shift CMP passdown 11/18/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Nov 18 1996 19:29 | 109 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 25 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0630 (m1).
CMP.A1 24hr MQCS COMPLETED: 11am 11/18
CMP.A1 24hr MQCS NEXT DUE : 11am 11/19
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0651 (m1).
CMP.A2 24hr MQCS COMPLETED: 10am 11/18
CMP.A2 24hr MQCS NEXT DUE : 10am 11/19
CMP.B1 (Speedfam CMP-V) - RUNNING: JL0656 (m1) and JL0611 (m2).
CMP.B1 24hr MQCS COMPLETED: 3am 11/18
CMP.B1 24hr MQCS NEXT DUE : 3am 11/19
CMP.B1 12hr MQCS COMPLETED: 4pm 11/18
CMP.B1 12hr MQCS NEXT DUE : 4am 11/19
CMP.B2 (Speedfam CMP-V) - RUNNING: JL0637 (m2).
CMP.B2 24hr MQCS COMPLETED: 5pm 11/18
CMP.B2 24hr MQCS NEXT DUE : 5pm 11/19
CMP.B2 12hr MQCS COMPLETED: 5pm 11/18
CMP.B2 12hr MQCS NEXT DUE : 5am 11/19
CMP.B3 (Speedfam CMP-V) - RUNNING: JD0616 (m3).
CMP.B3 24hr MQCS COMPLETED: 7:30pm 11/18
CMP.B3 24hr MQCS NEXT DUE : 7:30pm 11/19
CMP.B3 12hr MQCS COMPLETED: 7:30pm 11/18
CMP.B3 12hr MQCS NEXT DUE : 7:30am 11/19
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 4pm 11/18
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 4am 11/19
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 4pm 11/18
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 4am 11/19
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 4pm 11/18
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 4am 11/19
Hot/B lots in area:
__________________
JD0616 - M3
Hot lots coming to area:
-----------------------
XD0595 - DEP_ILD3 1
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
JD0615 - HOLD FOR ENG SPLITS
JD0619 - HOLD FOR RETICLE ISSUE PER MANAGEMENT
Monitor status:
--------------
2 boxes of 12K mqc wafers
1 box of 50K breakin wafers
Number of product lots in room:
------------------------------
15
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0636 - M1 - 24WFRS
JL0611 - M2 - 16
XD0592 - M2 - 24
JD0653 - M1 - 24
JD0602 - M3 - 19
# of carriers for strasbaugh/speedfam:
--------------------------------------
5 STRASBAUGH CARRIERS
5 PLATES
0 SPEEDFAM CARRIERS
|
| 84.18 | passdown cmp b-shift 11/19/96 | FABSIX::M_PROVENCHER | | Tue Nov 19 1996 06:35 | 116 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 6 MQC'S
BREAKIN WAFERS 48 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running yd0211 m1
CMP.A1 24hr MQCS COMPLETED: 11/18/96 @ 11:00 am
CMP.A1 24hr MQCS NEXT DUE : 11/19/96 @ 11:00 am
CMP.A2 (Strasbaugh 6DS-SP) - up/running xd0611 pmd
CMP.A2 24hr MQCS COMPLETED: 11/18/96 @ 10:00 am
CMP.A2 24hr MQCS NEXT DUE : 11/19/96 @ 10:00 am
CMP.B1 (Speedfam CMP-V) - : up/running jl0658 m1
CMP.B1 24hr MQCS COMPLETED 11/19/96 @ 6:00 am
CMP.B1 24hr MQCS NEXT DUE : 11/20/96 @ 6:00 am
CMP.B1 12hr MQCS COMPLETED: 11/19/96 @ 6:00 am
CMP.B1 12hr MQCS NEXT DUE : 11/19/96 @ 6:00 pm
CMP.B2 (Speedfam CMP-V) - : up/idle
CMP.B2 24hr MQCS COMPLETED: 11/18/96 @ 7:30 pm
CMP.B2 24hr MQCS NEXT DUE : 11/19/96 @ 7:30 pm
CMP.B2 12hr MQCS COMPLETED: 11/19/96 @ 7:30 am
CMP.B2 12hr MQCS NEXT DUE : 11/19/96 @ 7:30 pm
CMP.B3 (Speedfam CMP-V) - : up/running jl0657 m1
CMP.B3 24hr MQCS COMPLETED: 11/11/96 @ 2:30 pm
CMP.B3 24hr MQCS NEXT DUE : 11/12/96 @ 2:30 pm
CMP.B3 12hr MQCS COMPLETED: 11/12/96 @ 5:00 am
CMP.B3 12hr MQCS NEXT DUE : 11/12/96 @ 5:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/running xd0595 m3 (hot lot)
CMP-SCRUB.A1 12hr MQCS COMPLETED:11/19/96 @ 6:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE :11/19/96 @ 6:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:11/19/96 @ 6:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE :11/19/96 @ 6:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:11/19/96 @ 6:00 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE :11/19/96 @ 6:00 pm
Hot/B lots in area:
__________________
* xd0595 m3 in scrubber *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
----------
* JD0615 - HOLD FOR ENG SPLITS *
JD0619 - HOLD FOR RETICLE ISSUE PER MANAGEMENT *
Monitor status:
--------------
3 boxes of 12k mqc wafers
2 box of 50K breakin wafers
lot in the room
------------------------------
* 6 lots (at time this passdown was sent)*
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE E.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* jd0630 m1 23 wafers *
jl0656 m1 24 wafers
jd0651 m1 24 wafers
jl0658 m1 24 wafers
jl0637 m2 24 wafers
jl0648a m2 6 wafers
xd0485 m2 19 wafers
jd0616 m3 22 wafers (hotlot)
xd0595 m3 20 wafers (hotlot)
# of carriers for strasbaugh/speedfam:
--------------------------------------
0 speedfam carriers
5 strasbaugh carriers
5 strasbaugh plates shimmed + filmed
|
| 84.19 | A-shift CMP passdown 11/19/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Nov 19 1996 19:39 | 119 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: running 2nd set of mqcs. Particles good.
Uniformity high on first set, but center fast.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - DOWN: down for pad change. Failed 24hr mqcs
for high unif (center slow).
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - RUNNING: JL0661 (m1).
CMP.B1 24hr MQCS COMPLETED: 6am 11/19
CMP.B1 24hr MQCS NEXT DUE : 6am 11/20
CMP.B1 12hr MQCS COMPLETED: 7pm 11/19
CMP.B1 12hr MQCS NEXT DUE : 7am 11/20
CMP.B2 (Speedfam CMP-V) - DOWN: high particles (3000+).
CMP.B2 24hr MQCS COMPLETED: n/a
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: n/a
CMP.B2 12hr MQCS NEXT DUE : n/a
CMP.B3 (Speedfam CMP-V) - RUNNING: JL0685 (m2).
CMP.B3 24hr MQCS COMPLETED: 9pm 11/18
CMP.B3 24hr MQCS NEXT DUE : 9pm 11/19
CMP.B3 12hr MQCS COMPLETED: 7pm 11/19
CMP.B3 12hr MQCS NEXT DUE : 7am 11/20
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 7pm 11/19
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 7am 11/20
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 7pm 11/19
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 7am 11/20
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 7pm 11/19
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 7am 11/20
Hot/B lots in area:
__________________
JL0703 - M1
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - MQC
CMP.A2 - PAD CHANGE
CMP.B2 - HIGH PARTICLES
Scrap lots:
----------
* none *
Hold Lots:
---------
JD0615 - HOLD FOR ENG SPLITS.
Monitor status:
--------------
3 boxes of 12K mqc wafers.
1.5 boxes of 50K breakin wafers.
Number of product lots in room:
------------------------------
10
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
YE0211 - M1 - 24WFRS
JL0628 - M2 - 23
JL0703 - M1 - 12
JL0659 - M1 - 24
XD0618 - PMD - 24
JL0638 - M2 - 24
XD0595 - M3 - 20
JD0619 - M2 - 22
JL0660 - M1 - 24
JL0674 - PMD - 24
JL0657 - M1 - 23
JL0676 - PMD - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
5 STRASBAUGH
5 STRASBAUGH PLATES
0 SPEEDFAM
|
| 84.20 | passdown cmp b-shift 11/20/96 | FABSIX::M_PROVENCHER | | Wed Nov 20 1996 06:43 | 118 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 11 MQC'S
BREAKIN WAFERS 46 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running jl0678 pmd
CMP.A1 24hr MQCS COMPLETED: 11/20/96 @ 12:00 am
CMP.A1 24hr MQCS NEXT DUE : 11/21/96 @ 12:00 am
CMP.A2 (Strasbaugh 6DS-SP) - up/running xd0611 pmd
CMP.A2 24hr MQCS COMPLETED: 11/19/96 @ 11:30 pm
CMP.A2 24hr MQCS NEXT DUE : 11/20/96 @ 11:30 pm
CMP.B1 (Speedfam CMP-V) - : up/mqc 24 hr mqc's in process
CMP.B1 24hr MQCS COMPLETED n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: 11/20/96 @ 7:00 am
CMP.B1 12hr MQCS NEXT DUE : 11/20/96 @ 7:00 pm
CMP.B2 (Speedfam CMP-V) - : up/running xd0605 m1
CMP.B2 24hr MQCS COMPLETED: 11/19/96 @ 9:00 pm
CMP.B2 24hr MQCS NEXT DUE : 11/20/96 @ 9:00 pm
CMP.B2 12hr MQCS COMPLETED: 11/20/96 @ 7:00 am
CMP.B2 12hr MQCS NEXT DUE : 11/20/96 @ 7:00 pm
CMP.B3 (Speedfam CMP-V) - : up/running xe0577 m3
CMP.B3 24hr MQCS COMPLETED: 11/19/96 @ 11:00 pm
CMP.B3 24hr MQCS NEXT DUE : 11/20/96 @ 11:00 pm
CMP.B3 12hr MQCS COMPLETED: 11/20/96 @ 7:00 am
CMP.B3 12hr MQCS NEXT DUE : 11/20/96 @ 7:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:11/20/96 @ 7:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE :11/20/96 @ 7:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:11/20/96 @ 7:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE :11/20/96 @ 7:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:11/20/96 @ 7:00 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE :11/20/96 @ 7:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.b1 24 hr mqc's *
Scrap lots:
----------
* none *
Hold Lots:
----------
* JD0615 - HOLD FOR ENG SPLITS *
JD0619 - HOLD FOR RETICLE ISSUE PER MANAGEMENT *
jd0524 m4 (came into the room tonight, for eng)
xd0544 m4 (came into the room tonight, for eric b.))
Monitor status:
--------------
2� boxes of 12k mqc wafers
1� box of 50K breakin wafers
lot in the room
------------------------------
* 7 lots (at time this passdown was sent)*
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE E.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* jd0664 pmd 24 wafers *
jl0685 pmd 24 wafers
jd0647 pmd 24 wafers
jl0659 m1 24 wafers
jl0661 m1 24 wafers
xm0575 m1 22 wafers
jd0654 m1 24 wafers
xd0605 m1 23 wafers
xd0594 m2 23 wafers
jd0634 m2 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
0 speedfam carriers
5 strasbaugh carriers
5 strasbaugh plates shimmed + filmed
|
| 84.21 | A-shift CMP passdown 11/20/96 | FABSIX::J_SADIN | Freedom isn't free. | Wed Nov 20 1996 19:42 | 108 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 25 misc
CMP.A1 (Strasbaugh 6DS-SP) - VERIFY: running breakins after crash.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - MQC: running mqcs after crash.
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - RUNNING: XD0544 (m4 - eng lot) and JL0644 (m2).
CMP.B1 24hr MQCS COMPLETED: 9am 11/20
CMP.B1 24hr MQCS NEXT DUE : 9am 11/21
CMP.B1 12hr MQCS COMPLETED: 9am 11/20
CMP.B1 12hr MQCS NEXT DUE : 9pm 11/20
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0596 (m1) and JD0614 (m3).
CMP.B2 24hr MQCS COMPLETED: 9pm 11/19
CMP.B2 24hr MQCS NEXT DUE : 9pm 11/20
CMP.B2 12hr MQCS COMPLETED: 9pm 11/19
CMP.B2 12hr MQCS NEXT DUE : 9am 11/20
CMP.B3 (Speedfam CMP-V) - RUNNING: JD0635 (m2) and JD0591 (m3).
CMP.B3 24hr MQCS COMPLETED: 11pm 11/19
CMP.B3 24hr MQCS NEXT DUE : 11pm 11/20
CMP.B3 12hr MQCS COMPLETED: 7am 11/20
CMP.B3 12hr MQCS NEXT DUE : 7pm 11/20
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 7pm 11/20
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 7am 11/21
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 7pm 11/20
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 7am 11/21
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 7pm 11/20
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 7am 11/21
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
JD0524 - 0.7DAYS - HOLD FOR ENG SPLITS
Down Equipment:
--------------
CMP.A1 - VERIFY
CMP.A2 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
JD0615 - POLISH COMPLETED. ON HOLD FOR INTRA-DIE MEASUREMENTS.
JD0524 - ON HOLD FOR ENG SPLITS AT ILD4.
XD0544 - WILL BE GOING ON HOLD AFTER 900SEC OF POLISH ON CMP.B1 (PER ENG).
Monitor status:
--------------
2 boxes of 12K mqc wafers.
0 boxes of 50K breakin wafers.
Number of product lots in room:
------------------------------
10
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0615 - M1 - 24WFRS
JL0677 - PMD - 22
JL0678 - PMD - 24
XE0577 - M3 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
SEE SAMUEL GRALEY'S PASSDOWN
|
| 84.22 | passdown cmp b-shift 11/24/96 | FABSIX::M_PROVENCHER | | Sun Nov 24 1996 06:35 | 107 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 11 MQC'S
BREAKIN WAFERS 32 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24hr MQCS COMPLETED: 11/23/96 @ 2:00 pm
CMP.A1 24hr MQCS NEXT DUE : 11/24/96 @ 2:00 pm
CMP.A2 (Strasbaugh 6DS-SP) - up/running jl0680 pmd
CMP.A2 24hr MQCS COMPLETED: 11/24/96 @ 3:00 am
CMP.A2 24hr MQCS NEXT DUE : 11/25/96 @ 3:00 am
CMP.B1 (Speedfam CMP-V) - : up/running jl0676 m1
CMP.B1 24hr MQCS COMPLETED 11/23/96 @ 3:00 pm
CMP.B1 24hr MQCS NEXT DUE : 11/24/96 @ 3:00 pm
CMP.B1 12hr MQCS COMPLETED: 11/24/96 @ 2:00 am
CMP.B1 12hr MQCS NEXT DUE : 11/24/96 @ 2:00 pm
CMP.B2 (Speedfam CMP-V) - : up/mqc's in process
CMP.B2 24hr MQCS COMPLETED: 11/23/96 @ 8:00 am
CMP.B2 24hr MQCS NEXT DUE : 11/20/96 @ 8:00 am in process
CMP.B2 12hr MQCS COMPLETED: 11/24/96 @ 7:00 am
CMP.B2 12hr MQCS NEXT DUE : 11/24/96 @ 7:00 pm
CMP.B3 (Speedfam CMP-V) - : up/idle
CMP.B3 24hr MQCS COMPLETED: 11/23/96 @ 3:00 pm
CMP.B3 24hr MQCS NEXT DUE : 11/24/96 @ 3:00 pm
CMP.B3 12hr MQCS COMPLETED: 11/24/96 @ 4:00 am
CMP.B3 12hr MQCS NEXT DUE : 11/24/96 @ 4:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/running xd0603 m3
CMP-SCRUB.A1 12hr MQCS COMPLETED:11/23/96 @ 10:00 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE :11/24/96 @ 10:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:11/23/96 @ 10:00 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE :11/24/96 @ 10:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:11/23/96 @ 10:00 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE :11/24/96 @ 10:00 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.b2 24 hr mqc's *
Scrap lots:
----------
* none *
Hold Lots:
----------
* JD0636 m2 - HOLD FOR ENG, high uniformity % *
Monitor status:
--------------
3� boxes of 12k mqc wafers
1� box of 50K breakin wafers
lot in the room
------------------------------
* 3 lots (at time this passdown was sent)*
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE E.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* jd0670 pmd 24 wafers *
jl0643 m2 23 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
8 speedfam carriers
11 strasbaugh carriers
5 strasbaugh plates shimmed + filmed
|
| 84.23 | A-shift CMP passdown 11/24/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Nov 24 1996 19:43 | 108 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 18 mqc
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JL0679 (pmd).
CMP.A1 24hr MQCS COMPLETED: 4pm 11/24
CMP.A1 24hr MQCS NEXT DUE : 4pm 11/25
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JL0673 (pmd).
CMP.A2 24hr MQCS COMPLETED: 3am 11/24
CMP.A2 24hr MQCS NEXT DUE : 3am 11/25
CMP.B1 (Speedfam CMP-V) - RUNNING: JL0682 (m1).
CMP.B1 24hr MQCS COMPLETED: 2pm 11/24
CMP.B1 24hr MQCS NEXT DUE : 2pm 11/25
CMP.B1 12hr MQCS COMPLETED: 11am 11/24
CMP.B1 12hr MQCS NEXT DUE : 11pm 11/24
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0617 (m3).
CMP.B2 24hr MQCS COMPLETED: 9am 11/24
CMP.B2 24hr MQCS NEXT DUE : 9am 11/25
CMP.B2 12hr MQCS COMPLETED: 11am 11/24
CMP.B2 12hr MQCS NEXT DUE : 11pm 11/24
CMP.B3 (Speedfam CMP-V) - RUNNING: JD0630 (m2).
CMP.B3 24hr MQCS COMPLETED: 5pm 11/24
CMP.B3 24hr MQCS NEXT DUE : 5pm 11/25
CMP.B3 12hr MQCS COMPLETED: 11am 11/24
CMP.B3 12hr MQCS NEXT DUE : 11pm 11/24
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 11am 11/24
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 11pm 11/24
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 11am 11/24
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 11pm 11/24
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 11am 11/24
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 11pm 11/24
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1 box of 12K mqc wafers
2.5 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0680 - PMD - 23WFRS
JL0676 - M1 - 24
XD0606 - M1 - 15
JL0636 - M2 - 24
XD0603 - M3 - 22
# of carriers for strasbaugh/speedfam:
--------------------------------------
8 SPEEDFAM CARRIERS
8 STRASBAUGH CARRIERS
5 PLATES FILMED AND SHIMMED
|
| 84.24 | passdown cmp b-shift 11/25/96 | FABSIX::M_PROVENCHER | | Mon Nov 25 1996 05:57 | 111 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 MQC'S
BREAKIN WAFERS 32 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running jl0669 m1
CMP.A1 24hr MQCS COMPLETED: 11/24/96 @ 4:00 pm
CMP.A1 24hr MQCS NEXT DUE : 11/25/96 @ 4:00 pm
CMP.A2 (Strasbaugh 6DS-SP) - up/mqc after pad change (down @4:00am)
CMP.A2 24hr MQCS COMPLETED: in process
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - : up/xd0592 m3/
CMP.B1 24hr MQCS COMPLETED 11/24/96 @ 2:00 pm
CMP.B1 24hr MQCS NEXT DUE : 11/25/96 @ 2:00 pm
CMP.B1 12hr MQCS COMPLETED: 11/25/96 @ 3:30 am
CMP.B1 12hr MQCS NEXT DUE : 11/25/96 @ 3:30 pm
CMP.B2 (Speedfam CMP-V) - : up/jd0618 m3
CMP.B2 24hr MQCS COMPLETED: 11/24/96 @ 9:00 am
CMP.B2 24hr MQCS NEXT DUE : 11/25/96 @ 9:00 am
CMP.B2 12hr MQCS COMPLETED: 11/25/96 @ 3:30 am
CMP.B2 12hr MQCS NEXT DUE : 11/25/96 @ 3:30 pm
CMP.B3 (Speedfam CMP-V) - : up/jd0651 m2/jl0674 m1
CMP.B3 24hr MQCS COMPLETED: 11/24/96 @ 5:00 pm
CMP.B3 24hr MQCS NEXT DUE : 11/25/96 @ 5:00 pm
CMP.B3 12hr MQCS COMPLETED: 11/25/96 @ 4:00 am
CMP.B3 12hr MQCS NEXT DUE : 11/25/96 @ 4:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:11/24/96 @ 11:00 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE :11/25/96 @ 11:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:11/24/96 @ 11:00 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE :11/25/96 @ 11:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:11/24/96 @ 11:00 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE :11/25/96 @ 11:00 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.a2 mqc after pad change *
Scrap lots:
----------
* none *
Hold Lots:
----------
* xd0590 m25 just came into cmp will need barcode/100% meas per e.bodensieck *
Monitor status:
--------------
1� boxes of 12k mqc wafers one due @ 7:00 am
1� box of 50K breakin wafers
lot in the room
------------------------------
* 7 lots (at time this passdown was sent)*
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE E.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* jl0673 pmd 24 wafers *
jl0679 pmd 20 wafers
jl0685 m1 24 wafers
xe0602 m1 23 wafers
jd0630 m2 22 wafers
jd0617 m3 22 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
8 speedfam carriers
8 strasbaugh carriers
5 strasbaugh plates shimmed + filmed
|
| 84.25 | A-shift CMP passdown 11/25/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Nov 25 1996 19:44 | 109 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 25 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0664 (m1).
CMP.A1 24hr MQCS COMPLETED: 12pm 11/25
CMP.A1 24hr MQCS NEXT DUE : 12pm 11/26
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JL0706 (pmd).
CMP.A2 24hr MQCS COMPLETED: 8:30am 11/25
CMP.A2 24hr MQCS NEXT DUE : 8:30am 11/26
CMP.B1 (Speedfam CMP-V) - RUNNING: ZE0212 (m1).
CMP.B1 24hr MQCS COMPLETED: 7:30pm 11/25
CMP.B1 24hr MQCS NEXT DUE : 7:30pm 11/26
CMP.B1 12hr MQCS COMPLETED: 7:30pm 11/25
CMP.B1 12hr MQCS NEXT DUE : 7:30am 11/26
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0590 (m3).
CMP.B2 24hr MQCS COMPLETED: 8am 11/25
CMP.B2 24hr MQCS NEXT DUE : 8am 11/26
CMP.B2 12hr MQCS COMPLETED: 8am 11/25
CMP.B2 12hr MQCS NEXT DUE : 8pm 11/25
CMP.B3 (Speedfam CMP-V) - RUNNING: XD0620 (m1).
CMP.B3 24hr MQCS COMPLETED: 7:30pm 11/25
CMP.B3 24hr MQCS NEXT DUE : 7:30pm 11/26
CMP.B3 12hr MQCS COMPLETED: 7:30pm 11/25
CMP.B3 12hr MQCS NEXT DUE : 7:30am 11/26
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 11am 11/25
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 11pm 11/25
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 11am 11/25
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 11pm 11/25
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 11am 11/25
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 11pm 11/25
Hot/B lots in area:
__________________
XD0620 - M1
XD0616 - M1
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0590 - SPLIT LOT. HOLD FOR ERIC BODENSIECK.
Monitor status:
--------------
� BOX OF 12K MQC WAFERS (more on order)
� BOX OF 50K BREAKIN WAFERS
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0669 - M1 - 22WFRS
XD0592 - M3 - 23
JD0618 - M3 - 24
JL0678 - M1 - 24
JD0651 - M2 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
8 SPEEDFAM CARRIERS
8 STRASBAUGH CARRIERS
5 PLATES FILMED/SHIMMED
|
| 84.26 | passdown cmp b-shift 11/26/96 | FABSIX::M_PROVENCHER | | Tue Nov 26 1996 06:14 | 114 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 8 MQC'S
BREAKIN WAFERS 38 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24hr MQCS COMPLETED: 11/25/96 @ 12:00 pm
CMP.A1 24hr MQCS NEXT DUE : 11/26/96 @ 12:00 pm
CMP.A2 (Strasbaugh 6DS-SP) - up/running jl0658 m2
CMP.A2 24hr MQCS COMPLETED: 11/26/96 @ 4:00 am
CMP.A2 24hr MQCS NEXT DUE : 11/27/96 @ 4:00 am
CMP.B1 (Speedfam CMP-V) - : up/running jd0647 m2 hotlot/
CMP.B1 24hr MQCS COMPLETED 11/25/96 @ 7:30 am
CMP.B1 24hr MQCS NEXT DUE : 11/26/96 @ 7:30 am started @ 7:30 am
CMP.B1 12hr MQCS COMPLETED: 11/26/96 @ 7:30 am
CMP.B1 12hr MQCS NEXT DUE : 11/26/96 @ 7:30 pm
CMP.B2 (Speedfam CMP-V) - : up/jl0657 m2/
CMP.B2 24hr MQCS COMPLETED: 11/25/96 @ 8:00 am
CMP.B2 24hr MQCS NEXT DUE : 11/26/96 @ 8:00 am
CMP.B2 12hr MQCS COMPLETED: 11/26/96 @ 7:30 am
CMP.B2 12hr MQCS NEXT DUE : 11/26/96 @ 7:30 pm
CMP.B3 (Speedfam CMP-V) - : up/xd0485 m3/
CMP.B3 24hr MQCS COMPLETED: 11/25/96 @ 8:30 pm
CMP.B3 24hr MQCS NEXT DUE : 11/26/96 @ 8:30 pm
CMP.B3 12hr MQCS COMPLETED: 11/26/96 @ 7:30 am
CMP.B3 12hr MQCS NEXT DUE : 11/26/96 @ 7:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:11/26/96 @ 5:30 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE :11/26/96 @ 5:30 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:11/26/96 @ 5:30 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE :11/26/96 @ 5:30 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:11/26/96 @ 5:30 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE :11/26/96 @ 5:30 pm
Hot/B lots in area:
__________________
* jd0647 m2 *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
----------
* xd0590 m25 e.bodensieck *
Monitor status:
--------------
1� boxes of 12k mqc wafers 2 ordered @ 10 pm
� box of 50K breakin wafers 2 ordered @ 10 pm
lot in the room
------------------------------
*11 lots (at time this passdown was sent)*
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE T.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* jl0706 pmd 24 wafers *
xd0617 pmd 24 wafers
jd0664 m1 24 wafers
xd0620 m1 24 wafers (hotlot)
xd0616 m1 23 wafers
ze0212 m1 24 wafers
xe0529 m2 16 wafers
jd0619 m3 22 wafers
jl0657 m2 23 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
8 speedfam carriers
8 strasbaugh carriers
5 strasbaugh plates shimmed + filmed
|
| 84.27 | A-shift CMP passdown 11/26/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Nov 26 1996 19:43 | 112 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A1 24hr MQCS COMPLETED: 12pm 11/25
CMP.A1 24hr MQCS NEXT DUE : 12pm 11/26 (pad at 300wfrs)
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 24hr MQCS COMPLETED: 4am 11/26
CMP.A2 24hr MQCS NEXT DUE : 4am 11/27
CMP.B1 (Speedfam CMP-V) - MQC: running 24hr mqcs.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0590 (m25).
CMP.B2 24hr MQCS COMPLETED: 8am 11/25
CMP.B2 24hr MQCS NEXT DUE : 8am 11/26 (will need pad change after lot.
2000+ wafers).
CMP.B2 12hr MQCS COMPLETED: 8am 11/26
CMP.B2 12hr MQCS NEXT DUE : 8pm 11/26
CMP.B3 (Speedfam CMP-V) - RUNNING: XM0587 (m1) and JL0570B (m2).
CMP.B3 24hr MQCS COMPLETED: 9pm 11/25
CMP.B3 24hr MQCS NEXT DUE : 9pm 11/26
CMP.B3 12hr MQCS COMPLETED: 10am 11/26
CMP.B3 12hr MQCS NEXT DUE : 10pm 11/26
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9am 11/26
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9pm 11/26
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9am 11/26
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9pm 11/26
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9am 11/26
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9pm 11/26
Hot/B lots in area:
__________________
JD0647 - M2
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B1 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0590 - SPLIT LOT. HOLD FOR ERIC B.
Monitor status:
--------------
� BOX OF 12K MQC WAFERS. (MORE ON ORDER)
� BOX OF 50K BREAKIN WAFERS.(MORE ON ORDER)
Number of product lots in room:
------------------------------
13
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0646 - M1 - 23WFRS
JL0658 - M2 - 24
JD0647 - M2 - 24
JD0619 - M3 - 22
JL0657 - M2 - 20
JL0570B - M1 - 5
XE0578 - M3 - 23
XD0485 - M3 - 19
# of carriers for strasbaugh/speedfam:
--------------------------------------
8 SPEEDFAM
8 STRASBAUGH
5 STRASBAUGH PLATES FILMED/SHIMMED
|
| 84.28 | PASSDOWN | FABSIX::D_CAUSE | | Sat Jan 04 1997 08:04 | 38 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -DOWN/ FAILED MQC FOR UNIFORMITY AND SCRATCHES
CMP.A2 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/IDLE
CMP.B2 (Speedfam CMP-V) - DOWN/MQC FAILED FOR RANGE AND LOW REMOVAL RATE
CMP.B3 (Speedfam CMP-V) - UP/RUNNING TU
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:JD0783 DUE AT 8:30
------------------
HOLD LOTS IN AREA:2
___________________
NUMBER of product lots in room:2
--------------------------------
BREAK IN WAFERS USED:20
MQC WAFERS USED:10 WAFERS USED
MQC WAFERS AVAIL:5 BOXES
----------
|
| 84.29 | PASSDOWN | FABSIX::D_CAUSE | | Wed Jan 08 1997 07:35 | 39 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING JD0809
CMP.A2 (Strasbaugh 6DS-SP) -DOWN/PAD CHANGE WILL NEED BREAKIN AND FULL MQC
CMP.B1 (Speedfam CMP-V) - UP/RUNNING JD0839 FIRST PASS ***HOT LOT***
CMP.B2 (Speedfam CMP-V) - DOWN/MQC EVALUATING MQC'S
CMP.B3 (Speedfam CMP-V) - UP/RUNNING 2 XE0615 RAN FIRST 400 SEC
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:1
------------------
JD0839
HOLD LOTS IN AREA:0
___________________
NUMBER of product lots in room:11
--------------------------------
BREAK IN WAFERS USED:30
MQC WAFERS USED:25 WAFERS USED
MQC WAFERS AVAIL:4.5 BOXES
----------
|
| 84.30 | PASSDOWN | FABSIX::D_CAUSE | | Thu Jan 09 1997 07:42 | 41 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -DOWN/MQC FAILED 24HR MQC NEW PAD APPLIED
NEEDS FULL MQC
CMP.A2 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.B1 (Speedfam CMP-V) - DOWN/MQC SECOND PAD AFTER PM FAILED FOR PARTICLES
AND STD NEEDS BREAKIN AND FULL MQC
CMP.B2 (Speedfam CMP-V) - UP/IDLE
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JL0768 NEEDS TOUCH UP
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
------------------
HOLD LOTS IN AREA:2
___________________
NUMBER of product lots in room:4
--------------------------------
BREAK IN WAFERS USED:30
MQC WAFERS USED:24 WAFERS USED
MQC WAFERS AVAIL:3 BOXES
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