| Title: | Welcome to FLIGHT |
| Notice: | For the FLIGHT V3.1 kit, see note 507 |
| Moderator: | LHOTSE::DAHL |
| Created: | Tue Jun 24 1986 |
| Last Modified: | Fri Jun 06 1997 |
| Last Successful Update: | Fri Jun 06 1997 |
| Number of topics: | 1431 |
| Total number of notes: | 12344 |
| T.R | Title | User | Personal Name | Date | Lines |
|---|---|---|---|---|---|
| 26.1 | don't tread on my J-3 | BACH::BOETJE | Tue Jul 01 1986 14:29 | 7 | |
| 26.2 | Teos flow error | FABSIX::C_CATON | Thu Jun 05 1997 07:26 | 9 | |
Status : Down E2
Work done : Errored out during Teos dep. Purged 2 wafer (part
of a split lot). Check the cannester (3.5) and it
seemed ok. Ran Teos (no flow) followed the
debubble procedure. Doing the cleans/flushes
before putting the chamber back on line.
Issues : Reload the lot and restart.
| |||||
| 26.3 | RTL::DAHL | Thu Jun 05 1997 12:35 | 5 | ||
RE: <<< Note 26.2 by FABSIX::C_CATON >>> Might you have posted the previous message to the wrong conference? Sounds interesting, whatever it's about! -- Tom | |||||