| Title: | Celt Notefile |
| Moderator: | TALLIS::DARCY |
| Created: | Wed Feb 19 1986 |
| Last Modified: | Tue Jun 03 1997 |
| Last Successful Update: | Fri Jun 06 1997 |
| Number of topics: | 1632 |
| Total number of notes: | 20523 |
From: SHARE::TSS "HUDSON ETE 225-5272 05-Sep-1990 1436" 5-SEP-1990 18:25:25.30
To: TSS_Distribution
CC:
Subj: TSS Seminar - John O'Reilly, Digital, 9/26, 10:00 am, HWM
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ETE Technical Semi Description
________________________________________________________________________________
Title SUMMARY/DISCUSSION OF SEMATECH TECH REPORTS:
Speaker JOHN O'REILLY, DEC/SEMATECH
Date 26-SEP-90 - 26-SEP-90
Time 10:00 - 11:30
Location HALL OF WHITE MIST C.R., HLO1
Technical Host Wayne Fernald, Principal Eng., Hudson Site Facilities
Course Number 11TS9-HF
Registration Not required for most seminars. If registration
is required please log into COURSES software on SHARE
Username is COURSES and password is TRAINING.
Cancellation UNLESS OTHERWISE NOTED, THERE IS NO REGISTRATION REQUIRED TO
ATTEND SEMINARS
Summary/Discussion of SEMATECH Tech Reports:
'Nilstat Ionization System Testing' and
'Vibration Monitoring System and Case Studies'"
Abstract Two SEMATECH "Tech Reports" will be summarized and
discussed.
The first report is titled "Description of a Vibration
Monitoring System and Case Studies of its Use in the
First Six Weeks of its Operation".
The vibration monitoring system is, to the best of John's
knowledge, the only system of its type to exist in terms
of its sensitivity and ability to process accelerometer
data. The "signature" from an accelerometer contains
more information than almost any other sensor. The
system will be described. A few examples of its use in
finding sources of vibration will be discussed. The many
forms that vibration information will be discussed as
well as how to convert data from one form to another.
Actual vibration spectra will be shown as well as an
"amateur's" explanation of how to interpret spectra.
Colored slides of the system will be shown. A "dummy"
accelerometer with different types of mounts will be
available to look at.
Enhancements to the system, just recently made, will be
discussed.
The system was shown at SEMICON West and will supposedly
be on the cover of one of the next issues of
Microlithography News.
The recommended requirements for suppliers of equipment,
both those sensitive to and those not sensitive to
vibration will be discussed.
The second SEMATECH Tech Report is titled "Evaluation of
Nilstat Model 5000 Pulsed Air Ionization System with
'Class 1' Emitter Tips".
The ionization system was tested primarily for aerosol
particle generation. Previous work had shown that
ionization systems generate large numbers of particles.
It was desired to determine if that problem had been
eliminated. Witness wafer particle deposition was looked
at as well. Static charge build-up was observed in the
SEMATECH's clean room as well as the ionization system's
ability to remove it. A design of experiments approach
was utilized so as to determine the relative
contributions of variability in the results. Color slides
of the set-up in SEMATECH's clean room will be shown.
Biography John has been a Digital assignee at SEMATECH since
August, 1988.
Since his last TSS Seminar in June 1989, John O'Reilly
has completed 2 Tech Reports in his role as Contamination
Control Engineer. John O'Reilly is now an Equipment
Reliability Engineer at SEMATECH. He holds B.S.
Mechanical Engineering and M.S. Engineering Management
degrees and has been a Registered Professional Engineer
since 1986. John was in the Facilities Contamination
Control Department at SEMATECH from September, 1988 to
March, 1989.
In April '89, John joined SEMATECH's Equipment
Improvement Program (EIP) as an Equipment Reliability
Engineer.
He has worked with GENUS assisting with the wafer handler
portion of the GENUS 8720 EIP. He has brought Sandia's
Reliability Engineering expertise into GENUS where a
reliability model of the 8720 is under construction. John
has recently began managing a portion of Sandia's
contract with SEMATECH - the "task 1" re- liability
engineering portion. John has also been part of a task
force to provide a reliability engineering course for
SEMI/SEMATECH equipment suppliers in the Silicon Valley
area. John held a Users Group meeting for equipment
suppliers utilizing NESLAB chillers during SEMICON West.
Partly as a result of the NESLAB work, a new assignee in
the EIP Department has the charter to formalize a
SEMATECH Component and Subassembly Improvement Program.
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Engineering Training and Education
Supporting SCIT
| T.R | Title | User | Personal Name | Date | Lines |
|---|---|---|---|---|---|
| 802.1 | Even "Rep. Culbert" & "Mr. Drotter" are invited :-) | ACTGSF::BURNS | Is the whole world aGuinness | Thu Sep 06 1990 11:40 | 17 |
On Tuesday evening September 25th, a few of us will be bringing
John O'Reilly (JO'R) over to Brendan Behan's Pub in Boston their
weekly "Session" of Traditional Irish Music. According to our resident
Irish Music Authority (Kevin "Call me anything but Collect" Sullivan)
they have one of the best "Sessiuns" in the Boston area. I know
from personal experience that the Guinness is "Fantastic" :-)
If enough people are interested in attending, maybe we could
all meet somewhere in the Route 495/Maynard area ...
keVin
| |||||
| 802.2 | Culbert ... can we borrow the "Small Bus" again ?? :-) | HILL16::BURNS | Is the whole world aGuinness | Mon Sep 24 1990 11:12 | 15 |
JO'R is on the way, and tomorrow night we head for "The Brendan" !!
Rumor has it that George "I gotta find a new barber soon" Darcy may
also honor us by attending this gala event. :-)
There is still some limited space available if ANYONE else is
interested (or foolish enough) to want to join us .....
keVin
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| 802.3 | Not out of your way, is it? | KAOM25::RUSHTON | Unscathed by inspired lunacy | Mon Sep 24 1990 16:19 | 4 |
Could you stop by my place and pick me up, keVin? Pat | |||||
| 802.4 | If were not there by 8.00, then start without us !! | ACTGSF::BURNS | Is the whole world aGuinness | Tue Sep 25 1990 08:32 | 12 |
Pat: We'll pick you up at 7.00 !! :-)
keVin
| |||||
| 802.5 | Time Warp session next week was well attended... | KAOM25::RUSHTON | Unscathed by inspired lunacy | Tue Sep 25 1990 12:10 | 10 |
<<Pat: We'll pick you up at 7.00 !! :-)
At what Warp Factor?!?
Pat
| |||||
| 802.6 | More Power Scotty !!!!!!!!! | ACTGSF::BURNS | Is the whole world aGuinness | Tue Sep 25 1990 12:30 | 10 |
Warp Factor 5 Mr. Zulu ....
Eye Eye Captain !!
| |||||
| 802.7 | No one's aGuinness! | KAOM25::RUSHTON | Unscathed by inspired lunacy | Tue Sep 25 1990 12:39 | 17 |
keVin, I replied to your query in the San_Francisco conference about the Irish pubs in the Santa Clara area. To save you the time, I'll put the same info in here. I'll be in the Cupertino-Santa Clara area from 29 Sept. to 65 Oct., maybe we can have a session at one of the following bars... Finn McCool's on Wolfe Road, near the UCF facility in Cupertino, and Stanley's Irish Bar and Grill on Winchester Blvd in Campbell. Stanley's has live traditional music dinner shows on Fridays and Saturdays as well as homemade Irish cooking, pub lunches, all Irish beers, whiskies and single malts. Let me know when you'll be there. Pat | |||||
| 802.8 | Is the 65th of October a Saturday or a Sunday ?? :-) | ACTGSF::BURNS | Is the whole world aGuinness | Tue Sep 25 1990 13:27 | 14 |
Pat: My trip(s) to Dallas next week and Santa Clara the first
week in November have both been CANCELLED !!!!!
Budgets are still being worked. :-(
keVin
| |||||
| 802.9 | ��� | KAOM25::RUSHTON | Unscathed by inspired lunacy | Tue Sep 25 1990 16:06 | 7 |
Oh, well. At least you now know of two Irish pubs in the Santa Clara area for future trips. I'll see if I can 'nab' some souvenirs from them for your 'pub'! Pat | |||||
| 802.10 | Sorry to miss ya... | DPDMAI::MCQUEENEY | Kuwait has been Saddam-ized! | Mon Oct 01 1990 17:33 | 13 |
keVin:
Sorry to hear your trip to Dallas was cancelled. The State Fair of
Texas is happenning all this month. I went to an open air Charlie
Daniels Band concert there yesterday, 'twas quite a show.
Well, maybe next time. BTW - It was sunny and warm here in Dallas
yesterday (high 80's), so we're still feeling summer here, at least for
a few more weeks.
McQ
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