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PREVENTIVE MAINTENANCE SCHEDULE FOR FISCAL YEAR 1996
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SYSTEM NAME: R. H. STRASBAUGH MODEL 6DS-SP PLANARIZER
RTC NAME: CMP.A1
WORK WEEK #(S) PM TYPE DUE
-------------------------------------------------------------
1,2,4,5,6,8,9,10,11, WEEKLY
13,14,15,17,18,19,21,
22,23,24,26,27,28,30,
31,32,34,35,36,37,39,
40,41,43,44,45,47,48,
49,50,52
3,7,16,20,25,29,33,42, MONTHLY
46,51
38 SEMI-ANNUAL
12 ANNUAL
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PREVENTIVE MAINTENANCE SCHEDULE FOR FISCAL YEAR 1996
----------------------------------------------------
SYSTEM NAME: R. H. STRASBAUGH MODEL 6DS-SP PLANARIZER
RTC NAME: CMP.A2
WORK WEEK #(S) PM TYPE DUE
-------------------------------------------------------------
1,3,4,5,7,8,9,11,12, WEEKLY
13,14,16,17,18,20,21,
22,24,25,26,27,29,30,
31,33,34,35,37,38,39,
40,42,43,44,46,47,48,
50,51,52
2,6,10,15,19,28,32,36, MONTHLY
41,45
23 SEMI-ANNUAL
49 ANNUAL
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PREVENTIVE MAINTENANCE SCHEDULE FOR FISCAL YEAR 1996
----------------------------------------------------
SYSTEM NAME: ONTRAK DSS-200 WAFER SCRUBBER
RTC NAME: CMP-SCRUB.A1
WORK WEEK #(S) PM TYPE DUE
-------------------------------------------------------------
1,2,3,4,5,7,8,9,10,11, WEEKLY
12,13,14,15,16,17,18,
20,21,22,23,24,25,26,
27,28,29,30,31,33,34,
35,36,37,38,39,40,41,
42,43,44,46,47,48,49,
50,51,52
6,32 QUARTERLY
19,45 SEMI-ANNUAL
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PREVENTIVE MAINTENANCE SCHEDULE FOR FISCAL YEAR 1996
----------------------------------------------------
SYSTEM NAME: ONTRAK DSS-200 WAFER SCRUBBER
RTC NAME: CMP-SCRUB.A2
WORK WEEK #(S) PM TYPE DUE
-------------------------------------------------------------
1,2,3,4,5,6,7,8,9,10, WEEKLY
12,13,14,15,16,17,18,
20,21,22,23,25,26,27,
28,29,30,31,32,33,34,
35,36,38,39,40,41,42,
43,44,45,46,47,48,49,
51,52
24,50 QUARTERLY
11,37 SEMI-ANNUAL
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PREVENTIVE MAINTENANCE SCHEDULE FOR FISCAL YEAR 1996
----------------------------------------------------
SYSTEM NAME: SPEEDFAM CMP-V PLANARIZER
RTC NAME: CMP.B1
WORK WEEK #(S) PM TYPE DUE
-------------------------------------------------------------
2,3,4,5,7,8,10,11,12,13, WEEKLY
15,16,17,19,20,21,23,24,
25,26,28,29,30,32,33,34,
36,37,38,39,41,42,43,45,
46,47,49,50,51,52
1,5,14,18,27,31,40,44 MONTHLY
9,35 QUARTERLY
22,48 SEMI-ANNUAL
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