| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 73.1 | 4/1/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Mon Apr 01 1996 08:17 | 76 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 5 cmp.a1/.b1/scrub
BREAKIN WAFERS 30 misc
BROKEN PRODUCT WAFERS 2 A2 CRASHED LOT #YD0156 M1
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP IDLE
CMP.B1 (Speedfam CMP-V) - UP IDLE
CMP.B2 (SPEEDFAM CMP-V) - UP IDLE
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S PERFORMED
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
* NONE *
Down Equipment:
--------------
* NONE *
Scrap lots:
----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
0
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
----------------------
XL0432 PMD 24
YD0156 M1 24
JD0129 M2 24
XD0416 M2 23
JD0118 M3 19
JD0139 M2 21
# of carriers for strasbaugh/speedfam:
-------------------------------------
9 spare carriers for CMP.B1/B2
3 full carriers for CMP.A1/.A2
|
| 73.2 | A-shift CMP passdown 4/1/96 | SUBPAC::SADIN | Freedom isn't free. | Mon Apr 01 1996 20:41 | 73 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 21 cmp.a1/.b1/.b1/scrb
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - ENG: running grooved pad experiment.
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.B1 (Speedfam CMP-V) - RUNNING: XD0398 (m3) and XD0443 (pmd).
* note * equipment engineering will need this tool at 8am tomorrow morning.
Please have all work completed by this time.
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0395 (m3).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
ZD0098 - CMP_STI - 3.0DAYS
Down Equipment:
--------------
CMP.A1 - ENG EXPERIMENTS
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1.5boxes of 12K wafers (2more on order)
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* see TDCO regarding wafer breakin procedure on speedfams *
Lots/wafers processed:
---------------------
JD0156 - PMD - 24WFRS
JD0142 - M1 - 22WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
9 SPEEDFAM CARRIERS
6 STRASBAUGH CARRIERS
|
| 73.3 | 4/2/96 cmp b shift passdown | FABSIX::L_CEDRONE | | Tue Apr 02 1996 08:23 | 82 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 4 cmp.a1/.b1/scrub
BREAKIN WAFERS 50 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP IDLE
CMP.B1 (Speedfam CMP-V) - UP IDLE
CMP.B2 (SPEEDFAM CMP-V) - UP IDLE
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S PERFORMED
Special Comments:
-----------------
Lot XD0425 is in the scrubber it needs final measurements before being
shiped
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
* NONE *
Down Equipment:
--------------
* NONE *
Scrap lots:
----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
1 1/2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
0
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
----------------------
XD0436 PMD 23
XD0443 PMD 24
YD0157 M1 24
XD0395 M3 17
XD0398 M3 16
XD0404 M3 22
XD0425 M2 22
# of carriers for strasbaugh/speedfam:
-------------------------------------
10 spare carriers for CMP.B1/B2
4 full carriers for CMP.A1/.A2
|
| 73.4 | TUESDAY CMP A SHIFT PASSDOWN | FABSIX::J_ROA | | Tue Apr 02 1996 20:41 | 85 |
|
-< A shift CMP passdown - Tuesday 04/02/96 >-
--------------------------------------------------------------------------------
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1 mqcs
BREAKIN WAFERS 50 cmp.b1 breakin
Built carriers and plates available.
-----------------------------------
3 FULL CARRIERS BUILT ( STRASBAUGH )
------------------------------------------
9 SPEEDFAM B1 AND B2 CARRIERS AVAILABLE
CMP.A1 (Strasbaugh 6DS-SP) - IDLE/UP:
CMP.A2 (Strasbaugh 6DS-SP) - IDLE/UP:
CMP.B1 (Speedfam CMP-V) - UP/MQC:
CMP.B2 (Speefam CMP_V ) - UP: Running lot JD0122/M3
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE:
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE:
Hot/B lots in area:
__________________
B lot JD0122
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
NONE
Down Equipment:
--------------
Scrap lots:
----------
Hold Lots:
---------
Monitor status:
--------------
Number of product lots in room:
------------------------------
1 LOTS
New specs/revs posted:
---------------------
|
| 73.5 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Wed Apr 03 1996 07:40 | 40 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/RUNNING LOT JD0137 100% ON A4
CMP.B2 (Speedfam CMP-V)- UP/RUNNING LOT XD0437 100% ON A5
CMP-SCRUB.A1 (On-track scrubber) - DOWN/BROKEN ARM IN OUTSIDE SCRUB STATION
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
HOT/B lots in area: 1
-------------------
XD0437
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:1 LOT WAITING FOR T TAG
--------------------
HOLD LOTS IN AREA:
__________________
DOWN equipment:CMP-SCRUB.A1
---------------
MONITOR status:5 BOXS
---------------
NUMBER of product lots in room:3
-------------------------------
LOTS COMPLETED : 4
----------------
|
| 73.6 | 4/7/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Sun Apr 07 1996 08:59 | 76 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 17 cmp.a1/.b1/scrub
BREAKIN WAFERS 75 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING JD0154 M1, PRE MEASURING JD0148
CMP.A2 (Strasbaugh 6DS-SP) - UP MQC, RUNNING LOT JD0151 HOT
(The left carrier spit out a wafer on the first run, no wafers
were broken. Changed the left carrier now doing mqc.)
CMP.B1 (Speedfam CMP-V) - UP RUNNING XD0412 M3 + JD0119 M3
CMP.B2 (SPEEDFAM CMP-V) - UP MQC
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S PERFORMED
Hot/B lots in area:
___________________
XD0435 M2 B LOT (IN SCRUBER)
JD0151 M2 H LOT (AT POLISH A2)
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
XD0439 PMD NO TAGS
JD0097 M2 NO MACHINE
Down Equipment:
--------------
* NONE *
Scrap lots:
----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
3 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
7
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
----------------------
4 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
14 spare carriers for CMP.B1/B2
5 full carriers for CMP.A1/.A2
|
| 73.7 | A-shift CMP passdown 4/7/96 | SUBPAC::SADIN | Freedom isn't free. | Sun Apr 07 1996 20:29 | 78 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 cmp.a2/.b2/scrub
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0173 (pmd).
CMP.A2 (Strasbaugh 6DS-SP) - MQC: running 2nd set of mqcs. first set failed
for high unif.
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0097 (m2) and YD0159 (m2). Pad nearing
end of life (1000wfrs).
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0408 (m2).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0173 - HOT PMD
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
ZD0098 - STI - 9.0DAYS (ENG LOT)
Down Equipment:
--------------
CMP.A2 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
4.5 boxes of 12K wafers.
Number of product lots in room:
------------------------------
14
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0412 - M3 - 16WFRS
JD0154 - M1 - 19
JD0119 - M3 - 18
JD0151 - M2 - 17
JD0148 - M1 - 20
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 SPEEDFAM CARRIERS
3 STRASBAUGH CARRIERS
|
| 73.8 | 4/8/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Mon Apr 08 1996 08:41 | 77 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 cmp.a1/.b1/scrub
BREAKIN WAFERS 80 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING XL0432 M1
CMP.B1 (Speedfam CMP-V) - UP IDLE
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING XD0420 M3 + JD0143 M2
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S PERFORMED
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
JD0161 PMD 23 NO TAGS
JD0168 PMD 24 NO TAGS
JD0172 PMD 24 NO TAGS
Down Equipment:
--------------
* NONE *
Scrap lots:
-----------
2W FROM LOT JD0097 (THEY WERE RUN ON .B1 FOR 205 SEC. I DON'T KNOW WHAT HAPPEND
THE REST OF THAT LOT LOOKS GOOD.)
Hold Lots:
---------
* NONE *
Monitor status:
---------------
3 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
----------------------
8 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
14 spare carriers for CMP.B1/B2
3 full carriers for CMP.A1/.A2
|
| 73.9 | A-shift CMP passdown 4/8/96 | SUBPAC::SADIN | Freedom isn't free. | Mon Apr 08 1996 20:16 | 75 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 9 cmp.b2/.a1/scrb
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0155 (m1).
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0415 (m3).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
JD0161 - NO TAG
JD0168 - NO TAG
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
3.5 boxes of 12K monitor wafers
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XL0432 - M1 - 11WFRS
JD0172 - PMD - 24
XD0451 - PMD - 23
JD0143 - M2 - 24
XD0420 - M3 - 22
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 SPEEDFAM CARRIERS
3 STRASBAUGH CARRIERS
|
| 73.10 | 4/9/96 cmp b shift passdown | FABSIX::L_CEDRONE | | Tue Apr 09 1996 08:10 | 73 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 3 cmp.a1/.b1/scrub
BREAKIN WAFERS 25 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING JD0168 PMD
CMP.B1 (Speedfam CMP-V) - UP RUNNING XL0433 M1 + XL0429 M1
CMP.B2 (SPEEDFAM CMP-V) - UP IDLE
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S PERFORMED
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
* NONE *
Down Equipment:
--------------
* NONE *
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
3 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
3
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
----------------------
XD0415 M3
JD0155 M1
# of carriers for strasbaugh/speedfam:
-------------------------------------
14 spare carriers for CMP.B1/B2
6 full carriers for CMP.A1/.A2
|
| 73.11 | A-shift CMP passdown 4/09/96 | SUBPAC::SADIN | Freedom isn't free. | Tue Apr 09 1996 20:34 | 75 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 cmp.b1/.b2/.a1/.a2
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0161 (pmd).
CMP.A2 (Strasbaugh 6DS-SP) - MQC: failed first set of mqcs for bad unif.
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0166 (m1 - hot) and XD0414 (m3).
CMP.B2 (Speedfam CMP-V) - DOWN: down for a pad change (bad unif on last
mqc).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0166 - HOT M1
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
ZD0098 - 11.0 DAYS (ENG LOT)
Down Equipment:
--------------
CMP.A2 - MQC
CMP.B2 - PAD CHANGE
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2.5 boxes of 12k monitor wafers
Number of product lots in room:
------------------------------
7
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0168 - PMD - 24WFRS
XL0429 - M1 - 22
XL0433 - M1 - 12
JD0146 - M2 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 SPEEDFAM CARRIERS
2 STRASBAUGH CARRIERS
|
| 73.12 | 4/10/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Wed Apr 10 1996 08:47 | 72 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 cmp.a1/.b1/scrub
BREAKIN WAFERS 50 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP IDLE
CMP.B1 (Speedfam CMP-V) - UP IDLE
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING XD0425 M3 +XD0416 M3
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S PERFORMED
Hot/B lots in area:
___________________
XD0437 B LOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
* NONE *
Down Equipment:
--------------
* NONE *
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
3 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
----------------------
6 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
14 spare carriers for CMP.B1/B2
2 full carriers for CMP.A1/.A2
|
| 73.13 | CMP A SHIFT PASSDOWN | FABSIX::J_ROA | | Wed Apr 10 1996 20:14 | 85 |
|
-< A shift CMP passdown - Wednesday 04/10/96 >-
--------------------------------------------------------------------------------
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1 mqcs
BREAKIN WAFERS 50 cmp.b1 breakin
Built carriers and plates available.
-----------------------------------
3 FULL CARRIERS BUILT ( STRASBAUGH )
------------------------------------------
14 SPEEDFAM B1 AND B2 CARRIERS AVAILABLE
CMP.A1 (Strasbaugh 6DS-SP) - IDLE/UP:
CMP.A2 (Strasbaugh 6DS-SP) - IDLE/UP:
CMP.B1 (Speedfam CMP-V) - UP: Running lot XL0427
CMP.B2 (Speefam CMP_V ) - UP: Running hot lot JD0151
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE:
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE:
Hot/B lots in area:
__________________
HOT LOT JD0151
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
NONE
Down Equipment:
--------------
Scrap lots:
----------
Hold Lots:
---------
Monitor status:
--------------
Number of product lots in room:
------------------------------
2 LOTS
New specs/revs posted:
---------------------
|
| 73.14 | 4/14/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Sun Apr 14 1996 08:27 | 72 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 13 cmp.a1/.b1/scrub
BREAKIN WAFERS 50 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP IDLE
CMP.B1 (Speedfam CMP-V) - UP RUNNING YD0160 M1
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING XD0442 M1
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S PERFORMED
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
JD0158 M1 NO TAG
Down Equipment:
--------------
* NONE *
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
3
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
4 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
6 spare carriers for CMP.B1/B2
4 full carriers for CMP.A1/.A2
|
| 73.15 | A-shift CMP passdown 4/14/96 | SUBPAC::SADIN | Freedom isn't free. | Sun Apr 14 1996 20:25 | 74 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 2 scrb
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.B1 (Speedfam CMP-V) - RUNNING: XL0432 (m2) and JD0140 (m3).
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0143 (m3).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
JD0173 - ILD2 1
JD0207 - PMD
XD0452 - PMD
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12k monitor wafers
Number of product lots in room:
------------------------------
5
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0158 - m1 - 24wfrs
YD0160 - m2 - 24wfrs
XD0442 - m1 - 23wfrs
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 speedfam carriers
4 strasbaugh carriers
|
| 73.16 | 4/15/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Mon Apr 15 1996 08:37 | 74 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 21 cmp.a1/.b1/scrub
BREAKIN WAFERS 100 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING XD0452 PMD (HOT)
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING JD0148 M2
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0165 M1 + JD0141 M3
CMP.B2 (SPEEDFAM CMP-V) - UP MQC (2ND PAD WAS JUST CHANGED)
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S PERFORMED
Hot/B lots in area:
___________________
XD0452 PMD
JD0173 M2
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
JD0146 M3 NO MACHINE
Down Equipment:
--------------
* NONE *
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
1 1/2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
5 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
6 spare carriers for CMP.B1/B2
3 full carriers for CMP.A1/.A2
3 filmed and shimed for CMP.A1/.A2
|
| 73.17 | A-shift CMP passdown 4/15/96 | SUBPAC::SADIN | Freedom isn't free. | Mon Apr 15 1996 20:20 | 76 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 11 cmp.a1/.b2/scrb
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: running mqcs after monthly pm.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JL0163 (pmd).
CMP.B1 (Speedfam CMP-V) - RUNNING: XD0451 (m2).
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0143 (m3) and XD0437 (m3).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0451 - HOT ILD2
XD0437 - BLOT ILD3
XD0446 - BLOT PMD
Hot lots coming to area:
-----------------------
JD0166 - ILD3 1
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
4 boxes of 12k monitor wafers
Number of product lots in room:
------------------------------
11
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0452 - M1 - 22WFRS
JD0148 - M2 - 19WFRS
JD0165 - M1 - 20WFRS
JD0141 - M3 - 22WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 SPEEDFAM CARRIERS
3 STRASBAUGH CARRIERS
3 PLATES SHIMMED/FILMED
|
| 73.18 | 4/16/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Tue Apr 16 1996 08:56 | 76 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 cmp.a1/.b1/scrub
BREAKIN WAFERS 100 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING JD0157 M1
CMP.A2 (Strasbaugh 6DS-SP) - DOWN PAD CHANGE, ALSO NEEDS DOWN FORCE CHECKED
BECAUSE THE LEFT HEAD REMOVED 800A MORE THAN THE RIGHT.
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0166 M3 HOT + JD0172
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING XD0408 M3 + XD0439 M1
CMP-SCRUB.A1 (On-track scrubber) - IDLE
CMP-SCRUB.A2 (On-track scrubber) - IDLE
Hot/B lots in area:
___________________
JD0166 HOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
* NONE *
Down Equipment:
--------------
CMP.A2 DOWN PAD CHANGE
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
3 1/2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
7
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
7 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
6 spare carriers for CMP.B1/B2
0 full carriers for CMP.A1/.A2
0 filmed and shimed for CMP.A1/.A2
LOT JD0146 M3 NEEDS TO BE LOOKED AT BY PSS
|
| 73.19 | A-shift CMP passdown 4/16/96 | SUBPAC::SADIN | Freedom isn't free. | Tue Apr 16 1996 20:38 | 75 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.a1/.a2/.b1/.b2
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN: broken wafer on pad.
CMP.A2 (Strasbaugh 6DS-SP) - MQC: running mqcs after monthly pm.
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0168 (m1).
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0419 (m1).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
ZD0098 - 18DAYS (STI LOT)
Down Equipment:
--------------
CMP.A1 - BROKEN WAFER
CMP.A2 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
5 boxes of 12K monitor wafers
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0167 - PMD - 24
JD0157 - M1 - 23
JD0172 - M1 - 24
JD0166 - M3 - 20
XD0439 - M1 - 23
XD0408 - M3 - 22
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 SPEEDFAM CARRIERS
2 STRASBAUGH CARRIERS
|
| 73.20 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Sat Apr 20 1996 08:07 | 39 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/RUNNING LOT JD0121 100% ON A.5
CMP.B2 (Speedfam CMP-V)- DOWN/PAD CHANGE (DRIED OUT)NEED FULL MQC
RUNNING 2 LOTS JD0144,JD0144A1
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
HOT/B lots in area:
-------------------
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:
--------------------
HOLD LOTS IN AREA:
__________________
DOWN equipment:CMP.B2, PAD CHANGE
---------------
---------------
NUMBER of product lots in room:3
-------------------------------
LOTS COMPLETED : 4
----------------
|
| 73.21 | 4/21/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Sun Apr 21 1996 08:10 | 75 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 11 cmp.a1/.b1/scrub
BREAKIN WAFERS 25 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP IDLE
CMP.B1 (Speedfam CMP-V) - UP IDLE
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING JD0167 M1 + XD0440 M2 BOTH AT TOUCH UP
(LOT XD0440 HAS 5 WAFERS THAT ARE OVER POLISHED DO TO A MACHINE MALFUNCTION
THESE WAFERS NEED TO BE LOOKED AT BY PSS.)
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S PERFORMED
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
* NONE *
Down Equipment:
--------------
* NONE *
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
JL0163 1016 M1 - LOT WILL NOT MEASURE ON THICKNESS.A4 AND ITS DEVICE TYPE IS NOT
SET UP ON THICKNESS.A5. (THIS LOT WAS PUT ON HOLD BY C SHIFT)
Monitor status:
---------------
3 1/2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
3
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
4 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
14 spare carriers for CMP.B1/B2
6 full carriers for CMP.A1/.A2
0 filmed and shimed for CMP.A1/.A2
|
| 73.22 | A-shift CMP passdown 4/21/96 | SUBPAC::SADIN | Freedom isn't free. | Sun Apr 21 1996 20:41 | 72 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1/.b2/.a1
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN: vacuum sensor errors.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0443 (m2).
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0160 (m2) and JD0154 (m3).
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0158 (m2) and XD0432 (m3).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - VACUUM SENSOR ERROR
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
3 boxes of 12K monitors
Number of product lots in room:
------------------------------
7
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0163 - M1 - 12WFRS
JD0167 - M1 - 24
XD0440 - M2 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 SPEEDFAM CARRIERS
6 STRASBAUGH CARRIERS
|
| 73.23 | 4/22/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Mon Apr 22 1996 08:33 | 72 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 1 cmp.a1/.b1/scrub
BREAKIN WAFERS 25 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP IDLE
CMP.B1 (Speedfam CMP-V) - UP RUNNING YD0155 100%
CMP.B2 (SPEEDFAM CMP-V) - UP IDLE
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S PERFORMED
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
* NONE *
Down Equipment:
--------------
* NONE *
Scrap lots:
-----------
XL0432 M3 TM55 SCRAPED 1 WAFER
Hold Lots:
---------
* NONE *
Monitor status:
---------------
3 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
7 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
14 spare carriers for CMP.B1/B2
6 full carriers for CMP.A1/.A2
0 filmed and shimed for CMP.A1/.A2
|
| 73.24 | CMP A SHIFT PASSDOWN | FABSIX::J_ROA | | Mon Apr 22 1996 20:48 | 88 |
|
-< A shift CMP passdown - Monday 04/22/96 >-
--------------------------------------------------------------------------------
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1 mqcs
BREAKIN WAFERS 75 cmp.b1 breakin
Built carriers and plates available.
-----------------------------------
6 FULL CARRIERS BUILT ( STRASBAUGH )
------------------------------------------
14 SPEEDFAM B1 AND B2 CARRIERS AVAILABLE
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: Touching up lot YD0160
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: Touching up lot YD0156
CMP.B1 (Speedfam CMP-V) - RUNNING: Polishing lot JD0148 M3/1026.( This lot was
running on CMP.B2)
CMP.B2 (Speefam CMP_V ) - DOWN: All five mqc wafers were found to have
scratches. As a result the tool was put down in RTC and both primary/
secondary pad need to be changed.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE:
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE:
Hot/B lots in area:
__________________
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
Two lots without tags
Down Equipment:
--------------
Scrap lots:
----------
Hold Lots:
---------
Monitor status:
--------------
Number of product lots in room:
------------------------------
5 LOTS
New specs/revs posted:
---------------------
|
| 73.25 | 4/23/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Tue Apr 23 1996 08:12 | 72 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 16 cmp.a1/.b1/scrub
BREAKIN WAFERS 45 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING JD0171 M1
CMP.B1 (Speedfam CMP-V) - UP IDLE
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING JD0183 PMD + XL0432A M3 TOUCH UP
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S PERFORMED
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
2 LOTS BOTH ILD2
Down Equipment:
--------------
* NONE *
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
3 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
4 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
12 spare carriers for CMP.B1/B2
6 full carriers for CMP.A1/.A2
0 filmed and shimed for CMP.A1/.A2
|
| 73.26 | A-shift CMP passdown 4/23/96 | SUBPAC::SADIN | Freedom isn't free. | Tue Apr 23 1996 20:12 | 72 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 6 cmp.a1/.a2/scrb
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0171 (m1).
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XL0448 (pmd).
CMP.B1 (Speedfam CMP-V) - DOWN: numerous hardware/software errors.
CMP.B2 (Speedfam CMP-V) - DOWN: flipper-gripper problems.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B1 - MULTIPLE HARDWARE/SOFTWARE PROBLEMS
CMP.B2 - FLIPPER-GRIPPER PROBLEMS
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1.5 boxes of 12K monitor wafers
Number of product lots in room:
------------------------------
10
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0183 - PMD - 18WFRS
XL0432A - M3 - 12WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 SPEEDFAM CARRIERS
4 STRASBAUGH CARRIERS
|
| 73.27 | 4/24/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Wed Apr 24 1996 07:49 | 77 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 14 cmp.a1/.b1/scrub
BREAKIN WAFERS 100 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP MQC AFTER PAD CHANGE
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING JD0188 PMD + XL0428A M2
CMP.B1 (Speedfam CMP-V) - DOWN, CARRIER ROTATION ERRORS
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING JD0153 M3 + XL0433A M3
CMP-SCRUB.A1 (On-track scrubber) - IDLE
CMP-SCRUB.A2 (On-track scrubber) - IDLE
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
* NONE *
Down Equipment:
--------------
B1 DOWN CARRIER ROTATION ERRORS
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
1/2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
JD0186 PMD 24W
XL0448 PMD 24W
JD0171 M1 24W
JD0164 M2 24W
JD0168 M2 24W
XL0433A M3 12W
# of carriers for strasbaugh/speedfam:
-------------------------------------
6 spare carriers for CMP.B1/B2
4 full carriers for CMP.A1/.A2
0 filmed and shimed for CMP.A1/.A2
|
| 73.28 | CMP A SHIFT PASSDOWN | FABSIX::J_ROA | | Wed Apr 24 1996 20:45 | 87 |
|
-< A shift CMP passdown - Wednesday 04/24/96 >-
--------------------------------------------------------------------------------
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1 mqcs
BREAKIN WAFERS 75 cmp.b1 breakin
Built carriers and plates available.
-----------------------------------
2 FULL CARRIERS BUILT ( STRASBAUGH )
------------------------------------------
11 SPEEDFAM B1 AND B2 CARRIERS AVAILABLE
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE: After third try and a few pad changes
the machine finally passed mqc's and is ready to go.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: touchig up lot JD0189
CMP.B1 (Speedfam CMP-V) - Verify: It appears the hard drive issue has been
resolved and We are getting ready to start break-in the pad.
CMP.B2 (Speefam CMP_V ) - UP/RUNNING: Hot lot XD0446 finished first polish
and it's about to be scrubbed. this lot needs to be measured 100% after the
scrub.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE:
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE:
Hot/B lots in area:
__________________
Hot lots coming to area:
-----------------------
HOT XD0446
Static Lots in area:
-------------------
4 lots without tags
Down Equipment:
--------------
Scrap lots:
----------
Hold Lots:
---------
Monitor status:
--------------
Number of product lots in room:
------------------------------
6 LOTS
New specs/revs posted:
---------------------
|
| 73.29 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Fri Apr 26 1996 08:36 | 39 |
|
CMP.A1 (Strasbaugh 6DS-SP) - DOWN 2ND PAD CHANGE DONE NEEDS FULL MQC
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING XD0442
CMP.B1 (Speedfam CMP-V) - MQC 2ND RUN WITH OFFSETS INCLUDED
CMP.B2 (Speedfam CMP-V)- UP/MQC BEING RUN
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC DONE
HOT/B lots in area:
-------------------
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:3
--------------------
HOLD LOTS IN AREA:
__________________
DOWN equipment:CMP.A1, PAD CHANGE
---------------
---------------
NUMBER of product lots in room:4
-------------------------------
LOTS COMPLETED : 8
----------------
|
| 73.30 | A-shift CMP passdown 4/28/96 | SUBPAC::SADIN | Freedom isn't free. | Sun Apr 28 1996 20:34 | 75 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 cmp.b1/.a1/scrb
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0453 (pmd).
CMP.B1 (Speedfam CMP-V) - RUNNING: XD0440 (m3) and JD0159 (m3).
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0167 (m2).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
JD0097 - TH_CMP25 1 - HOLD FOR ENG. NEEDS NEW RECIPE ON UV-1050.
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
JD0097 - TH_CMP25 1 - HOLD FOR ENG. NEEDS NEW RECIPE ON UV-1050.
Monitor status:
--------------
3 boxes of 12K monitors.
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0180 - M1 - 24WFRS
JD0195 - PMD - 24WFRS
XD0446 - M3 - 24WFRS
JL0176 - M2 - 12WFRS
JL0163 - M2 - 12WFRS
JD0184 - M1 - 23WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
9 SPEEDFAM CARRIERS
3 STRASBAUGH CARRIERS
|
| 73.31 | 4/29/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Mon Apr 29 1996 07:55 | 74 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 7 cmp.a1/.b1/scrub
BREAKIN WAFERS 25 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP IDLE
CMP.B1 (Speedfam CMP-V) - UP IDLE
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING JD0160 M3
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S PERFORMED
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
* NONE *
Down Equipment:
--------------
* NONE *
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
JD0097A - ENG.
Monitor status:
---------------
2 1/2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
2
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
JD0167 24 M2
JD0159 21 M3
XD0440 23 M3
# of carriers for strasbaugh/speedfam:
-------------------------------------
9 spare carriers for CMP.B1/B2
3 full carriers for CMP.A1/.A2
0 filmed and shimed for CMP.A1/.A2
|
| 73.32 | A-shift CMP passdown 4/29/96 | SUBPAC::SADIN | Freedom isn't free. | Mon Apr 29 1996 20:09 | 73 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 16 cmp.b1/.b2/.a1/.a2
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0185 (m1).
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.B1 (Speedfam CMP-V) - IDLE.
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0165 (m3).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
JD0097A - HOLD FOR L. CAMILLETTI. NEEDS COPIOUS P2/THICKNESS MEASUREMENTS
IN THE AM.
Monitor status:
--------------
3 boxes of 12K monitor wafers.
Number of product lots in room:
------------------------------
3
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0209 - M1 - 24WFRS
JD0097A- M3 - 12WFRS
JD0160 - M3 - 23WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 SPEEDFAM CARRIERS
3 STRASBAUGH CARRIERS
|
| 73.33 | 4/30/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Tue Apr 30 1996 08:03 | 73 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 7 cmp.a1/.b1/scrub
BREAKIN WAFERS 50 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP IDLE
CMP.B1 (Speedfam CMP-V) - UP JD0186 M1 + JD0189 M1
CMP.B2 (SPEEDFAM CMP-V) - UP JD0181 M1
CMP-SCRUB.A1 (On-track scrubber) - IDLE
CMP-SCRUB.A2 (On-track scrubber) - IDLE
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
XD0463-M1-23W
Static Lots in area:
--------------------
* NONE *
Down Equipment:
--------------
* NONE *
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
JD0097A - ENG.
XD0459 - ENG. STI LOT
Monitor status:
---------------
2 1/2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
5
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
2 lots
# of carriers for strasbaugh/speedfam:
-------------------------------------
9 spare carriers for CMP.B1/B2
0 full carriers for CMP.A1/.A2
0 filmed and shimed for CMP.A1/.A2
|
| 73.34 | A-shift CMP passdown 4/30/96 | SUBPAC::SADIN | Freedom isn't free. | Tue Apr 30 1996 20:36 | 72 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 14 cmp.b1/.b2/.a1/.a2
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - MQC: running mqcs after pad/carrier change.
CMP.B1 (Speedfam CMP-V) - IDLE.
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0171 (m2).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
XD0459 - 0.9DAYS STI/ENG LOT
Down Equipment:
--------------
CMP.A2 - DOWN FOR MQCS AFTER PAD/CARRIER CHANGE.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
3 boxes of 12K monitor wafers.
Number of product lots in room:
------------------------------
1
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0190 - M1 - 22WFRS
JL0175 - M2 - 11WFRS
JD0186 - M1 - 24WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
3 STRASBAUGH CARRIERS
7 SPEEDFAM CARRIERS
|
| 73.35 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Fri May 03 1996 08:21 | 39 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/IDLE
CMP.B2 (Speedfam CMP-V)- UP/RUNNING LOT JD0192
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC DONE
HOT/B lots in area:
-------------------
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:0
--------------------
HOLD LOTS IN AREA:
__________________
DOWN equipment:
---------------
---------------
NUMBER of product lots in room:1
-------------------------------
LOTS COMPLETED : 4
----------------
|